Abstract: A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time ?t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

Abstract: A speaker assembly device for a door of a vehicle capable of being installed in vehicle doors of different thicknesses and shapes includes a speaker unit; a holder for mounting the speaker unit to a front portion thereof, the holder including an engagement portion at a back portion thereof; and a spacer including an engaging portion and an opposingly contacting portion, the engaging portion being engageable with the engagement portion of the holder and the opposingly contacting portion opposingly contacting the door of the vehicle.

Abstract: Suppressed are shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber, whereby contamination of a substrate by particles is suppressed. If one vacuum chamber is a substrate processing chamber for performing a vacuum process on the substrate and the other chamber is a transfer chamber having a substrate transfer device therein, the gate valve is opened when inner pressures of both the vacuum chambers are less than 66.5 Pa and a higher one thereof is less than twice a lower one thereof. Preferably, a purge gas for peeling of particles is supplied, before supplying the purge gas for pressure control, into the substrate processing chamber with a flow rate greater than that of the purge gas for pressure control.

Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

Abstract: In a lens periphery edge processing apparatus comprising lens rotating shafts 16, 17 for putting and holding an objective lens therebetween, a carriage 15 rotatable around a pivot, and a grindstone rotating shaft 9 provided with a grindstone 5 for grinding the objective lens L, the lens rotating shaft 17 is provided with a reference globe 70 having a predetermined radius.

Abstract: A semiconductor processing system includes a control section that switches a thermo-medium circulation apparatus between an ordinary mode and an energy-saving mode in correspondence with an ordinary operation state and a long idle state of a processing apparatus, respectively. The long idle state is an idle state of the processing apparatus longer than a predetermined threshold time period. A thermo-medium is circulated at a first flow rate and at a second flow rate smaller than the first flow rate in the ordinary mode and the energy-saving mode, respectively. The control section refers to recipe information on a process sequence, thereby detects that the processing apparatus will shift from the ordinary operation state to the long idle state, and switches the thermo-medium circulation apparatus from the ordinary mode to the energy-saving mode after the processing apparatus shifts to the long idle state.

Abstract: A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point.

Abstract: The invention comprises a lower electrode which is disposed in a processing chamber and holds a wafer W, and an exhaust ring mechanism disposed between the lower electrode and an inner wall of the processing chamber, wherein the exhaust ring mechanism has an exhaust ring, and a magnetic field forming section which forms a magnetic field parallel to the principal plane of the exhaust ring, and thereby preventing plasma leak from a plasma region to a non-plasma region by the formed magnetic field, and a plasma processing apparatus using the exhaust ring mechanism.

Abstract: A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum treatment chamber (1), wherein a transfer arm (5) and first and second buffers (6, 7) for temporarily supporting the wafer (W) are installed in the preliminary vacuum chamber (2), the transfer arm (5) is provided with a flexible arm part (5a) and a support part (16) supporting the wafer (W), the arm part (5a) is extended and retracted by the rotations of a drive side swing arm (14) and a driven side swing arm (15) forming the arm (5a) so as to move the support part (16) straight forward and backward while maintaining it in its attitude, and the first and second buffers (6, 7) are disposed on the motion route of the support part (16) of the transfer arm (5).

Abstract: According to the present invention, there is disclosed a gas introduction system for temperature adjustment comprising passing a gas whose temperature is managed for the temperature adjustment of an object to be processed between a mounting surface of a mounting base for holding the object to be processed under vacuum and a back surface of the object to be processed through a gas supply line, controlling a flow rate adjustment valve by control means based on a measured pressure of the gas supply line measured by a manometer, and adjusting a gas flow rate to the gas supply line so as to obtain a set pressure, so that the gas pressure can be set to a predetermined value in a short time, and the system is miniaturized with little waste of the gas.

Abstract: A scale for an apparatus for measuring displacement is enclosed. It comprises a scale member having a plurality of rectangular gratings arranged in a periodic pattern on the glass epoxy substrate and the like, a coating layer covered on the side of the scale member on which a plural of the rectangular gratings are formed, a scale cover (film layer) which functions as a protective layer, and a scale forming material bonded to the outer portion of the coating layer by an adhesive layer so as to keep contaminants, oil or particles from intruding between the rectangular grating and the adhesive layer, for example an adhesive tape and the like.

Abstract: A speaker assembly device for a door of a vehicle is capable of being set at a low cost at vehicle doors of different thicknesses, shapes, etc., to which a speaker is mounted. The speaker assembly device for a door of a vehicle includes a speaker unit; a holder for mounting the speaker unit to the front portion, the holder including an engagement portion at the back portion; and a spacer including an engaging portion and an opposingly contacting portion, the engaging portion being engageable with the engagement portion of the holder and the opposingly contacting portion opposingly contacting the door of the vehicle.

Abstract: An unstable weighing due to the plunger sliding resistance in a prepla type injection molding machine is prevented by dividing control of the plunger retraction movement for the weighing into speed control and pressure control. A plastic resin supply start position and a forced retraction release position are set along the way of the plunger retraction stroke by reference to a weighing start position. A plunger is moved from the weighing start position after injection and pressure-keeping to a weighing stop retraction position. Plastic resin is supplied to the forward portion of the injection cylinder when the plunger attains the supply start position from the weighing start position. The plunger is moved by forced retraction up to the forced retraction release position by speed control; the weighing is stabilized by changing the speed control to the pressure control once the plunger attains the forced retraction release position.

Abstract: A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole.

Abstract: In a hybrid lens forming method for transferring an aspherical composite layer made of an ultraviolet-curing resin, which is curable by irradiation with ultraviolet rays, onto one surface of a convex lens by using a forming die, the forming die is made of a material which transmits ultraviolet rays, and the aspherical composite layer is transferred onto the convex lens by applying ultraviolet rays from the side of the forming die and curing the ultraviolet-curing resin with ultraviolet rays transmitted through the forming die.

Abstract: In a lens periphery edge processing apparatus comprising lens rotating shafts 16, 17 for putting and holding an objective lens therebetween, a carriage 15 rotatable around a pivot, and a grindstone rotating shaft 9 provided with a grindstone 5 for grinding the objective lens L, the lens rotating shaft 17 is provided with a reference globe 70 having a predetermined radius.

Abstract: According to the present invention, there is disclosed a gas introduction system for temperature adjustment comprising passing a gas whose temperature is managed for the temperature adjustment of an object to be processed between a mounting surface of a mounting base for holding the object to be processed under vacuum and a back surface of the object to be processed through a gas supply line, controlling a flow rate adjustment valve by control means based on a measured pressure of the gas supply line measured by a manometer, and adjusting a gas flow rate to the gas supply line so as to obtain a set pressure, so that the gas pressure can be set to a predetermined value in a short time, and the system is miniaturized with little waste of the gas.

Abstract: In a lens periphery edge processing apparatus comprising lens rotating shafts 16, 17 for putting and holding an objective lens therebetween, a carriage 15 rotatable around a pivot, and a grindstone rotating shaft 9 provided with a grindstone 5 for grinding the objective lens L, the lens rotating shaft 17 is provided with a reference globe 70 having a predetermined radius.