Abstract: Provided is a tool that can easily analyze a number of defects detected by an inspection system under a plurality of inspection conditions. The data processing system includes a storage device configured to acquire from an inspection system coordinates of a plurality of defects obtained by inspecting an inspection object under a plurality of inspection conditions and store the coordinates while correlating the coordinates with the inspection conditions, an arithmetic unit configured to perform coordinate matching to detect the presence or absence of coordinates that are common to at least two inspection conditions of the plurality of inspection conditions, and a display device configured to display on a plurality of defect coordinate maps the defects obtained under the at least two inspection conditions.

Abstract: There is provided a data processor and a data processing method for displaying feature quantities for facilitating classification of defects extracted by an appearance checking device, receive defect checking information including at least coordinates of a plurality of defects transmitted from the appearance checking device for extracting defects of a sample via a communication line and defect review information including at least feature quantities transmitted from a reviewing device for acquiring images of the defects and giving the feature quantities of the defects via the communication line, displaying a graph field where at least two of the feature quantities which are plotted along axes on a display, and displaying the defects on positions of the graph field corresponding to the given feature quantities.