Patents by Inventor Hironori Ogawa

Hironori Ogawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240158622
    Abstract: An object of the present invention is to obtain a recycled carbon fiber-reinforced polyolefin composition containing recycled carbon fibers having a mechanical strength that is superior to that of a composition containing unused carbon fibers, and a molded product thereof, and the present invention relates to a recycled carbon fiber-reinforced polyolefin composition, containing 0.01 to 50 parts by mass of a modified polyolefin (A), 50 to 99 parts by mass of a polyolefin (B), and 1 to 80 parts by mass of a recycled carbon fiber (C), wherein a total of (A), (B) and (C) is 100 parts by mass, wherein the modified polyolefin (A) is a modified polyolefin obtained by reacting a modified polyolefin (D) having a group that reacts with a carbodiimide group and a carbodiimide group-containing compound (E).
    Type: Application
    Filed: February 22, 2022
    Publication date: May 16, 2024
    Applicant: MITSUI CHEMICALS, INC.
    Inventors: Hironori MATSUMOTO, Yoshiyuki OGAWA
  • Publication number: 20240143870
    Abstract: An information processing apparatus includes a generation unit that generates simulation data including a plurality of combinations of unprocessed data of a workpiece and processed data of the workpiece after a process is performed on the workpiece under a predetermined process condition. Each of the plurality of combinations includes the unprocessed data and the processed data when the process is performed with a plurality of pattern densities for each of a plurality of mask shapes. The information processing apparatus further includes a derivation unit that derives simulation parameters of a shape simulator based on a closeness between predicted data that is predicted by inputting the unprocessed data included in the simulation data to the shape simulator, and the processed data combined with the unprocessed data.
    Type: Application
    Filed: October 30, 2023
    Publication date: May 2, 2024
    Applicant: Tokyo Electron Limited
    Inventors: Hironori MOKI, Tetsuya NISHIZUKA, Masanobu HONDA, Yusuke OGAWA
  • Patent number: 11955739
    Abstract: A connection structure between a printed circuit board and a terminal block includes: an insertion portion at one end of the printed circuit board with a pattern disposed thereon; a terminal-block main body including a receiving port that receives the insertion portion; a nut held in the terminal-block main body; and a screw tightened into the nut. The pattern is interposed between the screw and the nut when the insertion portion is inserted into the receiving port.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: April 9, 2024
    Assignee: DAIKIN INDUSTRIES, LTD.
    Inventors: Kazunari Fukagawa, Hironori Ogawa, Akihiko Oguri, Ryuuichi Toyota, Natsuko Kitagawa
  • Patent number: 11875668
    Abstract: An information transmission system includes a bell, a transmitter, a manual actuator that is manually operated by an operator and actuates the bell, and a controller having a sensor and a memory, wherein the controller analyzes operation information of actuation of the bell actuated by the manual actuator based on an output from the sensor and stores the operation information to the memory, and wherein the transmitter determines operator information corresponding to the operator in the operation information recorded in the memory when the operator rings the bell, and sends the determined operator information.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: January 16, 2024
    Assignee: Koizumi Factory Corporation
    Inventors: Toshihiro Koizumi, Hironori Ogawa, Keiichi Osaku, Dankan Arekusanda Eriku Shoton, Masaru Mizuochi, Mio Omura
  • Publication number: 20230343622
    Abstract: Provided is a stage apparatus including: a first table that is movable on a base; a second table that is movable in a state of floating above the first table and includes a first portion and a second portion below the first portion; a first position measuring device that measures a position of the first portion of the second table; a second position measuring device that measures a position of the second portion of the second table; and a computer that controls a motor that drives the second table. The computer drives the second table based on information on the position of the first portion measured by the first position measuring device and information on the position of the second portion measured by the second position measuring device.
    Type: Application
    Filed: March 28, 2023
    Publication date: October 26, 2023
    Inventors: Takanori KATO, Masaki MIZUOCHI, Motohiro TAKAHASHI, Hironori OGAWA
  • Publication number: 20230215684
    Abstract: The present invention provides: a stage device that can suppress bending deformation of a mirror, and that can reduce the positioning error of a stage by reducing the measurement error of the position of the stage; and a charged particle beam device comprising this stage device.
    Type: Application
    Filed: February 22, 2021
    Publication date: July 6, 2023
    Applicant: Hitachi High-Tech Corporation
    Inventors: Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Hironori OGAWA, Takanori KATO
  • Patent number: 11664185
    Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: May 30, 2023
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Jun Etoh, Hironori Ogawa, Shuichi Nakagawa, Terunobu Funatsu
  • Publication number: 20230137117
    Abstract: A charged particle beam device according to the present invention includes a first movement table and a second movement table disposed above the first movement table, measures a first relative position between a sample chamber and the first movement table, a second relative position between the sample chamber and the second movement table, and a third relative position between a lens barrel and a sample, and corrects a relative position between the first movement table and the second movement table according to the first relative position and the second relative position.
    Type: Application
    Filed: October 12, 2022
    Publication date: May 4, 2023
    Inventors: Hironori OGAWA, Masaki MIZUOCHI, Motohiro TAKAHASHI, Takanori KATO
  • Publication number: 20230035686
    Abstract: Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same.
    Type: Application
    Filed: January 30, 2020
    Publication date: February 2, 2023
    Inventors: Hiroki TAKAHASHI, Shuichi NAKAGAWA, Toshihiko SHIMIZU, Kiyoshi YABATA, Hironori OGAWA, Jun ETOH
  • Patent number: 11417496
    Abstract: The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage device 100 comprises a support stage 10, a floating mechanism 20, and a movement stage 30. The movement stage 30 has a propulsion-applying unit 36, and the support stage 10 has a propulsion-receiving unit 11. The stage device 100 is configured so that when the movement stage 30 moves and the propulsion-applying unit 36 contacts or approaches the propulsion-receiving unit 11, the propulsion-applying unit 36 applies propulsion in the movement direction to the propulsion-receiving unit 11.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: August 16, 2022
    Assignee: Hitachi, Ltd.
    Inventors: Motohiro Takahashi, Takanori Kato, Naruo Watanabe, Hironori Ogawa
  • Publication number: 20220214220
    Abstract: A temperature abnormality detection device includes a plurality of infrared temperature sensors respectively capable of detecting temperature in a different detection area of an equipment, and a device body including a temperature abnormality determination unit that determines that the temperature in the detection area detected by each of the plurality of infrared temperature sensors is abnormal when the temperature in the detection area is higher than a reference temperature. The plurality of infrared temperature sensors is connected to each other by crossover wiring.
    Type: Application
    Filed: February 21, 2020
    Publication date: July 7, 2022
    Inventors: Ryo IKEUCHI, Koji TAKATORI, Takahiro NAKAMURA, Hironori OGAWA, Tadahiko OGAWA, Akira TAKAISHI
  • Publication number: 20220208505
    Abstract: A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.
    Type: Application
    Filed: November 29, 2021
    Publication date: June 30, 2022
    Inventors: Jun ETOH, Hironori OGAWA, Shuichi NAKAGAWA, Terunobu FUNATSU
  • Patent number: 11342156
    Abstract: A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: May 24, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Hironori Ogawa, Masaki Mizuochi, Shuichi Nakagawa, Motohiro Takahashi
  • Patent number: 11342211
    Abstract: The present disclosure provides a wafer inspection technology that involves less degradation of the image quality even when an object to be observed has a variation in height due to warpage, etc. of a wafer. This wafer inspection apparatus obtains an image with less degradation by: adjusting the focal point of an observation optical system to a height measured by a height sensor for measuring wafer surface heights; and further, correcting a switching signal for a CCD line sensor on the basis of stage position data and optical magnification data corresponding to the height so as to make a correction corresponding to the wafer surface height.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: May 24, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Akira Doi, Minoru Sasaki, Masaki Hasegawa, Hironori Ogawa, Tomohiko Ogata, Yuko Okada
  • Publication number: 20220148845
    Abstract: In order to improve the accuracy of stage movement in a charged particle beam apparatus, this stage movement control apparatus is characterized by comprising: a storage device in which overshoot amount data in which the movement distance of a stage and the overshoot amount of the stage are associated is stored; a movement target position setting unit which sets the movement target position of the stage; a stage movement amount calculation unit which calculates a stage movement amount that is an amount by which the stage moves to the movement target position in future; an overshoot estimation unit which, on the basis of the calculated stage movement amount and the overshoot amount data, estimates an overshoot amount corresponding to the stage movement amount; a movement target position correction unit which sets a corrected movement target position obtained by correcting the movement target position closer than the movement target position by the calculated overshoot amount; and a stage movement control unit w
    Type: Application
    Filed: March 19, 2019
    Publication date: May 12, 2022
    Inventors: Hironori OGAWA, Shuichi NAKAGAWA, Masaki MIZUOCHI, Takanori KATO, Naruo WATANABE, Motohiro TAKAHASHI
  • Publication number: 20220128286
    Abstract: The present disclosure provides an air conditioner including a compressor and a drive circuit configured to drive the compressor. The drive circuit includes an AC path, a rectifier connected to the AC path, a DC path on an output side of the rectifier, a smoothing capacitor connected to the DC path, an inverter connected to the DC path, a switch disposed on an electric path from the AC path to the smoothing capacitor, and a controller configured to close and open the switch during a preheating operation of supplying electricity for preheating the compressor via the inverter.
    Type: Application
    Filed: November 14, 2019
    Publication date: April 28, 2022
    Applicant: DAIKIN INDUSTRIES, LTD.
    Inventors: Keito KOTERA, Masahide FUJIWARA, Hironori OGAWA, Takamune OKUI, Yuuko NAKANISHI, Nobuyasu HIRAOKA
  • Publication number: 20220037814
    Abstract: A connection structure between a printed circuit board and a terminal block includes: an insertion portion at one end of the printed circuit board with a pattern disposed thereon; a terminal-block main body including a receiving port that receives the insertion portion; a nut held in the terminal-block main body; and a screw tightened into the nut. The pattern is interposed between the screw and the nut when the insertion portion is inserted into the receiving port.
    Type: Application
    Filed: October 21, 2019
    Publication date: February 3, 2022
    Applicant: DAIKIN INDUSTRIES, LTD.
    Inventors: Kazunari Fukagawa, Hironori Ogawa, Akihiko Oguri, Ryuuichi Toyota, Natsuko Kitagawa
  • Publication number: 20210335105
    Abstract: An information transmission system includes a bell, a transmitter, a manual actuator that is manually operated by an operator and actuates the bell, and a controller having a sensor and a memory, wherein the controller analyzes operation information of actuation of the bell actuated by the manual actuator based on an output from the sensor and stores the operation information to the memory, and wherein the transmitter determines operator information corresponding to the operator in the operation information recorded in the memory when the operator rings the bell, and sends the determined operator information.
    Type: Application
    Filed: July 8, 2021
    Publication date: October 28, 2021
    Applicant: Koizumi Factory Corporation
    Inventors: Toshihiro KOIZUMI, Hironori OGAWA, Keiichi OSAKU, Dankan Arekusanda Eriku SHOTON, Masaru MIZUOCHI, Mio OMURA
  • Publication number: 20210265129
    Abstract: A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.
    Type: Application
    Filed: January 19, 2021
    Publication date: August 26, 2021
    Inventors: Hironori OGAWA, Masaki MIZUOCHI, Shuichi NAKAGAWA, Motohiro TAKAHASHI
  • Patent number: 11049687
    Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: June 29, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Naruo Watanabe, Hironori Ogawa, Takanori Kato, Akira Nishioka