Abstract: A simple gas sensor for detecting a concentration of a detected gas with high accuracy, in which a thermal interference can hardly occur between a normal detection element pair and a reference detection element pair, is provided.

Abstract: The gas sensor includes: a cylindrical member which includes a gas detection chamber therein and extends along an axial thereof; a base member which closes an opening of a first axial end of the cylindrical member; a status sensor which is disposed at a substantially central portion of the base member, and detects at least the temperature or the humidity in the gas detection chamber; a gas detection element disposed around the status sensor on the base member; a lid member which closes an opening of a second axial end of the cylindrical member; and a gas inlet port which penetrates the lid member at a location not coinciding with the status sensor and the gas detection element when seen from the axial direction, and enables the introduction of an inspection target gas from an outside into the gas detection chamber.

Abstract: Provided is a catalytic combustion typed gas sensor of detecting a combustible gas having a concentration equal to or more than a predetermined value based on a raised electric resistance. Herein, combustion heat generated when a combustible gas contacts to a catalytic metal (or detection element) heated by passing electric current therethrough raises a temperature and electric resistance of the catalytic metal. The electric current is made to pass through the catalytic metal such that the temperature of the catalytic metal becomes a standby temperature which is calculated by subtracting the raised temperature portion from a desorption temperature. The combustion heat is generated when the combustible gas contacts to the catalytic metal. Note the catalytic metal adsorbs a silicone compound via a silicon (Si) poisoning process and then desorbs the resulting adsorbed silicone compound at the desorption temperature. The desorption temperature is set in the range over 350° C. to 600° C.

Abstract: The invention provides a hydrogen sensing device capable of preventing sensor sensitivity decreases. A hydrogen sensor 150 detects the hydrogen in an exhaust pipe and is installed in a divergent pipe DP. Flowing through the exhaust pipe is off-gas discharged from the fuel cell of a fuel cell vehicle. In order to decompose the siloxanes contained in the gas, a siloxane decomposing material 130 is placed upstream of the hydrogen sensor 150 inside the divergent pipe DP. Also, an SiO2 capturing material 140 is placed between the siloxane decomposing material 130 and the hydrogen sensor 150, so that the SiO2 capturing material can capture the SiO2 resulting from the decomposition of siloxanes by the siloxane decomposing material 130.

Abstract: A simple gas sensor for detecting a concentration of a detected gas with high accuracy, in which a thermal interference can hardly occur between a normal detection element pair and a reference detection element pair, is provided.

Abstract: Provided is a gas sensor that needs no temperature sensor for detecting a temperature of a heater for preventing dew condensation. The gas sensor comprises a hydrogen sensor 1 including: an element housing 13 having a detection chamber 13a to which hydrogen is introduced; a detection element 31 arranged in the detection chamber 13a and detecting hydrogen; a heater 21 for heating the detection chamber 13a by heat generation via passing an electric current through the heater 21, a resistance value of the heater 21 being changed corresponding to a temperature of the detection chamber 13a; and a microcomputer 51 and a heater operation circuit 52 for controlling the heater 21. Herein, the microcomputer 51 controls a temperature of the detection chamber 13a by adjusting the electric current passing through the heater 21 based on the resistance value of the heater 21.

Abstract: A hydrogen detection system can include an exposed detection element made of a catalytic metal which burns hydrogen so as to generate combustion heat. A hydrogen sensor can detect a hydrogen concentration based on a detected value of the detection element. A heating unit can heat the detection element. A hydrogen storage unit is included, and a hydrogen guiding pipe can guide the hydrogen from the hydrogen storage unit to the detection element. A flow rate adjusting device is attached to the hydrogen guiding pipe, and adjusts a flow rate of the hydrogen. A first dilution unit can dilute the hydrogen from the hydrogen storage unit with a dilution gas, and a controller can control the heating unit and the flow rate adjusting device.

Abstract: A gas sensor which includes walls delimiting a gas detection chamber, and having an introduction port (or an inlet) through which an observed gas is introduced into the gas detection chamber, a measuring element disposed in the gas detection chamber and measuring concentration of a subject gas contained in the observed gas, and a heater constituting at least a portion of the walls, the portion facing the gas detection chamber.

Abstract: The gas sensor includes: a cylindrical member which includes a gas detection chamber therein and extends along an axial thereof; a base member which closes an opening of a first axial end of the cylindrical member; a status sensor which is disposed at a substantially central portion of the base member, and detects at least the temperature or the humidity in the gas detection chamber; a gas detection element disposed around the status sensor on the base member; a lid member which closes an opening of a second axial end of the cylindrical member; and a gas inlet port which penetrates the lid member at a location not coinciding with the status sensor and the gas detection element when seen from the axial direction, and enables the introduction of an inspection target gas from an outside into the gas detection chamber.

Abstract: The present invention provides a mask pattern correction program for correcting a design pattern which serves as a source to form a mask pattern so that, by exposure of a mask with a pattern formed thereon onto a substrate, the mask pattern is transferred as designed, the mask pattern correction program including performing, on a computer, the steps of: determining, before simulation of the dimension of the pattern transferred by exposure, whether the simulation result will converge; and classifying design pattern edges into first and second target edges, correct the first target edges and perform simulation thereon if it is determined that the simulation result will not converge.

Abstract: This gas sensor is provided with: a detection element that measures a gas concentration of a detection target gas contained in an examination gas; a substrate having a heating element; and a supporting member that is fixed to the substrate, protrudes from the heating element, and supports the detection element.

Abstract: A gas sensor disposed on a wall of a gas passage, the gas sensor including: a gas detector detecting a target gas contained in the gas flowing in the gas passage; a detector which houses therein the gas detector and has a gas chamber into which the gas is introduced; and a cutoff valve controlling the introducing of the gas into the gas chamber from the gas passage.

Abstract: A gas detection chamber in which a gas sensing element is provided to detect a component of a gas allowed into the gas detection chamber is heated by a heater, and an output of the heater is regulated by a heater regulator. The heater regulator is adapted to cause the heater to continue to heat the gas detection chamber (preferably but not necessarily, the output of the heater is caused to lower) when an anomaly detection device detects an anomaly of the gas sensing element.

Abstract: A mask pattern design method includes: dividing design layout data for a pattern into multiple regions and extracting any region wherein transfer dimensions obtained from a transfer simulation of the pattern from the plurality of regions exceeds a predetermined allowance range; setting a process window of which multiple transfer conditions of the pattern data from the region extracted by the process are each changed, and computing transfer dimensions obtained from a transfer simulation with each transfer condition with the process window; and extracting the transfer conditions wherein the transfer dimension obtained from the transfer simulation with each transfer condition with the process window exceeds a predetermined allowance range, and computing yield from an occurrence probability regarding the transfer condition.

Abstract: A gas sensor which includes walls delimiting a gas detection chamber, and having an introduction port (or an inlet) through which an observed gas is introduced into the gas detection chamber, a measuring element disposed in the gas detection chamber and measuring concentration of a subject gas contained in the observed gas, and a heater constituting at least a portion of the walls, the portion facing the gas detection chamber.

Abstract: A gas sensor includes a gas detection chamber into which a detection gas is introduced, a detecting element and a compensating element each disposed in the gas detection chamber, a detection device which detects the concentration of a detection target gas contained in the detection gas, in accordance with a difference in electrical resistance values between the detecting element and the compensating element, and a dehumidifying element which is provided in the gas detection chamber, and reversibly absorbs water contained in the detection gas and drains off the water absorbed in the dehumidifying element.

Abstract: A gas-sensing element configured to measure a concentration of a specific component of a gas is mounted to a first circuit board which includes a driving circuit configured to drive the gas-sensing element. A moisture-proof material is disposed over at least one side of the first circuit board disposed in a tubular gas-sensing element case fixed to a sensor case. A gas-sensing chamber is defined by the first circuit board and an inner tubular surface of the gas-sensing element case, and opens at an open end of the gas-sensing element case to receive the gas to be monitored. A second circuit board which includes a control circuit configured to control the gas-sensing element via the driving circuit is fixed to a sensor case, and disposed in a position separate from the gas-sensing chamber such that the second circuit board is kept out of contact with the gas to be monitored.

Abstract: The present invention provides a mask pattern correction program for correcting a design pattern which serves as a source to form a mask pattern so that, by exposure of a mask with a pattern formed thereon onto a substrate, the mask pattern is transferred as designed, the mask pattern correction program including performing, on a computer, the steps of: determining, before simulation of the dimension of the pattern transferred by exposure, whether the simulation result will converge; and classifying design pattern edges into first and second target edges, correct the first target edges and perform simulation thereon if it is determined that the simulation result will not converge.

Abstract: This gas sensor is provided with: a detection element that measures a gas concentration of a detection target gas contained in an examination gas; a substrate having a heating element; and a supporting member that is fixed to the substrate, protrudes from the heating element, and supports the detection element.

Abstract: A gas sensor which includes walls delimiting a gas detection chamber, and having an introduction port (or an inlet) through which an observed gas is introduced into the gas detection chamber, a measuring element disposed in the gas detection chamber and measuring concentration of a subject gas contained in the observed gas, and a heater constituting at least a portion of the walls, the portion facing the gas detection chamber.