Abstract: An ink-jet head device using a stack of piezoelectric bodies, including a nozzle plate having a nozzle, a manifold portion having a restrictor plate that has a restrictor, piezoelectric bodies stacked in multiple layers and interposed between the nozzle plate and the manifold portion to form a chamber for containing ink, each of the piezoelectric bodies having a cavity at the center, common electrodes and driving electrodes alternately interposed one by one between adjacent piezoelectric bodies, a common lead line and a driving line electrically connected to the common electrodes and driving electrodes, respectively, for supplying a voltage to piezoelectric bodies to cause deformation thereof, and a medium interposed at least between the restrictor plate and a piezoelectric body adjacent to the restrictor plate, and between the nozzle plate and a piezoelectric body adjacent to the nozzle plate, the medium deformed corresponding to deformation of the piezoelectric bodies.

Abstract: A single stage microactuator for multidimensional actuation is provided. The single stage microactuator includes a substrate, a fixed plate electrode, a rectangular stage, a plurality of drive frame parts each having a plurality of drive frames, first spring parts each having a plurality of spring members and a plurality of spring holding members, a plurality of fixed frame parts, drive comb electrodes, fixed comb electrodes, and second spring parts. The microactuator enables multidirectional actuation with only one electrode and can be manufactured by a simple process without a need for an insulation process and coupling of motions in different directions does not occur due to multi-folded spring structure.

Abstract: A single-stage microactuator is provided.

Abstract: A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

Abstract: A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p+-type or n+-type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.

Abstract: An ink-jet head device using a stack of piezoelectric bodies, including a nozzle plate having a nozzle, a manifold portion having a restrictor plate that has a restrictor, piezoelectric bodies stacked in multiple layers and interposed between the nozzle plate and the manifold portion to form a chamber for containing ink, each of the piezoelectric bodies having a cavity at the center, common electrodes and driving electrodes alternately interposed one by one between adjacent piezoelectric bodies, a common lead line and a driving line electrically connected to the common electrodes and driving electrodes, respectively, for supplying a voltage to piezoelectric bodies to cause deformation thereof, and a medium interposed at least between the restrictor plate and a piezoelectric body adjacent to the restrictor plate, and between the nozzle plate and a piezoelectric body adjacent to the nozzle plate, the medium deformed corresponding to deformation of the piezoelectric bodies.