Abstract: The present invention provides a sheet stacking device, a counter-ejector, and a carton former and is provided with: a hopper unit that stacks cardboard boxes; feed rollers that feed a cardboard box to the hopper unit; a first blower device that blows air from above the hopper unit toward the cardboard box fed by the feed rollers; and a second blower device that blows air between the cardboard box stacked in the hopper unit and the cardboard box fed by the feed roller.

Abstract: A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference op

Abstract: A sheet stacking device is provided with a hopper unit configured to stack a sheet, a feeding unit configured to feed out the sheet to the hopper unit, a distance detection unit configured to detect an inter-sheet distance, in the vertical direction, between a rear end portion of the sheet that is preceding and a tip end portion of the sheet that is subsequent, and an output unit configured to output a behavior stabilization command for the sheet based on the inter-sheet distance.

Abstract: The present invention provides a sheet stacking device, a counter-ejector, and a carton former and is provided with: a hopper unit that stacks cardboard boxes; feed rollers that feed a cardboard box to the hopper unit; a first blower device that blows air from above the hopper unit toward the cardboard box fed by the feed rollers; and a second blower device that blows air between the cardboard box stacked in the hopper unit and the cardboard box fed by the feed roller.

Abstract: A sheet stacking device is provided with a hopper unit configured to stack a sheet, a feeding unit configured to feed out the sheet to the hopper unit, a distance detection unit configured to detect an inter-sheet distance, in the vertical direction, between a rear end portion of the sheet that is preceding and a tip end portion of the sheet that is subsequent, and an output unit configured to output a behavior stabilization command for the sheet based on the inter-sheet distance.

Abstract: Provided are a wafer heating and holding mechanism for a rotary table, a wafer heating method for a rotary table, and a wafer rotating and holding device with which a wafer put on a rotary table can be heated while being rotated stably under a state in which an in-plane temperature distribution of the wafer is maintained. The wafer heating and holding mechanism for a rotary table of a wafer rotating and holding device comprises: a rotary shaft; a rotary table placed on an end of the rotary shaft and configured to hold a wafer on an upper surface of the rotary table; a drive motor configured to supply motive power to the rotary shaft; and a heater provided above the rotary table and below the wafer while avoiding contact with the wafer to heat the wafer.

Abstract: An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

Abstract: Provided are a wafer holding mechanism for a rotary table and a method and a wafer rotating and holding device, which enable change of a holding position of the wafer during spin processing while maintaining the posture of the wafer, enable reduction of marks of outer peripheral pins due to etching, and enable reduction of insufficient cleaning or uneven cleaning. The wafer holding mechanism for a rotary table comprises a rotary table configured to hold a wafer on an upper surface thereof, and a plurality of movable outer peripheral pins provided in the rotary table and configured to hold an outer periphery of the wafer. The plurality of movable outer peripheral pins comprise a plurality of first movable outer peripheral pins and a plurality of second movable outer peripheral pins configured to hold the wafer at positions different from positions at which the wafer is held by the first movable outer peripheral pins.

Abstract: A method of controlling a vacuum valve includes instructing an actuator to reduce an operating speed so that an amplitude falls within the first threshold value when the amplitude obtained from a vibration sensor exceeds a first threshold value and a second threshold value. The method also includes instructing the actuator to return to the operating speed when the amplitude obtained from the vibration sensor is below the second threshold value.

Abstract: A production schedule change system includes: a production schedule acquisition part configured to acquire a production schedule of a product in a case where the product is produced at an initial condition of production speed; a time information acquisition part configured to acquire time information indicating a scheduled collection time; and a schedule candidate calculation part configured to: change the production speed from the initial condition within a range defined by a quality standard of the product, based on the time information; and calculates at least one production schedule candidate satisfying a first condition that a time difference between a deliverable time of the product and the scheduled collection time is in an acceptable range and at least one of a second condition that the deliverable time is earlier than the scheduled collection time or a third condition that the scheduled collection time is earlier than the deliverable time.

Abstract: Particle scattering is suppressed only by controlling the gate valve in opening the gate valve with the internal pressure of the chamber being matched to the atmospheric pressure.

Abstract: {Problem} In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands. {Solution to Problem} In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

Abstract: Particle scattering is suppressed only by controlling the gate valve in opening the gate valve with the internal pressure of the chamber being matched to the atmospheric pressure.

Abstract: The object of the invention is to control the vibration of a vacuum valve within the allowable range by regulating the operation speed of the vacuum valve. A controlling method for driving a vacuum valve of a valve system is as described below. The vacuum valve to be controlled is comprised of a valve body that opens and closes the opening of a vacuum valve, an actuator that moves the valve body between closed position and open position of the valve body, a vibration sensor for detecting vibration of the valve body, and a control unit that instructs the actuator about speed of the valve body.

Abstract: An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

Abstract: Provided are a wafer holding mechanism for a rotary table and a method and a wafer rotating and holding device, which enable change of a holding position of the wafer during spin processing while maintaining the posture of the wafer, enable reduction of marks of outer peripheral pins due to etching, and enable reduction of insufficient cleaning or uneven cleaning. The wafer holding mechanism for a rotary table comprises a rotary table configured to hold a wafer on an upper surface thereof, and a plurality of movable outer peripheral pins provided in the rotary table and configured to hold an outer periphery of the wafer. The plurality of movable outer peripheral pins comprise a plurality of first movable outer peripheral pins and a plurality of second movable outer peripheral pins configured to hold the wafer at positions different from positions at which the wafer is held by the first movable outer peripheral pins.

Abstract: Provided are a wafer heating and holding mechanism for a rotary table, a wafer heating method for a rotary table, and a wafer rotating and holding device with which a wafer put on a rotary table can be heated while being rotated stably under a state in which an in-plane temperature distribution of the wafer is maintained. The wafer heating and holding mechanism for a rotary table of a wafer rotating and holding device comprises: a rotary shaft; a rotary table placed on an end of the rotary shaft and configured to hold a wafer on an upper surface of the rotary table; a drive motor configured to supply motive power to the rotary shaft; and heating means provided above the rotary table and below the wafer while avoiding contact with the wafer to heat the wafer.

Abstract: {Problem} In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands. {Solution to Problem} In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

Abstract: Provided are: an alkali metal titanium oxide having a uniform composition and that is such that there are no residual by-products having a different composition or unreacted starting materials; and a method for producing a titanium oxide and proton exchange body obtained by processing the alkali metal titanium oxide. The method produces an alkali metal titanium oxide by firing the result of impregnating the surface and inside of pores of porous titanium compound particles with an aqueous solution of an alkali metal-containing component. The alkali metal titanium oxide is subjected to proton exchange, and with the proton exchange body of the alkali metal titanium oxide as the starting material, the titanium oxide is produced through a heat processing step.

Abstract: Provided is a titanate compound capable of further increasing the capacity of a power storage device when used as an electrode active material thereof. The titanate compound according to the present invention includes at least 60%, based on the number thereof, of particles having an anisotropic shape and a specific surface area of 10-30 m2/g as measured by a nitrogen adsorption BET one-point method, and having a long-axis diameter (L) in the range of 0.1<L?0.9 ?m as measured by electron microscopy.