Patents by Inventor Hiroyuki Iwakura
Hiroyuki Iwakura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11966210Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: GrantFiled: February 25, 2020Date of Patent: April 23, 2024Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
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Patent number: 11782425Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare the first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.Type: GrantFiled: March 3, 2020Date of Patent: October 10, 2023Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Kayoko Yashiki, Takayuki Kawagishi, Hiroyuki Iwakura
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Patent number: 11237538Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: GrantFiled: March 24, 2017Date of Patent: February 1, 2022Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
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Publication number: 20220019191Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: September 29, 2021Publication date: January 20, 2022Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Patent number: 11086304Abstract: A substrate processing apparatus includes an operating unit for transmitting apparatus data to a memory, the apparatus data being required while a recipe for processing a substrate is executed; and a data matching unit for comparing the apparatus data stored in the memory. When an error occurs in the substrate processing apparatus, the operating unit transmits data representing the error to the data matching unit. The data matching unit includes: a selection unit for selecting first apparatus data which was acquired when the recipe was executed without an occurrence of the error, and stored in the memory; an acquisition unit for acquiring first and second apparatus data from the memory, the first apparatus data being acquired when an error did not occur and the second apparatus data being acquired when an error occurred; and a calculation unit for comparing the first and second apparatus data and calculating a difference therebetween.Type: GrantFiled: March 29, 2017Date of Patent: August 10, 2021Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki Kawagishi, Hidemoto Hayashihara, Kayoko Yashiki, Hiroyuki Iwakura
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Patent number: 11052790Abstract: A vehicle seat structure includes: a first side frame (11a) extending in a front-rear direction along one side portion of a seat cushion (4); a second side frame (11b) extending in the front-rear direction along the other side portion of the seat cushion (4); posture changing mechanisms (6, 7) mounted on the first side frame (11a) and capable of changing the posture of the seat cushion (4), and reinforcement members (R1, R2) provided at a portion of the second side frame (11b) where the reinforcement members (R1, R2) overlap the posture changing mechanisms (6, 7) in a side view.Type: GrantFiled: February 28, 2019Date of Patent: July 6, 2021Assignee: MAZDA MOTOR CORPORATIONInventors: Takashi Suzuki, Koji Nonowaki, Shin Sakai, Shigeru Kobayashi, Hiroyuki Iwakura
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Patent number: 10937676Abstract: There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.Type: GrantFiled: September 28, 2018Date of Patent: March 2, 2021Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki Kawagishi, Kayoko Yashiki, Hiroyuki Iwakura
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Publication number: 20200384895Abstract: A vehicle seat structure includes: a first side frame (11a) extending in a front-rear direction along one side portion of a seat cushion (4); a second side frame (11b) extending in the front-rear direction along the other side portion of the seat cushion (4); posture changing mechanisms (6, 7) mounted on the first side frame (11a) and capable of changing the posture of the seat cushion (4), and reinforcement members (R1, R2) provided at a portion of the second side frame (11b) where the reinforcement members (R1, R2) overlap the posture changing mechanisms (6, 7) in a side view.Type: ApplicationFiled: February 28, 2019Publication date: December 10, 2020Applicant: MAZDA MOTOR CORPORATIONInventors: Takashi SUZUKI, Koji NONOWAKI, Shin SAKAI, Shigeru KOBAYASHI, Hiroyuki IWAKURA
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Patent number: 10860005Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.Type: GrantFiled: September 19, 2017Date of Patent: December 8, 2020Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide Asai, Hiroyuki Iwakura, Hidemoto Hayashihara, Mitsuru Fukuda, Kazuyoshi Yamamoto, Kayoko Yashiki, Takayuki Kawagishi
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Publication number: 20200201305Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare he first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.Type: ApplicationFiled: March 3, 2020Publication date: June 25, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuyoshi YAMAMOTO, Kazuhide ASAI, Hidemoto HAYASHIHARA, Mitsuru FUKUDA, Kayoko YASHIKI, Takayuki KAWAGISHI, Hiroyuki IWAKURA
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Publication number: 20200192324Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: February 25, 2020Publication date: June 18, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Patent number: 10452856Abstract: Described herein is a technique that may prevent unauthorized personnel from editing files without permission. A processing apparatus may include: an operating unit configured to display an operation screen for editing an integrated file containing: non-encrypted data corresponding to an item file; a drawing file; and encrypted data obtained by encrypting the item file; a memory unit configured to store the integrated file; and an arithmetic unit configured to: (a) compare the item file with data obtained by decrypting the encrypted data; and (b) combine and display the item file and the drawing file on the operation screen according to a result of comparison performed in (a).Type: GrantFiled: March 16, 2017Date of Patent: October 22, 2019Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Ichiro Nunomura, Satoru Takahata, Hiroyuki Iwakura
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Publication number: 20190035657Abstract: There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.Type: ApplicationFiled: September 28, 2018Publication date: January 31, 2019Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Hidemoto HAYASHIHARA, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Kayoko YASHIKI, Hiroyuki IWAKURA
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Publication number: 20180120822Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.Type: ApplicationFiled: September 19, 2017Publication date: May 3, 2018Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Hiroyuki IWAKURA, Hidemoto HAYASHIHARA, Mitsuru FUKUDA, Kazuyoshi YAMAMOTO, Kayoko YASHIKI, Takayuki KAWAGISHI
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Publication number: 20170300044Abstract: A substrate processing apparatus includes an operating unit for transmitting apparatus data to a memory, the apparatus data being required while a recipe for processing a substrate is executed; and a data matching unit for comparing the apparatus data stored in the memory. When an error occurs in the substrate processing apparatus, the operating unit transmits data representing the error to the data matching unit. The data matching unit includes: a selection unit for selecting first apparatus data which was acquired when the recipe was executed without an occurrence of the error, and stored in the memory; an acquisition unit for acquiring first and second apparatus data from the memory, the first apparatus data being acquired when an error did not occur and the second apparatus data being acquired when an error occurred; and a calculation unit for comparing the first and second apparatus data and calculating a difference therebetween.Type: ApplicationFiled: March 29, 2017Publication date: October 19, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Hidemoto HAYASHIHARA, Kayoko YASHIKI, Hiroyuki IWAKURA
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Publication number: 20170285613Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: March 24, 2017Publication date: October 5, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
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Patent number: 9720407Abstract: A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.Type: GrantFiled: June 19, 2014Date of Patent: August 1, 2017Assignee: Hitachi Kokusai Electric Inc.Inventors: Yoshitaka Koyama, Hiroyuki Iwakura
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Publication number: 20170193243Abstract: Described herein is a technique that may prevent unauthorized personnel from editing files without permission. A processing apparatus may include: an operating unit configured to display an operation screen for editing an integrated file containing: non-encrypted data corresponding to an item file; a drawing file; and encrypted data obtained by encrypting the item file; a memory unit configured to store the integrated file; and an arithmetic unit configured to: (a) compare the item file with data obtained by decrypting the encrypted data; and (b) combine and display the item file and the drawing file on the operation screen according to a result of comparison performed in (a).Type: ApplicationFiled: March 16, 2017Publication date: July 6, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Ichiro NUMOMURA, Satoru TAKAHATA, Hiroyuki IWAKURA
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Patent number: 9400794Abstract: There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.Type: GrantFiled: July 17, 2013Date of Patent: July 26, 2016Assignee: Hitachi Kokusai Electric Inc.Inventors: Kazuhide Asai, Osamu Ueda, Hiroyuki Iwakura
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Patent number: 9104196Abstract: There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.Type: GrantFiled: February 8, 2011Date of Patent: August 11, 2015Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Yoshitaka Koyama, Hiroyuki Iwakura, Yasuhiro Joho