Abstract: Transmission of vibrations between two independently supported structures is suppressed by a connecting member for connecting the two structures to form an enclosed space. A connecting member (37) connects a purge chamber which encloses the optical path of exposure light and isolates it from the surroundings and another structure to sustain airtightness in the purge chamber. A section of the connecting member (37), taken in a direction perpendicular to the axis of the connecting member (37), has a tubular form with a three-dimensional portion.

Abstract: A positive-tone radiation-sensitive resin composition comprising: (A) a low molecular weight compound having at least one amino group in which the nitrogen atom has at least one hydrogen atom bonded thereto and at least one of the hydrogen atoms is replaced by a t-butoxycarbonyl group, (B) a photoacid generator, and (C-1) a resin insoluble or scarcely soluble in alkali which is protected by an acid-dissociable group and becomes soluble in alkali when the acid-dissociable group dissociates or (C-2) an alkali-soluble resin and an alkali solubility control agent is disclosed. Also disclosed is a negative-tone radiation-sensitive resin composition comprising the low molecular weight compound (A), the photoacid generator (B), an alkali-soluble resin (D), and a compound capable of crosslinking with the alkali-soluble resin in the presence of an acid(E).

Abstract: An anti-vibration system with air dampers of high natural frequency, in small space. There are a pair of air dampers disposed with their driving directions opposed to each other, and inside pressures of these dampers can be changed to variably set the natural vibration frequency.

Abstract: An anti-vibration system with air dampers of high natural frequency, in a compact space. A pair of air dampers are disposed with their driving directions opposed to each other, and inside pressures of these dampers are variably controlled so as set the natural vibration frequency.

Abstract: A driving apparatus for moving an object has a stage which moves the object mounted thereon, a base member supporting the stage, a reaction force reception structure for receiving a reaction force generated upon driving the stage, a damp member for damping transmission of vibration with a predetermined frequency range from the reaction force reception structure to a floor and an actuator for generating a force between the base member and the reaction force reception structure.

Abstract: A radiation-sensitive resin composition comprising (A) a photoacid generator such as 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluorobenzenesulfonate or 2,4,6-trimethylphenyldiphenylsulfonium 4-trifluoromethylbenzenesulfonate and (B) a resin having an acetal structure typified by a poly(p-hydroxystyrene) resin in which a part of hydrogen atoms of phenolic hydroxyl groups have been replaced by 1-ethoxyethyl groups, 1-ethoxyethyl groups and t-butoxycarbonyl groups, or 1-ethoxyethyl groups and t-butyl groups. The resin composition is sensitive to deep ultraviolet rays and charged particles such as electron beams, exhibits excellent resolution performance and pattern shape-forming capability, and suppresses a nano-edge roughness phenomenon to a minimal extent.

Abstract: This invention is to reduce the influence of vibration or swing due to movement of stages, and minimize the influence on other apparatuses set on the same floor by decreasing the influence of a reaction force according to acceleration/deceleration of the stages on the floor. A driving apparatus includes a movable stage on which an object to be exposed is mounted, a stage base member supporting the stage, and a reaction force reception structure which is different from the stage base member and receives a reaction force generated upon driving the stage. Transmission of vibration with a predetermined frequency or more is damped between the reaction force reception structure and a floor. The apparatus also has an elastic support elastically supporting the reaction force reception structure with respect to the floor or base frame, and a force actuator such as a linear motor for generating a force between the stage base member and the reaction force reception structure.

Abstract: An anti-vibration system with air dampers of high natural frequency, in small space. There are a pair of air dampers disposed with their driving directions opposed to each other, and inside pressures of these dampers can be changed to variably set the natural vibration frequency.

Abstract: A positive-tone radiation-sensitive resin composition comprising: (A) a low molecular weight compound having at least one amino group in which the nitrogen atom has at least one hydrogen atom bonded thereto and at least one of the hydrogen atoms is replaced by a t-butoxycarbonyl group, (B) a photoacid generator, and (C-1) a resin insoluble or scarcely soluble in alkali which is protected by an acid-dissociable group and becomes soluble in alkali when the acid-dissociable group dissociates or (C-2) an alkali-soluble resin and an alkali solubility control agent is disclosed. Also disclosed is a negative-tone radiation-sensitive resin composition comprising the low molecular weight compound (A), the photoacid generator (B), an alkali-soluble resin (D), and a compound capable of crosslinking with the alkali-soluble resin in the presence of an acid(E).

Abstract: A radiation-sensitive resin composition including (1) an alkali-soluble resin, (2) a quinonediazide compound and (3) a mixed solvent including a monoketone having 7 to 14 carbon atoms and an alkoxypropionic acid alkyl ester is provided. The composition can be coated in a uniform thickness in a small coating weight. The composition has a high sensitivity and a high resolution, and also enables formation of resist patterns having a superior pattern shape with less pattern defects. Thus, it is suitable as a positive resist.

Abstract: An air-pressure vibration-damping apparatus, supporting an upper apparatus between a mounting floor and the upper apparatus. The vibration damping apparatus has four or more air springs for supporting the upper apparatus, a vibration-damping controller for controlling inner air pressures of the air springs so as to damp vibration from the mounting floor to the upper apparatus and suppress vibration of the upper apparatus, and a communicating pipe passing air between at least one couple of the air springs. When the couple of air springs mutually connected via the communicating pipe are regarded as one air spring, the number of air springs is three. Regarding this couple of air springs, the vibration-damping controller controls air pressure of at least one air spring.

Abstract: A process for producing a polymer having functional groups at its chain terminals, which comprises reacting a polymer having alkali metal atoms at its chain terminals with an alkylene oxide or sulfide in a hydrocarbon medium having a solubility parameter of 7.2 or less at 25.degree. C. This process makes it possible to produce the said polymer in a short period of time without necessitating a large power for agitation. According to this process, there can be produced a polymer having a functionality near the theoretical functionality in a short period of time.