Abstract: A processing apparatus configured to process a processing target object includes a holder configured to hold the processing target object; a holder moving mechanism configured to move the holder in a horizontal direction; a modifying device configured to radiate laser light to an inside of the processing target object to form multiple internal modification layers in a spiral shape; a modifying device moving mechanism configured to move the modifying device in the horizontal direction; and a controller configured to control an operation of forming the internal modification layers. The controller controls operations of the holder and the modifying device such that a spiral processing movement according to the formation of the internal modification layers and an eccentricity follow-up movement of correcting an eccentric amount between the holder and the processing target object held by the holder are shared by the holder and the modifying device.

Abstract: A substrate processing apparatus configured to process a combined substrate in which a first substrate and a second substrate are stacked on top of each other includes a substrate holder configured to hold the combined substrate; a laser radiating unit configured to radiate laser light to a laser absorbing film in a pulse shape; a moving mechanism configured to move the substrate holder and the laser radiating unit relative to each other; and a controller configured to control the laser radiating unit and the moving mechanism. The controller performs, based on a thickness of the laser absorbing film, a control of selecting a position of a separation surface between the first substrate and the second substrate from one of a position between the first substrate and the laser absorbing film or a position between the a separation facilitating film and the second substrate.

Abstract: A processing method of a combined substrate in which a first substrate and a second substrate are bonded to each other is provided. A laser absorption layer is formed on the second substrate. The substrate processing method includes forming a separation modification layer by radiating a laser beam to the laser absorption layer in a pulse shape to accumulate a stress in the laser absorption layer; and separating the second substrate by releasing the accumulated stress in a chain manner.

Abstract: A substrate processing apparatus configured to process a combined substrate in which a first substrate, an interface layer including at least a laser absorbing film, and a second substrate are stacked on top of each other includes a substrate holder configured to hold the combined substrate; an interface laser radiating unit configured to radiate laser light to the laser absorbing film in a pulse shape; a moving mechanism configured to move the substrate holder and the interface laser radiating unit relative to each other; and a controller. The controller performs a control of acquiring information of the interface layer formed in the combined substrate, and a control of setting, based on the acquired information of the interface layer, a bonding interface having a weakest adhesive strength among bonding interfaces in the interface layer as a separation interface between the first substrate and the second substrate.

Abstract: The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement. A scanner comprising: an outer frame; a first inner frame disposed inside the outer frame; a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction; a second inner frame disposed inside the first inner frame; a wide range X actuator for moving the second inner frame relative to the first inner frame in the X direction orthogonal to the Y direction; a third inner frame disposed inside the second inner frame; a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction; a movable foundation disposed inside the third inner frame; and a narrow range X actuator for moving the movable foundation relative to the third inner frame in the X direction.

Abstract: The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement. A scanner comprising: an outer frame; a first inner frame disposed inside the outer frame; a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction; a second inner frame disposed inside the first inner frame; a wide range X actuator for moving the second inner frame relative to the first inner frame in the X direction orthogonal to the Y direction; a third inner frame disposed inside the second inner frame; a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction; a movable foundation disposed inside the third inner frame; and a narrow range X actuator for moving the movable foundation relative to the third inner frame in the X direction.

Abstract: When a color-filter-array of a color-imaging-element is a Bayer-array, outputs of pixels prior to color-mixture correction are acquired from the color imaging element when red light is incident onto the color-imaging-element through a photography optical system, the outputs of the green pixels adjacent to the red pixels, among the acquired outputs of each pixel, are regarded as components of color mixture caused by the red pixels, and ratios of color mixture are calculated. In a central portion of an imaging surface of the color-imaging-element, ratios of color mixture, which do not depend on directions of the color mixture caused by the red pixels, are calculated. In end portions of the imaging surface of the color-imaging-element, separate ratios of color mixture according to the directions of the color mixture caused by the red pixels are respectively calculated. The calculated ratios of color mixture are subjected to interpolation calculation.

Abstract: An imaging apparatus (10) includes: an image pickup device (14) including plural photoelectric conversion elements arrayed in a predetermined first direction and second direction; a color filter that has a repeatedly disposed basic array pattern that includes a first filter corresponding to a first color that contributes most to obtaining a brightness signal, and second filters corresponding second colors, placed in a predetermined pattern; a drive section (22) that drives the image pickup device (14) such that, for an array of pixels to read from the image pickup device (14), pixel data of pixels placed at a set cycle in at least one direction of the first direction or the second direction is read to give a second array that is different from a first array expressing an array of all the pixels read from the image pickup device (14); and an image processing section (20) that corrects pixel data of a subject pixel for color mixing correction based on pixel data of a pixel that is the same color as an adjacent

Abstract: When a color-filter-array of a color-imaging-element is a Bayer-array, outputs of pixels prior to color-mixture correction are acquired from the color imaging element when red light is incident onto the color-imaging-element through a photography optical system, the outputs of the green pixels adjacent to the red pixels, among the acquired outputs of each pixel, are regarded as components of color mixture caused by the red pixels, and ratios of color mixture are calculated. In a central portion of an imaging surface of the color-imaging-element, ratios of color mixture, which do not depend on directions of the color mixture caused by the red pixels, are calculated. In end portions of the imaging surface of the color-imaging-element, separate ratios of color mixture according to the directions of the color mixture caused by the red pixels are respectively calculated. The calculated ratios of color mixture are subjected to interpolation calculation.

Abstract: An imaging apparatus includes: a lens-interchangeable type imaging apparatus body which includes a solid-state imaging device; and an interchangeable lens as defined herein; and the interchangeable lens is provided with a first storage portion which stores individual difference information about brightness of the interchangeable lens; and the lens-interchangeable type imaging apparatus body is provided with a second storage portion which stores information about a change of incident light sensitivity of the solid-state imaging device relative to each diaphragm value, and a control portion which uses the individual difference information about the brightness read from the first storage portion of the mounted interchangeable lens and the information about the change of the sensitivity in the second storage portion to thereby correct exposure at a time of imaging the photographic subject.

Abstract: An imaging apparatus includes a condenser lens optical system and a solid-state imaging device so that a pencil of incident light rays passing through the condenser lens optical system and then incident on the solid-state imaging device can be converged in a conical shape with a result that an image of the pencil of incident light rays can be formed on one point of a light receiving surface of the solid-state imaging device due to light condensing effect of the condenser lens optical system, and the imaging apparatus further includes a correcting portion which performs image quality correction on a taken image signal outputted from the solid-state imaging device in accordance with set correction quantities; and each of the correction quantities is defined in accordance with an image height direction angle width and an incidence angle as defined herein.

Abstract: An imaging apparatus includes: a lens-interchangeable type imaging apparatus body which includes a solid-state imaging device; and an interchangeable lens as defined herein; and the interchangeable lens is provided with a first storage portion which stores individual difference information about brightness of the interchangeable lens; and the lens-interchangeable type imaging apparatus body is provided with a second storage portion which stores information about a change of incident light sensitivity of the solid-state imaging device relative to each diaphragm value, and a control portion which uses the individual difference information about the brightness read from the first storage portion of the mounted interchangeable lens and the information about the change of the sensitivity in the second storage portion to thereby correct exposure at a time of imaging the photographic subject.

Abstract: An imaging apparatus includes a condenser lens optical system and a solid-state imaging device so that a pencil of incident light rays passing through the condenser lens optical system and then incident on the solid-state imaging device can be converged in a conical shape with a result that an image of the pencil of incident light rays can be formed on one point of a light receiving surface of the solid-state imaging device due to light condensing effect of the condenser lens optical system, and the imaging apparatus further includes a correcting portion which performs image quality correction on a taken image signal outputted from the solid-state imaging device in accordance with set correction quantities; and each of the correction quantities is defined in accordance with an image height direction angle width and an incidence angle as defined herein.

Abstract: An imaging apparatus (10) includes: an image pickup device (14) including plural photoelectric conversion elements arrayed in a predetermined first direction and second direction; a color filter that has a repeatedly disposed basic array pattern that includes a first filter corresponding to a first color that contributes most to obtaining a brightness signal, and second filters corresponding second colors, placed in a predetermined pattern; a drive section (22) that drives the image pickup device (14) such that, for an array of pixels to read from the image pickup device (14), pixel data of pixels placed at a set cycle in at least one direction of the first direction or the second direction is read to give a second array that is different from a first array expressing an array of all the pixels read from the image pickup device (14); and an image processing section (20) that corrects pixel data of a subject pixel for color mixing correction based on pixel data of a pixel that is the same color as an adjacent

Abstract: In an aspect of the present invention, only by storing the first correction coefficients corresponding to the colors of the color filters of the image pickup element and the second correction coefficients corresponding to the relative positions of the pixels to the position of the specific circuit element of the image pickup element, in the storage device, an adequate combination of the first correction coefficients and the second correction coefficients is selected for each pixel, and a calculation with it is performed with respect to the signal value of each of the pixels. Therefore, with an essential minimum number of correction coefficients, it is possible to quickly and accurately correct the variation in signal values caused by the color array for the color filters of the image pickup element and the variation in signal values caused by the structure in which multiple pixels share the specific circuit element.

Abstract: In an aspect of the present invention, only by storing the first correction coefficients corresponding to the colors of the color filters of the image pickup element and the second correction coefficients corresponding to the relative positions of the pixels to the position of the specific circuit element of the image pickup element, in the storage device, an adequate combination of the first correction coefficients and the second correction coefficients is selected for each pixel, and a calculation with it is performed with respect to the signal value of each of the pixels. Therefore, with an essential minimum number of correction coefficients, it is possible to quickly and accurately correct the variation in signal values caused by the color array for the color filters of the image pickup element and the variation in signal values caused by the structure in which multiple pixels share the specific circuit element.

Abstract: An image pickup apparatus includes: an image pickup element; a shake detection device configured to detect a vibration applied to a main body of the image pickup apparatus; and an image blur correction device configured to perform a correction of removing an image blur of the image due to the vibration, the image blur correction device including: a holding member configured to hold the image pickup element; a first driving device configured to move the holding member between a first position where the center of the image pickup element substantially corresponds to the optical axis and a second position; a heat exhausting member arranged to be in contact with the holding member when the holding member is located at the second position; and a control device configured to drive the first driving device based on the vibration.

Abstract: Provided is an atomic force microscope capable of increasing the phase detection speed of a cantilever vibration. The cantilever (5) is excited and the cantilever (5) and a sample are relatively scanned. Displacement of the cantilever (5) is detected by a sensor. An oscillator (27) generates an excitation signal of the cantilever (5) and generates a reference wave signal having a frequency based on the excitation signal and a fixed phase. According to vibration of the cantilever (5), a trigger pulse generation circuit (41) generates a trigger pulse signal having a pulse position changing in accordance with the vibration of the cantilever (5). According to the reference wave signal and the trigger pulse signal, a phase signal generation circuit (43) generates a signal corresponding to the level of the reference wave signal at the pulse position as a phase signal of vibration of the cantilever (5). As the reference wave signal, a saw tooth wave is used.

Abstract: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.

Abstract: An image pickup apparatus includes: an image pickup element; a shake detection device configured to detect a vibration applied to a main body of the image pickup apparatus; and an image blur correction device configured to perform a correction of removing an image blur of the image due to the vibration, the image blur correction device including: a holding member configured to hold the image pickup element; a first driving device configured to move the holding member between a first position where the center of the image pickup element substantially corresponds to the optical axis and a second position; a heat exhausting member arranged to be in contact with the holding member when the holding member is located at the second position; and a control device configured to drive the first driving device based on the vibration.