Abstract: A cantilever for an atomic force microscope, has a probe formed by a structure at least partially including a linear needle crystal. A method of manufacturing the cantilever comprises the steps of applying adhesive to a distal end portion of a cantilever body and placing on the adhesive, in a state where the cantilever body is held substantially horizontally, a structure having the shape of at least four needle crystals combined with one another so as to bond the structure to the distal end portion of the cantilever body.

Abstract: A method of making a cantilever stylus for an atomic force microscope comprises forming a film on a surface of a substrate, the film comprising a stylus material that is different from the material of the substrate. A resist thin film of a material different from the stylus material is formed on the surface of the stylus material so as to have a tip. The stylus material is then etched with an isotropic etching technique to a depth of etching greater than the radius of curvature of the tip of the resist film so that the stylus material, having two opposite principal surfaces, has a tip formed on one of the principal surfaces with a radius of curvature less than 0.1 .mu.m which protrudes beyond a tip of the other principal surface. At least the resist thin film and the substrate at the tips of the principal surfaces of the stylus material are then removed.

Abstract: A field-emission type switching device includes a substrate formed with a recess having a straight edge and serrated edge opposite to the straight edge. A gate electrode is formed at the bottom of the recess. An emitter electrode is provided over the substrate and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess so as to provide an emitter overhanging portion overhanging the recess. Similarly, a collector electrode is provided over the substrate and formed with a straight edge which is slightly off alignment with the straight edge of the recess so as to provide a collector overhanging portion overhanging the recess. The emitter and collector electrodes are disposed in one plane and the gate electrode is disposed in another plane below the one plane.

Abstract: An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 .mu.m and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).

Abstract: A field-emission type switching device includes a substrate formed with a recess having a straight edge and serrated edge opposite to the straight edge. A gate electrode is formed at the bottom of the recess. An emitter electrode is provided over the substrate and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess so as to provide an emitter overhanging portion overhanging the recess. Similarly, a collector electrode is provided over the substrate means and formed with a straight edge which is slightly off alignment with the straight edge of the recess so as to provide a collector overhanging portion overhanging the recess. The emitter and collector electrodes are disposed in one plate and the gate electrode is disposed in another plane below the one plane.

Abstract: A cantilever stylus suited for use in an atomic force microscope is made in the following processes: forming a first film on a substrate; forming a second film of metallic material on an external surface of the first film; forming a photoresist film on an external surface of the second film by making use of a photolithography technique; performing etching with respect to the second film with only a portion thereof covered with the photoresist film left on the first film; and further performing etching with respect to the first film with the second film being used as a resist film so that the first film may be configured into a cantilever stylus.

Abstract: A planar type cold cathode for generating electron field emission which has a planar cold cathode having triangular convex portions and an anode confronting the triangular convex portions wherein each convex portion has a sharp tip end having a radius of curvature of 0.1 .mu.m or less. Also, a manufacturing method therefor is disclosed. In this method, sharp tip ends of the cold cathode are formed by using a normal etching technique.