Patents by Inventor Hisashi Namba

Hisashi Namba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus and device fabrication method
    Publication number: 20040256574
    Abstract: In order to improve a responsiveness of the radiation cooling and to switch a cooling position, an exposure apparatus for exposing an object includes a cooling mechanism for radiation-cooling the object, and a regulator for regulating a radiant heat transfer amount between said cooling mechanism and the object.
    Type: Application
    Filed: June 18, 2004
    Publication date: December 23, 2004
    Inventor: Hisashi Namba
  • Mirror holding method and optical apparatus
    Publication number: 20040228018
    Abstract: This invention relates to a mirror holding method, wherein a symmetry axis of an illuminating area corresponds with that of a mirror holder, and a center of the illuminating area in a mirror differs from a centroid of the mirror.
    Type: Application
    Filed: May 12, 2004
    Publication date: November 18, 2004
    Inventors: Hisashi Namba, Eiji Sakamoto