Abstract: A hunting phenomenon of a control object is suppressed. A temperature adjusting device (10) includes a control unit (12), an input unit (13), and a filter (15). The filter (15) is connected to a location upstream of the input unit (13), cuts off a high frequency component of a measurement value (SS), and outputs a measurement value (SSF) after being subjected to filtering processing to the input unit (13). A measurement value (SSF) of a control object after being subjected to filtering processing is input to the input unit (13), and an actual measurement value (PV) based on the measurement value (SSF) after being subjected to filtering processing is output. The control unit (12) calculates an operation amount (MV) with respect to the control object such that the actual measurement value (PV) approximates a target value (SP) with respect to the control object.

Abstract: A technique for accurately detecting a temperature of a sealing surface which is not affected by sealing conditions or the like is provided. A seal bar (1) is a rod-shaped seal bar having a sealing surface (11a) and includes a heater (13) and a temperature sensor (14). The heater (13) is provided in a main body of the seal bar (1) and extends in an extending direction (D1) of the main body (11). The temperature sensor (14) is provided at a position between the sealing surface (11a) and the heater (13) in the main body (11) of the seal bar (1) and is inserted into the main body (11) of the seal bar (1) from an end surface (upper end surface (112) or the like) which intersects a long side of the sealing surface (11a).

Abstract: To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism.

Abstract: A stage apparatus is provided including a base, a table that is movable relative to the base, a drive mechanism that moves the table, a pressing mechanism that presses the table, a position detection device that detects a location of the table, and a control device that controls the pressing mechanism. The table is moved in a predetermined moving direction relative to the base by the drive mechanism. The table is pressed by the pressing mechanism in a direction different from the moving direction. The control device, which is connected to the position detection device, controls the pressing mechanism to press the table at a stop position of the table. The control device controls the pressing mechanism based on locations of the table before and after being pressed, a correction amount indicating a difference between the locations, and a target location of the table.

Abstract: An object of the invention is to provide a positioning apparatus and a positioning control device that may perform precise positioning by suppressing relative displacement of a movable point and positioning target objects. In a positioning apparatus including a movable stage, a stage position detector that detects a position of the movable stage, a control device that performs positioning of the movable stage, a positioning target object for positioning of the movable stage, and at least one or more sensors in a structure of the positioning target object or the movable stage, the control device includes an amount of relative displacement estimation unit that estimates an amount of relative displacement of the movable stage and the positioning target object using information of the sensor and information of the stage position detector, and a unit that controls the position of the stage using information calculated by the amount of relative displacement estimation unit.

Abstract: To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sample stage, a second position detection device that detects a position of the sample stage when the sample stage is positioned in a part of a stage movement range that the first position detection device is capable of detecting, and a control device that adjusts an offset amount of the first position detection device on the basis of a position detection result obtained by the second position detection device, and a charged particle beam apparatus using the stage apparatus.

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract: A stage apparatus includes a base. A table is movable relative to the base in a predetermined moving direction. A drive mechanism moves the table in the moving direction. A pressing mechanism presses the table in a direction different from the moving direction of the table. A position detection device detects a location of the table. A control device controls the pressing mechanism in accordance with table position information. The control device pinpoints a first location of the table before the table is pressed by the pressing mechanism and a second location of the table after the table is pressed by the pressing mechanism, and controls one or both of the drive mechanism and the pressing mechanism in accordance with a difference between the first and second locations of the table.

Abstract: A sinusoidal signal that is frequency-swept so as to have a frequency region in which each frequency has a different number of cycles and/or application duration is applied to a control system in a movement device that moves a movement target, time-series data for transmission characteristics obtained from said control system as a result of the application of the aforementioned sinusoidal signal is acquired, and said time-series data is subjected to spectral analysis. This allows the provision of a positioning control device and a frequency-characteristics measurement method that make it possible to optimize measuring precision while minimizing increases in the amount of time it takes to measure frequency characteristics.

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract: An object of the invention is to provide a positioning apparatus and a positioning control device that may perform precise positioning by suppressing relative displacement of a movable point and positioning target objects. In a positioning apparatus including a movable stage, a stage position detector that detects a position of the movable stage, a control device that performs positioning of the movable stage, a positioning target object for positioning of the movable stage, and at least one or more sensors in a structure of the positioning target object or the movable stage, the control device includes an amount of relative displacement estimation unit that estimates an amount of relative displacement of the movable stage and the positioning target object using information of the sensor and information of the stage position detector, and a unit that controls the position of the stage using information calculated by the amount of relative displacement estimation unit.

Abstract: To attain the above object, in the present invention, proposed are a stage apparatus including a sample stage that mounts a sample, a first position detection device that detects a position of the sample stage, a second position detection device that detects a position of the sample stage when the sample stage is positioned in a part of a stage movement range that the first position detection device is capable of detecting, and a control device that adjusts an offset amount of the first position detection device on the basis of a position detection result obtained by the second position detection device, and a charged particle beam apparatus using the stage apparatus.

Abstract: Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table.

Abstract: Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A linear moving mechanism includes a guide member providing a horizontal straight transport path, a moving member movable along the transport path and a drive mechanism which drives the moving member. The drive mechanism includes a first link arm pivotable around a first vertical shaft, and a second link arm having a first end and a second end. The first vertical shaft is on the transport path or on a line parallel to the transport path. The first end is connected to the first link arm for pivotal movement of the second link arm in a horizontal plane, whereas the second end is connected to the moving member for pivotal movement of the second link arm in a horizontal plane.