Patents by Inventor Hironobu Kawahara

Hironobu Kawahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treating method and apparatus therefor
    Patent number: 4795529
    Abstract: This invention relates to a plasma treating method and apparatus therefor. The plasma treating method comprises rendering a gas having a critical potential plasmic under a reduced pressure and changing an acceleration voltage for accelerating ions in the plasma towards a sample interposing the critical potential. The plasma treating apparatus comprises means for rendering a gas having a critical potential plasmic under a reduced pressure and means for changing an acceleration voltage for accelerating ions in the plasma towards a sample interposing the critical potential. According to the present invention, the etching step and the film formation step can be carried out alternately and the plasma treating time can be shortened.
    Type: Grant
    Filed: October 19, 1987
    Date of Patent: January 3, 1989
    Assignee: Hitachi, Ltd.
    Inventors: Yoshinao Kawasaki, Hironobu Kawahara, Yutaka Kakehi, Kado Hirobe, Katsuyoshi Kudo