Patents by Inventor Herbert Schaefer

Herbert Schaefer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8878335
    Abstract: A method and a system for providing fusing after packaging of semiconductor devices are disclosed. In one embodiment, a semiconductor device is provided comprising a substrate comprising a fuse area, at least one fuse disposed in the fuse area, and at least one layer disposed over the substrate, wherein the at least one layer comprises at least one opening exposing the at least one fuse.
    Type: Grant
    Filed: December 23, 2010
    Date of Patent: November 4, 2014
    Assignee: Infineon Technologies AG
    Inventors: Thorsten Meyer, Josef Boeck, Rudolf Lachner, Herbert Schaefer
  • Patent number: 8329532
    Abstract: One embodiment of the present invention relates to method for the concurrent deposition of multiple different crystalline structures on a semiconductor body utilizing in-situ differential epitaxy. In one embodiment of the present invention a preparation surface is formed, resulting in two distinct crystalline regions, a monocrystalline silicon substrate region and an isolating layer region. A monocrystalline silicon layer and an amorphous silicon layer are concurrently formed directly onto the preparation surface in the monocrystalline silicon substrate region and the isolating layer region, respectively. Deposition comprises the formation of two or more sub-layers. The process parameters can be varied for each individual sub-layer to optimize deposition characteristics.
    Type: Grant
    Filed: December 8, 2011
    Date of Patent: December 11, 2012
    Assignee: Infineon Technologies AG
    Inventors: Herbert Schaefer, Martin Franosch, Thomas Meister, Josef Boeck
  • Publication number: 20120161278
    Abstract: A method and a system for providing fusing after packaging of semiconductor devices are disclosed. In one embodiment, a semiconductor device is provided comprising a substrate comprising a fuse area, at least one fuse disposed in the fuse area, and at least one layer disposed over the substrate, wherein the at least one layer comprises at least one opening exposing the at least one fuse.
    Type: Application
    Filed: December 23, 2010
    Publication date: June 28, 2012
    Inventors: Thorsten Meyer, Josef Boeck, Rudolf Lachner, Herbert Schaefer
  • Patent number: 8115274
    Abstract: A fuse structure includes a substrate, a fuse conductive trace disposed closer to a first chip surface than to a second chip surface facing away from the first chip surface, a metallization layer on the substrate disposed on a side of the fuse conductive trace facing away from the first chip surface, and a planar barrier multilayer assembly disposed between the fuse conductive trace and the metallization layer and including multiple barrier layers of different materials, wherein the fuse conductive trace, the metallization layer and the barrier multilayer assembly are arranged such that when cutting the fuse conductive trace and the barrier multilayer assembly, a first area of the metallization layer is electrically isolated from a second area of the metallization layer.
    Type: Grant
    Filed: September 13, 2007
    Date of Patent: February 14, 2012
    Assignee: Infineon Technologies AG
    Inventors: Josef Boeck, Herbert Knapp, Wolfgang Liebl, Herbert Schaefer
  • Patent number: 8067290
    Abstract: The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittivity gas. In particular, a multilayer base-collector dielectric film is deposited over the collector region. A base region is formed onto the multilayer dielectric film and is patterned to form one or more base connection regions. The multilayer dielectric film is selectively etched during a plurality of isotropic etch processes to allow for the formation of one or more isolation region between the base connection regions and the collector region, wherein the one or more isolation regions comprise cavities filled with a gas having a low dielectric constant (e.g., air). The resultant bipolar transistor has a reduced base-collector capacitance, thereby allowing for improved frequency properties (e.g., higher maximum frequency operation).
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: November 29, 2011
    Assignee: Infineon Technologies AG
    Inventors: Josef Boeck, Wolfgang Liebl, Thomas Meister, Herbert Schaefer
  • Patent number: 7872349
    Abstract: An integrated circuit arrangement and method of fabricating the integrated circuit arrangement is provided. At least one integrated electronic component is arranged at a main area of a substrate. The component is arranged in the substrate or is isolated from the substrate by an electrically insulating region. Main channels are formed in the substrate and arranged along the main area. Each main channel is completely surrounded by the substrate transversely with respect to a longitudinal axis. Transverse channels are arranged transversely with respect to the main channels. Each transverse channel opens into at least one main channel. More than about ten transverse channels open into a main channel.
    Type: Grant
    Filed: January 3, 2006
    Date of Patent: January 18, 2011
    Assignee: Infineon Technologies AG
    Inventors: Volker Lehmann, Reinhard Stengl, Herbert Schaefer
  • Publication number: 20100187657
    Abstract: The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittivity gas. In particular, a multilayer base-collector dielectric film is deposited over the collector region. A base region is formed onto the multilayer dielectric film and is patterned to form one or more base connection regions. The multilayer dielectric film is selectively etched during a plurality of isotropic etch processes to allow for the formation of one or more isolation region between the base connection regions and the collector region, wherein the one or more isolation regions comprise cavities filled with a gas having a low dielectric constant (e.g., air). The resultant bipolar transistor has a reduced base-collector capacitance, thereby allowing for improved frequency properties (e.g., higher maximum frequency operation).
    Type: Application
    Filed: December 18, 2009
    Publication date: July 29, 2010
    Applicant: Infineon Technologies AG
    Inventors: Josef Boeck, Wolfgang Liebl, Thomas Meister, Herbert Schaefer
  • Publication number: 20090261327
    Abstract: One embodiment of the present invention relates to method for the concurrent deposition of multiple different crystalline structures on a semiconductor body utilizing in-situ differential epitaxy. In one embodiment of the present invention a preparation surface is formed, resulting in two distinct crystalline regions, a monocrystalline silicon substrate region and an isolating layer region. A monocrystalline silicon layer and an amorphous silicon layer are concurrently formed directly onto the preparation surface in the monocrystalline silicon substrate region and the isolating layer region, respectively. Deposition comprises the formation of two or more sub-layers. The process parameters can be varied for each individual sub-layer to optimize deposition characteristics.
    Type: Application
    Filed: April 21, 2008
    Publication date: October 22, 2009
    Applicant: Infineon Technologies AG
    Inventors: Herbert Schaefer, Martin Franosch, Thomas Meister, Josef Boeck
  • Publication number: 20080067627
    Abstract: A fuse structure includes a substrate, a fuse conductive trace disposed closer to a first chip surface than to a second chip surface facing away from the first chip surface, a metallization layer on the substrate disposed on a side of the fuse conductive trace facing away from the first chip surface, and a planar barrier multilayer assembly disposed between the fuse conductive trace and the metallization layer and including multiple barrier layers of different materials, wherein the fuse conductive trace, the metallization layer and the barrier multilayer assembly are arranged such that when cutting the fuse conductive trace and the barrier multilayer assembly, a first area of the metallization layer is electrically isolated from a second area of the metallization layer.
    Type: Application
    Filed: September 13, 2007
    Publication date: March 20, 2008
    Inventors: Josef Boeck, Herbert Knapp, Wolfgang Liebl, Herbert Schaefer
  • Publication number: 20070222032
    Abstract: A bipolar transistor has a base, an emitter and an emitter contact. The emitter has a monocrystalline layer and a polycrystalline layer, which are disposed between the base and the emitter contact in the mentioned order.
    Type: Application
    Filed: March 9, 2007
    Publication date: September 27, 2007
    Applicant: Infineon Technologies AG
    Inventors: Herbert Schaefer, Josef Boeck, Rudolf Lachner, Thomas Meister
  • Patent number: 7064360
    Abstract: A method is provided to fabricate a bipolar transistor with a low base connection resistance, low defect density and improved scalability. Scalability is to be understood in this case as both the lateral scaling of the emitter window and the vertical scaling of the base width (low temperature budget). The temperature budget can be kept low in the base region since no implantations are required in order to reduce the base connection resistance. Furthermore, the difficulties associated with the point defects are largely avoided.
    Type: Grant
    Filed: February 4, 2002
    Date of Patent: June 20, 2006
    Assignee: Infineon Technologies AG
    Inventors: Martin Franosch, Thomas Meister, Herbert Schaefer, Reinhard Stengl
  • Publication number: 20040099881
    Abstract: The method according to the invention makes it possible to fabricate a bipolar transistor with a low base connection resistance, low defect density and improved scalability. Scalability is to be understood in this case as both the lateral scaling of the emitter window and the vertical scaling of the base width (low temperature budget). The temperature budget can be kept low in the base region since no implantations are required in order to reduce the base connection resistance. Furthermore, the difficulties associated with the point defects are largely avoided.
    Type: Application
    Filed: December 22, 2003
    Publication date: May 27, 2004
    Inventors: Martin Franosch, Thomas Meister, Herbert Schaefer, Reinhard Stengl
  • Patent number: 6022786
    Abstract: For manufacturing a capacitor, in particular for a dynamic memory cell arrangement, a trench is etched in a substrate. In the trench, a layer sequence is produced that contains, in alternating fashion, layers of doped silicon and germanium-containing layers. By anisotropic etching, the surface of the semiconductor substrate (12) is exposed in the region of the trench floor. The trenches are filled with a conductive support structure (20). The germanium-containing layers are removed selectively to the layers of doped silicon. The exposed surface of the layers of doped silicon (17) and of the support structure (20) are provided with a capacitor dielectric (22), onto which is applied a counter-electrode (23).
    Type: Grant
    Filed: February 27, 1998
    Date of Patent: February 8, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventors: Martin Franosch, Wolfgang Hoenlein, Helmut Klose, Gerrit Lange, Volker Lehmann, Hans Reisinger, Herbert Schaefer, Reinhard Stengl, Hermann Wendt, Dietrich Widmann
  • Patent number: 6018174
    Abstract: A bottle-shaped trench capacitor having an expanded lower trench portion with an epi layer therein. The epi layer serves as the buried plate of the trench capacitor. A diffusion region surrounds the expanded lower trench portion to enhance the dopant concentration of the epi layer. The diffusion region is formed by, for example, gas phase doping, plasma doping, or plasma immersion ion implantation.
    Type: Grant
    Filed: June 26, 1998
    Date of Patent: January 25, 2000
    Assignees: Siemens Aktiengesellschaft, International Business Machines Corporation
    Inventors: Martin Schrems, Jack Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl
  • Patent number: 5998807
    Abstract: Semiconductor islands respectively comprise at least a Si.sub.1-x Ge.sub.x layer and a distorted silicon layer that exhibits essentially the same lattice constant as the Si.sub.1-x Ge.sub.x layer are formed on an insulating layer that is located on a carrier plate. The semiconductor islands are preferably formed by selective epitaxy and comprise p-channel MOS transistors and/or n-channel MOS transistors.
    Type: Grant
    Filed: September 9, 1997
    Date of Patent: December 7, 1999
    Assignee: Siemens Aktiengesellschaft
    Inventors: Bernhard Lustig, Herbert Schaefer, Martin Franosch
  • Patent number: 5945704
    Abstract: A trench capacitor with an epi layer in the lower portion of the trench. The epi layer serves as the buried plate of the trench capacitor. A diffusion region surrounds the lower portion of the trench to enhance the dopant concentration of the epi layer. The diffusion region is formed by, for example, gas phase doping, plasma doping, or plasma immersion ion implantation.
    Type: Grant
    Filed: June 26, 1998
    Date of Patent: August 31, 1999
    Assignees: Siemens Aktiengesellschaft, International Business Machines Corporation
    Inventors: Martin Schrems, Jack Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl
  • Patent number: 5943571
    Abstract: For manufacturing fine structures, nuclei that define the dimensions of the fine structures are formed on the surface of a substrate in a CVD process upon employment of a first process gas that contains SiH.sub.4 and GeH.sub.4 in a carrier gas. The nuclei can be employed both as a mask, for example, when etching or implanting, as will as active or passive component parts that remain in the structure, for example, as charge storages in the dielectric of an EEPROM.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: August 24, 1999
    Assignee: Siemens Aktiengesellschaft
    Inventors: Herbert Schaefer, Martin Franosch, Reinhard Stengl, Volker Lehmann, Hans Reisinger, Hermann Wendt
  • Patent number: 5913115
    Abstract: In producing a CMOS circuit, an n-channel MOS transistor and a p-channel MOS transistor are formed in a semiconductor substrate. In situ p-doped, monocrystalline silicon structures are formed by epitaxial growth selectively with respect to insulating material and with respect to n-doped silicon, such silicon structures being suitable as a diffusion source for forming source/drain regions of the p-channel MOS transistor. The source/drain regions of the n-channel MOS transistor are produced beforehand by means of implantation or diffusion. Owing to the selectivity of the epitaxy that is used, it is not necessary to cover the n-doped source/drain regions of the n-channel MOS transistor during the production of the p-channel MOS transistor.
    Type: Grant
    Filed: April 29, 1998
    Date of Patent: June 15, 1999
    Assignee: Siemens Aktiengesellschaft
    Inventors: Markus Biebl, Udo Schwalke, Herbert Schaefer, Dirk Schumann
  • Patent number: 5806603
    Abstract: A fire-extinguishing device is furnished, wherein an aerosol is generated in a single container or in a plurality of containers by burning a solid extinguishing agent. The aerosol streams and flows into the area to be protected along a nondirect path through annular channels or directly through a sieve floor.
    Type: Grant
    Filed: April 22, 1996
    Date of Patent: September 15, 1998
    Assignee: Total Walther Feuerschutz GmbH
    Inventors: Herbert Schaefers, John S. Nicholas
  • Patent number: 5415239
    Abstract: A sprinkler for automatic fire extinguishing plants according to the dry system is furnished for rooms subjected to and endangered by freezing and frost. Such plants are furnished in particular in case of the presence of a suspended ceiling with downwardly branching pipe pieces. In order to adapt the downwardly branching pipe pieces to the prevailing construction conditions, the branching pipe pieces are furnished by two pipe pieces screwed to each other. The two pipe pieces exhibit a support body at the upper end and a sprinkler at the lower end. The two parts are connected via two rods or pipes, screwed to each other, to form the special sprinkler.
    Type: Grant
    Filed: July 9, 1992
    Date of Patent: May 16, 1995
    Assignee: Total Walther Feuerschutz GmbH
    Inventors: Karl Kotter, Herbert Schaefers