Abstract: A projection exposure apparatus has an illumination optical system 3 for illuminating a mask formed with a pattern with beams of radiation, and a projection optical system for forming an image of the pattern on a workpiece on the basis of radiation from the mask. The illumination optical system supplies an illumination radiation having a center wavelength of 180 nm or smaller, and the projection optical system includes at least one concave mirror, fifteen or less pieces of refracting lenses, and four or more aspherical surfaces.

Abstract: For producing a semiconductor module, an electrically insulating layer and an electrically conductive layer are formed on a Nickel-base metal film over a metallic surface, the electrically conductive layer is connected electrically to an electric element through an electrically conductive joint arranged between the electric element and the electrically conductive layer, at least a part of the electric element and at least a part of the electrically conductive joint are covered with a molding resin, and subsequently, the Nickel-base metal film is removed from the metallic surface so that a combination of the Nickel-base metal film, the electrically insulating layer, the electrically conductive layer, the electrically conductive joint and the molding resin is separated from the metallic surface.

Abstract: For producing a semiconductor module, an electrically insulating layer and an electrically conductive layer are formed on a Nickel-base metal film over a metallic surface, the electrically conductive layer is connected electrically to an electric element through an electrically conductive joint arranged between the electric element and the electrically conductive layer, at least a part of the electric element and at least a part of the electrically conductive joint are covered with a molding resin, and subsequently, the Nickel-base metal film is removed from the metallic surface so that a combination of the Nickel-base metal film, the electrically insulating layer, the electrically conductive layer, the electrically conductive joint and the molding resin is separated from the metallic surface.

Abstract: Second and third clutches are axially aligned so that the back side of the second clutch and the front side of the third clutch oppose each other, and a first clutch is positioned radially inward of the second and third clutches. Further, a clutch drum is extended so as to be used in common by the second and third clutches, the second clutch is engaged and disengaged from the axial front side by a second piston of a second oil pressure actuator, and the third clutch is engaged and disengaged from the axial rear side by a third piston of a third oil pressure actuator. The first through third clutches are positioned in a compact manner and can be independently operated.

Abstract: For producing a semiconductor module, an electrically insulating layer and an electrically conductive layer are formed on a Nickel-base metal film over a metallic surface, the electrically conductive layer is connected electrically to an electric element through an electrically conductive joint arranged between the electric element and the electrically conductive layer, at least a part of the electric element and at least a part of the electrically conductive joint are covered with a molding resin, and subsequently, the Nickel-base metal film is removed from the metallic surface so that a combination of the Nickel-base metal film, the electrically insulating layer, the electrically conductive layer, the electrically conductive joint and the molding resin is separated from the metallic surface.

Abstract: In a frameless type automotive sunroof system, a pair of depending pieces extend from either side end portion of a rear drain channel member, and these depending pieces are each fitted into an opening formed in a rear end portion of a side frame member via a connecting member to attach the rear drain channel member across the side frame members. The connecting member adapted to be fitted in an opening formed in one of the side frame members, and having an upper slot adapted to receive the depending piece, and the connecting member is provided with a first snap fit arrangement for engagement with the side frame member opening, and a second snap fit arrangement for engagement with the depending piece. Thus, the attachment of the rear drain channel member to the side frame members can be accomplished simply by pushing the depending pieces into the openings in the corresponding side frame members with the connecting members interposed between them.

Abstract: A tape high-speed travelling device comprises a pinch roller allowing a tape to travel at a speed of more than 5m/sec. by elastically pressing the tape against a capstan, a device for moving the pinch roller toward the capstan, and a stop for limiting the movement of the pinch roller toward the capstan to a prescribed range to prevent occurrence of vibrations such as forced vibrations due to the rotation of the pinch roller.

Abstract: A video tape recorder includes a capstan, a stationary magnetic head, a pair of rubber pinch rollers disposed on opposite sides of the capstan, and a pair of head-facing guides whereby to travel an endless tape at a high speed. Each pinch roller and head facing guide are mounted on a supporting member which may be rocked by a wire with a coil spring against the force of a tension spring so that the pinch roller and head facing guide can press the tape against the capstan and magnetic head. Such a state may be maintained by abutting the support member on a stop.

Abstract: A magnetic recording and reproducing apparatus comprises a drive mechanism for running an endless magnetic tape of less than 300 m at a higher speed than 5 meters per second; a restricting member interlocking with the roll of said rapidly moving endless magnetic tape wound on a reel to apply a force against a centrifugal force generated on the tape roll so as to prevent it from being shaken unnecessarily; and a stationary magnetic head so arranged that the head is stational in a tape running direction and intermittently movable in a tape width direction to record frequency-modulated video signals in, and reproducing said signals from, the magnetic tape.

Abstract: An endless tape traveling device includes a substrate and a tape roll loaded stationary reel secured to the substrate. An endless tape is delivered from the innermost periphery of tape roll, through a slit provided across the width of the reel, toward the interior of the reel and, after running at high speed through a tape traveling path, wound around the the outer periphery of the tape roll.

Abstract: An endless tape-running apparatus comprises guide means for guiding an endless tape taken up on a reel, starting with the innermost periphery of the tape roll on the reel and again taking up the running tape on the outermost periphery of the tape roll, drive means for running the tape along said guide means at a higher speed than 5 meters per second, and a restricting means for preventing the endless tape roll rotated by said drive means from having its diameter broadened due to a great centrifugal force being applied to the endless tape roll by said rapid rotation.