Abstract: A vertical heat treatment apparatus is configured that a substrate supporter supporting a plurality of substrates in the configuration of a shelf thereon is loaded in a vertical reaction tube surrounded by a heating mechanism and a heat treatment is performed. The vertical heat treatment apparatus includes: a gas nozzle provided in the reaction tube to extend in a vertical direction of the substrate supporter and configured to discharge a processing gas; and a flow path forming member provided to surround the gas nozzle in the reaction tube, wherein the flow path forming member defines a fluid flowing space of a temperature adjusting fluid for adjusting a temperature of the processing gas in the gas nozzle and includes a supply hole and an exhaust hole to supply the temperature adjusting fluid.

Abstract: Provided is a method of controlling a gas supply apparatus including a vaporizer, a carrier gas supply source and a gas supply line, the method including: supplying a liquid or sold raw material to a raw material container included in a vaporizer; vaporizing the liquid or sold raw material in the raw material container to produce a raw material gas; exhausting an interior of the raw material container having the liquid or sold raw material; supplying a carrier gas from the carrier gas supply source to the raw material container; and flowing the raw material gas and the carrier gas from the raw material container to a processing chamber in which a substrate to be processed is accommodated via the gas supply line.

Abstract: A gas supply apparatus including a raw material gas supply system supplying a raw material gas inside a raw material storage tank into the processing container by the carrier gas, the gas supply apparatus includes: a carrier gas passage introducing the carrier gas into the raw material storage tank, a raw material gas passage connecting the raw material storage tank and the processing container to supply the carrier gas and the raw material gas; a pressure control gas passage being connected to the raw material gas passage to supply the pressure control gas; and a valve control unit controlling an opening/closing valve to perform for starting a supply of the pressure control gas into the processing container and simultaneously starting supply of the raw material gas into the processing container from the raw material storage tank, and stopping the supply of the pressure control gas.

Abstract: A high-frequency relay includes: a base block having fixed terminals insert-molded to expose fixed contacts; an electromagnetic block mounted on the base block and for rotating a movable iron piece due to excitation and demagnetization; and movable blocks interlocking with a rotation operation of the movable iron piece so as to be connected with and disconnected from the fixed contacts of the base block. A push-in spring for pushing one of the movable blocks is provided in the movable iron piece. The push-in spring includes a fixed portion fixed to the movable iron piece, a pressure portion for applying pressure to the movable block, and foot portions each extending substantially perpendicularly to the movable block wherein extending directions of the foot portions cane be adjusted.

Abstract: A high-frequency relay includes: a base block having fixed terminals insert-molded to expose fixed contacts on the upper surface; an electromagnetic block having a coil wound around an iron core through a spool; and mounted on the base block, and movable blocks having movable contacts driven in accordance with excitation and demagnetization of the electromagnetic block so as to be connected with and disconnected from the fixed contacts of the base block. The movable blocks have movable iron pieces to be connected with and disconnected from the fixed contacts of the fixed terminals. A return spring is provided for elastically supporting each of the movable blocks so as to make the movable block accessible vertically to the upper surface of the base block. The return spring is disposed to be biased to one of the fixed terminals.

Abstract: A high-frequency relay includes: a base block having fixed terminals insert-molded to expose fixed contacts; an electromagnetic block mounted on the base block and for rotating a movable iron piece due to excitation and demagnetization; and movable blocks interlocking with a rotation operation of the movable iron piece so as to be connected with and disconnected from the fixed contacts of the base block. A push-in spring for pushing one of the movable blocks is provided in the movable iron piece. The push-in spring includes a fixed portion fixed to the movable iron piece, a pressure portion for applying pressure to the movable block, and foot portions each extending substantially perpendicularly to the movable block wherein extending directions of the foot portions cane be adjusted.

Abstract: A high-frequency relay includes: a base block having fixed terminals insert-molded to expose fixed contacts on the upper surface; an electromagnetic block having a coil wound around an iron core through a spool; and mounted on the base block, and movable blocks having movable contacts driven in accordance with excitation and demagnetization of the electromagnetic block so as to be connected with and disconnected from the fixed contacts of the base block. The movable blocks have movable iron pieces to be connected with and disconnected from the fixed contacts of the fixed terminals. A return spring is provided for elastically supporting each of the movable blocks so as to make the movable block accessible vertically to the upper surface of the base block. The return spring is disposed to be biased to one of the fixed terminals.

Abstract: A plasma processing apparatus wherein a means is provided to apply the proper negative DC voltage through a filter circuit to an electrode for generating the low-temperature plasma through the feed of the high-frequency power. When the high-frequency power has been fed in the higher high-frequency power density to the electrode for generating the low temperature plasma, the sparks (abnormal discharge) easy to be generated are prevented from being caused to generate the stable low-temperature plasma for better plasma processing.