Abstract: A work vehicle cooperation system includes: a master traveling tack calculation unit that calculates a traveling track of a master work vehicle (1P) based on its position; a loop traveling detection unit that detects loop traveling in a loop work area (B); a redirection traveling target calculation unit that calculates a redirection traveling start point and a redirection traveling end point (Pc3) of a slave work vehicle (1C) based on a redirection traveling track including a redirection traveling start point (Pp1) and a redirection traveling end point of redirection traveling of the master work vehicle (1P); and a loop work traveling target calculation unit that calculates a target traveling position in loop work traveling of the slave work vehicle (1C) for the redirection traveling end point (Pc3) to a next redirection traveling start point (Pc1).

Abstract: In addition to improving security of data communication between a control device and a mobile terminal, to make it possible to easily make the data communication.

Abstract: Disclosed is a work vehicle coordinating system configured to carry out a ground work by a main work vehicle and an un-manned controlled sub work vehicle that follows up the main work vehicle. This system includes a main-vehicle position detection module, a sub-vehicle position detection module, a main-vehicle traveling path calculation section, a turning detection unit, a work traveling target calculation section, a turn traveling target calculation section, and a steering control section.

Abstract: A working machine is provided with a control device that can make wireless communication with a mobile terminal storing a mobile-use ID code and stores a working machine-use ID code, wherein the control device is provided with: ID code checking means adapted to check the mobile-use ID code obtained by ID code obtaining means and the working machine-use ID code with each other; data communication means adapted, in the case where as a result of the checking by the checking means, matching between the ID codes is established, to allow data communication between the mobile terminal and the control device, and in the case where the matching is not established, not to allow the data communication; and ID code registration means adapted to register the working machine-use ID code in the mobile terminal as the mobile-use ID code.

Abstract: A processing liquid supplying apparatus is arranged to discharge a processing liquid from a discharge port to supply the processing liquid to a processing object, and the processing liquid supplying apparatus includes a first piping, through the interior of which the processing liquid can flow, the interior of the first piping being in communication with the discharge port, and an X-ray irradiating means irradiating X-rays onto the processing liquid present inside the first piping. The first piping has an opening in its pipe wall and the opening is closed by a window member formed using a material that can transmit the X-rays, and the X-ray irradiating means irradiates the X-rays onto the processing liquid present inside the first piping via the window member.

Abstract: A substrate processing apparatus includes a substrate holding unit, an injection unit that injects droplets of a processing liquid from a plurality of injection ports respectively toward a plurality of collision positions on the substrate, and a liquid film forming unit. The liquid film forming unit discharges a protective liquid from a plurality of discharge ports toward a plurality of liquid contact positions that respectively cover different collision positions. The plurality of injection ports and the plurality of discharge ports may be formed in a nozzle. A nozzle moving unit may be provided, to move the nozzle along the substrate.

Abstract: A substrate processing apparatus has a cup part for receiving processing liquid such as pure water which is splashed from a substrate. The cup part is formed of electrical insulation material or semiconductor material. Hydrophilic treatment may be performed on an outer annular surface of the cup part and water may be held on the outer annular surface of the cup part while processing the substrate. With the disclosed apparatus, charged potential of the cup part generated by splashing of pure water can be suppressed, without greatly increasing the manufacturing cost of the substrate processing apparatus. As a result, it is possible to prevent electric discharge from occurring on the substrate due to induction charging of the substrate, in application of the processing liquid onto the substrate.

Abstract: A substrate processing apparatus includes a first processing chamber and a second processing chamber, a first substrate holding unit that holds a substrate in the first processing chamber, a chemical solution supply unit that supplies a chemical solution containing an etching component and a thickening agent to the substrate held by the first substrate holding unit, a substrate transfer unit that transfers the substrate from the first processing chamber to the second processing chamber in a state in which the chemical solution is held on the substrate, and a second substrate holding unit that holds a plurality of substrates on each of which the chemical solution is held in the second processing chamber.

Abstract: Disclosed is a work vehicle coordinating system configured to carry out a ground work by a main work vehicle and an un-manned controlled sub work vehicle that follows up the main work vehicle. This system includes a main-vehicle position detection module, a sub-vehicle position detection module, a main-vehicle traveling path calculation section, a turning detection unit, a work traveling target calculation section, a turn traveling target calculation section, and a steering control section.

Abstract: A substrate processing apparatus has a cup part for receiving processing liquid which is applied from a processing liquid applying part and is splashed from a substrate, and the cup part is formed of electrical insulation material. Hydrophilic treatment is performed on an outer annular surface of the cup part and water is held on the outer annular surface of the cup part while processing the substrate. With this structure, charged potential of the cup part generated in splashing of pure water can be suppressed by the water held on the outer annular surface, without greatly increasing the manufacturing cost of the substrate processing apparatus by forming the cup part with special conductive material. As a result, it is possible to prevent electric discharge from occurring on the substrate due to induction charging of the substrate, in application of the processing liquid onto the substrate.

Abstract: A lens unit (LU) holding at least two lenses (4, 5) in a lens frame (1) adjacently in the optical axis direction and provided with positioning protrusions (2c, 2d) formed in correspondence with each of the two lenses (4, 5) in at least three separate locations in the peripheral direction of the lens frame (1), protruding from the inner surface of the lens frame (1) and contacting a peripheral surface of a corresponding lens to position the corresponding lens relative to the lens frame (1), an adhesive filling space (GSP1) formed between the peripheral surface of each of the two lenses (4, 5) and the inner surface of the lens frame (1) in overlap with the two lenses (4, 5), and an adhesive injection hole (1c) formed in the lens frame (1) in communication with the adhesive filling space (GSP1).

Abstract: The examination schedule memory unit stores an examination schedule including the starting time and the ending time of each examination. A cleaning capacity memory unit stores cleaning-capacity information that specifies the cleaning capacity of cleaning apparatuses that clean a scope used for the examination. A cleaning schedule generation unit generates a cleaning schedule for cleaning a used scope produced at the end of each examination with cleaning apparatuses having a cleaning capacity required by the cleaning-capacity information stored in the cleaning capacity memory unit. The scope shortage determination unit determines whether or not there will be a shortage of scopes to be used for each examination in accordance with both the examination starting time specified by the above examination schedule and the cleaning ending time specified by the cleaning schedule.

Abstract: A substrate processing apparatus includes a first processing chamber and a second processing chamber, a first substrate holding unit that holds a substrate in the first processing chamber, a chemical solution supply unit that supplies a chemical solution containing an etching component and a thickening agent to the substrate held by the first substrate holding unit, a substrate transfer unit that transfers the substrate from the first processing chamber to the second processing chamber in a state in which the chemical solution is held on the substrate, and a second substrate holding unit that holds a plurality of substrates on each of which the chemical solution is held in the second processing chamber.

Abstract: A substrate processing apparatus which holds and rotates a substrate substantially horizontally; having a control unit which controls a rinsing liquid supply mechanism for supplying a rinsing liquid onto the substrate; a gas knife mechanism that sprays gas onto the substrate to form a gas spraying zone and scans the entire substrate without rotating the substrate; a rinsing liquid mechanism for supplying a rinsing liquid onto the substrate at its area downstream from the gas spraying zone; and a drying unit for drying the substrate by rotating the substrate.

Abstract: A substrate treating apparatus includes a circulating line having a treating tank for storing a phosphoric acid aqueous solution, a circulating pump for feeding the phosphoric acid aqueous solution, a heater for circulation for heating the phosphoric acid aqueous solution, a filter for filtering the phosphoric acid aqueous solution, the circulating line causing the phosphoric acid aqueous solution discharged from the treating tank to flow in order of the circulating pump, the heater for circulation and the filter, and returning the phosphoric acid aqueous solution from the filter to the treating tank. The apparatus also includes a branch pipe branching from the circulating line between the heater for circulation and the filter for extracting the phosphoric acid aqueous solution from the circulating line, and a concentration measuring station connected to the branch pipe for measuring silicon concentration in the phosphoric acid aqueous solution by potentiometry.

Abstract: A substrate processing method comprising: holding a substrate substantially horizontally by a rotatable substrate holding mechanism; supplying a rinsing liquid onto the top of the substrate held by the substrate holding mechanism at the substrate holding step; after the rinsing liquid supply step, spraying a gas onto the top of the substrate held by the substrate holding mechanism, by a gas knife mechanism, to form a gas spraying zone on the substrate top, and unidirectionally scanning the substrate top in its entirety by this gas spraying zone, without rotating the substrate; replenishing the rinsing liquid by supplying, in parallel to the gas knife spraying step, a rinsing liquid onto the substrate top at its area downstream in the gas-spraying-zone scanning direction rather than the gas spraying zone formed by the gas knife mechanism; and drying the substrate surface after the gas knife spraying step and the rinsing liquid replenishing step.

Abstract: A working machine is provided with a control device that can make wireless communication with a mobile terminal storing a mobile-use ID code and stores a working machine-use ID code, wherein the control device is provided with: ID code checking means adapted to check the mobile-use ID code obtained by ID code obtaining means and the working machine-use ID code with each other; data communication means adapted, in the case where as a result of the checking by the checking means, matching between the ID codes is established, to allow data communication between the mobile terminal and the control device, and in the case where the matching is not established, not to allow the data communication; and ID code registration means adapted to register the working machine-use ID code in the mobile terminal as the mobile-use ID code.

Abstract: A recording unit holds a plurality of examination data including the examination date of a performed examination. A search unit extracts examination data matching a set condition, of the plurality of examination data held in the recording unit. An output unit outputs a search result by the search unit. A first narrowing unit extracts examination data in which the examination date is included within a designated first period. A reference data determination unit classifies the examination data extracted by the first narrowing unit by an examinee and determines, for every examinee, one piece of the examination data to be a reference in accordance with a predetermined rule.

Abstract: A scheduling method suitable for a single-substrate type substrate treating apparatus is provided. In the scheduling method, a controller provided in the substrate treating apparatus prepares schedule defining performances of the substrate treating apparatus having a single-substrate type treating unit in a time sequential order. The method comprises the steps of: a step for preparing a plurality of tentative timetables for a plurality of respective substrates, each of the tentative timetables combining a plurality of blocks in a time sequential order, each of the blocks defining a treatment content for one of the substrates; and a scheduling step for preparing a total schedule by acquiring the blocks from the plurality of tentative timetables to dispose the acquired blocks in a time sequential order.

Abstract: A substrate processing apparatus includes a substrate holding unit that holds a substrate, an injection unit that injects droplets of a processing liquid from a plurality of injection ports respectively toward a plurality of collision positions within a principal surface of the substrate held by the substrate holding unit, and a liquid film forming unit. The liquid film forming unit discharges a protective liquid from a plurality of discharge ports respectively toward a plurality of liquid contact positions within the principal surface of the substrate held by the substrate holding unit to form a plurality of liquid films of the protective liquid that respectively cover different collision positions.