Abstract: An optical waveguide component has a first optical member in which a predetermined first core pattern groove is formed and a second optical member in which a predetermined second core pattern groove is formed, the first and second optical members being combined together so that said first and second core pattern grooves are opposingly overlapped with each other, and the first and second core pattern grooves being filled with a core material.

Abstract: In an electron emission element having an emitter section for emitting electrons, the emitter section includes, on a first conductive electrode, a structure in which at least a first semiconductor layer, a second semiconductor layer, an insulating layer and a second conductive electrode are deposited sequentially; and the first and second semiconductor layers include at least one of carbon, silicon and germanium as a main component, and the first semiconductor layer includes at least one type of atoms among carbon atom, oxygen atoms and nitrogen atoms which is different from the main component.

Abstract: A diamond film of this invention is formed from growth nuclei distributed on a substrate at a density of at least 1.times.10.sup.10 numbers/cm.sup.2, the film is dense, having flat surface and great freedom in the thickness of the continuous film. The growth nuclei can be distributed at such a high density by, for example, dispersing diamond grains of average diameter of no more than 0.1 .mu.m in an acid solution, and distributing the grains on a substrate immersed in the solution by any means including ultrasonic vibration and voltage application. Such techniques for nucleation are simple and excellent in repeatability. The diamond film is formed on the substrate using the diamond grains as the growth nuclei by the plasma CVD or any other techniques.

Abstract: A multilayer film forming apparatus including a film forming chamber, a substrate on which a multilayer film is formed, an optical thickness monitoring substrate which controls an optical thickness of each layer of a multilayer film, a monitor exchange system which exchanges the optical thickness monitoring substrate for each layer and a multilayer film monitoring substrate which is disposed under the optical thickness monitoring substrate to observe spectral characteristics of the multilayer film.

Abstract: Two modules, each of which has a plurality of memory IC chips installed therein, are stacked to form a module unit. Furthermore, a plurality of the module units are installed on a mother board so as to form a multilevel semiconductor integrated circuit device. By further stacking a specific module containing an IC chip for replacing the functions of a defective chip, a repair process can be conducted more easily and efficiently. Alternatively, instead of the module units, a plurality of TAB packages stacked in a multilayer structure are installed on the mother board. Outer leads of each of the TAB packages and terminal pads on the circuit board are respectively connected to each other in a one-to-one way. Thus, only a defective TAB package need be taken away and consequently, efficiency in the repair process further improves.

Abstract: A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by a factor of 10 or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel.

Abstract: Two modules, each of which has a plurality of memory IC chips installed therein, are stacked to form a module unit. Furthermore, a plurality of the module units are installed on a mother board so as to form a multilevel semiconductor integrated circuit device. By further stacking a specific module containing an IC chip for replacing the functions of a defective chip, a repair process can be conducted more easily and efficiently. Alternatively, instead of the module units, a plurality of TAB packages stacked in a multilayer structure are installed on the mother board. Outer leads of each of the TAB packages and terminal pads on the circuit board are respectively connected to each other in a one-to-one way. Thus, only a defective TAB package need be taken away and consequently, efficiency in the repair process further improves.

Abstract: A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device.

Abstract: A diamond-like thin film of good quality is prepared homogeneously and fast in a deposition. A mesh-like acceleration electrode is provided at the opening of a chamber including a filament, and a plasma is generated in the chamber. Because the chamber is isolated electrically from the electric system of the apparatus, the high density and the equilibrium state are maintained, and the plasma density and the potential are homogenized around the mesh-like electrode. In this state, a bias potential is applied to the substrate, and the ions are accelerated according to the potential difference between the plasma and the substrate to deposit a diamond-like thin film on the substrate. Preferably, a negative potential electrode is provided before or around the substrate. Further, an insulating member is provided to surround a flight path of ions between the chamber and the substrate.

Abstract: A tape driving mechanism for a magnetic recording apparatus has a capstan rotated to advance a magnetic tape by pinching the magnetic tape between the capstan and a pinch roller. The pinch roller is pressed onto the magnetic tape against the capstan. The capstan surface is coated with a diamond-like carbon film which is smooth and highly wear-resistant. The difference between the tangential speed of the capstan and the tape transfer speed is almost zero. Thus, the state of contact is static. A static frictional coefficient between the diamond-like carbon film of the capstan and the magnetic tape is almost equal to twice the static frictional coefficient between the metal surface of the capstan and the magnetic tape in the conventional tape driving mechanism. The tape driving force thus remains sufficient even if the pressure exerted by the pinch roller is reduced to half the value employed in the conventional tape driving mechanism. The diamond-like carbon film may be coated on a rough surface of the capstan.

Abstract: A plasma CVD apparatus for continuously forming a diamond-like film on a length of magnetic tape, includes a first vacuum vessel, a plasma generating vessel for transforming a gaseous medium into a plasma, and an electrode for accelerating ions of the plasma toward the substrate. The plasma generating vessel has a gas outflow port of a shape complementary to that of the portion of the magnetic tape readied for deposition. A portion of the plasma generating vessel is disposed within the vacuum vessel, with the gas outflow port facing the substrate. A gap between the substrate and the gas outflow port is set to maintain the pressure of plasma in the gap uniform.

Abstract: In an apparatus for forming a thin film on substrates, two substrate supporters having respective recesses therein are connected by a shaft so that the recesses oppose one another, and opposing ends of many rod-like substrates are supported on the side walls of the recesses. Then, the substrates are rotated on the side walls as the substrate supporters are revolved, and the substrates shift their positions under their own weight. In this state, deposition particles impinge against the substrates from a material source, while the rod-like substrates are stirred so that each region of the outer peripheries thereof has an equal probability of having the film deposited thereon. Thus, a uniform thin film is formed on the surface of every substrate. The numbers of recesses may be two or more. Further, a nest of substrate supporters may be used.

Abstract: In a heat-plasma-jet, an arc is initially generated between opposed endless ends of a pair of electrodes and is moved along the opposed endless ends of the electrodes by generating magnetic fields having the same polarity at the opposed ends of the electrodes. Thereafter, a plasma generating gas is supplied into a region in which the arc is generated.

Abstract: A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.

Abstract: A photosensitive body has an electrically conductive substrate, and a photoconductive film formed on the substrate. A multiple optical film is formed on the photosensitive layer. The multiple optical film allows permeation of light beams in specific wavelength. Further, a diamond-like carbon film is formed on the multiple optical film. The diamond-like carbon film has thickness of at least 1,500.ANG. and Noop hardness of at least 1,000 kg/mm.sup.2. The multiple optical film and the diamond-like carbon film are provided in order to improve resistance against wear, ozone, and light.

Abstract: A hair conditioning composition comprising a guanidine derivative having an amide group in its molecule or a salt thereof as an active ingredient is effective to render damaged hair soft and moist.

Abstract: A hair cosmetic composition comprising:(A) 0.05% to 10% by weight of at least one quaternary ammonium salt having the formula: ##STR1## wherein R.sub.1 is an alkenyl having 14 to 20 carbon atoms, R.sub.2 is an alkyl or alkenyl having 14 to 20 carbon atoms, R.sub.3 and R.sub.4 are independently methyl, ethyl, a polyoxyethylene having an average polymerization degree of 1 to 5, or a polyoxypropylene having an average polymerization degree of 1 to 5, and X.sup.- is an anion, and having an iodine value of 35 to 100; and(B) 0.05% to 10% by weight of a phosphate having the formula: ##STR2## wherein R.sub.5 is a linear alkyl having 1 to 22 carbon atoms, a hydroxyalkyl having 1 to 22 carbon atoms, an alkenyl having 2 to 22 carbon atoms, an alkylphenyl having 7 to 22 carbon atoms, or glyceryl, R.sub.6 is hydrogen or methyl, R.sub.7 is hydrogen, an alkali metal, a C.sub.1 -C.sub.20 alkyl-substituted ammonium, or a C.sub.1 -C.sub.20 hydroxyalkyl-substituted ammonium, R.sub.8 is a group having the formula ##STR3## or R.

Abstract: A magnetic recording medium has a non-magnetic substrate, a magnetic layer formed on the surface of the substrate containing a ferromagnetic material, and a protective film formed on the magnetic layer. The protective film is constituted by a singular layer of continuous or dispersed molecular structures in which carbon and an element constituting the magnetic layer are bonded directly or indirectly through oxygen and at least one fluorine is bonded to the carbon. This magnetic recording medium can be produced by a method comprising preparing a substrate of a non-magnetic material, forming a magnetic layer of a ferromagnetic material on the surface of the substrate, and forming, by a plasma CVD method, a protective film of a fluorine-containing molecular body having a thickness not greater than a value equivalent to 5 .ANG. on the surface of the magnetic layer.

Abstract: A magnetic recording medium is provided with a protective film made of a diamond like carbon film and an organic compound film on a ferromagnetic metal recording film; and it realizes excellent durability and small spacing loss or the like; and as a result high density magnetic recording is obtainable.

Abstract: A magnetic recording medium has a protective layer made of high hardness carbon synthesized under a low-temperature and a low-pressure by blowing hydrocarbon gas plasma onto a magnetic recording layer. The resistance thereof is large, and therefore, high density magnetic recording can be realized in a magnetic recording system wherein the magnetic head contacts the magnetic recording medium. Durability of the magnetic recording medium is substantially improved.