Abstract: Disclosed is a magnetic field generator for magnetron plasma. The magnetic field generator is provided with a plurality of magnetic segments, and generates a predetermined multi-pole magnetic field around the periphery of a workpiece substrate within a process chamber. The strength of the multi-pole magnetic field is controlled so that the state of the multi-pole magnetic field is matched different plasma processes. Further, the pattern of the multi-pole magnetic field can be changed so as to match different sizes of the substrate.

Abstract: A control switch detecting apparatus aims at detecting a control switch operable by an operator for controlling a medical device. When a position signal for representing a position of at least one of the control switch and the operator is transmitted from at least one of the control switch and the operator, an obtaining unit obtains relative position information indicative of a relative positional relationship between the control switch and the operator based on the transmitted position signal.

Abstract: An ultrasonic lithotripter comprising a first transmission probe which has a hollow portion in the form of a through hole and transmits ultrasonic vibration and a superfine second transmission probe which can be passed through the hollow portion of the first transmission probe. An object of manipulation is held by means of the second transmission probe as it is manipulated by means of the first transmission probe.

Abstract: An endoscopic lithotripsy probe apparatus includes a probe, ultrasonic-vibration source, mechanical shock generation source, and switch-mechanism. The ultrasonic-vibration source is detachably attached to the probe to transmit an ultrasonic-vibration to the probe in a state in which the proximal end of the probe is connected to the ultrasonic-vibration source. The mechanical shock generation source, which is disposed on the side of the proximal end of the probe, applies a force to the ultrasonic-vibration source in a state in which the ultrasonic-vibration source is detached from the proximal end of the probe, and allows the ultrasonic-vibration source to collide with the proximal end of the probe so that a mechanical shock is applied to the probe. The switch-mechanism switches a state in which the ultrasonic-vibration from the ultrasonic-vibration source is transmitted to the probe and a state in which the mechanical shock from the mechanical shock generation source is transmitted.

Abstract: An image signal captured by a camera head and outputted from an image processor is inputted into a foot switch control device. The image signal is processed in a display control unit of the foot switch control device, inputted into a display and displayed thereon. The display control unit reads out an image indicating the foot switch state corresponding to the foot switch function that is presently allocated to the inputted endoscopic image from a memory unit and superimposes this image on the endoscopic image.

Abstract: A control device for a medical system includes: an instructing unit, which can be instructed by an operator, for outputting an instructing signal according to the instruction by the operator; a control signal generating unit for receiving an instructing signal, and generating multiple control signals for controlling multiple medical apparatuses in accordance with the instructing signal; and multiple output units, which can be connected with a medical apparatus, for outputting control signals to the corresponding medical apparatus.

Abstract: Each magnet segment 22 of a magnetic field forming mechanism 21 is constructed such that, after the magnetic pole of each magnet segment 22 set to face a vacuum chamber 1 as shown in FIG. 3A, adjoining magnet segments 22 are synchronously rotated in opposite directions, and hence every other magnet element 22 is rotated in the same direction as shown in FIGS. 3B, 3C to thereby control the status of a multi-pole magnetic field formed in the vacuum chamber 1 and surrounding a semiconductor wafer W. Therefore, the status of a multi-pole magnetic field can be easily controlled and set appropriately according to a type of plasma processing process to provide a good processing easily.

Abstract: An ultrasonic driving apparatus consists mainly of a digital oscillatory circuit, an amplifier, a detection circuit, a phase difference detection circuit, a register, a data transfer circuit, and a switching circuit. The digital oscillatory circuit is used to drive an ultrasonic transducer at the resonance frequency of the ultrasonic transducer. The amplifier amplifies a driving signal output from the digital oscillatory circuit. The detection circuit detects the phase ?v of an applied voltage and the phase ?i of an induced current from the driving signal applied to the ultrasonic transducer via the amplifier. The phase difference detection circuit detects a difference between the phases ?v and ?i. The register holds digital frequency data with which a frequency at which the digital oscillatory circuit is oscillated is determined, and changes the digital frequency data. The data transfer circuit transfers the digital frequency data to the register.

Abstract: An ultrasonic calculus treatment apparatus includes a longitudinal-vibration piezoelectric oscillator for vibrating in the axial direction of an ultrasonic transmitting member and a torsional-vibration piezoelectric oscillator for vibrating about the axial direction, and further includes driving circuits for driving the piezoelectric oscillators at respective resonance frequencies and a mode selection switch for permitting the oscillators to vibrate independently or in combination, so that lithotripsy can be performed effectively in accordance with the size of a calculus or a function of an operating tool.

Abstract: An ultrasonic surgical apparatus comprises an ultrasonic transducer for generating vibration in response to a drive signal to be given, and a treatment device having a probe to which the vibration is transferred from the ultrasonic transducer to effect treatment with the vibration. This device further comprises a signal generator for generating an AC signal for driving the ultrasonic transducer, and a modulator for modulating the AC signal generated by the signal generator to produce a drive signal to be given to the ultrasonic transducer.

Abstract: Disclosed is a magnetic field generator for magnetron plasma. The magnetic field generator is provided with a plurality of magnetic segments, and generates a predetermined multi-pole magnetic field around the periphery of a workpiece substrate within a process chamber. The strength of the multi-pole magnetic field is controlled so that the state of the multi-pole magnetic field is matched different plasma processes. Further, the pattern of the multi-pole magnetic field can be changed so as to match different sizes of the substrate.

Abstract: A control switch detecting apparatus aims at detecting a control switch operable by an operator for controlling a medical device. When a position signal for representing a position of at least one of the control switch and the operator is transmitted from at least one of the control switch and the operator, an obtaining unit obtains relative position information indicative of a relative positional relationship between the control switch and the operator based on the transmitted position signal.

Abstract: An image signal captured by a camera head and outputted from an image processor is inputted into a foot switch control device. The image signal is processed in a display control unit of the foot switch control device, inputted into a display and displayed thereon. The display control unit reads out an image indicating the foot switch state corresponding to the foot switch function that is presently allocated to the inputted endoscopic image from a memory unit and superimposes this image on the endoscopic image.

Abstract: A control device for a medical system includes: an instructing unit, which can be instructed by an operator, for outputting an instructing signal according to the instruction by the operator; a control signal generating unit for receiving an instructing signal, and generating multiple control signals for controlling multiple medical apparatuses in accordance with the instructing signal; and multiple output units, which can be connected with a medical apparatus, for outputting control signals to the corresponding medical apparatus.

Abstract: An ultrasonic lithotripter comprising a first transmission probe which has a hollow portion in the form of a through hole and transmits ultrasonic vibration and a superfine second transmission probe which can be passed through the hollow portion of the first transmission probe. An object of manipulation is held by means of the second transmission probe as it is manipulated by means of the first transmission probe.

Abstract: An ultrasonic surgical system includes an ultrasonic transducer, a probe connected to the ultrasonic transducer and coming in contact with a treatment target, a detector detecting current and voltage which are supplied to the ultrasonic transducer, a driver driving the ultrasonic transducer to oscillate at its resonance point, and a controller. The controller detects a mechanical load exerted on the probe based on the voltage detected by the detector, and outputs a signal for reducing the mechanical load to the driver when the detected mechanical load is higher than a predetermined value.

Abstract: Each magnet segment 22 of a magnetic field forming mechanism 21 is constructed such that, after the magnetic pole of each magnet segment 22 set to face a vacuum chamber 1 as shown in FIG. 3A, adjoining magnet segments 22 are synchronously rotated in opposite directions, and hence every other magnet element 22 is rotated in the same direction as shown in FIGS. 3B, 3C to thereby control the status of a multi-pole magnetic field formed in the vacuum chamber 1 and surrounding a semiconductor wafer W. Therefore, the status of a multi-pole magnetic field can be easily controlled and set appropriately according to a type of plasma processing process to provide a good processing easily.

Abstract: An ultrasonic driving apparatus consists mainly of a digital oscillatory circuit, an amplifier, a detection circuit, a phase difference detection circuit, a register, a data transfer circuit, and a switching circuit. The digital oscillatory circuit is used to drive an ultrasonic transducer at the resonance frequency of the ultrasonic transducer. The amplifier amplifies a driving signal output from the digital oscillatory circuit. The detection circuit detects the phase &thgr;v of an applied voltage and the phase &thgr;i of an induced current from the driving signal applied to the ultrasonic transducer via the amplifier. The phase difference detection circuit detects a difference between the phases &thgr;v and &thgr;i. The register holds digital frequency data with which a frequency at which the digital oscillatory circuit is oscillated is determined, and changes the digital frequency data. The data transfer circuit transfers the digital frequency data to the register.

Abstract: When a substrate 30 is to be subjected to a magnetron plasma process, a dipole ring magnet 21 is provided, in which a large number of anisotropic segment magnets 22 are arranged in a ring-like shape around the outer wall of a chamber 1. A magnetic field gradient, wherein the magnetic field strength decreases from the E pole side toward the W pole side in a direction perpendicular to a magnetic field direction B, is formed in a plane perpendicular to the direction of an electric field between a pair of electrodes separated from each other. The anisotropic segment magnets have a first section a including anisotropic segment magnets arranged in the vicinity of a region A located outside an E pole side end of the process substrate with an N pole thereof being directed toward this region, and a second portion b including anisotropic segment magnets arranged with an S pole thereof being directed toward this region, to locally increase the magnetic field strengths of the first and second regions.

Abstract: An endoscopic lithotripsy probe apparatus includes a probe, ultrasonic-vibration source, mechanical shock generation source, and switch-mechanism. The ultrasonic-vibration source is detachably attached to the probe to transmit an ultrasonic-vibration to the probe in a state in which the proximal end of the probe is connected to the ultrasonic-vibration source. The mechanical shock generation source, which is disposed on the side of the proximal end of the probe, applies a force to the ultrasonic-vibration source in a state in which the ultrasonic-vibration source is detached from the proximal end of the probe, and allows the ultrasonic-vibration source to collide with the proximal end of the probe so that a mechanical shock is applied to the probe. The switch-mechanism switches a state in which the ultrasonic-vibration from the ultrasonic-vibration source is transmitted to the probe and a state in which the mechanical shock from the mechanical shock generation source is transmitted.