Patents by Inventor Heng Hsieh

Heng Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9859364
    Abstract: A semiconductor device includes a substrate, a source/drain feature, a gate structure, a top interlayer dielectric (ILD), a contact, and an isolation pillar. The source/drain feature is at least partially disposed in the substrate. The gate structure is disposed on the substrate and adjacent to the source/drain feature. The top ILD is disposed on the gate structure. The contact is disposed on the source/drain feature. The contact includes a barrier metal and a contact metal. The barrier metal is disposed on and in contact with the source/drain feature. The contact metal is disposed on the barrier metal. The isolation pillar is disposed adjacent to the contact. The isolation pillar is in contact with the barrier metal and the contact metal of the contact and the top ILD.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: January 2, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sheng-Hsiung Wang, Bao-Ru Young, Tung-Heng Hsieh
  • Patent number: 9806071
    Abstract: An integrated circuit comprises a first layer on a first level. The first layer comprises a set of first lines. The first lines each have a length and a width. The length of each of the first lines is greater than the width. The integrated circuit also comprises a second layer on a second level different from the first level. The second layer comprises a set of second lines. The second lines each have a length and a width. The length of each of the second lines is greater than the width. The integrated circuit further comprises a coupling configured to connect at least one first line of the set of first lines with at least one second line of the set of second lines. The coupling has a length and a width. The set of second lines has a pitch measured between the lines of the set of second lines in the first direction. The length of the first coupling is greater than or equal to the pitch.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: October 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Heng Hsieh, Hui-Zhong Zhuang, Chung-Te Lin, Ting-Wei Chiang, Sheng-Hsiung Wang, Li-Chun Tien
  • Publication number: 20170309715
    Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact, a separator, a plug contacting the source/drain contact and a wiring contacting the plug. The fin structure protrudes from an isolation insulating layer and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact is disposed on the first source/drain region. The separator is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact are in contact with a same face of the separator.
    Type: Application
    Filed: July 12, 2017
    Publication date: October 26, 2017
    Inventors: Yi-Jyun HUANG, Tung-Heng HSIEH, Bao-Ru YOUNG
  • Patent number: 9773879
    Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact, a separator, a plug contacting the source/drain contact and a wiring contacting the plug. The fin structure protrudes from an isolation insulating layer and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact is disposed on the first source/drain region. The separator is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact are in contact with a same face of the separator.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: September 26, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jyun Huang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20170249191
    Abstract: In some examples, a method includes assigning, to each respective task queue of a plurality of task queues, a respective priority ratio based at least in part on a number of tasks in the respective task queue. The method further includes assigning, by a processor of a plurality of processors, respective tasks from the respective task queues to at least one processor of the plurality of processors in an order based at least in part on the respective priority ratio, wherein the respective priority ratio defines a relative frequency with which tasks from the respective task queue are assigned to the at leak one processor.
    Type: Application
    Filed: February 25, 2016
    Publication date: August 31, 2017
    Inventors: Dar-Der Chang, Hsing Heng Hsieh, Charles Dominic Potter
  • Patent number: 9690188
    Abstract: A method for manufacturing a photomask is provided. The method includes providing a flexible substrate, forming a plurality of microstructures on the flexible substrate, coating the flexible substrate with a shading material to form a shading layer on the substrate, and solidifying the shading layer which is a single layer.
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: June 27, 2017
    Assignee: NATIONAL CHENG KUNG UNIVERSITY
    Inventors: Yung-Chun Lee, Chun-Ying Wu, Heng Hsieh, Yi-Ta Hsieh, Jhih-Nan Yan
  • Patent number: 9691721
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: June 27, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Hsu
  • Publication number: 20170154967
    Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact, a separator, a plug contacting the source/drain contact and a wiring contacting the plug. The fin structure protrudes from an isolation insulating layer and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact is disposed on the first source/drain region. The separator is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact are in contact with a same face of the separator.
    Type: Application
    Filed: May 17, 2016
    Publication date: June 1, 2017
    Inventors: Yi-Jyun HUANG, Tung-Heng HSIEH, Bao-Ru YOUNG
  • Publication number: 20170154966
    Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact layer and a separation layer. The fin structure protrudes from an isolation insulating layer disposed over a substrate and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact layer is disposed on the first source/drain region. The separation layer is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact layer are in contact with a same face of the separation layer.
    Type: Application
    Filed: May 17, 2016
    Publication date: June 1, 2017
    Inventors: Yi-Jyun HUANG, Tung-Heng HSIEH, Bao-Ru YOUNG
  • Publication number: 20170025401
    Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.
    Type: Application
    Filed: September 30, 2016
    Publication date: January 26, 2017
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Publication number: 20160370698
    Abstract: A method includes receiving a layout of an integrated circuit (IC) device, the layout having an outer boundary and an inner boundary thereby defining a first region between the outer boundary and the inner boundary and placing a first plurality of dummy patterns in the first region, wherein the first plurality of dummy patterns is lithographically printable. The method further includes performing an Optical Proximity Correction (OPC) process, the first plurality of dummy patterns being position within the first region in such a way that prevents sub-resolution assist features from being inserted into the first region by the OPC process.
    Type: Application
    Filed: June 21, 2016
    Publication date: December 22, 2016
    Inventors: Yi-Fan Chen, Tung-Heng Hsieh, Chin-Shan Hou, Yu-Bey Wu
  • Publication number: 20160358902
    Abstract: An integrated circuit comprises a first layer on a first level. The first layer comprises a set of first lines. The first lines each have a length and a width. The length of each of the first lines is greater than the width. The integrated circuit also comprises a second layer on a second level different from the first level. The second layer comprises a set of second lines. The second lines each have a length and a width. The length of each of the second lines is greater than the width. The integrated circuit further comprises a coupling configured to connect at least one first line of the set of first lines with at least one second line of the set of second lines. The coupling has a length and a width. The set of second lines has a pitch measured between the lines of the set of second lines in the first direction. The length of the first coupling is greater than or equal to the pitch.
    Type: Application
    Filed: August 22, 2016
    Publication date: December 8, 2016
    Inventors: Tung-Heng Hsieh, Hui-Zhong Zhuang, Chung-Te Lin, Ting-Wei Chiang, Sheng-Hsiung Wang, Li-Chun Tien
  • Publication number: 20160351555
    Abstract: An integrated circuit includes a plurality of gate electrode structures extending along a first direction and having a predetermined spatial resolution measurable along a second direction orthogonal to the first direction. The plurality of gate electrode structures includes a first gate electrode structure having a first portion and a second portion separated by a first carve-out region, and a conductive feature over the first carve-out region and electrically connecting the first portion and the second portion of the first gate electrode.
    Type: Application
    Filed: August 10, 2016
    Publication date: December 1, 2016
    Inventors: Tung-Heng HSIEH, Hui-Zhong ZHUANG, Chung-Te LIN, Sheng-Hsiung WANG, Ting-Wei CHIANG, Li-Chun TIEN
  • Publication number: 20160351451
    Abstract: Methods and apparatus for polysilicon MOS capacitors in a replacement gate process. A method includes disposing a gate dielectric layer over a semiconductor substrate; disposing a polysilicon gate layer over the dielectric layer; patterning the gate dielectric layer and the polysilicon gate layer to form a plurality of polysilicon gates spaced by at least a minimum polysilicon to polysilicon pitch; defining a polysilicon resistor region containing at least one of the polysilicon gates and not containing at least one other of the polysilicon gates, which form dummy gates; depositing a mask layer over an inter-level dielectric layer; patterning the mask layer to expose the dummy gates; removing the dummy gates and the gate dielectric layer underneath the dummy gates to leave trenches in the inter-level dielectric layer; and forming high-k metal gate devices in the trenches in the inter-level dielectric layer. An apparatus produced by the method is disclosed.
    Type: Application
    Filed: August 8, 2016
    Publication date: December 1, 2016
    Inventors: Pai-Chieh Wang, Tung-Heng Hsieh, Yimin Huang, Chung-Hui Chen
  • Publication number: 20160343656
    Abstract: A semiconductor device includes a substrate having an active region, a first gate structure over a top surface of the substrate, a second gate structure over the top surface of the substrate, a pair of first spacers on each sidewall of the first gate structure, a pair of second spacers on each sidewall of the second gate structure, an insulating layer over at least the first gate structure, a first conductive feature over the active region and a second conductive feature over the substrate. Further, the second gate structure is adjacent to the first gate structure and a top surface of the first conductive feature is coplanar with a top surface of the second conductive feature.
    Type: Application
    Filed: August 8, 2016
    Publication date: November 24, 2016
    Inventors: Tung-Heng Hsieh, Hui-Zhong Zhuang, Chung-Te Lin, Ting-Wei Chiang, Sheng-Hsiung Wang, Li-Chun Tien
  • Publication number: 20160333508
    Abstract: The present invention provides a fabricating method for spunbond nonwoven from natural cellulose fiber blended with nano silver, which comprises following steps. Firstly, prepare nano silver colloidal sol by reduction titration for mixture of polyvinyl alcohol (PVA), silver nitrate (AgNO3) and sodium borohydride (NaBH4). Secondly, prepare mixing cellulose serum by blending agitation for mixture of wood pulp, N-methylmorpholine N-oxide (NMMO) and stabilizer. Thirdly, prepare blending mucilage from mixing cellulose serum via blending process. Fourthly, produce spinning dope by blending and dehydrating the nano silver colloidal sol and mixing cellulose serum. Fifthly, produce molten filament tow by spunbond spinning method in association with coagulation, regeneration, water rinse and high-speed stretching process.
    Type: Application
    Filed: November 12, 2015
    Publication date: November 17, 2016
    Inventors: Wen-Tung CHOU, Ming-Yi LAI, Kun-Shan HUANG, Shao-Hua CHOU, Meng-Heng HSIEH
  • Publication number: 20160333498
    Abstract: The present invention provides a fabricating method for natural cellulose fiber blended with nano silver. The fabricating method comprises following steps: Firstly, prepare nano silver colloidal sol by reduction titration for mixture of polyvinyl alcohol (PVA), silver nitrate (AgNO3) and sodium borohydride (NaBH4). Secondly, prepare mixing cellulose serum by blending agitation for mixture of wood pulp, N-methylmorpholine N-oxide (NMMO) and stabilizer. Thirdly, produce spinning dope by blending and dehydrating the nano silver colloidal sol and mixing cellulose serum. Fourthly, produce fibrous tow by Dry-Jet Wet Spinning method in association with coagulation, regeneration in coagulation bath, and water rinse. Finally, obtain final product of natural cellulose fiber blended with nano silver by post treatments of dry, oil and coil in proper order.
    Type: Application
    Filed: November 9, 2015
    Publication date: November 17, 2016
    Inventors: Wen-Tung CHOU, Ming-Yi LAI, Kun-Shan HUANG, Shao-Hua CHOU, Meng-Heng HSIEH
  • Publication number: 20160333499
    Abstract: The present invention provides a fabricating method for meltblown nonwoven from natural cellulose fiber blended with nano silver, which comprises following steps. Firstly, prepare nano silver colloidal sol by reduction titration for mixture of polyvinyl alcohol (PVA), silver nitrate (AgNO3) and sodium borohydride (NaBH4). Secondly, prepare mixing cellulose serum by blending agitation for mixture of wood pulp, N-methylmorpholine N-oxide (NMMO) and stabilizer. Thirdly, prepare blending mucilage from mixing cellulose serum via blending process. Fourthly, produce spinning dope by blending and dehydrating the nano silver colloidal sol and mixing cellulose serum. Fifthly, produce molten filament tow by meltblown spinning method in association with coagulation, regeneration in coagulation bath, and water rinse.
    Type: Application
    Filed: November 10, 2015
    Publication date: November 17, 2016
    Inventors: Wen-Tung CHOU, Ming-Yi LAI, Kun-Shan HUANG, Shao-Hua CHOU, Meng-Heng HSIEH
  • Patent number: 9472501
    Abstract: A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: October 18, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Gun Liu, Tung-Heng Hsieh, Tsung-Chieh Tsai, Juing-Yi Wu, Liang-Yao Lee, Jyh-Kang Ting
  • Patent number: RE46587
    Abstract: A resistive touch device with no visual color difference comprises a first transparent conductive substrate, a second transparent conductive substrate and a spacer layer. The first transparent conductive substrate with a bottom thereof has a plurality of first transparent conductive electrodes, and a first voltage difference in a first direction. The second transparent conductive substrate with a top thereof has a plurality of second transparent conductive electrodes, and a second voltage difference in a second direction. The first direction is perpendicular to the second direction. The spacer layer is formed between the first and second transparent conductive substrates, which is used for isolating the first transparent conductive electrode and the second transparent conductive electrode.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: October 24, 2017
    Assignees: Wistron Corporation, eTurboTouch Technology Inc.
    Inventors: Kuei-Ching Wang, Yu-Heng Hsieh, Ta-Hu Lin, Tung-Hsin Liu