Patents by Inventor Helmut Baumann

Helmut Baumann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Acceleration sensor
    Patent number: 5461917
    Abstract: An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.
    Type: Grant
    Filed: October 5, 1993
    Date of Patent: October 31, 1995
    Assignee: Robert Bosch GmbH
    Inventors: Jiri Marek, Dietrich Schubert, Helmut Baumann, Horst Muenzel, Michael Offenberg, Martin Willmann
  • Method for dicing composite wafers
    Patent number: 5369060
    Abstract: In a method for dicing multi-layer composite wafers, proceeding from an upper side of the wafer, cuts are introduced into an upper layer of the wafer and, proceeding from a lower side of the wafer, cuts are introduced into a lower layer of the wafer.
    Type: Grant
    Filed: June 1, 1993
    Date of Patent: November 29, 1994
    Assignee: Robert Bosch GmbH
    Inventors: Helmut Baumann, Juergen Kurle, Peter Eiberger
  • Method of making sensor
    Patent number: 5355569
    Abstract: A method for producing capacitive sensors which is used in particular for the parallel production of capacitive sensors with exactly defined stray capacitance. For this purpose, troughs (15, 16, 17) are cut along or parallel to the splitting lines (6), so that adjustment errors in the position of the cut, during separation of the sensors, and variations in the cut width have no effect on the stray capacitance.
    Type: Grant
    Filed: September 25, 1992
    Date of Patent: October 18, 1994
    Assignee: Robert Bosch GmbH
    Inventors: Jiri Marek, Helmut Baumann, Guenther Findler, Michael Offenberg, Martin Willmann
  • Method of assembling micromechanical sensors
    Patent number: 5273939
    Abstract: A method is proposed for assembling micromechanical sensors, in particular Hall sensors, or pressure or acceleration sensors, in which at least one silicon sensor element is applied to a substrate. The at least one silicon sensor element is joined to the substrate via at least one assembly pedestal, the cap faces of which are kept small compared with the surface of the silicon sensor element, so that a gap exists between the substrate and the silicon sensor element except for the region of the at least one assembly pedestal.
    Type: Grant
    Filed: January 30, 1992
    Date of Patent: December 28, 1993
    Assignee: Robert Bosch GmbH
    Inventors: Rolf Becker, Klaus Jaeckel, Jiri Marek, Frank Bantien, Helmut Baumann, Kurt Weiblen, Martin Willmann
  • Sintering furnace
    Patent number: 4106893
    Abstract: A sintering furnace for sintering magnetic-ceramic articles is in the form of a quick-firing carriage furnace having a cooling system for indirect cooling in a cooling zone, having a sluice chamber at its outlet-end and being gastight at its base.
    Type: Grant
    Filed: February 24, 1977
    Date of Patent: August 15, 1978
    Assignee: Ludwig Riedhammer GmbH & Co. K.G.
    Inventors: Helmut Baumann, Fritz Petzi