Abstract: An actuator which is actuated by an external input and also can remove noise caused by a high frequency by providing a low pass filter capable of preventing a particular high frequency through its mechanical structure. The actuator includes an external gimbal, an internal gimbal, and a connection axis which is disposed in an identical direction to an axis extended from the external gimbal. In this intake, the connection axis is provided between the external gimbal and internal gimbal whereby a not desired high frequency vibration may not be transmitted to a vibrated body provided in the internal gimbal. The actuator constructed as above does not need an electrical control and an additional part, and can be actuated by an external input, and also is highly productive and does not require an additional cost by providing a low pass filter with only comparatively simple change of a mechanical design.

Abstract: A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and reflects light; a pair of torsion springs which support opposite ends of the reflection plate so that the reflection plate is raised from the substrate, and acting as a rotation axis when the reflection plate is rotationally driven; a pair of frames which are connected to the reflection plate without connecting to the torsion springs and are symmetrically formed with respect to the torsion springs; frame supporting units which connect the reflection plate and the frames; and a driving unit including moving combs disposed on the frames and static combs disposed on the substrate and respectively corresponding to the moving combs in order to generate an electrostatic force.

Abstract: A micro device and a micro mirror employing a piezo actuator are provided. The micro mirror includes a substrate; a plate which is rotatably suspended about a rotation axis over the substrate; at least two cantilevers, each comprising a fixed end fixed to the substrate, and a free end perpendicularly crossing the rotation axis of the plate and connecting to a side of the plate, each cantilever having a piezo actuator installed on an upper surface of the cantilever; a plurality of connectors each one of which connects the free end of a corresponding one of the cantilevers to a side of the plate; and a pair of torsion springs which are connected to the plate and act as a rotational axis for the plate.

Abstract: A rotational micro mirror is rapidly driven, has a large driving angle, and is structurally stable. The rotational micro mirror includes: a substrate; a reflection plate which is rotatable and reflects light; a pair of torsion springs which support opposite ends of the reflection plate so that the reflection plate is raised from the substrate, and acting as a rotation axis when the reflection plate is rotationally driven; a pair of frames which are connected to the reflection plate without connecting to the torsion springs and are symmetrically formed with respect to the torsion springs; frame supporting units which connect the reflection plate and the frames; and a driving unit including moving combs disposed on the frames and static combs disposed on the substrate and respectively corresponding to the moving combs in order to generate an electrostatic force.

Abstract: A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.

Abstract: A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.

Abstract: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

Abstract: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

Abstract: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

Abstract: A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.

Abstract: A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.

Abstract: A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.

Abstract: A torsion spring for a MEMS structure has a plurality of beams, each beam having two ends wherein both ends are fixed to a predetermined area, and at least one connection bar disposed at a right angle to a lengthwise direction of the plurality of beams, wherein the at least one connection bar connects the plurality of beams. Preferably, the distance between the connection bars is equal to or greater than the width of one of the plurality of beams. Accordingly, a torsion spring according to the present invention has a bending stiffness greater than a torsional stiffness, which allows easier torsion. Further, a torsion spring according to the present invention may be easily fabricated by etching.

Abstract: A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is vertical to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.

Abstract: A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.

Abstract: A torsion spring for a MEMS structure has a plurality of beams, each beam having two ends wherein both ends are fixed to a predetermined area, and at least one connection bar disposed at a right angle to a lengthwise direction of the plurality of beams, wherein the at least one connection bar connects the plurality of beams. Preferably, the distance between the connection bars is equal to or greater than the width of one of the plurality of beams. Accordingly, a torsion spring according to the present invention has a bending stiffness greater than a torsional stiffness, which allows easier torsion. Further, a torsion spring according to the present invention may be easily fabricated by etching.

Abstract: A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.

Abstract: A comb structure in which a magnetic force, which is generated between a pair of intermeshed combs by applying a magnetic flux thereto, is constant with respect to the relative motion between the combs, is provided. Also, an actuator and an inertia sensor both using the comb structure are provided. The comb structure includes a pair of magnetic combs, a magnetic flux guide for magnetically connecting the pair of combs, a coil wound around an arbitrary portion of the magnetic flux guide, and a power supply connected to the coil. The pair of magnetic combs intermeshed with each other having a gap S therebetween are connected to each other by the magnetic flux guide, such that they are driven by receiving a magnetic field from the coil. The coil is supposed to generate a magnetic field under the influence of a current provided from the power supply.

Abstract: A single stage microactuator for multidimensional actuation is provided. The single stage microactuator includes a substrate, a fixed plate electrode, a rectangular stage, a plurality of drive frame parts each having a plurality of drive frames, first spring parts each having a plurality of spring members and a plurality of spring holding members, a plurality of fixed frame parts, drive comb electrodes, fixed comb electrodes, and second spring parts. The microactuator enables multidirectional actuation with only one electrode and can be manufactured by a simple process without a need for an insulation process and coupling of motions in different directions does not occur due to multi-folded spring structure.

Abstract: A single-stage microactuator is provided.