Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: Disclosed is an illuminating optical unit in an image display unit for displaying an image by irradiating a GLV (spatial modulation device) with a laser beam and modulating the laser beam based on an image signal inputted to the GLV, which includes a polarized light rotation means for equally dividing a polarized light component of the laser beam into a P polarized light component and an S polarized light component, a polarized light beam splitter for separating from each other the P polarized light component and the S polarized light component equally divided by the polarized light rotation means, and an optical path difference generation means for generating an optical path difference not less than the coherence length of the laser beam between the laser beam of the P polarized light component and the laser beam of the S polarized light component.

Abstract: A constant voltage supply unit having a high-speed load response, equipped with a fold-back type over-current protection function in which an output current detection voltage indicative of the output current is compared with the sum of a feedback voltage indicative of the output voltage and an offset voltage. The over-current protection function has a characteristic that the offset voltage is inversely proportional to the output-current detection voltage, so that the offset voltage is large when the output-current detection voltage (or the output current) is low, and decreases with the output-current detection voltage. In addition, the constant-voltage power supply unit allows enhance feedback of ac components in the feedback loop so as to enhance the ESR of the load-side capacitor, thereby securing phase compensation to prevent oscillations in the feedback loop.

Abstract: Speckle noise is reduced to increase image quality in an image display apparatus such as a projection display or the like.

Abstract: A method and apparatus for controlling the focal position of the UV light for auto-focussing the converged UV light, and a method and apparatus and for inspecting a device, such as a semiconductor wafer or liquid crystal using the converged UV light, in which the UV light converged is to be auto-focussed accurately and speedily. The method includes an inspection stage 11 for supporting a semiconductor wafer, an objective lens for UV light 40 or converging a UV laser light for illuminating the laser light converged to the semiconductor wafer, a distance sensor 41 secured to this objective lens for UV light 40 to detect the distance to the semiconductor wafer and a controller for causing movement of the inspection stage 11 in a perpendicular direction. The controller causes the distance between the objective lens for UV light 40 and the semiconductor wafer to coincide with the target distance T based on the distance as detected by the distance sensor 41.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: Disclosed is an illuminating optical unit in an image display unit for displaying an image by irradiating a GLV (spatial modulation device) with a laser beam and modulating the laser beam based on an image signal inputted to the GLV, including a polarized light rotation means for equally dividing a polarized light component of the laser beam into a P polarized light component and an S polarized light component, a polarized light beam splitter for separating from each other the P polarized light component and the S polarized light component equally divided by the polarized light rotation means, and an optical path difference generation means for generating an optical path difference not less than the coherence length of the laser beam between the laser beam of the P polarized light component and the laser beam of the S polarized light component.

Abstract: For effecting auto-focussing of an objective lens used for observing a semiconductor wafer, a semiconductor microscopic device includes an inspection stage for supporting a semiconductor wafer and an objective lens for observing the semiconductor wafer. For automatic focussing of the objective lens, a defocussing magnitude of a light spot is detected using a knife edge. A collimator lens is oscillated by a voice coil motor to oscillate the light spot on the wafer. A peak value of the defocussing quantity detected at this time is peak-held to generate a position detection signal. The inspection stage is vertically moved so that this position detection signal will be equal to a pre-set target value.

Abstract: To properly focus an ultraviolet objective lens by the use of a distance sensor even when inspecting an object having a larger step than the focal depth of the objective lens, a difference between the real shape of a convex or concave pattern in each of dies formed on a semiconductor wafer 100 to be inspected and the shape (false shape) of a convex or concave pattern the distance sensor 8 recognizes, is calculated as a correction value C2 intended for use to compensate for an influence of the step in the die. The output from the distance sensor 8 is compensated with the correction value C2 to determine an accurate target moving distance, and an inspection stage 2 is driven accordingly to the target moving distance to automatically focus the ultraviolet objective lens.

Abstract: A semiconductor light exposure device reducing coherency of laser light to an appropriate value by a simplified structure without producing speckles. The semiconductor light exposure device includes an ultraviolet light generating device, a uniform illumination device having the operation of inducing an optical path length difference and a projection device for projecting the laser light from the uniform illumination device. The ultraviolet light generating device includes an Nd:YAG Q-switch laser unit with a wavelength of 1064 nm, oscillated with a longitudinal single mode, a phase modulation unit or phase-modulating the fundamental laser light outgoing from the Nd:YAG Q-switch laser unit with voltage signals having plural frequency components, and a wavelength conversion unit for converting the wavelength of the fundamental laser light phase-modulated by the phase modulation unit into an ultraviolet laser light with a wavelength of 213 nm as a fifth harmonics.

Abstract: A laser beam generating device which, by addition of a simplified structure, can enlarge the spectral width of the laser light and lower the coherence to a moderate value. The laser light generating device includes a first laser light source 31, a second laser light source 32, phase modulation units 34, 35 for phase-modulating the beams from the light sources with a sole frequency component or plural frequency components, and an additive frequency generating unit 33 for producing a light beam of the shorter wavelength based on the wavelength of the light phase-modulated by the phase modulation units 34, 30. The fundamental wavelength laser light generated by the first laser light source 31 is phase-modulated by the phase modulation unit 34 based on a pre-set modulation amplitude and the modulation frequency so as to be enlarged in spectral width before being incident on the additive frequency generating unit 33.

Abstract: A laser beam generating device which, by addition of a simplified structure, can enlarge the spectral width of the laser light and lower the coherence to a moderate value. The laser light generating device includes a first laser light source 31, a second laser light source 32, phase modulation units 34, 35 for phase-modulating the beams from the light sources with a sole frequency component or plural frequency components, and an sum frequency generating unit 33 for producing a light beam of the shorter wavelength based on the wavelength of the light phase-modulated by the phase modulation units 34, 35. The fundamental wavelength laser light generated by the first laser light source 31 is phase-modulated by the phase modulation unit 34 based on a pre-set modulation amplitude and the modulation frequency so as to be enlarged in spectral width before being incident on the sum frequency generating unit 33.

Abstract: A semiconductor light exposure device reducing coherency of laser light to an appropriate value by a simplified structure without producing speckles. The semiconductor light exposure device includes an ultraviolet light generating device, a uniform illumination device having the operation of inducing an optical path length difference and a projection device for projecting the laser light from the uniform illumination device. The ultraviolet light generating device includes an Nd:YAG Q-switch laser unit with a wavelength of 1064 nm, oscillated with a longitudinal single mode, a phase modulation unit or phase-modulating the fundamental laser light outgoing from the Nd:YAG Q-switch laser unit with voltage signals having plural frequency components, and a wavelength conversion unit for converting the wavelength of the fundamental laser light phase-modulated by the phase modulation unit into an ultraviolet laser light with a wavelength of 213 nm as a fifth harmonics.

Abstract: A continuous-wave ultraviolet laser light generating apparatus includes a laser light source unit (1) for generating laser light from visible light to near-infrared light, a wavelength converting means (4) which includes an optical resonator (2) and a wavelength convertor (3) disposed in the optical resonator (2) for converting a wavelength of incident laser light and which converts the laser light from the laser light source unit (1) into continuous-wave ultraviolet laser light L.sub.UL to emit the latter, a locking means (5) for adjusting the optical resonator (2) so as to have a predetermined cavity length, and an electrooptic phase modulator (6) for modulating a phase of the laser light from the laser light source unit in response to a resonance frequency of the optical resonator. The electrooptic phase modulator (6) is made of an electrooptic crystal (11) having a composition of ATiOXO.sub.4 where A depicts any one of K, Cs and Rb and X depicts any one of P and As.

Abstract: A composite electronic component including a resonator element and a capacitor element fixed together by adhesive material. The capacitor element is longer than the resonator element, so that side steps are defined on both end portions of the elements. First and second lead terminals are connected by solder with first and second capacitor electrodes located on a front surface of the capacitor element and with resonator electrodes located on side surfaces of the resonator element exposed at the side steps. A third lead terminal is connected by solder with a third capacitor electrode located on a rear surface of the capacitor element. Therefore, the thin and miniature composite electronic component adapted for a Colpitts oscillation circuit is obtained at a low cost.