Patents by Inventor Heng-Wen Ting

Heng-Wen Ting has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10483396
    Abstract: An embodiment is a semiconductor structure. The semiconductor structure includes a substrate. A fin is on the substrate. The fin includes silicon germanium. An interfacial layer is over the fin. The interfacial layer has a thickness in a range from greater than 0 nm to about 4 nm. A source/drain region is over the interfacial layer. The source/drain region includes silicon germanium.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: November 19, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yun Chin, Chii-Horng Li, Chien-Wei Lee, Hsueh-Chang Sung, Heng-Wen Ting, Roger Tai, Pei-Ren Jeng, Tzu-Hsiang Hsu, Yen-Ru Lee, Yan-Ting Lin, Davie Liu
  • Patent number: 10468482
    Abstract: A method includes forming a crown structure over a substrate; forming fins in the crown structure; forming an intra-device isolation region between the fins and forming inter-device isolation regions on opposing sides of the crown structure; forming a gate structure over the fins; forming a dielectric layer that extends continuously over the inter-device isolation regions, the fins and the intra-device isolation region; performing an etching process to reduce a thickness of the dielectric layer, where after the etching process, upper surfaces of the inter-device isolation regions and upper surfaces of the fins are exposed while an upper surface of the intra-device isolation region is covered by a remaining portion of the dielectric layer; and forming an epitaxial structure over the exposed upper surfaces of the fins, where after the epitaxial structure is formed, there is a void between the epitaxial structure and the intra-device isolation region.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: November 5, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Heng-Wen Ting, Jung-Chi Tai, Li-Li Su, Tzu-Ching Lin
  • Publication number: 20190252240
    Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 15, 2019
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Li-Li Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
  • Patent number: 10269618
    Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Li-Li Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
  • Publication number: 20190051737
    Abstract: A semiconductor device includes a plurality of semiconductor fins, an epitaxy structure, a capping layer, and a contact. The epitaxy structure adjoins the semiconductor fins. The epitaxy structure has a plurality of protrusive portions. The capping layer is over a sidewall of the epitaxy structure. The contact is in contact with the epitaxy structure and the capping layer. The contact has a portion between the protrusive portions. The portion of the contact between the protrusive portions has a bottom in contact with the epitaxy structure.
    Type: Application
    Filed: October 15, 2018
    Publication date: February 14, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Ru LEE, Chii-Horng LI, Chien-I KUO, Heng-Wen TING, Jung-Chi TAI, Lilly SU, Yang-Tai HSIAO
  • Patent number: 10164097
    Abstract: A semiconductor device includes a substrate, at least one first isolation structure, at least two second isolation structures, and a plurality of epitaxy structures. The substrate has a plurality of semiconductor fins therein. The first isolation structure is disposed between the semiconductor fins. The semiconductor fins are disposed between the second isolation structures, and the second isolation structures extend into the substrate further than the first isolation structure. The epitaxy structures are respectively disposed on the semiconductor fins. The epitaxy structures are separated from each other, and at least one of the epitaxy structures has a substantially round profile.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Heng-Wen Ting, Tzu-Hsiang Hsu, Chih-Yun Chin
  • Patent number: 10103249
    Abstract: A semiconductor device includes a semiconductor substrate, a plurality of semiconductor fins and a source/drain structure. The semiconductor fins and the source/drain structure are located on the semiconductor substrate, and the source/drain structure is connected to the semiconductor fins. The source/drain structure has a top portion with a W-shape cross section for forming a contact landing region. The semiconductor device may further include a plurality of capping layers located on a plurality of recessed portions of the top portion.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: October 16, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Heng-Wen Ting, Jung-Chi Tai, Lilly Su, Yang-Tai Hsiao
  • Publication number: 20180175144
    Abstract: A method includes forming a crown structure over a substrate; forming fins in the crown structure; forming an intra-device isolation region between the fins and forming inter-device isolation regions on opposing sides of the crown structure; forming a gate structure over the fins; forming a dielectric layer that extends continuously over the inter-device isolation regions, the fins and the intra-device isolation region; performing an etching process to reduce a thickness of the dielectric layer, where after the etching process, upper surfaces of the inter-device isolation regions and upper surfaces of the fins are exposed while an upper surface of the intra-device isolation region is covered by a remaining portion of the dielectric layer; and forming an epitaxial structure over the exposed upper surfaces of the fins, where after the epitaxial structure is formed, there is a void between the epitaxial structure and the intra-device isolation region.
    Type: Application
    Filed: January 30, 2018
    Publication date: June 21, 2018
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Heng-Wen Ting, Jung-Chi Tai, Li-Li Su, Tzu-Ching Lin
  • Publication number: 20180082883
    Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.
    Type: Application
    Filed: November 27, 2017
    Publication date: March 22, 2018
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Li-Li Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
  • Patent number: 9905641
    Abstract: A semiconductor device includes a substrate, at least one first isolation structure, at least two second isolation structure, and an epitaxy structure. The substrate has a plurality of semiconductor fins therein. The first isolation structure is disposed between the semiconductor fins. The semiconductor fins are disposed between the second isolation structures, and the second isolation structures extend into the substrate further than the first isolation structure. The epitaxy structure is disposed on the semiconductor fins. At least one void is present between the first isolation structure and the epitaxy structure.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: February 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Heng-Wen Ting, Jung-Chi Tai, Lilly Su, Tzu-Ching Lin
  • Patent number: 9831116
    Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: November 28, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Li-Li Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
  • Publication number: 20170077300
    Abstract: A semiconductor device includes a substrate, at least one first isolation structure, at least two second isolation structures, and a plurality of epitaxy structures. The substrate has a plurality of semiconductor fins therein. The first isolation structure is disposed between the semiconductor fins. The semiconductor fins are disposed between the second isolation structures, and the second isolation structures extend into the substrate further than the first isolation structure. The epitaxy structures are respectively disposed on the semiconductor fins. The epitaxy structures are separated from each other, and at least one of the epitaxy structures has a substantially round profile.
    Type: Application
    Filed: September 11, 2015
    Publication date: March 16, 2017
    Inventors: Yen-Ru LEE, Chii-Horng LI, Heng-Wen TING, Tzu-Hsiang HSU, Chih-Yun CHIN
  • Publication number: 20170077228
    Abstract: A semiconductor device includes a semiconductor substrate, a plurality of semiconductor fins and a source/drain structure. The semiconductor fins and the source/drain structure are located on the semiconductor substrate, and the source/drain structure is connected to the semiconductor fins. The source/drain structure has a top portion with a W-shape cross section for forming a contact landing region. The semiconductor device may further include a plurality of capping layers located on a plurality of recessed portions of the top portion.
    Type: Application
    Filed: September 10, 2015
    Publication date: March 16, 2017
    Inventors: Yen-Ru LEE, Chii-Horng LI, Chien-I KUO, Heng-Wen TING, Jung-Chi TAI, Lilly SU, Yang-Tai HSIAO
  • Publication number: 20170076973
    Abstract: An embodiment is a structure including a first fin over a substrate, a second fin over the substrate, the second fin being adjacent the first fin, an isolation region surrounding the first fin and the second fin, a gate structure along sidewalls and over upper surfaces of the first fin and the second fin, the gate structure defining channel regions in the first fin and the second fin, a source/drain region on the first fin and the second fin adjacent the gate structure, and an air gap separating the source/drain region from a top surface of the substrate.
    Type: Application
    Filed: January 20, 2016
    Publication date: March 16, 2017
    Inventors: Yen-Ru Lee, Chii-Horng Li, Chien-I Kuo, Lilly Su, Chien-Chang Su, Heng-Wen Ting, Jung-Chi Tai, Che-Hui Lee, Ying-Wei Li
  • Publication number: 20170077222
    Abstract: A semiconductor device includes a substrate, at least one first isolation structure, at least two second isolation structure, and an epitaxy structure. The substrate has a plurality of semiconductor fins therein. The first isolation structure is disposed between the semiconductor fins. The semiconductor fins are disposed between the second isolation structures, and the second isolation structures extend into the substrate further than the first isolation structure. The epitaxy structure is disposed on the semiconductor fins. At least one void is present between the first isolation structure and the epitaxy structure.
    Type: Application
    Filed: September 15, 2015
    Publication date: March 16, 2017
    Inventors: Yen-Ru LEE, Chii-Horng LI, Chien-I KUO, Heng-Wen TING, Jung-Chi TAI, Lilly SU, Tzu-Ching LIN
  • Patent number: 8368057
    Abstract: An organic thin film transistor includes: a gate electrode, a gate insulating film, a source electrode, a drain electrode, and an organic active layer. The organic active layer includes an organic semiconductor compound represented by the following formula (A) as defined in the specification.
    Type: Grant
    Filed: September 9, 2010
    Date of Patent: February 5, 2013
    Assignee: National Tsing Hua University
    Inventors: Yu-Ping Wang, Heng-Wen Ting, Chung-Min Tsai, Tri-Rung Yew
  • Patent number: 8283469
    Abstract: The present invention discloses a soluble and air-stable perylene diimide (PDI) derivative to function as an N-type organic semiconductor material. In the PDI derivative of the present invention, the core thereof is substituted by electron withdrawing groups, and the side chains thereof are substituted by benzene functional groups, whereby are promoted the solubility and air-stability of the molecule. The PDI derivative of the present invention can be used to fabricate an organic semiconductor element via a soluble process at a low temperature and under an atmospheric environment.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: October 9, 2012
    Assignee: National Tsing Hua University
    Inventors: Szu-Ying Chen, Heng-Wen Ting, Tri-Rung Yew, Jeng-Hua Wei
  • Publication number: 20110233526
    Abstract: The present invention discloses a soluble and air-stable perylene diimide (PDI) derivative to function as an N-type organic semiconductor material. In the PDI derivative of the present invention, the core thereof is substituted by electron withdrawing groups, and the side chains thereof are substituted by benzene functional groups, whereby are promoted the solubility and air-stability of the molecule. The PDI derivative of the present invention can be used to fabricate an organic semiconductor element via a soluble process at a low temperature and under an atmospheric environment.
    Type: Application
    Filed: March 24, 2010
    Publication date: September 29, 2011
    Inventors: Szu-Ying Chen, Heng-Wen Ting, Tri-Rung Yew, Jeng-Hua Wei
  • Publication number: 20110193065
    Abstract: An organic thin film transistor includes: a gate electrode, a gate insulating film, a source electrode, a drain electrode, and an organic active layer. The organic active layer includes an organic semiconductor compound represented by the following formula (A) as defined in the specification.
    Type: Application
    Filed: September 9, 2010
    Publication date: August 11, 2011
    Inventors: Yu-Ping Wang, Heng-Wen Ting, Chung-Min Tsai, Tri-Rung Yew