Abstract: A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.

Abstract: An information managing method for managing information based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, the information managing method comprising: storing the apparatus information of the substrate processing apparatus at a transmission time of the electronic message in a first apparatus information storage unit; comparing the event information with a condition for accumulating the apparatus information when the electronic message is transmitted; and accumulating the apparatus information in a second apparatus information storage unit by associating the apparatus information with a time stamp of a generation of the event information when the condition is satisfied.

Abstract: There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.

Abstract: There are provided at least one or more of substrate processing apparatuses that process a substrate, and a group management device connected to each substrate processing apparatus, so that the group management device monitors an operation state of the substrate processing apparatus, thereby grasping a timing of updating a program of the substrate processing apparatus, and when the timing arrives, updates the program.

Abstract: A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.

Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.

Abstract: A substrate processing system capable of making it easy to set an operation authority in a plurality of substrate processing apparatuses and a management device is provided. In a substrate processing system including a plurality of substrate processing apparatuses for executing a process on a wafer, a management device connected to the plurality of substrate processing apparatuses via a communication line, the management device has a display screen for setting an operation authority to each of the management device and the plurality of substrate processing apparatuses capable of communicating with the management device for each user.

Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.

Abstract: There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.

Abstract: An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.

Abstract: A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for identifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.

Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.

Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.

Abstract: A substrate processing system capable of making it easy to set an operation authority in a plurality of substrate processing apparatuses and a management device is provided. In a substrate processing system including a plurality of substrate processing apparatuses for executing a process on a wafer, a management device connected to the plurality of substrate processing apparatuses via a communication line, the management device has a display screen for setting an operation authority to each of the management device and the plurality of substrate processing apparatuses capable of communicating with the management device for each user.

Abstract: An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.

Abstract: A method and system for writing a data image in the main memory of a computer to a secondary storage device minimizes delay in performing a required reboot. Prior to the reboot, a portion of the physical memory is copied either to a reserved memory space or to secondary storage, or one portion of memory may be copied to a reserved memory space and another portion may be copied to secondary storage. After reboot, memory usage is initially limited to the portion of memory that was copied prior to the reboot. The remaining physical memory is incrementally written to the storage device and dynamically added as memory for use by the operating system. If the reboot is due to a crash or other problem, completion of a full memory dump may be cancelled if, upon scanning memory, it is determined that the problem is a known issue.

Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.

Abstract: There are provided at least one or more of substrate processing apparatuses that process a substrate, and a group management device connected to each substrate processing apparatus, so that the group management device monitors an operation state of the substrate processing apparatus, thereby grasping a timing of updating a program of the substrate processing apparatus, and when the timing arrives, updates the program.

Abstract: A method and system for writing a data image in the main memory of a computer to a secondary storage device minimizes delay in performing a required reboot. Prior to the reboot, a portion of the physical memory is copied either to a reserved memory space or to secondary storage, or one portion of memory may be copied to a reserved memory space and another portion may be copied to secondary storage. After reboot, memory usage is initially limited to the portion of memory that was copied prior to the reboot. The remaining physical memory is incrementally written to the storage device and dynamically added as memory for use by the operating system. If the reboot is due to a crash or other problem, completion of a full memory dump may be cancelled if, upon scanning memory, it is determined that the problem is a known issue.