Abstract: According to one embodiment, an oxide semiconductor includes indium (In), gallium (Ga), and silicon (Si). A composition ratio of Si to In (Si/In) in the oxide semiconductor is larger than 0.2, and a composition ratio of Si to Ga (Si/Ga) in the oxide semiconductor is larger than 0.2.

Abstract: According to one embodiment, an oxide semiconductor includes indium (In), gallium (Ga), and silicon (Si). A composition ratio of Si to In (Si/In) in the oxide semiconductor is larger than 0.2, and a composition ratio of Si to Ga (Si/Ga) in the oxide semiconductor is larger than 0.2.

Abstract: A thin film transistor includes semiconductor layer, source electrode, and drain electrode. The semiconductor layer includes first to fifth regions. The third region is provided between the first and second regions. The first region is disposed between the fourth and third regions. The second region is disposed between the fifth and third regions. The semiconductor layer includes an oxide. The source electrode is connected to the first region. The drain electrode is connected to the second region. First thickness of the first region along a second direction is thinner than third thickness along the second direction of each of the third to fifth regions. The second direction crosses a first direction and connects the first region and the source electrode. The first direction connects the first and second regions. Second thickness of the second region along the second direction is thinner than the third thickness.

Abstract: According to one embodiment, a solid-state imaging device includes a plurality of photoelectric conversion elements, a field effect transistor, a trench, and a P-type impurity diffusion region. The plurality of photoelectric conversion elements is two-dimensionally arranged in a semiconductor layer. The field effect transistor includes N-type source and drain on a surface side of the semiconductor layer. The trench penetrates through a surface and a rear surface of the semiconductor layer and surrounds each of the photoelectric conversion elements. The width of the trench is enlarged from the surface of the semiconductor layer toward a position at a predetermined depth, and is not enlarged at a position deeper than the position at the predetermined depth. The P-type impurity diffusion region is arranged in a side surface of the trench.

Abstract: A semiconductor device according to an embodiment includes a gate electrode, a first dielectric film, an oxide semiconductor film, a second dielectric film, a source electrode and a drain electrode. The first dielectric film is placed above the gate electrode. The oxide semiconductor film is placed above the first dielectric film. The oxide semiconductor film is formed to have a film thickness in a first contact region in contact with the source electrode and a second contact region in contact with the drain electrode larger than a film thickness in a channel region of the oxide semiconductor film so that a film portion of the first contact region projects toward the source electrode side and a film portion of the second contact region projects toward the drain electrode side.

Abstract: A semiconductor device according to an embodiment, includes a gate electrode, a first dielectric film, a first oxide semiconductor film, a second dielectric film, a source electrode, a source wire, a drain electrode, and a drain wire. The source wire is arranged on the second dielectric film, and connected to the source electrode. The drain wire is arranged on the second dielectric film, and connected to the drain electrode. At least one of the source wire and the drain wire includes a fringe portion sticking out above a channel region. A barrier film that suppresses intrusion of hydrogen is arranged being in contact with at least one of an upper surface and a lower surface of the fringe portion. A region where the barrier film is not formed is included above the channel region.

Abstract: A semiconductor device according to an embodiment, includes a source electrode, a drain electrode arranged apart from the source electrode, an oxide semiconductor film, a gate dielectric film, and a gate electrode. The oxide semiconductor film is arranged below the source electrode and the drain electrode to connect the source electrode and the drain electrode. The gate dielectric film is formed below the oxide semiconductor film such that a thickness below at least one of the source electrode and the drain electrode is made thinner than a thickness below a channel region of the oxide semiconductor film between the source electrode and the drain electrode. The gate electrode is arranged below the gate dielectric film and formed in a position where one of portions of the gate electrode overlaps with the source electrode and another one of the portions of the gate electrode overlaps with the drain electrode.

Abstract: A semiconductor device according to an embodiment includes a gate electrode, a first dielectric film, an oxide semiconductor film, a second dielectric film, a source electrode and a drain electrode. The first dielectric film is placed above the gate electrode. The oxide semiconductor film is placed above the first dielectric film. The oxide semiconductor film is formed to have a film thickness in a first contact region in contact with the source electrode and a second contact region in contact with the drain electrode larger than a film thickness in a channel region of the oxide semiconductor film so that a film portion of the first contact region projects toward the source electrode side and a film portion of the second contact region projects toward the drain electrode side.

Abstract: A semiconductor device according to an embodiment, includes a source electrode, a drain electrode arranged apart from the source electrode, an oxide semiconductor film, a gate dielectric film, and a gate electrode. The oxide semiconductor film is arranged below the source electrode and the drain electrode to connect the source electrode and the drain electrode. The gate dielectric film is formed below the oxide semiconductor film such that a thickness below at least one of the source electrode and the drain electrode is made thinner than a thickness below a channel region of the oxide semiconductor film between the source electrode and the drain electrode. The gate electrode is arranged below the gate dielectric film and formed in a position where one of portions of the gate electrode overlaps with the source electrode and another one of the portions of the gate electrode overlaps with the drain electrode.

Abstract: Certain embodiments provide a solid-state imaging device including: a semiconductor substrate of a first conductivity type having a first face and a second face that is the opposite side from the first face; a plurality of pixels provided on the first face of the semiconductor substrate, each of the pixels including a semiconductor region of a second conductivity type that converts incident light into signal charges, and stores the signal charges; a readout circuit provided on the second face of the semiconductor substrate to read the signal charges stored in the pixels; an ultrafine metal structure placed at intervals on a face on a side of the semiconductor region, the light being incident on the face; and an insulating layer provided between the ultrafine metal structure and the semiconductor region.

Abstract: In general, according to one embodiment, a semiconductor device includes a first electrode, an oxide semiconductor film, an insulating film, a second electrode, a third electrode. The oxide semiconductor film is configured together with a first region, a second region, a third region, a fourth region, and a fifth region in one direction. The insulating film is provided between the first electrode and the oxide semiconductor film. The second electrode is provided on the second region and contacts the second region with an entire upper face of the second region as a contact face. The third electrode is provided on the fourth region and contacts the fourth region with an entire upper face of the fourth region as a contact face. The oxygen concentrations in the second region and in the fourth region are less than the oxygen concentration in the third region.

Abstract: In general, according to one embodiment, a semiconductor device includes a first electrode, an oxide semiconductor film, an insulating film, a first protective film, second and third electrodes. The oxide semiconductor film is provided on the first electrode. The oxide semiconductor film includes a first face on the first electrodes side and a second face on a side opposite to the first face. The insulating film is provided between the first electrode and the oxide semiconductor film. The first protective film includes a first film provided between the insulating film and the first face and a second film provided on the second face. The first protective film suppresses substances including hydrogen from being introduced from an outer side of the oxide semiconductor film to an inner side of the oxide semiconductor film. The second electrode and the third electrode are electrically connected to the oxide semiconductor film.

Abstract: According to one embodiment, there is provided a solid-state image sensing device including a photodiode in which a semiconductor region of a first conductivity type formed on a substrate and a semiconductor region of a second conductivity type which is different from the first conductivity type is made as a PN junction. The semiconductor region of the first conductivity type has a first semiconductor region and a plurality of second semiconductor regions. Either of the first semiconductor region and each of the second semiconductor regions is formed by a material containing Si as a main component. The other of the first semiconductor region and each of the second semiconductor regions is formed by a material containing Si1-xGex (0<x?1) as a main component. Each of the plurality of second semiconductor regions is provided in a shape of an island over the first semiconductor region.

Abstract: Certain embodiments provide a solid-state imaging device including: a semiconductor substrate of a first conductivity type having a first face and a second face that is the opposite side from the first face; a plurality of pixels provided on the first face of the semiconductor substrate, each of the pixels including a semiconductor region of a second conductivity type that converts incident light into signal charges, and stores the signal charges; a readout circuit provided on the second face of the semiconductor substrate to read the signal charges stored in the pixels; an ultrafine metal structure placed at intervals on a face on a side of the semiconductor region, the light being incident on the face; and an insulating layer provided between the ultrafine metal structure and the semiconductor region.

Abstract: A semiconductor device comprises: a p-type semiconductor substrate (1); an insulating film (3); a gate electrode (2) formed on the substrate via the insulating film; and an n-type source/drain region (5) formed on both sides of a channel forming region (4) located under the gate electrode (2) formed on the substrate (1). In particular, the thickness (TOX) of the insulating film (3) is determined to be less than 2.5 nm at conversion rate of silicon oxide film (silicon oxide equivalent thickness); a gate length (Lg) of the gate electrode (2) is determined to be equal to or less than 0.3 ?m; and further a voltage applied to the gate electrode (2) and the drain region (6) is determined to be 1.5 V or less. Therefore, in the MOSFET having the tunneling gate oxide film (3), the reliability of the transistor under the hot carrier stress can be improved, and the gate leakage current can be reduced markedly, so that the transistor characteristics can be improved markedly.

Abstract: A semiconductor device comprises: a p-type semiconductor substrate (1); an insulating film (3); a gate electrode (2) formed an the substrate via the insulating film; and an n-type source/drain region (5) formed on both sides of a channel forming region (4) located under the gate electrode (2) formed on the substrate (1). In particular, the thickness (TOX) of the insulating film (3) is determined to be less than 2.5 nm at conversion rate of silicon oxide film (silicon oxide equivalent thickness); a gate length (Lg) of the gate electrode (2) is determined to be equal to or less than 0.3 ?m; and further a voltage applied to the gate electrode (2) and the drain region (6) is determined a be 1.5 V or less. Therefore, in the MOSFET having the tunneling gate oxide film (3), the reliability of the transistor under the hot carrier stress can be improved, and the gate leakage current can be reduced markedly, so that the transistor characteristics can be improved markedly.

Abstract: A semiconductor device comprises: a p-type semiconductor substrate (1); an insulating film (3); a gate electrode (2) formed an the substrate via the insulating film; and an n-type source/drain region (5) formed on both sides of a channel forming region (4) located under the gate electrode (2) formed on the substrate (1). In particular, the thickness (TOX) of the insulating film (3) is determined to be less than 2.5 nm at conversion rate of silicon oxide film (silicon oxide equivalent thickness); a gate length (Lg) of the gate electrode (2) is determined to be equal to or less than 0.3 ?m; and further a voltage applied to the gate electrode (2) and the drain region (6) is determined a be 1.5 V or less. Therefore, in the MOSFET having the tunneling gate oxide film (3), the reliability of the transistor under the hot carrier stress can be improved, and the gate leakage current can be reduced markedly, so that the transistor characteristics can be improved markedly.

Abstract: A semiconductor device comprises: a p-type semiconductor substrate (1); an insulating film (3); a gate electrode (2) formed on the substrate via the insulating film; and an n-type source/drain region (5) formed on both sides of a channel forming region (4) located under the gate electrode (2) formed on the substrate (1). In particular, the thickness (TOX) of the insulating film (3) is determined to be less than 2.5 nm at conversion rate of silicon oxide film (silicon oxide equivalent thickness); a gate length (Lg) of the gate electrode (2) is determined to be equal to or less than 0.3 ?m; and further a voltage applied to the gate electrode (2) and the drain region (6) is determined to be 1.5 V or less. Therefore, in the MOSFET having the tunneling gate oxide film (3), the reliability of the transistor under the hot carrier stress can be improved, and the gate leakage current can be reduced markedly, so that the transistor characteristics can be improved markedly.

Abstract: A semiconductor device comprises: a p-type semiconductor substrate (1); an insulating film (3); a gate electrode (2) formed on the substrate via the insulating film; and an n-type source/drain region (5) formed on both sides of a channel forming region (4) located under the gate electrode (2) formed on the substrate (1). In particular, the thickness (TOX) of the insulating film (3) is determined to be less than 2.5 nm at conversion rate of silicon oxide film (silicon oxide equivalent thickness); a gate length (Lg) of the gate electrode (2) is determined to be equal to or less than 0.3 &mgr;m: and further a voltage applied to the gate electrode (2) and the drain region (6) is determined to be 1.5 V or less. Therefore, in the MOSFET having the tunneling gate oxide film (3), the reliability of the transistor under the hot carrier stress can be improved, and the gate leakage current can be reduced markedly, so that the transistor characteristics can be improved markedly.

Abstract: A surface orientation other than a (100) surface orientation is exposed to the surface portion of a silicon substrate having the (100) surface orientation, for example. A silicon epitaxial growth layer is formed only on a region containing a channel forming region on the (100) surface orientation.