Patents by Inventor Henning Feick

Henning Feick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10707362
    Abstract: Embodiments related to controlling of photo-generated charge carriers are described and depicted. At least one embodiment provides a semiconductor substrate comprising a photo-conversion region to convert light into photo-generated charge carriers; a region to accumulate the photo-generated charge carriers; a control electrode structure including a plurality of control electrodes to generate a potential distribution such that the photo-generated carriers are guided towards the region to accumulate the photo-generated charge carriers based on signals applied to the control electrode structure; a non-uniform doping profile in the semiconductor substrate to generate an electric field with vertical field vector components in at least a part of the photo-conversion region.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: July 7, 2020
    Assignee: Infineon Technologies AG
    Inventors: Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, Ines Uhlig, Thoralf Kautzsch, Dirk Meinhold, Hanno Melzner
  • Publication number: 20200158841
    Abstract: An optical sensor device configured to detect a time of flight of an electromagnetic signal includes a semiconductor substrate having a main surface and a conversion region configured to convert at least a fraction of the electromagnetic signal into photo-generated charge carriers; a first control electrode formed in a trench extending from the main surface into the semiconductor substrate; a second control electrode disposed directly or indirectly on the main surface; a control circuit configured to apply a varying first potential to the first control electrode and to apply a varying second potential to the second control electrode, where the varying second potential has a fixed phase relationship to the first varying potential, to generate electric potential distributions in the conversion region to direct the photo-generated charge carriers; and a readout node arranged in the semiconductor substrate and configured to detect the directed photo-generated charge carriers.
    Type: Application
    Filed: January 20, 2020
    Publication date: May 21, 2020
    Applicants: Infineon Technologies AG, pmdtechnologies ag
    Inventors: Stefano PARASCANDOLA, Henning FEICK, Matthias FRANKE, Dirk OFFENBERG, Jens PRIMA, Robert ROESSLER, Michael SOMMER
  • Patent number: 10594966
    Abstract: An optical sensor device comprising a conversion region to convert an electromagnetic signal into photo-generated charge carriers is shown. The optical sensor device comprises a read-out node configured to read-out the photo-generated charge carriers and a control electrode which is separated by an isolating material from the conversion region. Furthermore, the optical sensor device comprises a doping region in the semiconductor substrate between the control electrode and the conversion region, wherein the doping region comprises a higher doping concentration compared to a minimum doping concentration of the conversion region, wherein the doping concentration is at least 1000 times higher than the minimum doping concentration of the conversion region and wherein the doping region extends into the semiconductor substrate. Moreover, a projection of the control electrode towards the conversion region overlaps the doping region or is located in the doping region.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: March 17, 2020
    Assignee: Infineon Technologies AG
    Inventor: Henning Feick
  • Patent number: 10545225
    Abstract: An optical sensor device configured to detect a time of flight of an electromagnetic signal includes a semiconductor substrate with a conversion region configured to convert at least a portion of the electromagnetic signal into photo-generated charge carriers. A deep control electrode is formed in a trench extending into the semiconductor substrate. The deep control electrode extends deeper into the semiconductor substrate than a shallow control electrode. A control circuit is configured to apply to the deep control electrode and to the shallow control electrode varying potentials having a fixed phase relationship to each other, to generate electric potential distributions in the conversion region, by which the photo-generated charge carriers in the conversion region are directed. The directed photo-generated charge carriers are detected at at least one readout node.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: January 28, 2020
    Assignees: Infineon Technologies AG, pmdtechnologies ag
    Inventors: Stefano Parascandola, Henning Feick, Matthias Franke, Dirk Offenberg, Jens Prima, Robert Roessler, Michael Sommer
  • Patent number: 10541261
    Abstract: An optical sensor device includes a semiconductor substrate including a conversion region to convert an electromagnetic signal into photo-generated charge carriers, a read-out node configured to read-out a first portion of the photo-generated charge carriers, a control electrode, which is formed in a trench extending into the semiconductor substrate, and a doping region in the semiconductor substrate, where the doping region is adjacent to the trench, where the doping region has a doping type different from the read out node, and where the doping region has a doping concentration so that the doping region remains depleted during operation.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: January 21, 2020
    Assignees: Infineon Technologies AG, pmdtechnologies ag
    Inventors: Robert Roessler, Henning Feick, Matthias Franke, Dirk Offenberg, Stefano Parascandola, Jens Prima
  • Patent number: 10455178
    Abstract: An optical sensor device, which may be a time-of-flight sensor, comprises a pixel array having a plurality of pixels. Moreover, the optical sensor device comprises a read-out node configured to provide photo-generated charge carriers from a first pixel and a second pixel for read-out and a first transfer gate configured to enable a read-out of the first pixel using the read-out node and a second transfer gate to disable a read-out of the second pixel during read-out of the first pixel.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: October 22, 2019
    Assignee: Infineon Technologies AG
    Inventor: Henning Feick
  • Publication number: 20190198609
    Abstract: A transistor arrangement includes: a layer stack with first and second semiconductor layers of complementary first and second doping types; a first source region of a first transistor device adjoining the first semiconductor layers; a first drain region of the first transistor device adjoining the second semiconductor layers and spaced apart from the first source region; gate regions of the first transistor device, each gate region adjoining at least one second semiconductor layer, being arranged between the first source region and the first drain region, and being spaced apart from the first source region and the first drain region; a third semiconductor layer adjoining the layer stack and each of the first source region, first drain region, and each gate region; and active regions of a second transistor device integrated in the third semiconductor layer in a second region spaced apart from a first region of the third semiconductor layer.
    Type: Application
    Filed: December 21, 2018
    Publication date: June 27, 2019
    Inventors: Rolf Weis, Henning Feick, Franz Hirler, Andreas Meiser
  • Patent number: 10329140
    Abstract: A semiconductor device includes at least one suspension region of a membrane structure, where the suspension region lies laterally in a first region of a surface of a semiconductor substrate; and a membrane region of the membrane structure, where a cavity is arranged vertically between the membrane region and at least one part of the semiconductor substrate, and the first region of the surface of the semiconductor substrate is formed by a surface of a shielding doping region of the semiconductor substrate.
    Type: Grant
    Filed: February 8, 2018
    Date of Patent: June 25, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Marco Haubold, Henning Feick, Kerstin Kaemmer
  • Patent number: 10276494
    Abstract: Memory cells and corresponding memory arrays are provided. The memory cell comprises a fusable element and a bipolar transistor arranged adjacent to the fusable element.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: April 30, 2019
    Assignee: Infineon Technologies AG
    Inventors: Kerstin Kaemmer, Martin Bartels, Henning Feick
  • Patent number: 10241391
    Abstract: Various embodiments provide a method for processing a carrier, the method including changing the three-dimensional structure of a mask layer arranged over the carrier so that at least two mask layer regions are formed having different mask layer thicknesses; and applying an ion implantation process to the at least two mask layer regions to form at least two implanted regions in the carrier having different implantation depth profiles.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: March 26, 2019
    Assignee: Infineon Technologies AG
    Inventors: Jens Schneider, Henning Feick, Marcel Heller, Dieter Kaiser
  • Publication number: 20180286941
    Abstract: A radio frequency resistor element comprises a resistive polysilicon trace, an isolation component and a semiconductor substrate. The resistive polysilicon trace is located above the isolation component. The isolation component is laterally at least partially surrounded by a modified semiconductor region located above the semiconductor substrate and having a higher charge carrier recombination rate than the semiconductor substrate.
    Type: Application
    Filed: March 23, 2018
    Publication date: October 4, 2018
    Inventors: Hans Taddiken, Martin Bartels, Andrea Cattaneo, Henning Feick, Christian Kuehn, Anton Steltenpohl
  • Publication number: 20180222744
    Abstract: A semiconductor device includes at least one suspension region of a membrane structure, where the suspension region lies laterally in a first region of a surface of a semiconductor substrate; and a membrane region of the membrane structure, where a cavity is arranged vertically between the membrane region and at least one part of the semiconductor substrate, and the first region of the surface of the semiconductor substrate is formed by a surface of a shielding doping region of the semiconductor substrate.
    Type: Application
    Filed: February 8, 2018
    Publication date: August 9, 2018
    Inventors: Marco Haubold, Henning Feick, Kerstin Kaemmer
  • Patent number: 10008621
    Abstract: Embodiments related to controlling of photo-generated charge carriers are described and depicted. At least one embodiment provides a semiconductor substrate comprising a photo-conversion region to convert light into photo-generated charge carriers; a region to accumulate the photo-generated charge carriers; a control electrode structure including a plurality of control electrodes to generate a potential distribution such that the photo-generated carriers are guided towards the region to accumulate the photo-generated charge carriers based on signals applied to the control electrode structure; a non-uniform doping profile in the semiconductor substrate to generate an electric field with vertical field vector components in at least a part of the photo-conversion region.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: June 26, 2018
    Assignee: Infineon Technologies AG
    Inventors: Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, Ines Uhlig, Thoralf Kautzsch, Dirk Meinhold, Hanno Melzner
  • Publication number: 20180151765
    Abstract: Embodiments related to controlling of photo-generated charge carriers are described and depicted.
    Type: Application
    Filed: January 26, 2018
    Publication date: May 31, 2018
    Inventors: Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, lnes Uhlig, ThoraIf Kautzsch, Dirk Meinhold, Hanno Melzner
  • Patent number: 9984917
    Abstract: A method for manufacturing a semiconductor device in accordance with various embodiments may include: forming an opening in a first region of a semiconductor substrate, the opening having at least one sidewall and a bottom; implanting dopant atoms into the at least one sidewall and the bottom of the opening; configuring at least a portion of a second region of the semiconductor substrate laterally adjacent to the first region as at least one of an amorphous or polycrystalline region; and forming an interconnect over at least one of the first and second regions of the semiconductor substrate.
    Type: Grant
    Filed: May 21, 2014
    Date of Patent: May 29, 2018
    Assignee: Infineon Technologies AG
    Inventors: Christian Kuehn, Martin Bartels, Henning Feick, Dirk Offenberg, Anton Steltenpohl, Hans Taddiken, Ines Uhlig
  • Publication number: 20180106892
    Abstract: An optical sensor device configured to detect a time of flight of an electromagnetic signal includes a semiconductor substrate with a conversion region configured to convert at least a portion of the electromagnetic signal into photo-generated charge carriers. A deep control electrode is formed in a trench extending into the semiconductor substrate. The deep control electrode extends deeper into the semiconductor substrate than a shallow control electrode. A control circuit is configured to apply to the deep control electrode and to the shallow control electrode varying potentials having a fixed phase relationship to each other, to generate electric potential distributions in the conversion region, by which the photo-generated charge carriers in the conversion region are directed. The directed photo-generated charge carriers are detected at at least one readout node.
    Type: Application
    Filed: October 13, 2017
    Publication date: April 19, 2018
    Applicants: Infineon Technologies AG, pmdtechnologies ag
    Inventors: Stefano PARASCANDOLA, Henning FEICK, Matthias FRANKE, Dirk OFFENBERG, Jens PRIMA, Robert ROESSLER, Michael SOMMER
  • Publication number: 20180108692
    Abstract: An optical sensor device includes a semiconductor substrate comprising a conversion region to convert an electromagnetic signal into photo-generated charge carriers, a read-out node configured to read-out a first portion of the photo-generated charge carriers, a control electrode, which is formed in a trench extending into the semiconductor substrate, and a doping region in the semiconductor substrate, wherein the doping region is adjacent to the trench, and wherein the doping region has a doping type different from the read out node, wherein the doping region has a doping concentration so that the doping region remains depleted during operation.
    Type: Application
    Filed: October 13, 2017
    Publication date: April 19, 2018
    Applicants: Infineon Technologies AG, pmdtechnologies ag
    Inventors: Robert ROESSLER, Henning FEICK, Matthias FRANKE, Dirk OFFENBERG, Stefano PARASCANDOLA, Jens PRIMA
  • Publication number: 20180061756
    Abstract: One time programmable memory cell and memory array Memory cells and corresponding memory arrays are provided. The memory cell comprises a fusable element and a bipolar transistor arranged adjacent to the fusable element.
    Type: Application
    Filed: July 19, 2017
    Publication date: March 1, 2018
    Inventors: Kerstin Kaemmer, Martin Bartels, Henning Feick
  • Patent number: 9905715
    Abstract: Embodiments related to controlling of photo-generated charge carriers are described and depicted. At least one embodiment provides a semiconductor substrate comprising a photo-conversion region to convert light into photo-generated charge carriers; a region to accumulate the photo-generated charge carriers; a control electrode structure including a plurality of control electrodes to generate a potential distribution such that the photo-generated carriers are guided towards the region to accumulate the photo-generated charge carriers based on signals applied to the control electrode structure; a non-uniform doping profile in the semiconductor substrate to generate an electric field with vertical field vector components in at least a part of the photo-conversion region.
    Type: Grant
    Filed: November 29, 2013
    Date of Patent: February 27, 2018
    Assignee: Infineon Technologies AG
    Inventors: Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, Ines Uhlig, Thoralf Kautzsch, Dirk Meinhold, Hanno Melzner
  • Patent number: 9905609
    Abstract: Embodiments related to the manufacturing of an imager device and an imager device are disclosed. Embodiments associated with methods of an imager device are also disclosed.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: February 27, 2018
    Assignee: Infineon Technologies AG
    Inventors: Dirk Offenberg, Henning Feick, Stefano Parascandola