Abstract: A substrate cleaning method includes: steps (a) to (d). In step (a), a liquid is supplied onto a nanoimprint template substrate that has a patterned surface with foreign particles to form a liquid film on the patterned surface. In step (b), the liquid film is solidified to form a solidified film including the foreign particles. In step (c), the substrate is reversed. In step (d), the solidified film is melted to remove the foreign particles.

Abstract: A deposit monitoring device includes a non-permeated water line discharging non-permeated water where dissolved components and dispersed components are concentrated from water to be treated from a separation membrane device for obtaining permeated water by concentrating the dissolved components and dispersed components from water to be treated by a separation membrane; a first deposit detecting unit using part of the non-permeated water branched off as a detection liquid, and having a first separation membrane for detection in which the detection liquid is separated into permeated water for detection and non-permeated water for detection; a deposition condition altering device altering deposition conditions for deposits in the first separation membranes for detection; and first flow rate measuring devices for separated liquid detection that measure the flow rates of one or both of the permeated water for detection and the non-permeated water for detection separated by the first separation membrane for detecti

Abstract: A method for producing an electrodeposition coated article, in which an insulating film is formed by forming an insulating layer on a surface of an article to be coated according to an electrodeposition method by using an electrodeposition coating material, and then by performing a baking treatment, the electrodeposition coating material contains a solvent containing polyamide imide and an organic solvent added to the electrodeposition coating material, a boiling point of the organic solvent is higher than 100° C., and a Hansen solubility parameter is similar to the polyamide imide and has high compatibility.

Abstract: A water treatment device is provided with a separation membrane device having a separation membrane for concentrating dissolved components and dispersed components from water to be treated and obtaining permeated water; a first deposit detecting unit provided in a non-permeated water branch line branched from a non-permeated water line for discharging non-permeated water in which dissolved components and dispersed components have been concentrated, using part of the non-permeated water that has branched off as a detection liquid, and having a first separation membrane for detection in which the detection liquid is separated into permeated water for detection and non-permeated water for detection; and first flow rate measuring devices for separated liquid for detection that measure the flow rates of one or both of the permeated water for detection and the non-permeated water for detection separated by the first separation membrane for detection.

Abstract: A composition for forming a PZT-based piezoelectric film formed of Mn-doped composite metal oxides is provided, the composition including: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone, in which when a metal atom ratio in the composition is shown as Pb:Mn:Zr:Ti, the PZT-based precursors are contained so that a metal atom ratio of Pb is satisfied to be from 1.00 to 1.20, a metal atom ratio of Mn is satisfied to be equal to or greater than 0.002 and less than 0.05, a metal atom ratio of Zr is satisfied to be from 0.40 to 0.55, a metal atom ratio of Ti is satisfied to be from 0.45 to 0.60, and the total of Zr and Ti in a metal atom ratio is 1.

Abstract: This ferroelectric thin film-forming sol-gel solution contains: a PZT-based compound; a high-molecular compound used to adjust the viscosity containing polyvinyl pyrrolidone; and an organic dopant containing N-methyl pyrrolidone, in which the amount of the PZT-based compound is greater than or equal to 17 mass % in terms of oxides, the molar ratio (PZT-based compound:polyvinyl pyrrolidone) of the polyvinyl pyrrolidone to the PZT-based compound is 1:0.1 to 1:0.5 in terms of monomers, and the amount of the organic dopant containing N-methyl pyrrolidone in the sol-gel solution is 3 mass % to 13 mass %.

Abstract: A cleaning device of the present invention simultaneously cleans two different hydraulic oil tubes of an aircraft. The cleaning device has a supply flow path, a return flow path, a valved connection tube, a connection tube on-off valve and a control section. The supply flow path is connected to a supply end of a first hydraulic oil tube. The return flow path is connected to a supply end of a second hydraulic oil tube. The valved connection tube is arranged between a connection end of the first hydraulic oil tube and a connection end of the second hydraulic oil tube and fluidly connects the first and second hydraulic oil tubes. The connection tube on-off valve is arranged in a flow path of the valved connection tube and controls a flow rate of a cleaning agent flowing through the valved connection tube according to an instruction from the control section.

Abstract: A composition used for forming a PZT-based piezoelectric film formed of Mn and Nb co-doped composite metal oxides is provided, in which the composition includes PZT-based precursors so that a metal atom ratio (Pb:Mn:Nb:Zr:Ti) in the composition satisfies (1.00 to 1.25):(0.002 to 0.056):(0.002 to 0.056):(0.40 to 0.60):(0.40 to 0.60), a rate of Mn is from 0.20 to 0.80 when the total of metal atom rates of Mn and Nb is 1, a rate of Zr is from 0.40 to 0.60 when the total of metal atom rates of Zr and Ti is 1, and the total rate of Zr and Ti is from 0.9300 to 0.9902 when the total of metal atom rates of Mn, Nb, Zr, and Ti is 1.

Abstract: A Ce-doped PZT-based piezoelectric film is provided which is formed of Ce-doped composite metal oxides represented by a general formula: PbzCexZryTi1-yO3. x, y, and z in the general formula satisfy a relationship of 0.005?x?0.05, a relationship of 0.40?y?0.55, and a relationship of 0.95?z?1.15, respectively. It is preferable that the hysteresis of the polarization quantity of the Ce-doped PZT-based piezoelectric film be shifted from the center of the hysteresis to a negative side by 4 kV/cm or more.

Abstract: A composition for forming a Ce-doped PZT-based piezoelectric film contains: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone. The PZT-based precursors are contained so that a metal atom ratio (Pb:Ce:Zr:Ti) in the composition satisfies (1.00 to 1.28):(0.005 to 0.05):(0.40 to 0.55):(0.60 to 0.45) and the total of Zr and Ti in a metal atom ratio is 1. A concentration of the PZT-based precursor in 100 mass % of the composition is from 17 mass % to 35 mass % in terms of an oxide concentration, a rate of diol in 100 mass % of the composition is from 16 mass % to 56 mass %, and a molar ratio of polyvinylpyrrolidone to 1 mole of the PZT-based precursor is 0.01 moles to 0.25 moles in terms of monomers.

Abstract: A method for forming a LaNiO3 thin film is provided, the method including: a step of forming a coating film by coating a substrate surface which is coated with a Pt electrode with a LaNiO3 thin film-forming liquid composition and drying the LaNiO3 thin film-forming liquid composition in a state where amounts of H2, H2O, and CO adsorbed on the substrate surface per 1 cm2 are 1.0×10?10 g or less, 2.7×10?10 g or less, and 4.2×10?10 g or less, respectively; a step of pre-baking the coating film; and a step of forming a LaNiO3 thin film by baking the pre-baked coating film.

Abstract: According to one embodiment, a dust collection apparatus includes a liquid supplier, a first member, and a liquid recoverer. One end of the first member is connected to the liquid supplier, one other end of the first member is connected to the liquid recoverer. The first member is conductive. The first member has a first surface including a plurality of trenches.

Abstract: A dielectric-thin-film forming composition for forming a BST dielectric thin film, includes a liquid composition for forming a thin film which takes a form of a mixed composite metal oxide in which a composite oxide B including Cu (copper) is mixed into a composite metal oxide A expressed by a formula: Ba1-xSrxTiyO3 (wherein 0.2<x<0.6 and 0.9<y<1.1), the liquid composition is an organic metal compound solution in which a raw material for composing the composite metal oxide A and a raw material for composing the composite oxide B are dissolved in an organic solvent at a proportion having a metal atom ratio expressed by the formula shown above and a molar ratio between A and B in the range of 0.001?B/A<0.15.

Abstract: A Mn and Nb co-doped PZT-based piezoelectric film formed of Mn and Nb co-doped composite metal oxides is provided, in which a metal atom ratio (Pb:Mn:Nb:Zr:Ti) in the film satisfies (0.98 to 1.12):(0.002 to 0.056):(0.002 to 0.056):(0.40 to 0.60):(0.40 to 0.60), a rate of Mn is from 0.20 to 0.80 when the total of metal atom rates of Mn and Nb is 1, a rate of Zr is from 0.40 to 0.60 when the total of metal atom rates of Zr and Ti is 1, and the total rate of Zr and Ti is from 0.9300 to 0.9902 when the total of metal atom rates of Mn, Nb, Zr, and Ti is 1.

Abstract: Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9<x<1.3, 0?y<0.1, and 0?z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3?n?7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium).

Abstract: A ferroelectric film a plurality of fired films is provided. Each of the plurality of fired films is made of metal oxide in a perovskite structure including Pb, Zr, and Ti, a total content of Li, Na, and K in the each of the plurality of fired films is 3 mass ppm or less, and the total content of Li, Na, and K on one surface of each of the plurality of fired films is 5 times or more of the total concentration of Li, Na, and K on other surface of each of the plurality of fired films.

Abstract: In a pattern formation method according to an embodiment, a resist pattern is formed on a first film formed on a substrate. In the process for forming the resist pattern, the resist pattern includes a first pattern including a defect in a predetermined region on the first film. Next, a second film is accumulated on the first pattern in the predetermined region. Furthermore, a second pattern is formed in the first film with the resist pattern and the second film. Then, a third pattern is formed in the predetermined region on the first film.

Abstract: An LaNiO3 thin-film-forming composition contains an LaNiO3 precursor, an organic solvent and a stabilizer. Also, the mixture ratio of the LaNiO3 precursor relative to a total of 100% by mass of the LaNiO3 precursor, the organic solvent and the stabilizer is 1-20% by mass on an oxide basis. Further, the dispersion component (dD), the polarization component (dP), and the hydrogen bond component (dH) of the HSP value of the organic solvent fulfill the relations 14<dD<20, 3<dP<26, and d3<dH<30, respectively.

Abstract: A LaNiO3 thin film having extremely few voids is uniformly formed. Provided is a LaNiO3 thin film-forming composition for forming a LaNiO3 thin film. It includes: a LaNiO3 precursor; a first organic solvent; a stabilizer; and a second organic solvent. The first organic solvent includes carboxylic acids, alcohols, esters, ketones, ethers, cycloalkanes, aromatic compounds, or tetrahydrofuran. The stabilizer includes ?-diketones, ?-ketones, ?-keto esters, oxyacids, diols, triols, carboxylic acids, alkanolamines, or polyvalent amines. The second organic solvent has a boiling point of 150° C. to 300° C. and a surface tension of 20 to 50 dyn/cm. The LaNiO3 precursor content is 1 to 20 mass % with respect to 100 mass % of the composition. The stabilizer content is 0 to 10 mol with respect to 1 mol of a total amount of the LaNiO3 precursors. The second organic solvent content is 5 to 20 mass % with respect to the composition.

Abstract: A scale detection device of a concentrating device comprises: a reverse osmosis membrane device 13 that is a concentrating device including a reverse osmosis membrane 13a, which is a filtering membrane for concentrating salt in a water to be treated 11, containing at least calcium sulfate to obtain reclaimed water 12; and a scale detection unit 15 disposed in a branched line L14 branched from a concentrated water line L13 discharging concentrated water 14 having a high concentration of salt, the scale detection unit further concentrating the salt in the concentrated water 14 to obtain reclaimed water for detection 16, and including a detection membrane 15a detecting the absence or presence of scale component deposition in the concentrated water 14.