Patents by Inventor Hartmut Rohrmann

Hartmut Rohrmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering device for manufacturing thin films
    Publication number: 20050205412
    Abstract: A sputtering station for depositing a thin film on a substrate includes a cathode comprising two targets placed opposite each other defining a plasma region, permanent magnets or coils to generate a magnetic field, yokes to direct the magnetic field and two independent power supplies connected to each target to independently control the energy to each target.
    Type: Application
    Filed: March 21, 2005
    Publication date: September 22, 2005
    Inventors: Hartmut Rohrmann, Jens Baumann