Abstract: A small capacitance change detection device includes a capacitance detection element, signal generation circuit, signal amplification circuit, and output circuit. The signal amplification circuit includes a first transistor and first to third voltage sources. The second or third voltage source is connected to the other output terminal of the first transistor via a first switch. A voltage to be applied from the second voltage source to the other output terminal is set to have a value equal to or larger than a value obtained by subtracting a threshold voltage of the first transistor from a voltage of the first voltage source while a voltage to be applied from the third voltage source to the other output terminal is set to have a value equal to or smaller than a value obtained by subtracting the threshold voltage from the voltage of the first voltage source.

Abstract: A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode.

Abstract: An authentication token includes a personal collation unit and communication unit. The personal collation unit includes a sensor, storage unit, and collation unit. The sensor detects biometrical information of a user and outputs the detection result as sensing data. The storage unit stores in advance registered data to be collated with the biometrical information of the user. The collation unit collates the registered data with the sensing data and outputs the collation result as authentication data. The communication unit transmits the authentication data from the personal collation unit to the use device as communication data. The personal collation unit and communication unit are integrated.

Abstract: A small shape recognizing capacitive sensor device includes detection elements, sensor circuits, and a correction circuit. The detection elements are arranged adjacent to each other. The sensor circuits are connected to the detection elements, respectively. The correction circuit corrects the output signal level of the sensor circuit. The output signal level correction circuit includes a calibration circuit, calibration reference signal generation circuit, and comparison circuit. The calibration circuit is connected to the output side of the sensor circuit. The calibration reference signal generation circuit generates a calibration reference signal. The comparison circuit compares the output from the sensor circuit with the calibration reference signal and supplies the difference output to the calibration circuit as a control signal.

Abstract: A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.

Abstract: A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.