Patents by Inventor Hideki Hirota

Hideki Hirota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe card holder
    Patent number: 10989739
    Abstract: The present invention provides a probe card holder including a plate-shaped frame formed with an opening approximately the same size as the probe card, a plurality of card bottom surface holding portions that are provided around a peripheral edge of the opening in the frame and that hold a bottom surface of the probe card while biasing the bottom surface, and a plurality of card top surface supporting portions that support the top surface of the probe card. Each card bottom surface holding portion includes an L-shaped member with a base portion and a bottom surface supporting portion, a knob that is linked to a tip end portion of the base portion and a biasing member that is disposed between the knob and the top surface of the frame and that biases the bottom surface supporting member upward toward the bottom surface of the frame.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: April 27, 2021
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Hideki Hirota, Takao Yasuta, Takayuki Narumi, Yoshinori Kikuchi
  • PROBE CARD HOLDER
    Publication number: 20200103442
    Abstract: The present invention provides a probe card holder including a plate-shaped frame formed with an opening approximately the same size as the probe card, a plurality of card bottom surface holding portions that are provided around a peripheral edge of the opening in the frame and that hold a bottom surface of the probe card while biasing the bottom surface, and a plurality of card top surface supporting portions that support the top surface of the probe card. Each card bottom surface holding portion includes an L-shaped member with a base portion and a bottom surface supporting portion, a knob that is linked to a tip end portion of the base portion and a biasing member that is disposed between the knob and the top surface of the frame and that biases the bottom surface supporting member upward toward the bottom surface of the frame.
    Type: Application
    Filed: September 9, 2019
    Publication date: April 2, 2020
    Applicant: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: HIDEKI HIROTA, TAKAO YASUTA, TAKAYUKI NARUMI, YOSHINORI KIKUCHI
  • Sample device for charged particle beam
    Patent number: 8729497
    Abstract: Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4.
    Type: Grant
    Filed: October 5, 2011
    Date of Patent: May 20, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasuhira Nagakubo, Toshiaki Tanigaki, Hideki Hirota, Katsuji Ito, Takayuki Asakawa
  • SAMPLE DEVICE FOR CHARGED PARTICLE BEAM
    Publication number: 20130193343
    Abstract: Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4.
    Type: Application
    Filed: October 5, 2011
    Publication date: August 1, 2013
    Inventors: Yasuhira Nagakubo, Toshiaki Tanigaki, Hideki Hirota, Katsuji Ito, Takayuki Asakawa
  • Sample case for an electron microscope
    Patent number: D651226
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: December 27, 2011
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasuhira Nagakubo, Toshiaki Tanigaki, Hideki Hirota, Takayuki Asakawa, Katsuji Itou
  • Fixation device for a sample case for an electron microscope
    Patent number: D660335
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: May 22, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasuhira Nagakubo, Toshiaki Tanigaki, Hideki Hirota, Takayuki Asakawa, Katsuji Itou