Patents by Inventor Hiroyuki Abo
Hiroyuki Abo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110183448Abstract: A liquid composition used to carry out crystal anisotropic etching of a silicon substrate provided with an etching mask formed of a silicon oxide film with the silicon oxide film used as a mask includes cesium hydroxide, an alkaline organic compound, and water.Type: ApplicationFiled: January 26, 2011Publication date: July 28, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Hiroyuki Abo, Taichi Yonemoto, Shuji Koyama, Kenta Furusawa, Keisuke Kishimoto
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Publication number: 20110151598Abstract: A method for manufacturing a substrate for liquid-ejecting heads includes etching a surface of a silicon substrate using a first etchant, with a silicon oxide layer as a mask, to form a depression as a part of a liquid supply port, and subsequently etching at least the silicon oxide layer and the thickness sandwiched between the depression and the etched surface of the silicon substrate with a second etchant to form the liquid supply port.Type: ApplicationFiled: December 20, 2010Publication date: June 23, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Hiroyuki Abo, Keiji Watanabe, Keiji Matsumoto
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Publication number: 20110107598Abstract: A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.Type: ApplicationFiled: January 19, 2011Publication date: May 12, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Noriyasu Ozaki, Junichi Kobayashi, Shuji Koyama, Tadanobu Nagami, Yoshinori Tagawa, Kenji Fujii, Hiroyuki Murayama, Masaki Ohsumi, Jun Yamamuro, Yoshinobu Urayama, Hiroyuki Abo, Takeshi Terada, Masahisa Watanabe, Taichi Yonemoto
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Patent number: 7901045Abstract: The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.Type: GrantFiled: January 30, 2008Date of Patent: March 8, 2011Assignee: Canon Kabushiki KaishaInventors: Kazuya Abe, Kenji Ono, Toshiyasu Sakai, Hiroyuki Abo, Noriyasu Ozaki, Mitsuru Chida
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Patent number: 7891784Abstract: A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.Type: GrantFiled: January 24, 2008Date of Patent: February 22, 2011Assignee: Canon Kabushiki KaishaInventors: Noriyasu Ozaki, Junichi Kobayashi, Shuji Koyama, Tadanobu Nagami, Yoshinori Tagawa, Kenji Fujii, Hiroyuki Murayama, Masaki Ohsumi, Jun Yamamuro, Yoshinobu Urayama, Hiroyuki Abo, Takeshi Terada, Masahisa Watanabe, Taichi Yonemoto
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Publication number: 20100216264Abstract: A method of manufacturing a substrate for a liquid discharge head, the substrate being a silicon substrate having a first surface opposed to a second surface, the method comprising the steps of providing a layer on the second surface of the silicon substrate, wherein the layer has a lower etch rate than silicon when exposed to an etchant of silicon, partially removing the layer so as to expose part of the second surface of the silicon substrate, wherein the exposed part surrounds at least one part of the layer; and wet etching the layer and the exposed part of the second surface of the silicon substrate, using the etchant of silicon, to form a liquid supply port extending from the second surface to the first surface of the silicon substrate.Type: ApplicationFiled: February 22, 2010Publication date: August 26, 2010Applicant: CANON KABUSHIKI KAISHAInventors: Keiji Matsumoto, Shuji Koyama, Hiroyuki Abo, Keiji Watanabe
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Publication number: 20100147793Abstract: The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.Type: ApplicationFiled: December 10, 2009Publication date: June 17, 2010Applicant: CANON KABUSHIKI KAISHAInventors: Tadanobu Nagami, Junichi Kobayashi, Takeshi Terada, Makoto Watanabe, Hiroyuki Abo, Mitsunori Toshishige, Yoshinori Tagawa, Shuji Koyama, Kenji Fujii, Masaki Ohsumi, Jun Yamamuro, Hiroyuki Murayama, Yoshinobu Urayama, Taichi Yonemoto
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Publication number: 20090302502Abstract: Provided is a process of producing a liquid discharge head having a substrate, a passage-forming member, and a patterned layer. The process includes providing a resin layer on a substrate; providing a resist pattern on the resin layer for patterning the resin layer; forming a patterned layer by patterning the resin layer using the resist pattern as a mask; providing a layer for forming a passage pattern having a shape of passage on the resist pattern lying on the patterned layer; forming a passage pattern by patterning the layer for forming a passage pattern; removing the resist pattern; providing a passage-forming member so as to cover the passage pattern and the patterned layer; and removing the passage pattern to give the passage.Type: ApplicationFiled: June 4, 2009Publication date: December 10, 2009Applicant: CANON KABUSHIKI KAISHAInventors: Hiroyuki Abo, Masaki Ohsumi, Toshiyasu Sakai, Noriyasu Ozaki, Mitsuru Chida, Kazuya Abe
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Publication number: 20090065474Abstract: A method for manufacturing a liquid-ejection head substrate including a silicon substrate having a supply port for supplying liquid is provided. The method includes: forming an etching mask layer on a surface of the silicon substrate, the etching mask layer having an opening in a portion corresponding to the supply port; forming a first recess in the surface of the silicon substrate by anisotropically etching the silicon substrate through the opening in the etching mask layer; forming a second recess that extends toward the other surface of the silicon substrate, in a surface of the first recess in the silicon substrate; and forming the supply port by anisotropically etching the silicon substrate from the surface provided with the second recess.Type: ApplicationFiled: September 5, 2008Publication date: March 12, 2009Applicant: CANON KABUSHIKI KAISHAInventors: Mitsuru Chida, Toshiyasu Sakai, Noriyasu Ozaki, Hiroyuki Abo, Kazuya Abe, Kenji Ono
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Publication number: 20080180487Abstract: The present invention provides an ink jet recording head which includes a substrate, an energy generating element which is disposed on the substrate and generates energy for discharging a liquid, an electrode which is disposed on the substrate and is electrically connected to the energy generating element, a passage-forming member which is disposed on the substrate, an adhesion layer which is disposed on the substrate and facilitates adhesion between the passage-forming member and the substrate, and a bump disposed on the electrode. The area of an upper surface of the bump is larger than the area of a lower surface of the bump, the lower surface being located on the substrate side, the upper surface being located opposite the lower surface, and a side face of the bump is covered with the adhesion layer. Thereby, a protective film is formed around the bump.Type: ApplicationFiled: January 30, 2008Publication date: July 31, 2008Applicant: CANON KABUSHIKI KAISHAInventors: Kazuya Abe, Kenji Ono, Toshiyasu Sakai, Hiroyuki Abo, Noriyasu Ozaki, Mitsuru Chida
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Publication number: 20080180486Abstract: A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.Type: ApplicationFiled: January 24, 2008Publication date: July 31, 2008Applicant: CANON KABUSHIKI KAISHAInventors: Noriyasu Ozaki, Junichi Kobayashi, Shuji Koyama, Tadanobu Nagami, Yoshinori Tagawa, Kenji Fujii, Hiroyuki Murayama, Masaki Ohsumi, Jun Yamamuro, Yoshinobu Urayama, Hiroyuki Abo, Takeshi Terada, Masahisa Watanabe, Taichi Yonemoto