Patents by Inventor Heng Chang
Heng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230187281Abstract: A semiconductor device includes a substrate, a plurality of nanosheets, a plurality of source/drain (S/D) features, and a gate stack. The substrate includes a first fin and a second fin. The first fin has a first width less than a second width of the second fin. The plurality of nanosheets is disposed on the first fin and the second fin. The plurality of source/drain (S/D) features are located on the first fin and the second fin and abutting the plurality of nanosheets. A bottom surface of the plurality of source/drain (S/D) features on the first fin is equal to or lower than a bottom surface of the plurality of source/drain (S/D) features on the second fin. The gate stack wraps each of the plurality of nanosheets.Type: ApplicationFiled: February 10, 2023Publication date: June 15, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
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Patent number: 11676959Abstract: An electrostatic discharge (ESD) protection circuit is coupled between first and second power supply buses. The ESD protection circuit includes a detection circuit; a pull-up circuit, coupled to the detection circuit, comprising at least a first n-type transistor; a pull-down circuit, coupled to the pull-up circuit, comprising at least a second n-type transistor; and a bypass circuit, coupled to the pull-up and pull-down circuits, wherein the detection circuit is configured to detect whether an ESD event is present on either the first or the second bus so as to cause the pull-up and pull-down circuits to selectively enable the bypass circuit for providing a discharging path between the first and second power supply buses.Type: GrantFiled: June 9, 2022Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Fu Tsai, Tzu-Heng Chang, Yu-Ti Su, Kai-Ping Huang
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Patent number: 11668973Abstract: An electronic device is provided. The electronic device includes a substrate; a plurality of first light-emitting elements disposed in a first area of the substrate; a plurality of second light-emitting elements disposed in a second area of the substrate; a first power line disposed on the substrate and electrically connected to the plurality of first light-emitting elements; a second power line disposed on the substrate and electrically connected to the plurality of second light-emitting elements; a first circuit connecting element electrically connected to the first power line; and a first power supply element electrically connected to the first circuit connecting element. A projection of the first area on the substrate does not overlap a projection of the second area on the substrate, and the first area is closer to the first circuit connecting element than the second area.Type: GrantFiled: May 18, 2021Date of Patent: June 6, 2023Assignee: INNOLUX CORPORATIONInventors: Heng-Chang Chang, Chin-Lung Ting
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Patent number: 11658226Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure according to one embodiment includes first nanostructures, a first gate structure wrapping around each of the first nanostructures and disposed over an isolation structure, and a backside gate contact disposed below the first nanostructures and adjacent to the isolation structure. A bottom surface of the first gate structure is in direct contact with the backside gate contact.Type: GrantFiled: April 13, 2021Date of Patent: May 23, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huan-Chieh Su, Chun-Yuan Chen, Li-Zhen Yu, Lin-Yu Huang, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
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Publication number: 20230147849Abstract: Examples of computing devices for changing an operating mode thereof are described herein. In an example, a signal is received by the computing device from an electronic device having a contactless reader. The electronic device is connectable to the computing device. The computing device Is operated in one of a low-power operating mode and a full-power operating mode based on the received signal.Type: ApplicationFiled: April 29, 2020Publication date: May 11, 2023Inventors: SHIH-HENG CHEN, HSIANG-TA KE, SHIH-HSIUNG TU, HENG-CHANG HSU
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Publication number: 20230123887Abstract: A device includes standard cells in a layout of an integrated circuit. The standard cells include a first standard cell and a second standard cell disposed next to each other. The first standard cell is configured to operate as an electrostatic discharge (ESD) protection circuit and includes a first gate and a second gate. The first gate includes a first gate finger and a second gate finger that are arranged over a first active region, for forming a first transistor and a second transistor, respectively. The second gate is separate from the first gate. The second gate includes a third gate finger and a fourth gate finger that are arranged over a second active region, for forming a third transistor and a fourth transistor, respectively. The first transistor and the second transistor are connected in parallel, and the third transistor and the fourth transistor are connected in parallel.Type: ApplicationFiled: December 14, 2022Publication date: April 20, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tzu-Heng CHANG, Kuo-Ji CHEN, Ming-Hsiang SONG
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Patent number: 11621197Abstract: Semiconductor devices and methods of forming the same are provided. A method according to the present disclosure includes providing a workpiece that has a substrate, a first plurality of channel members, a second plurality of channel members, a first gate structure engaging the first plurality of channel members, a second gate structure engaging the second plurality of channel members, a hybrid fin disposed between the first and second gate structures, and an isolation feature disposed under the hybrid fin. The method also includes forming a metal cap layer at a frontside of the workpiece. The metal cap layer electrically connects the first and second gate structures. The method also includes etching the isolation feature, etching the hybrid fin, etching the metal cap layer, and depositing a dielectric material to form a gate isolation feature disposed between the first and second gate structures.Type: GrantFiled: September 1, 2021Date of Patent: April 4, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Lo-Heng Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
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Publication number: 20230096634Abstract: In an example, a head mountable device (HMD), according to the disclosure, comprises a body, an antenna enclosure system which includes a first antenna enclosure having a first antenna and positioned to a first side of the body and a second antenna enclosure having a second antenna and positioned to a second side of the body, a wireless base unit housing a base band unit, and a cable to transfer at least one of data and power between the wireless base unit to the antenna enclosure system.Type: ApplicationFiled: September 27, 2021Publication date: March 30, 2023Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.Inventors: Hung-Chi Shih, Chien-Heng Chang Chien, Chih-Hsin Lee
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Patent number: 11605737Abstract: A device includes a substrate, a semiconductor layer, a gate structure, source/drain regions, a bottom isolation layer, and a bottom spacer. The semiconductor layer is above the substrate. The gate structure is above the substrate and surrounds the semiconductor layer. The source/drain regions are on opposite sides of the semiconductor layer. The bottom isolation layer is between the substrate and the semiconductor layer. The bottom spacer is on a sidewall of the bottom isolation layer. The bottom isolation layer has a seam therein, and the seam exposes a sidewall of the bottom spacer.Type: GrantFiled: April 18, 2022Date of Patent: March 14, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao
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Patent number: 11600529Abstract: Provided is a semiconductor device including a semiconductor substrate, a plurality of semiconductor nanosheets, a plurality of source/drain (S/D) features and a gate stack. The semiconductor substrate includes a first fin and a second fin. The first fin has a first width less than a second width of the second fin, and a top surface of the first fin is lower than a top surface of the second fin. The plurality of semiconductor nanosheets are disposed on the first fin and the second fin. The plurality of source/drain (S/D) features are located on the first fin and the second fin and abutting the plurality of semiconductor nanosheets. The gate stack wraps each of the plurality of semiconductor nanosheets.Type: GrantFiled: April 12, 2022Date of Patent: March 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
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Publication number: 20230061812Abstract: A semiconductor device includes a through-silicon via (TSV) in a TSV zone in a substrate and the TSV extends through the substrate; an ESD cell proximal to a first end of the TSV and in contact with the TSV zone, the ESD cell including a set of diodes electrically connected in parallel to each other; an antenna pad electrically connected to a second end of the TSV; and an antenna electrically connected to the antenna pad and extending in a first direction, the first direction is parallel to a major axis of the TSV. The semiconductor device includes a conductive pillar extending parallel to the TSV at a same side of the substrate as the antenna pad, wherein a first end of the conductive pillar electrically connects to the antenna pad, and a second end of the conductive pillar electrically connects to the set of diodes of the ESD cell.Type: ApplicationFiled: September 21, 2021Publication date: March 2, 2023Inventors: HoChe YU, Fong-Yuan CHANG, XinYong WANG, Chih-Liang CHEN, Tzu-Heng CHANG
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Publication number: 20230047194Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a substrate and first nanostructures and second nanostructures formed over the substrate. The semiconductor structure also includes a gate structure including a first portion wrapping around the first nanostructures and a second portion wrapping around the second nanostructures. The semiconductor structure also includes a dielectric feature sandwiched between the first portion and the second portion of the gate structure. In addition, the dielectric feature includes a bottom portion and a top portion over the bottom portion, and the top portion of the dielectric feature includes a shell layer and a core portion surrounded by the shell layer.Type: ApplicationFiled: March 16, 2022Publication date: February 16, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Yuan CHEN, Huan-Chieh SU, Li-Zhen YU, Lo-Heng CHANG, Cheng-Chi CHUANG, Chih-Hao WANG
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Publication number: 20230034360Abstract: A semiconductor structure is provided. The semiconductor structure includes a first gate stack wrapping around first nanostructures, a second gate stack wrapping around second nanostructures, a gate isolation structure interposing between the first gate stack and the second gate stack, a first source/drain feature adjoining the first nanostructures, a second source/drain feature adjoining the second nanostructures, and a source/drain spacer structure interposing between the first source/drain feature and the second source/drain feature. The gate isolation structure covers a sidewall of the source/drain spacer structure.Type: ApplicationFiled: February 15, 2022Publication date: February 2, 2023Inventors: Huan-Chieh Su, Zhi-Chang Lin, Li-Zhen Yu, Chun-Yuan Chen, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang, Lin-Yu Huang
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Publication number: 20230026310Abstract: A method for forming a semiconductor structure is provided. The method includes forming a fin structure over a substrate. The fin structure includes a protection layer and alternating first and second semiconductor layers over the protection layer. The method also includes etching the fin structure to form a source/drain recess, forming a sacrificial contact in the source/drain recess, forming a source/drain feature over the sacrificial contact in the source/drain recess, removing the first semiconductor layers of the fin structure, thereby forming a plurality of nanostructures, forming a gate stack wrapping around the nanostructures, removing the substrate thereby exposing the protection layer and the sacrificial contact and replacing the sacrificial contact with a contact plug.Type: ApplicationFiled: July 23, 2021Publication date: January 26, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jung-Hung CHANG, Lo Heng CHANG, Zhi-Chang LIN, Shih-Cheng CHEN, Chien-Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
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Patent number: 11562996Abstract: A device includes first and second standard cells in a layout of an integrated circuit, and first and second active regions. The first standard cell includes an electrostatic discharge (ESD) protection unit, and the second standard cell includes first and second transistors that connect to the ESD protection unit. The first active region includes first, second, and third source/drain regions. The first standard cell includes a first gate arranged across the first active region; and a second gate that is separated from the first gate and is arranged across the first active region and the second active region. The first gate, the first source/drain region and the second source/drain region together correspond to a third transistor of the ESD protection unit. The second gate, the second source/drain region and the third source/drain region together correspond to the first transistor.Type: GrantFiled: August 6, 2020Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tzu-Heng Chang, Kuo-Ji Chen, Ming-Hsiang Song
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Patent number: 11557586Abstract: A device includes standard cells in a layout of an integrated circuit, the standard cells includes first and second standard cells sharing a first active region and a second active region. The first standard cell includes first and second gates. The first gate includes a first gate finger and a second gate finger that are arranged over the first active region, for forming the first transistor and the second transistor. The second gate is separate from the first gate, the second gate includes a third gate finger and a fourth gate finger that are arranged over the second active region, for forming the third transistor and the fourth transistor. The second standard cell includes a third gate arranged over the first active region and the second active region, for forming the fifth transistor and the sixth transistor. The first to fourth transistors operate as an electrostatic discharge protection circuit.Type: GrantFiled: August 6, 2020Date of Patent: January 17, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tzu-Heng Chang, Kuo-Ji Chen, Ming-Hsiang Song
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Publication number: 20230012216Abstract: A method for forming a gate all around transistor includes forming a plurality of semiconductor nanosheets. The method includes forming a cladding inner spacer between a source region of the transistor and a gate region of the transistor. The method includes forming sheet inner spacers between the semiconductor nanosheets in a separate deposition process from the cladding inner spacer.Type: ApplicationFiled: July 8, 2021Publication date: January 12, 2023Inventors: Zhi-Chang LIN, Kuan-Ting PAN, Shih-Cheng CHEN, Jung-Hung CHANG, Lo-Heng CHANG, Chien-Ning YAO, Kuo-Cheng CHIANG
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Publication number: 20230009077Abstract: A semiconductor device with different configurations of contact structures and a method of fabricating the same are disclosed. The method includes forming first and second fin structures on a substrate, forming n- and p-type source/drain (S/D) regions on the first and second fin structures, respectively, forming first and second contact openings on the n- and p-type S/D regions, respectively, forming a carbon-based layer in the first and second contact openings, performing a remote plasma treatment with radicals on the carbon-based layer to form a remote plasma treated layer, selectively removing a portion of the remote plasma treated layer, forming a p-type work function metal (pWFM) silicide layer on the p-type S/D region, and forming an n-type work function metal (nWFM) silicide layer on the pWFM silicide layer and on the n-type S/D region.Type: ApplicationFiled: February 25, 2022Publication date: January 12, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shuen-Shin LIANG, Huan-Chieh SU, Lo-Heng CHANG, Shih-Chuan CHIU, Hsu-Kai CHANG, Ko-Feng CHEN, Keng-Chu LIN, Pinyen LIN, Sung-Li WANG
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Publication number: 20220406909Abstract: A device includes a substrate, a gate structure, a source/drain region, a first silicide layer, a second silicide layer and a contact. The gate structure wraps around at least one vertical stack of nanostructure channels. The source/drain region abuts the gate structure. The first silicide layer includes a first metal component on the source/drain region. The second silicide layer includes a second metal component different than the first metal component, and is on the first silicide layer. The contact is on the second silicide layer.Type: ApplicationFiled: April 13, 2022Publication date: December 22, 2022Inventors: Shih-Chuan CHIU, Lo-Heng CHANG, Huan-Chieh SU, Cheng-Chi CHUANG, Yun Ju FAN, Chih-Hao WANG
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Patent number: 11532626Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.Type: GrantFiled: May 29, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jung-Hung Chang, Lo-Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang