Patents by Inventor Herbert Schaefer
Herbert Schaefer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8878335Abstract: A method and a system for providing fusing after packaging of semiconductor devices are disclosed. In one embodiment, a semiconductor device is provided comprising a substrate comprising a fuse area, at least one fuse disposed in the fuse area, and at least one layer disposed over the substrate, wherein the at least one layer comprises at least one opening exposing the at least one fuse.Type: GrantFiled: December 23, 2010Date of Patent: November 4, 2014Assignee: Infineon Technologies AGInventors: Thorsten Meyer, Josef Boeck, Rudolf Lachner, Herbert Schaefer
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Patent number: 8329532Abstract: One embodiment of the present invention relates to method for the concurrent deposition of multiple different crystalline structures on a semiconductor body utilizing in-situ differential epitaxy. In one embodiment of the present invention a preparation surface is formed, resulting in two distinct crystalline regions, a monocrystalline silicon substrate region and an isolating layer region. A monocrystalline silicon layer and an amorphous silicon layer are concurrently formed directly onto the preparation surface in the monocrystalline silicon substrate region and the isolating layer region, respectively. Deposition comprises the formation of two or more sub-layers. The process parameters can be varied for each individual sub-layer to optimize deposition characteristics.Type: GrantFiled: December 8, 2011Date of Patent: December 11, 2012Assignee: Infineon Technologies AGInventors: Herbert Schaefer, Martin Franosch, Thomas Meister, Josef Boeck
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Publication number: 20120161278Abstract: A method and a system for providing fusing after packaging of semiconductor devices are disclosed. In one embodiment, a semiconductor device is provided comprising a substrate comprising a fuse area, at least one fuse disposed in the fuse area, and at least one layer disposed over the substrate, wherein the at least one layer comprises at least one opening exposing the at least one fuse.Type: ApplicationFiled: December 23, 2010Publication date: June 28, 2012Inventors: Thorsten Meyer, Josef Boeck, Rudolf Lachner, Herbert Schaefer
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Patent number: 8115274Abstract: A fuse structure includes a substrate, a fuse conductive trace disposed closer to a first chip surface than to a second chip surface facing away from the first chip surface, a metallization layer on the substrate disposed on a side of the fuse conductive trace facing away from the first chip surface, and a planar barrier multilayer assembly disposed between the fuse conductive trace and the metallization layer and including multiple barrier layers of different materials, wherein the fuse conductive trace, the metallization layer and the barrier multilayer assembly are arranged such that when cutting the fuse conductive trace and the barrier multilayer assembly, a first area of the metallization layer is electrically isolated from a second area of the metallization layer.Type: GrantFiled: September 13, 2007Date of Patent: February 14, 2012Assignee: Infineon Technologies AGInventors: Josef Boeck, Herbert Knapp, Wolfgang Liebl, Herbert Schaefer
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Patent number: 8067290Abstract: The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittivity gas. In particular, a multilayer base-collector dielectric film is deposited over the collector region. A base region is formed onto the multilayer dielectric film and is patterned to form one or more base connection regions. The multilayer dielectric film is selectively etched during a plurality of isotropic etch processes to allow for the formation of one or more isolation region between the base connection regions and the collector region, wherein the one or more isolation regions comprise cavities filled with a gas having a low dielectric constant (e.g., air). The resultant bipolar transistor has a reduced base-collector capacitance, thereby allowing for improved frequency properties (e.g., higher maximum frequency operation).Type: GrantFiled: December 18, 2009Date of Patent: November 29, 2011Assignee: Infineon Technologies AGInventors: Josef Boeck, Wolfgang Liebl, Thomas Meister, Herbert Schaefer
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Patent number: 7872349Abstract: An integrated circuit arrangement and method of fabricating the integrated circuit arrangement is provided. At least one integrated electronic component is arranged at a main area of a substrate. The component is arranged in the substrate or is isolated from the substrate by an electrically insulating region. Main channels are formed in the substrate and arranged along the main area. Each main channel is completely surrounded by the substrate transversely with respect to a longitudinal axis. Transverse channels are arranged transversely with respect to the main channels. Each transverse channel opens into at least one main channel. More than about ten transverse channels open into a main channel.Type: GrantFiled: January 3, 2006Date of Patent: January 18, 2011Assignee: Infineon Technologies AGInventors: Volker Lehmann, Reinhard Stengl, Herbert Schaefer
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Publication number: 20100187657Abstract: The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittivity gas. In particular, a multilayer base-collector dielectric film is deposited over the collector region. A base region is formed onto the multilayer dielectric film and is patterned to form one or more base connection regions. The multilayer dielectric film is selectively etched during a plurality of isotropic etch processes to allow for the formation of one or more isolation region between the base connection regions and the collector region, wherein the one or more isolation regions comprise cavities filled with a gas having a low dielectric constant (e.g., air). The resultant bipolar transistor has a reduced base-collector capacitance, thereby allowing for improved frequency properties (e.g., higher maximum frequency operation).Type: ApplicationFiled: December 18, 2009Publication date: July 29, 2010Applicant: Infineon Technologies AGInventors: Josef Boeck, Wolfgang Liebl, Thomas Meister, Herbert Schaefer
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Publication number: 20090261327Abstract: One embodiment of the present invention relates to method for the concurrent deposition of multiple different crystalline structures on a semiconductor body utilizing in-situ differential epitaxy. In one embodiment of the present invention a preparation surface is formed, resulting in two distinct crystalline regions, a monocrystalline silicon substrate region and an isolating layer region. A monocrystalline silicon layer and an amorphous silicon layer are concurrently formed directly onto the preparation surface in the monocrystalline silicon substrate region and the isolating layer region, respectively. Deposition comprises the formation of two or more sub-layers. The process parameters can be varied for each individual sub-layer to optimize deposition characteristics.Type: ApplicationFiled: April 21, 2008Publication date: October 22, 2009Applicant: Infineon Technologies AGInventors: Herbert Schaefer, Martin Franosch, Thomas Meister, Josef Boeck
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Publication number: 20080067627Abstract: A fuse structure includes a substrate, a fuse conductive trace disposed closer to a first chip surface than to a second chip surface facing away from the first chip surface, a metallization layer on the substrate disposed on a side of the fuse conductive trace facing away from the first chip surface, and a planar barrier multilayer assembly disposed between the fuse conductive trace and the metallization layer and including multiple barrier layers of different materials, wherein the fuse conductive trace, the metallization layer and the barrier multilayer assembly are arranged such that when cutting the fuse conductive trace and the barrier multilayer assembly, a first area of the metallization layer is electrically isolated from a second area of the metallization layer.Type: ApplicationFiled: September 13, 2007Publication date: March 20, 2008Inventors: Josef Boeck, Herbert Knapp, Wolfgang Liebl, Herbert Schaefer
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Publication number: 20070222032Abstract: A bipolar transistor has a base, an emitter and an emitter contact. The emitter has a monocrystalline layer and a polycrystalline layer, which are disposed between the base and the emitter contact in the mentioned order.Type: ApplicationFiled: March 9, 2007Publication date: September 27, 2007Applicant: Infineon Technologies AGInventors: Herbert Schaefer, Josef Boeck, Rudolf Lachner, Thomas Meister
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Patent number: 7064360Abstract: A method is provided to fabricate a bipolar transistor with a low base connection resistance, low defect density and improved scalability. Scalability is to be understood in this case as both the lateral scaling of the emitter window and the vertical scaling of the base width (low temperature budget). The temperature budget can be kept low in the base region since no implantations are required in order to reduce the base connection resistance. Furthermore, the difficulties associated with the point defects are largely avoided.Type: GrantFiled: February 4, 2002Date of Patent: June 20, 2006Assignee: Infineon Technologies AGInventors: Martin Franosch, Thomas Meister, Herbert Schaefer, Reinhard Stengl
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Publication number: 20040099881Abstract: The method according to the invention makes it possible to fabricate a bipolar transistor with a low base connection resistance, low defect density and improved scalability. Scalability is to be understood in this case as both the lateral scaling of the emitter window and the vertical scaling of the base width (low temperature budget). The temperature budget can be kept low in the base region since no implantations are required in order to reduce the base connection resistance. Furthermore, the difficulties associated with the point defects are largely avoided.Type: ApplicationFiled: December 22, 2003Publication date: May 27, 2004Inventors: Martin Franosch, Thomas Meister, Herbert Schaefer, Reinhard Stengl
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Patent number: 6022786Abstract: For manufacturing a capacitor, in particular for a dynamic memory cell arrangement, a trench is etched in a substrate. In the trench, a layer sequence is produced that contains, in alternating fashion, layers of doped silicon and germanium-containing layers. By anisotropic etching, the surface of the semiconductor substrate (12) is exposed in the region of the trench floor. The trenches are filled with a conductive support structure (20). The germanium-containing layers are removed selectively to the layers of doped silicon. The exposed surface of the layers of doped silicon (17) and of the support structure (20) are provided with a capacitor dielectric (22), onto which is applied a counter-electrode (23).Type: GrantFiled: February 27, 1998Date of Patent: February 8, 2000Assignee: Siemens AktiengesellschaftInventors: Martin Franosch, Wolfgang Hoenlein, Helmut Klose, Gerrit Lange, Volker Lehmann, Hans Reisinger, Herbert Schaefer, Reinhard Stengl, Hermann Wendt, Dietrich Widmann
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Patent number: 6018174Abstract: A bottle-shaped trench capacitor having an expanded lower trench portion with an epi layer therein. The epi layer serves as the buried plate of the trench capacitor. A diffusion region surrounds the expanded lower trench portion to enhance the dopant concentration of the epi layer. The diffusion region is formed by, for example, gas phase doping, plasma doping, or plasma immersion ion implantation.Type: GrantFiled: June 26, 1998Date of Patent: January 25, 2000Assignees: Siemens Aktiengesellschaft, International Business Machines CorporationInventors: Martin Schrems, Jack Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl
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Patent number: 5998807Abstract: Semiconductor islands respectively comprise at least a Si.sub.1-x Ge.sub.x layer and a distorted silicon layer that exhibits essentially the same lattice constant as the Si.sub.1-x Ge.sub.x layer are formed on an insulating layer that is located on a carrier plate. The semiconductor islands are preferably formed by selective epitaxy and comprise p-channel MOS transistors and/or n-channel MOS transistors.Type: GrantFiled: September 9, 1997Date of Patent: December 7, 1999Assignee: Siemens AktiengesellschaftInventors: Bernhard Lustig, Herbert Schaefer, Martin Franosch
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Patent number: 5945704Abstract: A trench capacitor with an epi layer in the lower portion of the trench. The epi layer serves as the buried plate of the trench capacitor. A diffusion region surrounds the lower portion of the trench to enhance the dopant concentration of the epi layer. The diffusion region is formed by, for example, gas phase doping, plasma doping, or plasma immersion ion implantation.Type: GrantFiled: June 26, 1998Date of Patent: August 31, 1999Assignees: Siemens Aktiengesellschaft, International Business Machines CorporationInventors: Martin Schrems, Jack Mandelman, Joachim Hoepfner, Herbert Schaefer, Reinhard Stengl
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Patent number: 5943571Abstract: For manufacturing fine structures, nuclei that define the dimensions of the fine structures are formed on the surface of a substrate in a CVD process upon employment of a first process gas that contains SiH.sub.4 and GeH.sub.4 in a carrier gas. The nuclei can be employed both as a mask, for example, when etching or implanting, as will as active or passive component parts that remain in the structure, for example, as charge storages in the dielectric of an EEPROM.Type: GrantFiled: June 26, 1997Date of Patent: August 24, 1999Assignee: Siemens AktiengesellschaftInventors: Herbert Schaefer, Martin Franosch, Reinhard Stengl, Volker Lehmann, Hans Reisinger, Hermann Wendt
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Patent number: 5913115Abstract: In producing a CMOS circuit, an n-channel MOS transistor and a p-channel MOS transistor are formed in a semiconductor substrate. In situ p-doped, monocrystalline silicon structures are formed by epitaxial growth selectively with respect to insulating material and with respect to n-doped silicon, such silicon structures being suitable as a diffusion source for forming source/drain regions of the p-channel MOS transistor. The source/drain regions of the n-channel MOS transistor are produced beforehand by means of implantation or diffusion. Owing to the selectivity of the epitaxy that is used, it is not necessary to cover the n-doped source/drain regions of the n-channel MOS transistor during the production of the p-channel MOS transistor.Type: GrantFiled: April 29, 1998Date of Patent: June 15, 1999Assignee: Siemens AktiengesellschaftInventors: Markus Biebl, Udo Schwalke, Herbert Schaefer, Dirk Schumann
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Patent number: 5806603Abstract: A fire-extinguishing device is furnished, wherein an aerosol is generated in a single container or in a plurality of containers by burning a solid extinguishing agent. The aerosol streams and flows into the area to be protected along a nondirect path through annular channels or directly through a sieve floor.Type: GrantFiled: April 22, 1996Date of Patent: September 15, 1998Assignee: Total Walther Feuerschutz GmbHInventors: Herbert Schaefers, John S. Nicholas
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Patent number: 5415239Abstract: A sprinkler for automatic fire extinguishing plants according to the dry system is furnished for rooms subjected to and endangered by freezing and frost. Such plants are furnished in particular in case of the presence of a suspended ceiling with downwardly branching pipe pieces. In order to adapt the downwardly branching pipe pieces to the prevailing construction conditions, the branching pipe pieces are furnished by two pipe pieces screwed to each other. The two pipe pieces exhibit a support body at the upper end and a sprinkler at the lower end. The two parts are connected via two rods or pipes, screwed to each other, to form the special sprinkler.Type: GrantFiled: July 9, 1992Date of Patent: May 16, 1995Assignee: Total Walther Feuerschutz GmbHInventors: Karl Kotter, Herbert Schaefers