Patents by Inventor Hirotaka Miyamoto

Hirotaka Miyamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220131328
    Abstract: An optical pulse stretcher includes a first delay optical system including a plurality of concave toroidal mirrors; and a beam splitter including a first surface and a second surface, causing a part of pulse laser light incident on the first surface to be transmitted in a first direction and output as a first beam and another part thereof to be reflected in a second direction and enter the first delay optical system, and causing a part of pulse laser light incident on the second surface from the first delay optical system to be reflected in the first direction and output as a second beam.
    Type: Application
    Filed: January 10, 2022
    Publication date: April 28, 2022
    Applicant: Gigaphoton Inc.
    Inventor: Hirotaka MIYAMOTO
  • Patent number: 11239624
    Abstract: A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: February 1, 2022
    Assignee: Gigaphoton Inc.
    Inventor: Hirotaka Miyamoto
  • Publication number: 20210367396
    Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.
    Type: Application
    Filed: August 10, 2021
    Publication date: November 25, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Takuma YAMANAKA, Miwa IGARASHI
  • Publication number: 20210294223
    Abstract: A wavelength control method of a laser apparatus includes sequentially obtaining target wavelength data of a pulse laser beam, sequentially saving the target wavelength data, sequentially measuring a wavelength of the pulse laser beam to obtain a measured wavelength, calculating a wavelength deviation using the measured wavelength and the target wavelength data at a time before a time when the measured wavelength is obtained, and feedback-controlling the wavelength of the pulse laser beam using the wavelength deviation.
    Type: Application
    Filed: June 8, 2021
    Publication date: September 23, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Takuma YAMANAKA, Hirotaka MIYAMOTO
  • Patent number: 10965087
    Abstract: Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: March 30, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Hirotaka Miyamoto, Osamu Wakabayashi
  • Patent number: 10797465
    Abstract: A laser apparatus includes first and second wavelength dispersion elements, an optical element, first and second actuators, and a control unit. The first wavelength dispersion element generates wavelength dispersion in a direction orthogonal to an electric discharge direction between a pair of electric discharge electrodes. The second wavelength dispersion element generates wavelength dispersion in a direction parallel to the electric discharge direction. The optical element corrects wavelength dispersion generated by the second wavelength dispersion element. The first actuator drives the first wavelength dispersion element. The second actuator drives the optical element. The control unit controls the first actuator so that the center wavelength of the laser light approaches to a target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: October 6, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Hirotaka Miyamoto, Osamu Wakabayashi
  • Publication number: 20200227878
    Abstract: A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.
    Type: Application
    Filed: March 23, 2020
    Publication date: July 16, 2020
    Applicant: Gigaphoton Inc.
    Inventor: Hirotaka MIYAMOTO
  • Patent number: 10637203
    Abstract: A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: April 28, 2020
    Assignee: Gigaphoton Inc.
    Inventor: Hirotaka Miyamoto
  • Patent number: 10522966
    Abstract: A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element; and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: December 31, 2019
    Assignee: Gigaphoton Inc.
    Inventor: Hirotaka Miyamoto
  • Patent number: 10466414
    Abstract: A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.
    Type: Grant
    Filed: May 15, 2017
    Date of Patent: November 5, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Hirotaka Miyamoto, Osamu Wakabayashi
  • Publication number: 20190181607
    Abstract: A laser apparatus includes first and second wavelength dispersion elements, an optical element, first and second actuators, and a control unit. The first wavelength dispersion element generates wavelength dispersion in a direction orthogonal to an electric discharge direction between a pair of electric discharge electrodes. The second wavelength dispersion element generates wavelength dispersion in a direction parallel to the electric discharge direction. The optical element corrects wavelength dispersion generated by the second wavelength dispersion element. The first actuator drives the first wavelength dispersion element. The second actuator drives the optical element. The control unit controls the first actuator so that the center wavelength of the laser light approaches to a target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 13, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Osamu WAKABAYASHI
  • Publication number: 20190173258
    Abstract: Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 6, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Osamu WAKABAYASHI
  • Patent number: 10205297
    Abstract: A narrow band excimer laser apparatus includes a line narrowing module that narrows the spectral line width of laser light, a nitrogen gas introducing unit, a first valve that restricts the flow of nitrogen gas from the introducing unit into a casing of the module, an exhaust unit that causes gas to flow out from the casing, an exhaust pump for exhausting the gas from the casing, a second valve that restricts the exhausting of gas from the exhaust unit, an atmosphere discharge unit that discharges the gas within the casing into the atmosphere, a third valve that restricts the discharge of gas into the atmosphere, and a control unit that closes the second valve while opening the first and third valves, supplies nitrogen gas into the casing, then closes the third valve while opening the first and second valves, drives the exhaust pump, and causes laser oscillation thereafter.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: February 12, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Hirotaka Miyamoto, Osamu Wakabayashi
  • Publication number: 20190006814
    Abstract: A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.
    Type: Application
    Filed: September 6, 2018
    Publication date: January 3, 2019
    Applicant: Gigaphoton Inc.
    Inventor: Hirotaka MIYAMOTO
  • Publication number: 20180198253
    Abstract: A narrow band excimer laser apparatus includes a line narrowing module that narrows the spectral line width of laser light, a nitrogen gas introducing unit, a first valve that restricts the flow of nitrogen gas from the introducing unit into a casing of the module, an exhaust unit that causes gas to flow out from the casing, an exhaust pump for exhausting the gas from the casing, a second valve that restricts the exhausting of gas from the exhaust unit, an atmosphere discharge unit that discharges the gas within the casing into the atmosphere, a third valve that restricts the discharge of gas into the atmosphere, and a control unit that closes the second valve while opening the first and third valves, supplies nitrogen gas into the casing, then closes the third valve while opening the first and second valves, drives the exhaust pump, and causes laser oscillation thereafter.
    Type: Application
    Filed: March 6, 2018
    Publication date: July 12, 2018
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Osamu WAKABAYASHI
  • Publication number: 20180041000
    Abstract: A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.
    Type: Application
    Filed: October 13, 2017
    Publication date: February 8, 2018
    Applicant: Gigaphoton Inc.
    Inventor: Hirotaka MIYAMOTO
  • Publication number: 20170248758
    Abstract: A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.
    Type: Application
    Filed: May 15, 2017
    Publication date: August 31, 2017
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Osamu WAKABAYASHI
  • Patent number: 8565057
    Abstract: An optical recording medium is provided. The optical recording medium includes a multilayer including an N (N?5) number of interfaces capable of reflecting incident light.
    Type: Grant
    Filed: March 11, 2011
    Date of Patent: October 22, 2013
    Assignee: Sony Corporation
    Inventors: Tetsuhiro Sakamoto, Hirotaka Miyamoto, Jun Nakano, Kouichi Yasuda
  • Patent number: 8395976
    Abstract: An optical disc apparatus can make the focus of an information light beam converged by an objective lens agree with a target track of a target mark layer of an optical disc by appropriately predefining the distance between the focus of a servo light beam and that of the information light beam with regard to the direction of the thickness and a radial direction of the optical disc by means of the optical pickup of the apparatus and then operating for focus control and tracking control of the objective lens so as to make focus of the servo light beam converged by the objective lens agree with a reference track of a reference mark layer.
    Type: Grant
    Filed: November 17, 2008
    Date of Patent: March 12, 2013
    Assignee: Sony Corporation
    Inventors: Kimihiro Saito, Hirotaka Miyamoto, Toshihiro Horigome
  • Patent number: 8369201
    Abstract: There is provided an optical pickup including: an optical-system having an object-lens illuminating a first light for information recording or reproducing on a recording layer as a target and a second light on an optical-recording medium including a reference plane having a reflection-layer and the recording-layer at a layer position different from that of the reference-plane and on which information recording is performed through mark formation, and a focus-aligned-position-adjusting unit adjusting a focus-aligned position of the first light through the object-lens by changing collimation thereof incident to the object-lens; and a focusing-mechanism driving the object-lens in a focusing direction, wherein, when a depth of focus ?/NA2 defined by a wavelength ? of the first light and a numerical aperture NA of the object lens is set to ? and the maximum-surface-blur range is denoted by D, the optical-system is designed so that a use magnification ratio ? satisfies |?|??(D/?).
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: February 5, 2013
    Assignee: Sony Corporation
    Inventors: Kimihiro Saito, Norihiro Tanabe, Hirotaka Miyamoto, Takahiro Miura