Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

Abstract: A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

Abstract: A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.

Abstract: An information processor includes a controller that is configured to: produce, on the basis of use information of a device manufactured under a manufacturing condition based on spec information, appropriate spec information representing an appropriate spec which is appropriate to the device; and determine a manufacturing condition for the device on the basis of the appropriate spec information.

Abstract: Functional agent-containing fibers according to an embodiment of the present invention, wherein a functional agent is supported by silicone fixed to the fibers. The silicone includes an acrylic-modified organopolysiloxane having two or more acrylic groups per molecule. A rate of decrease in the functional agent after the functional agent-containing fibers are washed 10 times is less than 40%. In the present invention, the functional agent-containing fibers may be produced, e.g., by irradiating fibers impregnated with a fiber treatment agent A containing silicone with an electron beam so that the silicone is fixed to the fibers, and impregnating the fibers to which the silicone has been fixed with a fiber treatment agent B containing a functional agent. The functional agent-containing fibers may be produced, e.g.

Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

Abstract: An actuator includes: a casing; a pressure reducing valve and a piston. The pressure reducing valve is provided in the casing to reduce a pressure of a driving fluid supplied from an outside of the casing to a predetermined level. The piston is provided in the casing to form a pressure chamber together with the casing. The piston is driven by the driving fluid that has been pressure-reduced to the predetermined level.

Abstract: An opening for allowing an object of paying of respects to be moved therethrough is formed in a wall. An inside support position for an object of paying of respects to be supported at is set at a position that is in the internal area and across from the opening and in a range over which the transport device is capable of moving an object of paying of respects. A support portion configured to support an object of paying of respects is also configured to be moved, through the opening, between the inside support position and an outside support position for an object of paying of respects to be supported at such that at least a portion of the object of paying of respects is located outside the internal area.

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

Abstract: A support portion on which an object of paying of respects transported by the transport device is placed is provided at the support position. The support portion includes one or more restriction members configured to restrict movement of an object of paying of respects toward the first side by contacting the object of paying of respects from the first side, and one or more guide portions configured to move an object of paying of respects toward the first side to a contact position at which the object of paying of respects contacts the one or more restriction members or to a position located more toward the second side relative to the contact position.

Abstract: A storage facility for objects of paying of respects includes a partition wall located to partition off the support position from a respects-paying position for a person visiting to pay respects, a window member including a variable-light-transmittance member whose light transmittance is adjustable, an illuminating device for which an amount of light emitted thereby is adjustable, and a controller. A window for allowing the person visiting to pay respects to view an object of paying of respects is formed in an area, of the partition wall, toward which the object of paying of respects faces when supported in the support position. The window is provided with a window member. And the illuminating device is so positioned that light therefrom reaches the object of paying of respects supported in the support position.

Abstract: A plurality of storage sections include one or more reference storage sections each of which is defined to be a storage section that has an occupiable area at least a portion of which extends over a same positional range along the first direction as a portion of an occupiable area in the support position. A transport device includes a projecting and retracting mechanism configured to project and retract along the first direction a holding member configured to hold an object of paying of respects, and is configured to move the holding member toward a partition wall side along the first direction when moving an object of paying of respects to a reference storage section or to the support position by means of the projecting and retracting mechanism.

Abstract: Provided is a cap for a handwheel that opens and closes a valve, capable of being readily attached to the handwheel without requiring a large space around the handwheel. The cap has easily switchable two working modes: One is a co-rotation mode where the cap is capable of rotating with the handwheel and the other is an independent rotation mode where the cap is capable of rotating independently of the handwheel. The cap has an internal casing to be securely fitted to the handwheel; an external casing being rotatable around its axis and having the internal casing in an interior thereof; a clutch for connecting the external casing with the internal casing and for disconnecting the former from the latter; and a maintaining member for keeping the external casing rotatable independently of the internal casing when they are disconnected by the clutch.

Abstract: Provided is a cap for a handwheel that opens and closes a valve, capable of being readily attached to the handwheel without requiring a large space around the handwheel. The cap has easily switchable two working modes: One is a co-rotation mode where the cap is capable of rotating with the handwheel and the other is an independent rotation mode where the cap is capable of rotating independently of the handwheel. The cap has an internal casing to be securely fitted to the handwheel; an external casing being rotatable around its axis and having the internal casing in an interior thereof; a clutch for connecting the external casing with the internal casing and for disconnecting the former from the latter; and a maintaining member for keeping the external casing rotatable independently of the internal casing when they are disconnected by the clutch.

Abstract: A silicon nitride film forming method includes accommodating a workpiece within a reaction chamber, forming a silicon nitride film on the workpiece accommodated within the reaction chamber, carbon-terminating a surface of the silicon nitride film by supplying a hydrocarbon compound having an unsaturated bond into the reaction chamber accommodating the workpiece on which the silicon nitride film is formed, and unloading the workpiece, on which the silicon nitride film having a carbon-terminated surface is formed, out of the reaction chamber.

Abstract: Provided is a method of protecting a component of a film forming apparatus, which includes forming a film having a rough surface on a surface of a component which is provided in the interior of the processing chamber of a film forming apparatus such that the surface of the component is coated with the film having the rough surface, the component being exposed to a film forming atmosphere during a film forming process. Forming a film having a rough surface on a surface of the component is in some embodiments performed before or after the film forming process is performed on target substrate and in some cases both before and after.

Abstract: In order to improve the charging efficiency of a charging apparatus including a photovoltaic generator such as a solar battery, a charging apparatus includes: a battery which is rechargeable; a photovoltaic generator generating electric power in response to received light; and a generative charging portion supplying the electric power generated by the photovolaic generator to the battery. The generative charging portion includes: a control portion which controls current in the direction from the battery to the photovoltaic generator; and a voltage regulation portion which regulates voltage of the electric power supplied from the photovoltaic generator to the battery and is connected to the control portion in series.

Abstract: In order to improve the charging efficiency of a charging apparatus including a photovoltaic generator such as a solar battery, a charging apparatus includes: a battery which is rechargeable; a photovoltaic generator generating electric power in response to received light; and a generative charging portion supplying the electric power generated by the photovolaic generator to the battery. The generative charging portion includes: a control portion which controls current in the direction from the battery to the photovoltaic generator; and a voltage regulation portion which regulates voltage of the electric power supplied from the photovoltaic generator to the battery and is connected to the control portion in series.

Abstract: In a semiconductor device manufacturing method, at least a semiconductor element is arranged in a cavity of a resin molding die. A resin is supplied to a resin reservoir in direct contact with the cavity and is then injected in order to substantially fill the cavity. The resin filled in the cavity forms a resin seal for encapsulating the semiconductor element. The resin seal has a recess or a protrusion as a remainder of the resin reservoir.

Abstract: In a semiconductor device manufacturing method, at least a semiconductor element is arranged in a cavity of a resin molding die. A resin is supplied to a resin reservoir in direct contact with the cavity and is then injected in order to substantially fill the cavity. The resin filled in the cavity forms a resin seal for encapsulating the semiconductor element. The resin seal has a recess or a protrusion as a remainder of the resin reservoir.