Abstract: A semiconductor device has: a first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type differing from the first conductivity type in the first semiconductor layer; a third semiconductor layer of the second conductivity type in the second semiconductor layer and having a higher impurity concentration than the second semiconductor layer; a fourth semiconductor layer of the first conductivity type on the third semiconductor layer; a fifth semiconductor layer of the first conductivity type on the fourth semiconductor layer and having a higher impurity concentration than the fourth semiconductor layer; a sixth semiconductor layer of the second conductivity type in the second semiconductor layer and having a higher impurity concentration than the third semiconductor layer; and a seventh semiconductor layer of the second conductivity type having the same impurity concentration distribution as the third semiconductor layer in a depth direction.

Abstract: According to one embodiment, a semiconductor device includes: a semiconductor substrate having an upper surface and a lower surface; a first conductive layer formed above the semiconductor substrate; and a second conductive layer formed on the upper surface of the first conductive layer, in which, when viewed from above, the second conductive layer is formed in a region inside an end edge of the first conductive layer, the thickness of the second conductive layer is larger than the thickness of the first conductive layer, the thermal conductivity of the second conductive layer is larger than the thermal conductivity of the first conductive layer, and the resistivity of the second conductive layer is smaller than the resistivity of the first conductive layer.

Abstract: To reduce on-resistance while suppressing a characteristic variation increase of a vertical MOSFET with a Super Junction structure, the vertical MOSFET includes a semiconductor substrate having an n-type drift region, a p-type base region formed on the surface of the n-type drift region, a plurality of p-type column regions disposed in the n-type drift region at a lower portion of the p-type base region by a predetermined interval, a plurality of trenches whose bottom surface reaches a position deeper than the p-type base region and that is disposed between the adjacent p-type column regions, a plurality of gate electrodes formed in the plurality of trenches, and an n-type source region formed on the side of the gate electrode in the p-type base region.

Abstract: The semiconductor device includes a pair of gate-electrodes GE formed inside the pair of trenches TR via an gate insulating film (GI), respectively. The pair of column regions PC are spaced apart from each other in the Y-direction. The pair of trenches TR are provided apart from each other in the Y direction, are provided between the pair of column regions PC in the Y direction, and extend in the X direction. The ends of the pair of trenches TR in the X direction are connected to each other by a connecting portion TRa extending in the Y direction. The connection portion TRa is integrated with the pair of trenches TR. The pair of column regions PC extend in the X direction along the pair of trenches TR, and extend in the X direction toward the outer edge of the semiconductor substrate beyond the connection portion TRa.

Abstract: To reduce on-resistance while suppressing a characteristic variation increase of a vertical MOSFET with a Super Junction structure, the vertical MOSFET includes a semiconductor substrate having an n-type drift region, a p-type base region formed on the surface of the n-type drift region, a plurality of p-type column regions disposed in the n-type drift region at a lower portion of the p-type base region by a predetermined interval, a plurality of trenches whose bottom surface reaches a position deeper than the p-type base region and that is disposed between the adjacent p-type column regions, a plurality of gate electrodes formed in the plurality of trenches, and an n-type source region formed on the side of the gate electrode in the p-type base region.

Abstract: According to this present application, a reliability of a semiconductor device can be improved. The semiconductor device has a first region where a MOSFET is formed, and a second region where a temperature sensor transistor is formed. A body region is formed in a semiconductor substrate of the first region, and a base region is formed in the semiconductor substrate of the second region. A source region is formed in the body region and an emitter region is formed in the base region. A first column region is formed in the semiconductor substrate located below the body region, and a second column region is formed in the semiconductor substrate located below the base region.

Abstract: Reliability of a semiconductor device is improved and reduction in yield is reduced. In a semiconductor substrate SUB, a trench TR is formed. A gate-electrode GE1 is formed inside the trench TR via a gate insulating film GI1. In the semiconductor substrate SUB, a body region PB, a well region PW1 and a well region NW1 are formed. A source-region NS is formed in the body-region PB. In the well region PW1, an n-type source region and an n-type drain region are formed. In the well region NW1, a p-type source region and a p-type drain region are formed. The source region NS, the n-type source region, the n-type drain region, the p-type source region and the p-type drain region are subjected to heat treatment. After heat treatment, a p-type column region PC is formed in the semiconductor substrate SUB located below the body region PB.

Abstract: In a semiconductor substrate SUB, a trench TR is formed. A gate-electrode GE1 is formed inside the trench TR via a gate insulating film GI1. A body region PB, a well region PW1 and a well region NW1 are formed. A source-region NS is formed in the body-region PB. In the well region PW1, an n-type source region and an n-type drain region are formed. In the well region NW1, a p-type source region and a p-type drain region are formed. An interlayer insulating film IL1 is formed on the upper surface of semiconductor substrate SUB. In the interlayer insulating film IL1, a hole CH1 is formed in the source region NS and in the body region PB. Holes CH3 are formed in the interlayer insulating film IL1 so as to reach the n-type source region, the n-type drain region, the p-type source region and the p-type drain region.

Abstract: A semiconductor device includes a chip mounting portion and a semiconductor chip provided on the chip mounting portion via a conductive adhesive material. Here, a planar shape of the semiconductor chip is a quadrangular shape. Also, in plan view, a plurality of thin portions is formed at a plurality of corner portions of the semiconductor chip, respectively. Also, the plurality of thin portions respectively formed at the plurality of corner portions of the semiconductor chip is spaced apart from each other. Further, thickness of each of the plurality of thin portions is smaller than a thickness of the semiconductor chip other than the plurality of the thin portions.

Abstract: A semiconductor device includes a first semiconductor chip including a first MOSFET of n-type and a first parasitic diode and a second semiconductor chip including a second MOSFET of n-type and a second parasitic diode. A first source electrode and a first gate wiring are formed on a first front surface of the first semiconductor chip, and a first drain electrode is formed on a first back surface of the first semiconductor chip. A second source electrode and a second gate wiring are formed on a second front surface of the second semiconductor chip, and a second drain electrode is formed on a second back surface of the second semiconductor chip. The first back surface and the second back surface are faced to each other such that the first drain electrode and the second drain electrode are in contact with each other via a conductive tape.

Abstract: A semiconductor device includes: a first semiconductor chip including a first MOSFET of n-type and a first parasitic diode; and a second semiconductor chip including a second MOSFET of n-type and a second parasitic diode. A first source electrode and a first gate wiring are formed in a first front surface of the first semiconductor chip, and a first drain electrode is formed in a first back surface of the first semiconductor chip. A second source electrode and a second gate wiring are formed in a second front surface of the second semiconductor chip, and a second drain electrode is formed in a second back surface of the second semiconductor chip. The first front surface and the second front surface face each other such that the first source electrode and the second source electrode are in contact with each other via a conductive paste.

Abstract: A semiconductor device and a method of manufacturing the same capable of ensuring a sufficient breakdown voltage near a terminal end portion of a cell portion are provided. The cell portion includes a first cell column region and a second cell column region adjacent to each other, and a first cell trench gate and a second cell trench gate arranged between the first cell column region and the second cell column region. An outer peripheral portion includes an outer peripheral trench gate connected to an end portion of each of the first cell trench gate and the second cell trench gate, and a first outer peripheral column region arranged on the cell portion side with respect to the outer peripheral trench gate and extended across the first cell trench gate and the second cell trench gate in plan view.

Abstract: In a trench gate type power MOSFET having a super-junction structure, both improvement of a breakdown voltage of a device and reduction of on-resistance are achieved. The trench gate and a column region are arranged so as to be substantially orthogonal to each other in a plan view, and a base region (channel forming region) and the column region are arranged separately in a cross-sectional view.

Abstract: A semiconductor device according to an embodiment comprises: a cell portion in which a vertical type MOSFET is formed; and a termination portion arranged adjacent to the cell portion. The termination portion includes a connection trench gate provided along a first direction. The cell portion includes: a plurality of first column regions provided along a second direction intersecting the first direction; and a plurality of trench gates provided along the second direction such that two trench gates are arranged between the two adjacent first column regions. The plurality of trench gates extend from the cell portion to the termination portion and are connected to the connection trench gate. The plurality of first column regions extend from the cell portion to the termination portion, and the termination portion includes a plurality of second column regions different from the plurality of first column regions.

Abstract: In a trench gate type power MOSFET having a super-junction structure, both improvement of a breakdown voltage of a device and reduction of on-resistance are achieved. The trench gate and a column region are arranged so as to be substantially orthogonal to each other in a plan view, and a base region (channel forming region) and the column region are arranged separately in a cross-sectional view.

Abstract: A semiconductor device according to an embodiment comprises: a cell portion in which a vertical type MOSFET is formed; and a termination portion arranged adjacent to the cell portion. The termination portion includes a connection trench gate provided along a first direction. The cell portion includes: a plurality of first column regions provided along a second direction intersecting the first direction; and a plurality of trench gates provided along the second direction such that two trench gates are arranged between the two adjacent first column regions. The plurality of trench gates extend from the cell portion to the termination portion and are connected to the connection trench gate. The plurality of first column regions extend from the cell portion to the termination portion, and the termination portion includes a plurality of second column regions different from the plurality of first column regions.

Abstract: A semiconductor device for suppressing a variation in characteristics caused by a current flowing at the time of breakdown is disclosed. The first power MOS transistor Q 1 and the column CLM are formed in the first element region FCM defined in the epitaxial layer NEL, and the second power MOS transistor Q 2 is formed in the second element region RCM. The first power MOS transistor Q 1 includes a first trench gate electrode TGE1, and the second power MOS transistor Q 2 includes a second trench gate electrode TGE2. The depth GDP1 of the first trench gate electrode TGE1 is shallower than the depth GDP2 of the second trench gate electrode TGE2.

Abstract: To reduce on-resistance while suppressing a characteristic variation increase of a vertical MOSFET with a Super Junction structure, the vertical MOSFET includes a semiconductor substrate having an n-type drift region, a p-type base region formed on the surface of the n-type drift region, a plurality of p-type column regions disposed in the n-type drift region at a lower portion of the p-type base region by a predetermined interval, a plurality of trenches whose bottom surface reaches a position deeper than the p-type base region and that is disposed between the adjacent p-type column regions, a plurality of gate electrodes formed in the plurality of trenches, and an n-type source region formed on the side of the gate electrode in the p-type base region.

Abstract: A semiconductor device which simplifies the manufacturing process while decreasing the width of separation between a first MOS transistor area and a second MOS transistor area, and a method for manufacturing the semiconductor device. A first MOS transistor and a second MOS transistor configure a bidirectional switch. The first MOS transistor and second MOS transistor each have a vertical trench structure. A first impurity region abuts on the side wall of a first gate trench of a first MOS transistor element outside the first MOS transistor area and is electrically coupled to a first source region.

Abstract: A semiconductor device for suppressing a variation in characteristics caused by a current flowing at the time of breakdown is disclosed. The first power MOS transistor Q 1 and the column CLM are formed in the first element region FCM defined in the epitaxial layer NEL, and the second power MOS transistor Q 2 is formed in the second element region RCM. The first power MOS transistor Q 1 includes a first trench gate electrode TGE1, and the second power MOS transistor Q 2 includes a second trench gate electrode TGE2. The depth GDP1 of the first trench gate electrode TGE1 is shallower than the depth GDP2 of the second trench gate electrode TGE2.