Abstract: A panel transfer device according to one or more embodiment may include a base; an arm rotatably connected to the base, which includes a first detector; an end effector connected to the arm, including: a connector rotatably connected to the arm; a wrist connected to the connector, including a second detector; and a pair of forks connected to the wrist, including sensor. In response to the end effector gripping the panel, the sensor detects displacement of the panel in a first direction, the end effector rotates to a position where the first and second detectors face each other, the first and second detectors communicate to detect displacement of the panel in a second direction, and the panel transfer device calculates a correction amount based on the detected displacement of the panel in the first direction and in the second direction, and places the panel based on the correction amount.

Abstract: A robot system includes a robot that includes a motor, a first storage unit that is provided to correspond to the motor and stores identification information of the motor, a second storage unit that is provided separately from the first storage unit and stores the identification information of the motor, and a control unit that detects whether or not the motor attached to the robot is a motor to which the identification information has been assigned in advance, by comparing the identification information of the motor stored in the first storage unit and the identification information of the motor stored in the second storage unit.

Abstract: A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.

Abstract: An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating device 11 is rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.

Abstract: A short-circuiting device according includes a short circuit that is electrically connected to a robot, the robot including a robotic arm and at least one motor, the robotic arm including at least one joint shaft that is provided with the respective at least one motor, the short circuit being provided separately from a robot controller configured to control the robot, the short circuit being configured to apply a dynamic brake to each motor.

Abstract: A substrate handling apparatus according to one or more embodiments may include: a base, an elevating unit that is connected to the base to freely elevate and lower, an arm that is rotatably connected to the elevating unit, a disk that is provided on the arm, and a hand that is rotatably connected to the arm, wherein in case that the hand is provided on a position to overlap the arm, the disk is provided under the substrate extracted by the hand.

Abstract: A transport system includes a robot, sensors (an aligner sensor, a protrusion detecting sensor) and a controller. The robot having a hand which supports a wafer and transports the wafer to an aligner apparatus. The sensor detects the position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer on the hand. The controller determines the positional deviation of the wafer based on a detection value of the sensor.

Abstract: A substrate handling apparatus according to one or more embodiments may include: a base, an elevating unit that is connected to the base to freely elevate and lower, an arm that is rotatably connected to the elevating unit, a disk that is provided on the arm, and a hand that is rotatably connected to the arm, wherein in case that the hand is provided on a position to overlap the arm, the disk is provided under the substrate extracted by the hand.

Abstract: A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.

Abstract: A substrate conveying robot includes a hand sensor provided on a substrate holding hand, and a hand circuit substrate provided on the substrate holding hand and connected to the hand sensor, and a serial communication connection is made between a robot controller and the hand circuit substrate through an inside of an arm.

Abstract: A robot system includes a robot that includes a motor, a first storage unit that is provided to correspond to the motor and stores identification information of the motor, a second storage unit that is provided separately from the first storage unit and stores the identification information of the motor, and a control unit that detects whether or not the motor attached to the robot is a motor to which the identification information has been assigned in advance, by comparing the identification information of the motor stored in the first storage unit and the identification information of the motor stored in the second storage unit.

Abstract: A wafer jig according to one or more embodiments may be used for a robot having a hand and a state detector. The hand can transport a wafer. The state detector detects a state of a member holding the wafer at the hand or a state of a negative pressure adsorbing the wafer at the hand. The wafer jig includes an information output part. The information output part outputs information to a hand side via the state detector by changing a detection result of the state detector.

Abstract: A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.

Abstract: An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating device 11 is rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.

Abstract: A transport system includes a robot, sensors (an aligner sensor, a protrusion detecting sensor) and a controller. The robot having a hand which supports a wafer and transports the wafer to an aligner apparatus. The sensor detects the position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer on the hand. The controller determines the positional deviation of the wafer based on a detection value of the sensor.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.

Abstract: A wafer jig according to one or more embodiments may be used for a robot having a hand and a state detector. The hand can transport a wafer. The state detector detects a state of a member holding the wafer at the hand or a state of a negative pressure adsorbing the wafer at the hand. The wafer jig includes an information output part. The information output part outputs information to a hand side via the state detector by changing a detection result of the state detector.

Abstract: A robot system includes: a robot; a portable operation terminal having a teaching function; and a robot controller having operation modes including a teaching mode and another operation mode different from the teaching mode, the teaching mode being an operation mode for teaching a motion to the robot through the portable operation terminal. The robot controller is configured to: detect electrical connection and electrical disconnection between the robot controller and the portable operation terminal; change an operation mode in which to operate the robot to the teaching mode when detecting the connection between the robot controller and the portable operation terminal; and change the operation mode in which to operate the robot to the other operation mode different from the teaching mode when detecting the disconnection between the robot controller and the portable operation terminal.

Abstract: An aligner apparatus according to one or more embodiments may include a first rotating base, a second rotating base, and a detection apparatus. The first rotating base on which a wafer placed thereon rotates around a first rotation axis line. The second rotating base on which a wafer placed thereon rotates around a second rotation axis whose position is different from that of the first rotation axis line. The detection apparatus includes one sensor for detecting the edge of the wafer, and the detection range of the sensor includes the edge of the wafer placed on the first rotating base and the edge of the wafer placed on the second rotating base, and detects the edges of the two wafers.