Abstract: A stereoscopic display apparatus and a stereoscopic display system capable of reducing flicker due to the influence of a fluorescent lamp while preventing an increase in crosstalk.

Abstract: A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.

Abstract: An inspection system includes a SEM visual inspection apparatus for detecting a defect in a semiconductor sample in steps of manufacturing a semiconductor device and a review apparatus for observing, at a high resolution, the defect in the semiconductor sample detected by the SEM visual inspection apparatus. The system has a function of transmitting an alignment dictionary image as one of alignment parameters to be set by the SEM visual inspection apparatus using an inspection recipe to the review apparatus.

Abstract: There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate inspection device is such that a substrate having a circuit pattern is irradiated with a primary charged particle beam, the substrate is moved at a constant speed or at an increasing or a decreasing speed, a position resulting from the movement is monitored, the position of irradiation with the primary charged particle beam is controlled according to the coordinates of the substrate, an image in a partial region on the substrate is captured at a speed lower than the velocity of the movement, a defect candidate is detected based on the captured image, and the detected defect candidate is displayed in a map format.

Abstract: An image signal processing apparatus performs gradation control on respective pixels. Specifically, the image signal processing apparatus includes an image signal processing unit which controls light emission and non-light emission of respective subfields so as to provide a field having a level of brightness. Here, the field is a unit display period of the pixels and divided into the subfields which have different light emission periods and are arranged in a predetermined sequence. In the predetermined sequence, the subfields are arranged in a manner such that a subfield having the shortest light emission period among the subfields is in the first place, one of a subfield having the longest light emission period and a subfield having the second longest light emission period among the subfields is in the second place, and the other one is in the third place.

Abstract: An image signal processing apparatus outputs, alternately on a-per frame basis, a first image to be displayed to one of left and right eyes of a viewer and a second image to be displayed to the other eye, and transmits, to a pair of image viewer glasses, a synchronizing signal for controlling timing of opening and closing of optical filters so as to allow the viewer to see the output frames through corresponding eyes. Specifically, the apparatus includes: a persistence amount detecting unit which detects a persistence amount indicating an effect of a first frame in the first image on a second frame in the second image and immediately following the first frame; and an optical-filter adaptive control unit which generates the synchronizing signal indicating timing of opening and closing of the optical filter corresponding to the second frame. The timing is changed based on the persistence amount detected.

Abstract: An apparatus for processing a defect candidate image, including: a scanning electron microscope for taking an enlarged image of a specimen by irradiating and scanning a converged electron beam onto the specimen and detecting charged particles emanated from the specimen by the irradiation; an image processor for processing the image taken by the scanning electron microscope to detect defect candidates on the specimen and classify the detected defect candidates into one of plural classes; a memory for storing output from the image processor including images of the detected defect candidates; and a display unit which displays information stored in the memory and an indicator, wherein the display unit displays a distribution of the detected and classified defect candidates in a map format by distinguishing by the classified class, and the display unit also displays an image of a defect candidate stored in the memory together with the map which is indicated on the map by the indicator.

Abstract: An apparatus for processing a defect candidate image, including: an imager for taking an enlarged image of a specimen; an image processor for processing the image taken by the imager to detect defect candidates existing on the specimen and classify the detected defect candidates into one of plural defect classes; a memory for storing information of the defect candidates including the images of the defect candidates and the classified defect class data outputted from the image processor; and a display unit having a display screen for displaying information stored in the memory, wherein the display unit displays an image of the defect candidates together with the defect class data stored in the memory and the displayed defect class data is changeable on the display screen, and the memory changes the stored defect class data of the displayed defect candidate to the changed defect class data.

Abstract: A color conversion device (100) according to the present invention generates color data (24) in a second color gamut based on first converted color data (22) and input color data (21), which are obtained from input color data (20) in a first color gamut, and outputs the color data (24) in the second color gamut, the color conversion device (100) including: a first color mapping unit (11) which generates the first converted color data (22) by mapping the input color data (21) into the second color gamut; a color mixing unit (12) which generates color data (23) by mixing the first converted color data (22) and second converted color data (25) at a ratio corresponding to the first color gamut and the second color gamut; and a color data output unit (13) which outputs the color data (23).

Abstract: An illumination apparatus includes a light source (1), a first integrator (11) into which light from the light source (1) enters, and a second integrator (33) into which light exiting from the first integrator (11) enters. Accordingly, the aperture shape of the first integrator (11) can be optimally designed, so that the light utilization efficiency can be increased. Furthermore, even when the length of the first integrator (11) is reduced, a deficiency in the light uniformity due to the first integrator (11) is compensated for by the second integrator (33), so that high uniformity can be secured at the surface to be illuminated.

Abstract: An image system comprises an image display device which displays images, and image viewing eyeglasses used for viewing images displayed by the image display device.

Abstract: An inspection method and apparatus irradiates a sample on which a pattern is formed with an electron beam, so that an inspection image and a reference image can be generated on the basis of a secondary electron or a reflected electron emitted by the sample. An abnormal pattern is determined based on a difference in halftone values of each pixel between the inspection image and the reference image. A plurality of feature quantities of the abnormal pattern are obtained from an image of the abnormal pattern, and, based on the distribution of the plurality of feature quantities of the abnormal pattern, a range for classifying the type of the abnormal pattern is designated. Thus, a desired defect can be extracted from many defects extracted by inspection.

Abstract: An image system includes: a display device configured to display an image; and an eyeglasses device for viewing the image displayed by the display device, wherein the display device includes: a display portion configured to display in time series the image to be viewed through the eyeglasses device; a signal generation portion configured to generate a synchronization signal for synchronizing timing of switching of frames of the image; and a transmission portion configured to transmit the synchronization signal, the eyeglasses device includes: an optical filter portion configured to adjust an amount of light of the image; a reception portion configured to receive the synchronization signal transmitted from the transmission portion; and a control portion configured to control action of the optical filter portion corresponding to the switching of the frames of the image, based on the synchronization signal, the signal generation portion further generates a parameter signal including action information for defini

Abstract: A display apparatus, which makes one pixel displayable in four colors, that is, three primary colors and a white color, and inputs and displays chrominance signals corresponding to a mixing ratio of the four colors, includes a color correction instrument which performs first color correction of increasing the saturation of chrominance signals, and a second color correction of decreasing at least the saturation of the chrominance signals, when a predetermined color component exists in the chrominance signals corresponding to a pixel, selection instrument which switches temporally and selects either of first chrominance signals obtained by the first color correction, and second chrominance signals obtained by the second color correction, and a display instrument which displays the chrominance signals, which are selected, in the pixel.

Abstract: An apparatus for processing a defect candidate image, including: a scanning electron microscope for taking an enlarged image of a specimen by irradiating and scanning a converged electron beam onto the specimen and detecting charged particles emanated from the specimen by the irradiation; an image processor for processing the image taken by the scanning electron microscope to detect defect candidates on the specimen and classify the detected defect candidates into one of plural classes; a memory for storing output from the image processor including images of the detected defect candidates; and a display unit which displays information stored in the memory and an indicator, wherein the display unit displays a distribution of the detected and classified defect candidates in a map format by distinguishing by the classified class, and the display unit also displays an image of a defect candidate stored in the memory together with the map which is indicated on the map by the indicator.

Abstract: An illumination apparatus includes a light source (1), a first integrator (11) into which light from the light source (1) enters, and a second integrator (33) into which light exiting from the first integrator (11) enters. Accordingly, the aperture shape of the first integrator (11) can be optimally designed, so that the light utilization efficiency can be increased. Furthermore, even when the length of the first integrator (11) is reduced, a deficiency in the light uniformity due to the first integrator (11) is compensated for by the second integrator (33), so that high uniformity can be secured at the surface to be illuminated.

Abstract: A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

Abstract: In a light source emitting single-color light represented by a solid light source such as a light emitting diode, a light output is increased while a color reproducibility is maintained. A red, a green, and a blue light emitting diode are controlled so that a first light emitting step of making the red light emitting diode emit light in a first light emission period, a second light emitting step of making the green light emitting diode emit light in a second light emission period, a third light emitting step of making the blue light emitting diode emit light in a third light emission period, and a fourth light emitting step of making the red light emitting diode, the green light emitting diode and the blue light emitting diode emit light at the same time in a fourth light emission period are carried out for display of one image.

Abstract: The present invention provides an appearance inspection apparatus that allows a user to give precedence to either defect detection performance or throughput. The appearance inspection apparatus allows a user to select the frequency of a digital image signal or the ratio of the frequency of the digital image signal to a sampling rate. Further, a user is allowed to select either throughput improvement or S/N improvement to prioritize.

Abstract: A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.