Abstract: A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.

Abstract: A plate member 101 having flexible portions; plate members 102 to 104 having openings corresponding to the flexible portions of the plate member 101; a plate member 201 having flexible portions; and plate members 202 to 204 having openings corresponding to the flexible portions of the plate member 201 are formed by etching. The plate members 101 to 104 and 201 to 204 are bonded by diffusion bonding process to make first and second flanges 100 and 200. Interconnecting shafts are formed by cutting. The first and second flanges 100 and 200 and the interconnecting shafts are bonded by diffusion bonding process to make a strain generation unit 5. Strain gauges are attached to the lower face of the strain generation unit 5. A stain gauge type sensor 1 is thus made.

Abstract: A displacement electrode cooperates with four switch electrodes on a substrate to form respective switches SW1 to SW4. When all of the switches SW1 to SW4 are on, no X- and Y-axial outputs are activated and only a Z-axial output is activated. On the other hand, when at least one of the switches SW1 to SW4 is off, no Z-axial output is activated and only X- and Y-axial outputs are activated.

Abstract: A sensor strain causer can be made into a simple shape, and the attachment work for strain gauges is made easy. In a multiaxial sensor 1 for measuring one or more of multiaxial force, moment, acceleration, and angular acceleration, externally applied, a plurality of strain gauges R11 to R48 disposed on one plane are provided. Thereby, because the time for the attachment work for the strain gauges R11 to R48 can be shortened, the mass productivity can be improved and the cost can be reduced.

Abstract: In a capacitance type sensor, capacitive elements are formed between a displacement electrode 104 and capacitance electrodes E1 and E2. When an external force is applied, the displacement electrode 104 is displaced to come into contact with a switch electrode E3 or E4 kept at a ground potential. The displacement electrode 104 is further displaced with being in contact with the switch electrode E3 or E4. When the displacement of the displacement electrode 104 changes the distances from the capacitance electrodes E1 and E2, the capacitance values of the capacitive elements change. Based on the changes, the force is detected.

Abstract: Switches SW1 to SW4 and variable resistors are formed so as to overlap each other at positions corresponding to the X-axial positive direction, the X-axial negative direction, the Y-axial positive direction, and the Y-axial negative direction, respectively. When at least one of the switches SW1 to SW4 is off, no Z-axial output is activated and only X- and Y-axial outputs are activated. On the other hand, when any of the switches SW1 to SW4 is on, no X- and Y-axial outputs are activated and only a Z-axial output is activated.

Abstract: A strain gauge type sensor and a strain gauge type sensor unit using the sensor are improved in sensitivity. In a strain gauge type sensor 1 for measuring at least one of multiaxial force, moment, acceleration, and angular acceleration, externally applied, diaphragms 15 and 16 different in thickness are formed at inner and outer edges of a substantially disk-shaped interconnecting portion 13 interconnecting a vicinity of an upper end of a force receiving portion 11 and a fixed portion 12 disposed around the force receiving portion 11. The thicknesses of the diaphragms 15 and 16 are determined such that strains at intersections of a straight line extending through an origin O with the diaphragms 15 and 16 are equal to each other. Strain gauges are disposed at the intersections of the straight line extending through the origin O with the diaphragms 15 and 16.

Abstract: In a sensor sheet of the present invention, a large number of sensor cells, each having capacitance element electrodes corresponding to an X-axis direction, a Y-axis direction and a Z-axis direction and a displacement electrode arranged to form capacitance elements between the capacitance element electrodes and the displacement electrode, are arranged in matrix. This arrangement enables measurement of a distribution of three-dimensional components of the force applied from outside over the overall sensor sheet on the basis of the components of force detected in each of the large number of sensor cells.

Abstract: The power consumption is reduced, wiring is simplified, and the cost is reduced. A multiaxial sensor unit 10 for measuring one or more of multiaxial force, moment, acceleration, and angular acceleration, externally applied, includes eight strain gauges R11 to R24 disposed on a single plane, and one bridge circuit 11 constructed by connecting the strain gauges R11 to R24. Thereby, bridge circuits 11 and strain gauges R11 to R24 are reduced in comparison with a prior art to reduce the power consumption, simplify wiring, and reduce the manufacturing cost.

Abstract: Switches SW1 to SW4 and variable resistors are formed so as to overlap each other at positions corresponding to the X-axial positive direction, the X-axial negative direction, the Y-axial positive direction, and the Y-axial negative direction, respectively. When at least one of the switches SW1 to SW4 is off, no Z-axial output is activated and only X- and Y-axial outputs are activated. On the other hand, when any of the switches SW1 to SW4 is on, no X- and Y-axial outputs are activated and only a Z-axial output is activated.

Abstract: A displacement electrode cooperates with four switch electrodes on a substrate to form respective switches SW1 to SW4. When all of the switches SW1 to SW4 are on, no X- and Y-axial outputs are activated and only a Z-axial output is activated. On the other hand, when at least one of the switches SW1 to SW4 is off, no Z-axial output is activated and only X- and Y-axial outputs are activated.

Abstract: Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the above electrodes (E0 to E5). The displacement electrode (40) cooperates with the reference electrode (E0) and the capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected to the capacitance element (C0) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C1 to C5) when the detective member (30) is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member (30) is detected.

Abstract: A sensor strain causer can be made into a simple shape, and the attachment work for strain gauges is made easy. In a multiaxial sensor 1 for measuring one or more of multiaxial force, moment, acceleration, and angular acceleration, externally applied, a plurality of strain gauges R11 to R48 disposed on one plane are provided. Thereby, because the time for the attachment work for the strain gauges R11 to R48 can be shortened, the mass productivity can be improved and the cost can be reduced.

Abstract: In a resistance type sensor of the present invention, a sensor unit having variable contact resistances and a wakeup switch formed in two layers is produced by folding a FPC forming thereon pressure-sensitive resistive inks, a displacement electrode connected to ground, and a displacement electrode held at a power-supply voltage Vcc. Accordingly, whenever operation is applied to an operating button, the displacement electrode and the displacement electrode are reliably contacted with each other, first, and, then, resistance values of the variable contact resistances are changed while the displacement electrodes are kept in their contacted state. This enables the operation applied to the operating button to be detected reliably.

Abstract: Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the above electrodes (E0 to E5). The displacement electrode (40) cooperates with the reference electrode (E0) and the capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected to the capacitance element (C0) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C1 to C5) when the detective member (30) is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member (30) is detected.

Abstract: Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). At a position opposite to these electrodes (E0 to E5), a displacement electrode (40) is disposed that is Z-axially deformable as a detective member (30) is externally operated to move Z-axially. The displacement electrode (40) cooperates with the reference electrode (E0) and capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected in series with the capacitance element (C0) with respect to a signal externally input. Changes in the capacitance values of the capacitance elements (C1 to C5) as the detective member (30) is moved are detected to sense the displacement of the detective member (30).

Abstract: A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.

Abstract: In a capacitance type sensor of the present invention, a capacitance element is constituted between a displacement electrode and a capacitance element electrode. A return-switch movable electrode is arranged above and spaced from the displacement electrode, to be placed in contact with the displaying electrode due to a displacement of a direction button. When the direction button is operated, the return-switch movable electrode is first displaced into contact with the displacement electrode. Then, the both make a displacement while keeping a contact state. When the displacement electrode is displaced to change the spacing to the capacitance element electrode, changed is the capacitance value of the capacitance element. Based on this change, a force is recognized. Herein, in the course of a transit from a state the displacement electrode and the return-switch electrode are not in contact to a state of their contact, the output signal varies necessarily beyond a threshold voltage.

Abstract: A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.

Abstract: A movable switch electrode (E21) which is contactable with a capacitance element electrode (E1) formed on a substrate (20) and is spaced apart from a fixed switch electrode (E11) formed in an interior of the capacitance element electrode (E1) and having a domed form to cover the fixed switch electrode (E11) is set in place. When a detective member (30) is operated and a force applied from a displacement electrode (40) to the movable switch electrode (E21) reaches a specified value, the movable switch electrode (E21) is elastically deformed and depressed drastically with buckling at the nearly top portion thereof and is brought into contact with the fixed switch electrode (E11). This brings the switch into the ON-state. At this time, an operator is given a pronounced click feeling.