Abstract: An intaglio jig for manufacturing an electronic component having an external electrode by applying a conductive paste to an electronic component body includes an elastic body, and a recessed portion that is formed in the elastic body and in which the conductive paste is contained. The recessed portion includes an opening having an opening width that conforms to a width of the external electrode, a bottom surface at a predetermined depth from the opening, and at least one protrusion portion in which a protrusion height locally protruding from the bottom surface is less than the predetermined depth.

Abstract: A method for forming a zeolite membrane by performing an ALD cycle, the ALD cycle including a silicon oxide film forming step and an aluminum oxide film forming step. In the silicon oxide film forming step, an organic Si compound is used as a first raw material gas and OH radicals are used as a reaction gas; in the aluminum oxide film forming step, an organic Al compound is used as a second raw material gas and OH radicals are used as a reaction gas; and the silicon oxide films and the aluminum oxide films are alternately formed in forward or reverse order to form the zeolite membrane.

Abstract: A cooling apparatus is provided, including a jet plate and a carrier plate provided with an accommodating groove, a coolant inlet, and a coolant outlet. The jet plate is in the accommodating groove, with nozzles provided on the jet plate in a protruding manner. A distribution cavity is between the jet plate and the carrier plate, and the distribution cavity communicates with the coolant inlet, which is for injection of cooling liquid. A collection cavity for backflow of the cooling liquid is formed in the accommodating groove, and is separated from the distribution cavity. The coolant outlet communicates with the collection cavity. The cooling liquid is distributed to the jet plate through the distribution cavity, and is sprayed to the collection cavity through the nozzles for heat exchange, and the cooling liquid obtained through heat exchange is converged in the collection cavity and flows out through the coolant outlet.

Abstract: A positioning jig assembly includes a positioning main body with holes into which electronic component bodies are respectively press-fit, a first and a second guide bodies disposed to be superimposed on the positioning main body in a planar view. First through-holes are formed in the first guide body. Second through-holes formed in the second guide body guide the electronic component main bodies to the first through-holes. The first through-holes provisionally position the electronic component main bodies. When height in the first direction of the electronic component main bodies is represented as H, lengths of the first through-hole and the second through-hole are respectively represented as L1 and L2, and depth of the hole is represented as D, L1<H<D+L1+L2 and D<H hold.

Abstract: An ALD device includes a first precursor generator that is connected to a processing gas source and generates a first precursor to be supplied to a reactor vessel, and a second precursor generator that is connected to a reducing gas source and the reactor vessel and generates a second precursor to be supplied to the reactor vessel. The first precursor generator etches a target by a first plasma excited by a first plasma generator and supplies a compound gas containing a metallic component as the first precursor. The second precursor generator supplies radicals of a reducing gas component in a second plasma excited by a second plasma generator as the second precursor.

Abstract: A method for forming films on particles of powder includes diffusing the powder by leading the powder into a jet nozzle and ejecting a jet flow of the powder; leading the diffused particles of powder, a raw material gas, and a reaction gas activated by atmospheric pressure plasma, into a reaction container, and forming a swirl flow in the container; and forming the films on the diffused particles of powder by reaction of a raw material gas and an activated reaction gas in the container. An apparatus is also disclosed having a reaction container with a peripheral wall having a round section in plan view and a jet nozzle for a powder source, raw material gas, and atmospheric pressure plasma sources are coupled to and enter the container at an angle with a radius thereof thereby forming a swirl flow to form a film on the powder.

Abstract: A temperature stimulation unit according to one or more embodiments may include a cover, a case including a top portion with an opening, and a control board. The case may include a bottom portion and a side portion having a through-hole. The bottom portion and the side portion may define a clearance at least with the control board.

Abstract: A temperature stimulation unit according to one or more embodiments may include a cover, a case with an opening through which the cover is exposed, a temperature changer located on a back surface of the cover, and a coil spring that urges the cover and the temperature changer in a direction to cause the cover and the temperature changer to protrude outside the case through the opening.

Abstract: An electronic component manufacturing method includes a blotting process of bringing a conductive paste applied to an end portion of each electronic component body held by a jig into contact with a surface of a surface plate. The blotting process includes simultaneous performance of a distance changing process of changing the distance between an end face of each electronic component body and the surface of the surface plate and a position changing process of changing a two-dimensional position where the end face of the electronic component body is projected on the surface of the surface plate in such a manner that the direction of the movement of two-dimensional position in parallel to the surface of the surface plate successively varies (e.g., along a circular path).

Abstract: A film forming apparatus configured to form a metal oxide film or a metal nitride film through atomic layer deposition by alternately introducing metal compound gas and an OH radical or an NH radical in a reaction container. The film forming apparatus including: the reaction container; and at least one plasma generator provided outside the reaction container and configured to generate a first plasma including an oxygen radical or a nitrogen radical when oxygen or nitrogen is supplied and generate a second plasma including a hydrogen radical when hydrogen is supplied. The OH radical is generated by collision between the oxygen radical and the hydrogen radical or the NH radical is generated by collision between the nitrogen radical and the hydrogen radical in a downstream region from an outlet of the at least one plasma generator to an inner space of the reaction container.

Abstract: A pre-press process includes a first step for bonding a first end portion of each of a plurality of electronic component bodies to a bonding surface of a flat plate material disposed in a jig, a second step for moving the jig relative to a surface plate, a third step for bringing a second end portions of each of the plurality of electronic component bodies into contact with the surface plate while the flat plate material is in a softened state so that the flat plate material is deformed to align respective positions of end surfaces of the second end portions, a fourth step for curing the flat plate material, and then a fifth step for moving the jig relative to the surface plate to separate from the surface plate the plurality of electronic component bodies in which the respective positions of the end surfaces are aligned.

Abstract: An electronic component manufacturing method comprising: a first step of moving an electronic component body in a first direction relative to a dip layer of a conductive paste to immerse the electronic component body in the dip layer; a second step of moving the electronic component body relative to the dip layer in a second direction that is opposite to the first direction, thereby separating the electronic component body from the dip layer; a third step of forcibly cutting a connection between the conductive paste coated on the end portions of the electronic component body and the dip layer, using a contact with a solid or fluid cutter; and a fourth step of removing excess paste from the conductive paste coated on the end portions of the electronic component body. The third and fourth steps may be conducted simultaneously by cutting and removing the paste with the paste removal member.

Abstract: A heat-treating furnace has: a rotary shaft; a rotary bottom surface pivotally supported by the rotary shaft and rotates; a plurality of workpiece storage chambers arranged on the rotary bottom surface in a multi-stage torus configuration around an axis of the rotary shaft as a center; a hollow bell-shaped hot-blast guide disposed in a center of the torus configuration on the rotary bottom surface around the axis of the rotary shaft as a center so as to decrease a volumetric capacity in the furnace and to adjust a quantity of a hot blast fed in from above itself into the workpiece storage chamber on each stage; a furnace body bottom surface spaced away from the rotary bottom surface; and a furnace body lateral surface disposed on the furnace body bottom surface.

Abstract: An electric pump device includes a motor having a rotor and a stator portions, a pump portion and a housing. The stator portion has a stator core, and coils each having a winding portion and a crossover portion. The housing has a housing body portion having a tubular shape and extending in the axial direction, and a flange portion expanding radially outward from the outer peripheral surface of the housing body portion. The flange portion has an end surface that faces toward one side in the axial direction and is disposed in the axial direction between a first and a second virtual plane. The first and the second virtual planes pass through parts of the stator core, the winding portion, and the crossover portion located respectively closest to one and the other sides in the axial direction and expanding in a direction perpendicular to a central axis.

Abstract: A method for forming a barium titanate film by conducting an ALD cycle, wherein the ALD cycle comprises forming a titanium oxide film and forming barium oxide film. In the forming of a titanium oxide film, TDMAT (Ti[N(CH3)2]4) is used as first raw material gas, and an OH radical is used as reaction gas, and in the forming of barium oxide film, a vaporized barium complex is used as second raw material gas, and an OH radical is used as reaction gas, and the titanium oxide film and the barium oxide film are alternately formed in a normal order or a reverse order.

Abstract: A film formation method for forming a CVD film and an ALD film on a film formation target. In an ALD process, an ALD cycle is repeatedly executed a plurality of times, the ALD cycle including: a first step for filling a reaction container with a source gas introduced through a first supply pipe; a second step for exhausting the source gas from the reaction container; a third step for filling the reaction container with a reactant gas activated by an inductively coupled plasma in a second supply pipe and introduced through the second supply pipe; and a fourth step for exhausting the reactant gas from the reaction container. In a CVD process, the ALD cycle is executed at least once, and the second step is finished while leaving the source gas in a gas phase in the reaction container.

Abstract: An electric pump device is provided. The electric pump device includes a motor, an inverter substrate electrically connected to the motor, a housing for housing the motor and the inverter substrate, and a pump portion driven by power of the motor. The housing includes a motor housing portion for housing the motor and an inverter housing portion for housing the inverter substrate. The motor housing portion has strut portions which extend inside the inverter housing portion and fixed to the inverter substrate.

Abstract: A method for forming a coating film on a powder includes: a dispersion step of setting a container having contained the powder P in a main body of a dispersion device, and dispersing the powder in the container by the main body of the dispersion device; and an ALD step for forming the coating film on a surface of the powder, by setting the container having been removed from the main body of the dispersion device in a main body of an ALD apparatus in such a state that gas can be introduced and be exhausted, introducing a gas for performing an ALD cycle into the container, filling the container with the gas, and then exhausting the gas.

Abstract: An electronic component manufacturing apparatus has a holding member for holding an electronic component body, a surface plate, a moving unit that causes the holding member and the surface plate to relatively move, and a control unit that controls the moving unit. The control unit causes the moving unit to simultaneously perform a distance changing movement for changing, by shortening or extending, the distance between an end face of each electronic component body and a surface of the surface plate, and a position changing movement for changing a two-dimensional position where the end face of the electronic component body is projected on the surface of the surface plate in such a manner that the direction in which the two-dimensional position moves in parallel with the surface of the surface plate successively varies (for example, along a circular path).

Abstract: A paste coating apparatus includes a first feeder that feeds a first belt, a mounter that joins one end portion of each of a plurality of electronic components to the first belt, a first coater that coats paste on the other end portion of each of the plurality of electronic components mounted on the first belt, a first dryer that dries the paste, a second feeder that feeds a second belt, a transfer device that transfers the plurality of electronic components from the first belt to the second belt, a second coater that coats the paste on the one end portion of each of the plurality of electronic components mounted on the second belt, a second dryer that dries the paste, and a collection device that winds and collects the second belt.