Patents by Inventor Heinrich Koerner

Heinrich Koerner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7948064
    Abstract: Structures of a system on a chip are disclosed. In one embodiment, the system on a chip (SoC) includes an RF component disposed on a first part of a substrate, a semiconductor component disposed on a second part of the substrate, the semiconductor component and the RF component sharing a common boundary, and a conductive cage disposed enclosing the RF component. The conductive cage shields the semiconductor component from electromagnetic radiation originating from the RF circuit.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: May 24, 2011
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Andre Hanke, Snezana Jenei, Oliver Nagy, Jiro Morinaga, Bernd Adler, Heinrich Koerner
  • Patent number: 7936052
    Abstract: Structures of a system on chip and methods of forming a system on chip are disclosed. In one embodiment, a method of fabricating the system on chip includes forming a through substrate opening from a back surface of a substrate, the through substrate opening disposed between a first and a second region, the first region comprising devices for RF circuitry and the second region comprising devices for other circuitry. The method further includes forming patterns for redistribution lines on a photo resist layer, the photo resist layer disposed under the back surface, and filling the through substrate opening and the patterns for redistribution lines with a conductive material.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: May 3, 2011
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Jens Pohl, Gottfried Beer, Heinrich Koerner
  • Publication number: 20100129977
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Application
    Filed: January 29, 2010
    Publication date: May 27, 2010
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Patent number: 7692266
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Grant
    Filed: March 3, 2006
    Date of Patent: April 6, 2010
    Assignee: Infineon Technologies A.G.
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Publication number: 20100078817
    Abstract: One or more embodiments relate to a semiconductor device, comprising: a Si-containing layer; a barrier layer disposed over the Si-containing layer, the barrier layer comprising a compound including a metallic element; a metallic nucleation_seed layer disposed over the barrier layer, the nucleation_seed layer including the metallic element; and a metallic interconnect layer disposed over the nucleation_seed layer, the interconnect layer comprising at least one element selected from the group consisting of Cu (copper), Au (gold), and Ag (silver).
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Inventor: Heinrich KOERNER
  • Publication number: 20100078777
    Abstract: Structure and method for fabricating a system on chip with an on-chip RF shield including interconnect metallization is described. In one embodiment, the system on chip includes an RF circuitry disposed on a first portion of a top surface of a substrate, and a semiconductor circuitry disposed on a second portion of the top surface of the substrate. An interconnect RF barrier is disposed between the RF circuitry and the semiconductor circuitry, the interconnect RF barrier coupled to a ground potential node.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Inventors: Hans-Joachim Barth, Heinrich Koerner, Thorsten Meyer, Markus Brunnbauer
  • Publication number: 20100078776
    Abstract: Structures of a system on chip and methods of forming a system on chip are disclosed. In one embodiment, a method of fabricating the system on chip includes forming a through substrate opening from a back surface of a substrate, the through substrate opening disposed between a first and a second region, the first region comprising devices for RF circuitry and the second region comprising devices for other circuitry. The method further includes forming patterns for redistribution lines on a photo resist layer, the photo resist layer disposed under the back surface, and filling the through substrate opening and the patterns for redistribution lines with a conductive material.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Inventors: Hans-Joachim Barth, Jens Pohl, Gottfried Beer, Heinrich Koerner
  • Publication number: 20100078779
    Abstract: Structures of a system on a chip are disclosed. In one embodiment, the system on a chip (SoC) includes an RF component disposed on a first part of a substrate, a semiconductor component disposed on a second part of the substrate, the semiconductor component and the RF component sharing a common boundary, and a conductive cage disposed enclosing the RF component. The conductive cage shields the semiconductor component from electromagnetic radiation originating from the RF circuit.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Inventors: Hans-Joachim Barth, Andre Hanke, Snezana Jenei, Oliver Nagy, Jiro Morinaga, Bernd Adler, Heinrich Koerner
  • Publication number: 20100052178
    Abstract: One or more embodiments relate to a semiconductor device that includes: a conductive layer including a sidewall; a conductive capping layer disposed over the conductive layer and laterally extending beyond the sidewall of the conductive layer by a lateral overhang; and a conductive via in electrical contact with the conductive capping layer.
    Type: Application
    Filed: August 29, 2008
    Publication date: March 4, 2010
    Inventors: Dirk Meinhold, Heinrich Koerner, Wolfgang Dickenscheid
  • Patent number: 7667256
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structure levels in which in each case elongated interconnects are arranged.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: February 23, 2010
    Assignee: Infineon Technologies AG
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Patent number: 7656037
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structures levels and elongated interconnects.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: February 2, 2010
    Assignee: Infineon Technologies AG
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20100007027
    Abstract: A connection arrangement having an outer conductive structure arranged at least partly or completely in a cutout of an electrical insulation layer is provided. An inner conductive structure is arranged at the bottom of the cutout on one side of the insulation layer. The inner conductive structure adjoins the outer conductive structure in a contact zone. A contact area is arranged at the outer conductive structure on the other side of the cutout. The contact zone and the contact area do not overlap. The bottom of the cutout is arranged to overlaps at least half of the contact area, to provide a step in the insulation layer at the edge of the cutout outside a main current path between the contact area and the inner conductive structure.
    Type: Application
    Filed: September 18, 2009
    Publication date: January 14, 2010
    Inventors: Stephen Drexl, Thomas Goebel, Johann Helneder, Martina Hommel, Wolfgang Klein, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck
  • Publication number: 20080224318
    Abstract: An integrated circuit arrangement includes a substrate with a multiplicity of integrated semiconductor components arranged therein, the substrate having a wiring interconnect near to the substrate, a middle wiring interconnect and a wiring interconnect remote from the substrate, which are arranged in this order at increasing distance from the substrate.
    Type: Application
    Filed: September 20, 2006
    Publication date: September 18, 2008
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20080197870
    Abstract: In an embodiment, an integrated circuit or chip is supplied to its intended application and a measurement quantity representing the state of one or a plurality of electrical connections in the chip is determined within the application environment of the chip and, if the measurement quantity determined does not correspond to predefined criteria, a corresponding signal is output.
    Type: Application
    Filed: August 23, 2007
    Publication date: August 21, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventor: Heinrich Koerner
  • Patent number: 7233053
    Abstract: To fabricate an integrated semiconductor product with integrated metal-insulator-metal capacitor, first of all a dielectric auxiliary layer (6) is deposited on a first electrode (2, 3, 5). This auxiliary layer (6) is then opened up (15) via the first electrode. Then, a dielectric layer (7) is produced, and the metal track stack (8, 9, 10) for the second electrode is then applied to the dielectric layer (6). This is followed by the patterning of the metal-insulator-metal capacitor using known etching processes. This makes it possible to produce dielectric capacitor layers of any desired thickness using materials which can be selected as desired. In particular, this has the advantage that via etches can be carried out significantly more easily than in the prior art, since it is not necessary to etch through the residual dielectric capacitor layer above the metal tracks.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: June 19, 2007
    Assignee: Infineon Technologies AG
    Inventors: Klaus Koller, Heinrich Körner, Michael Schrenk
  • Publication number: 20070105366
    Abstract: An explanation is given of, inter alia, methods in which the barrier material is removed at a via bottom or at a via top area by long-term heat treatment. Concurrently or alternatively, interconnects are coated with barrier material in a simple and uncomplicated manner by means of the long-term heat treatment.
    Type: Application
    Filed: October 30, 2006
    Publication date: May 10, 2007
    Inventors: Oliver Aubel, Wolfgang Hasse, Martina Hommel, Heinrich Koerner
  • Publication number: 20070071052
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structure levels in which in each case elongated interconnects are arranged.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 29, 2007
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20070071053
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structures levels and elongated interconnects.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 29, 2007
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20060267205
    Abstract: An integrated circuit arrangement includes an electrically conductive conduction structure made from copper or a copper alloy. At a side wall of the conduction structure, there is a layer stack which includes at least three layers. Despite very thin layers in the layer stack, it is possible to achieve a high barrier action against copper diffusion combined with a high electrical conductivity, as is required for electrolytic deposition of copper using external current.
    Type: Application
    Filed: May 19, 2006
    Publication date: November 30, 2006
    Inventor: Heinrich Koerner
  • Publication number: 20060222760
    Abstract: A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
    Type: Application
    Filed: March 21, 2006
    Publication date: October 5, 2006
    Inventors: Johann Helneder, Markus Schwerd, Thomas Goebel, Andrea Mitchell, Heinrich Koerner, Martina Hommel