Abstract: Provided is a method for moving, in a vacuum chamber carrying therein a fixedly-provided evaporation source, a substrate toward the evaporation source together with a mask closely attached to the substrate surface, and onto the surface substrate, evaporating a material vaporized in the evaporation source through an aperture formed to the mask. In this method of the invention, means for moving the substrate toward the evaporation source is provided with cooling means not to come in contact with but to be in proximity to a surface of the mask on the evaporation source side, and a cooling plate formed with an aperture proximal to the evaporation source is disposed. With such a configuration, the steam of the material coming from the evaporation source is directed to the mask and the substrate through the aperture of the cooling plate.

Abstract: A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.

Abstract: The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.

Abstract: A display device includes a first substrate having a display area with a plurality of pixels on a main surface and a first seal area formed at a periphery of the display area, and a second substrate disposed to cover the main surface of the first substrate, and having a second seal area at a part of the second substrate opposite to the first seal area. At least one driving circuit is arranged outside of the display area on the first substrate. The second substrate has a recessed portion formed at a part of the main surface of the second substrate within the second seal area, and a film coats the recessed portion and/or an outside of the second substrate. A moisture absorbent layer is arranged in the recessed portion so as to be adhered to the recessed portion or the film when the film coats the recessed portion.

Abstract: The present invention relates to a method of manufacturing a transflective liquid crystal display device including a color filter substrate having a plurality of pixels, each including a reflective display part and a transmissive display part, and retardation plates each built in areas on a principal surface of the color filter substrate opposed to a liquid crystal layer, which correspond to the reflective display parts.

Abstract: A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.

Abstract: Provided is a method for moving, in a vacuum chamber carrying therein a fixedly-provided evaporation source, a substrate toward the evaporation source together with a mask closely attached to the substrate surface, and onto the surface substrate, evaporating a material vaporized in the evaporation source through an aperture formed to the mask. In this method of the invention, means for moving the substrate toward the evaporation source is provided with cooling means not to come in contact with but to be in proximity to a surface of the mask on the evaporation source side, and a cooling plate formed with an aperture proximal to the evaporation source is disposed. With such a configuration, the steam of the material coming from the evaporation source is directed to the mask and the substrate through the aperture of the cooling plate.

Abstract: Direct exposure equipment having a multiple heads generally conducts overlapping exposure at an exposure area boundary between the heads. In such a case, if the heads are misaligned, a flaw will occur in a pattern shape at an area that is subject to overlapping exposure. To overcome this, TEGs are disposed for evaluating line width and resistance at an overlapping exposure area between the exposure heads and at a returning exposure area formed when direct exposure equipment having a multi-head configuration exposes a substrate. By examining measured values from these TEGs, a misalignment in the multiple exposure heads is detected.

Abstract: In the present invention, to realize a liquid crystal display device of high-definition transflective IPS system comprising an inner retardation plate (retardation layer) in a reflective display unit, the retardation layer is formed of liquid crystal monomers with acrylates containing a polymerization initiator and either one or both of a triplet quencher and a radical quencher added.

Abstract: The organic electroluminescence display apparatus of the present invention comprises a first and second substrates, the former being coated with banks for separating pixels, a lower electrode, organic light-emitting layer and upper electrode of a transparent material in this order, and the latter being coated with a color filter and electroconductive shadow pattern, wherein the organic light-emitting layer surrounded by the banks for separating pixels faces the color filter, and the first and second substrates face each other in such a way that the upper electrode over the banks for separating pixels is electrically connected to the electroconductive shadow pattern. This structure connects at least one of the upper electrode and electroconductive shadow pattern to a power supply point, to control ununiform emitted light brightness which may result from voltage drop at the upper transparent electrode.

Abstract: A method of manufacturing a transflective liquid crystal display device including a plurality of pixels each having a reflective display part and a transmissive display part, and a color filter substrate including a retardation plate built in an area of a principal surface of each pixel opposed to a liquid crystal layer, which corresponds to the reflective display part, the method including in the following order: (1) a step of forming an underlayer for aligning molecules of the retardation plate; (2) a step of applying a photosetting material of the retardation plate onto the underlayer; (3) a first exposure step of selectively curing a part of the material of the retardation plate, which corresponds to the reflective display part, by light radiation through a mask; and (4) a second exposure step of heating the material of the retardation plate while exposing an entire surface thereof to light to cure the material of the retardation plate.

Abstract: The present invention relates to a method of manufacturing a transflective liquid crystal display device including a color filter substrate having a plurality of pixels, each including a reflective display part and a transmissive display part, and retardation plates each built in areas on a principal surface of the color filter substrate opposed to a liquid crystal layer, which correspond to the reflective display parts.

Abstract: For lasting stable vapor deposition of a material for a long term, the present invention provides the vapor deposition crucible comprising an evaporation chamber defined by a container part of the material and an orifice plate controlling vapor pressure of the material evaporated therein, and a pressure-controlling chamber defined in a space between the orifice plate and a discharge plate through which the material is discharged to the exterior of the vapor deposition crucible. A protrusion extending outwardly from the pressure-controlling chamber and having a second opening on its distal end may be provided on the upper surface of the discharge plate, and a heater may be provided on the side surface of the protrusion to oppose the side surface of the protrusion with an insulation mechanism provided at a position higher than the heater but lower than the second opening.

Abstract: A display device includes a first substrate having a display area with a plurality of pixels on a main surface and a first seal area formed at a periphery of the display area, and a second substrate disposed to cover the main surface of the first substrate, and having a second seal area at a part of the second substrate opposite to the first seal area. At least one driving circuit which drives the plurality of pixels is arranged outside of the display area on the first substrate. The second substrate has a recessed portion formed at a part of the main surface of the second substrate within the second seal area, and a moisture absorbent layer having a light shielding property adheres to the recessed portion and is arranged to cover the display area and the at least one driving circuit.

Abstract: The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.

Abstract: Disclosed is an image display apparatus having a construction such that ultraviolet rays irradiated from a second substrate side are prevented from propagating through a first substrate to reach its display area by providing a picture-frame resin film for shielding ultraviolet rays on that area of the first substrate that is to be sealed to the second substrate with a sealant. Thereby, when the sealant for sealing the substrates is cured by irradiation of ultraviolet rays, photo deterioration of organic materials constituting emitting layered products and semiconductor layers constituting active elements both of which are formed on the display area may be prevented, and a high-reliability and high-performance image display apparatus may be realized.

Abstract: The organic electroluminescence display apparatus of the present invention comprises a first and second substrates, the former being coated with banks for separating pixels, a lower electrode, organic light-emitting layer and upper electrode of a transparent material in this order, and the latter being coated with a color filter and electroconductive shadow pattern, wherein the organic light-emitting layer surrounded by the banks for separating pixels faces the color filter, and the first and second substrates face each other in such a way that the upper electrode over the banks for separating pixels is electrically connected to the electroconductive shadow pattern. This structure connects at least one of the upper electrode and electroconductive shadow pattern to a power supply point, to control ununiform emitted light brightness which may result from voltage drop at the upper transparent electrode.

Abstract: Glass substrates interposed by unhardened thermosetting sealing material is surrounded by two sheets. The space between the sheets is placed in a roughly sealed state and decompressed to produce at least a partial vacuum between the sheets. The sheets serve to press the glass substrates against the sealing material by the pressure difference relative to the atmospheric pressure. One or more heaters spaced apart from the sheets heat the glass substrates and the sealing material, setting the sealing material.

Abstract: The invention provides a high quality liquid crystal panel with low non-uniformity by enveloping a pair of glass substrates sandwiching an uncured thermosetting seal member with heat-resistant metal sheets, bringing the insides of the sheets into a substantially hermetically closed state to decompress the space around the substrates, pressing the glass substrates and the seal member by a pressure difference from the atmospheric pressure in a predetermined space created by the enveloping sheets, heating the sheets, the glass substrates and the seal member with a heater disposed at a position remote from the sheet and curing the seal member, and maintaining the gap between the pair of glass substrates to prevent non-uniformity of the gap between the pair of glass substrates constituting the liquid crystal panel.

Abstract: Disclosed is an image display apparatus having a construction such that ultraviolet rays irradiated from a second substrate side are prevented from propagating through a first substrate to reach its display area by providing a picture-frame resin film for shielding ultraviolet rays on that area of the first substrate that is to be sealed to the second substrate with a sealant. Thereby, when the sealant for sealing the substrates is cured by irradiation of ultraviolet rays, photo deterioration of organic materials constituting emitting layered products and semiconductor layers constituting active elements both of which are formed on the display area may be prevented, and a high-reliability and high-performance image display apparatus may be realized.