Abstract: The axial displacement of the clutch retainer 28 of the roller clutch 10 is prevented. And, part of the clutch retainer 28 is prevented from rubbing the portion which rotates together with the follower pulley 7 to suppress the heat generation during overrun. Accordingly, grease degradation is prevented and durability and reliability are improved. Bevel is formed on the inner periphery of the outer clutch-race 25 of the roller clutch 10 and on the outer periphery of rollers 26 at an axial end thereof. Accordingly, the circumferential location of the rollers 26 is properly maintained and the installation of the outer clutch-race 25 on the outer diameter side of the rollers 26 and so the assembling process thereof become easy.

Abstract: A member used within a plasma processing apparatus and exposed to a plasma of a halogen gas such as BCl3 or Cl2 is formed from a sintered body of metals of Group IIIa of Periodic Table such as Y, La, Ce, Nd and Dy, and Al and/or Si, for example, 3Y2O3.5Al2O3, 2Y2O3.Al2O3, Y2O3.Al2O3 or disilicate or monosilicate, and in particular, in this sintered body, the content of impurity metals of Group IIa of Periodic Table contained in the sintered body is controlled to be 0.15 wt % or more in total. Specifically, for this member, an yttrium-aluminum-garnet sintered body having a porosity of 3% or less and also having a surface roughness of 1 ?m or less in center line average roughness Ra is utilized.

Abstract: Excellent durability and reliability are provided and assembling work is made easy. The clutch retainer 28a of the roller clutch 10a is prevented from being displaced in the axial direction. It is prevented that part of the clutch retainer 28a rubs the portion rotating together with the follower pulley 7a, so that the heat generation during over-run is prevented. Accordingly, grease degradation is prevented, and durability and reliability are improved. In addition, the inner clutch ring 21 of the roller clutch 10a and the rollers are provided with a chamfered portion along the outer periphery at the end thereof in the axial direction. Accordingly, the rollers 26 are positioned properly in the circumferential direction, while the inner clutch ring 21 is easily installed on the inner diameter side of the rollers 26, and the assembling work is made easy.

Abstract: A seal structure of a fixing portion of a weather strip of the present invention comprises the fixing portion that is fixed at a flange portion provided at a periphery of an opening of a car body, and a dam portion that is provided at a position opposite to a top end of the flange portion, wherein an adhesive sealant is coated within the dam portion, and wherein the top end of the flange portion contacts the adhesive sealant.

Abstract: An X-ray detector comprising a scintillator layer (38) provided for each pixel and adapted for converting X radiation into light, a storage capacitor (15) for storing, as electric charge, the light converted in the scintillator layer (38), and a partition layer (39) partitioning the adjoining scintillator layers (38) provided to the respective pixels. The scintillator layer (38) contains a fluorescent material (I), the partition layer contains a second phosphor (P2) having optical characteristics different from those of the fluorescent material (IP1). The wavelength of the fluorescent light emitted from the second phosphor (P2) includes a component which is equal to or longer than the shortest wavelength of the fluorescent light emitted from the fluorescent material (IP1).

Abstract: The axial displacement of the clutch retainer 28 of the roller clutch 10 is prevented. And, part of the clutch retainer 28 is prevented from rubbing the portion which rotates together with the follower pulley 7 to suppress the heat generation during overrun. Accordingly, grease degradation is prevented and durability and reliability are improved. Bevel is formed on the inner periphery of the outer clutch-race 25 of the roller clutch 10 and on the outer periphery of rollers 26 at an axial end thereof. Accordingly, the circumferential location of the rollers 26 is properly maintained and the installation of the outer clutch-race 25 on the outer diameter side of the rollers 26 and so the assembling process thereof become easy.

Abstract: The axial displacement of the clutch retainer 28 of the roller clutch 10 is prevented. And, part of the clutch retainer 28 is prevented from rubbing the portion which rotates together with the follower pulley 7 to suppress the heat generation during overrun. Accordingly, grease degradation is prevented and durability and reliability are improved. During assembling, with the inner clutch-race 21 being inserted midway on the radially inner side of the rollers 26, the clutch retainer 28 is rotated relative to the inner clutch race 21. With this operation, the inner-clutch race 21 is completely inserted while the springs are simultaneously compressed to press the rollers 26. Accordingly, the circumferential location of the rollers 26 is properly maintained while the inner clutch-race 21 is easily installed on the inner diameter side of the rollers 26 and so the assembling process thereof become easy.

Abstract: Abrasion powder from the clutch retainer 28a is prevented from getting mixed into the grease used for lubricating the roller clutch 10, and the grease is prevented from becoming exposed to high temperatures, and so degrading too quickly is prevented in the grease. Specifically, a retaining piece 33 is formed at one end of the clutch retainer 28a in the inner-diameter side portion thereof, and a retaining collar section 34 is formed around the inner peripheral surface of the other end of the clutch retainer 28a. The inner ring 21 for the clutch is held from both sides in the axial direction between the fitting portion 35 at the tip end of the retaining piece 33 and the retaining collar section 34.

Abstract: An actuator 1 in which a displacement element 7 has a piezoelectric ceramic layer 4 and a pair of electrodes 5, 6 interposing therebetween the piezoelectric ceramic layer 4. The entire thickness of the actuator 1 is 100 &mgr;m or less. The piezoelectric ceramic layer 4 and the substrate 2 have as their principal component a perovskite crystal containing at least Pb; Zr and Ti, and, the maximum difference in a composition ratio Pb/(Ti+Zr) between the surface of the piezoelectric ceramic layer 4 and the inside of the substrate 2 is 0.02 or less. This reduces characteristic variation.

Abstract: Excellent durability and reliability are provided and assembling work is made easy.

Abstract: A member used within a plasma processing apparatus and exposed to a plasma of a halogen gas such as BCl3 or Cl2 is formed from a sintered body of metals of Group IIIa of Periodic Table such as Y, La, Ce, Nd and Dy, and Al and/or Si, for example, 3Y2O3.5Al2O3, 2Y2O3.Al2O3, Y2O3.Al2O3 or disilicate or monosilicate, and in particular, in this sintered body, the content of impurity metals of Group IIa of Periodic Table contained in the sintered body is controlled to be 0.15 wt % or more in total. Specifically, for this member, an yttrium-aluminum-garnet sintered body having a porosity of 3% or less and also having a surface roughness of 1 &mgr;m or less in center line average roughness Ra is utilized.

Abstract: A one-way clutch therein which comprises an inner diameter side member fixed to an end of a rotary shaft, an outer diameter side member disposed around the inner diameter side member, a one-way clutch disposed between a middle part in the axial direction on the outer peripheral surface of the inner diameter side member and a middle part in the axial direction on the inner peripheral surface of the outer diameter side member, and a pair of support bearings disposed between the outer peripheral surface of the inner diameter side member and the inner peripheral surface of the outer diameter side member at a position to pinch this one-way clutch from the both sides thereof in the axial direction for allowing a relative rotation between the inner diameter side member and the outer diameter side member while supporting a radial load applied on this outer diameter side member.

Abstract: A member used within a plasma processing apparatus and exposed to a plasma of a halogen gas such as BCl3 or Cl2 is formed from a sintered body of metals of Group IIIa of Periodic Table such as Y, La, Ce, Nd and Dy, and Al and/or Si, for example, 3Y2O3·5Al2O3, 2Y2O3·Al2O3, Y2O3·Al2O3 or disilicate or monosilicate, and in particular, in this sintered body, the content of impurity metals of Group IIa of Periodic Table contained in the sintered body is controlled to be 0.15 wt % or more in total. Specifically, for this member, an yttrium-aluminum-garnet sintered body having a porosity of 3% or less and also having a surface roughness of 1 &mgr;m or less in center line average roughness Ra is utilized.

Abstract: The present invention provides an X-ray image detector (1) which can reduce the size of a whole apparatus associated with an X-ray imaging tube, reduce noise components of an output X-ray image even if an incident X-ray is very weak, and provide a distortion-free visible image or electric image.

Abstract: A one-way clutch therein which comprises an inner diameter side member fixed to an end of a rotary shaft, an outer diameter side member in a cylindrical form disposed around the inner diameter side member to be concentric with the inner diameter side member, a one-way clutch disposed between a middle part in the axial direction on the outer peripheral surface of the inner diameter side member and a middle part in the axial direction on the inner peripheral surface of the outer diameter side member for transmitting rotation between the outer diameter side member and the inner diameter side member only when the outer diameter side member has a tendency to relatively rotate in a predetermined direction with respect to the inner diameter side member, and a pair of support bearings disposed between the outer peripheral surface of the inner diameter side member and the inner peripheral surface of the outer diameter side member at a position to pinch this one-way clutch from the both sides thereof in the axial direc

Abstract: Low thermal expansion ceramics contains a cordierite crystal phase, wherein a phase of a crystalline compound containing at least one element selected from the group consisting of an alkaline earth element other than Mg, a rare earth element, Ga and In, is precipitated in the grain boundaries of said crystal phase, said ceramics has a relative density of not smaller than 95%, a coefficient of thermal expansion of not larger than 1×10−6/° C. at 10 to 40° C., and a Young's modulus of not smaller than 130 GPa. That is, the ceramics has a small coefficient of thermal expansion, is deformed very little depending upon a change in the temperature, has a very high Young's modulus and is highly rigid and is resistance against external force such as vibration. Accordingly, the ceramics is very useful as a member for supporting a wafer or an optical system is a lithography apparatus that forms high resolution circuit patterns on a silicon wafer.

Abstract: The semi-insulating aluminum nitride sintered body of this invention is composed of aluminum nitride particles, electroconductive fine particles having a volume inherent resistivity value of not larger than 10.sup.2 .OMEGA..multidot.cm which are dispersed among the aluminum nitride particles and an intergranular phase formed from an oxide containing at least one element selected from the group consisting of Ti, Ce, Ni, Ta, Y, Er and Yb, or from Si. This sintered body has a volume inherent resistivity value of 10.sup.4 to 10.sup.11 .OMEGA..multidot.cm, and is very useful, for example, as a member for removing static electricity, or a dielectric layer of an electrostatic chuck. Since dispersions of volume inherent resistivity values are very small, a material having a volume inherent resistivity value within a certain range can be produced with good reproducibility. Accordingly, the yield is high, and the productivity is very good.

Abstract: A wafer support member comprises a base made of ceramics with thickness of 3 mm or more, a metallic electrode plate with thickness of 0.5 mm or more bonded onto the base, and an attraction surface composed of an aluminum nitride film with thickness of 0.01 to 0.5 mm coated on the surface of the electrode plate. The electrode plate functions as a plasma generating electrode when high frequency voltage is applied to the electrode plate and as an electrostatic attraction electrode when direct-current high voltage is applied to the electrode plate. Also, a wafer holding device for holding a wafer such as semiconductor wafer and glass substrate for liquid crystal is disclosed. The wafer holding device comprises a base body of aluminum nitride sintered body containing resistance heating elements therein. Lead terminals for feeding power to the resistance heating elements are formed in the lower surface of the base body.

Abstract: A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 10.sup.14 .OMEGA.-cm at 25.degree. C.

Abstract: A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 10.sup.14 .OMEGA.-cm at 25.degree. C.