Abstract: In the three-dimensional integration of integrated circuits, a thinned semiconductor substrate is arranged on a second semiconductor substrate and is mechanically and electrically connected thereto. To that end, in the second, thinned semiconductor substrate, continuous contact holes are formed proceeding from a substrate rear side as far as a first metal wiring plane on a substrate front side. In order to align the contact holes with the structures arranged on the front side, a structure is arranged on the front side of the substrate, which can be used as an alignment mark on the front side. The structure is overgrown with a useful layer and uncovered proceeding from the rear side of the substrate, so that the structure can also be used as an alignment mark from the rear side. This avoids an alignment error between the structures arranged on the front side and the rear side.

Abstract: An integrated circuit arrangement having a number of structural elements, at least one of which is surrounded by a metallic shielding structure. This structural element is thus protected against interference due to disturbing impulses from its environment. In particular, the structural elements of the circuit arrangement can be arranged next to or on top of one another. To produce the metallic shielding structure of a structural element of the circuit arrangement, at least one depression which surrounds the structural element is created and then lined with metal. The contacts and electrical connections of the structural element are electrically insulated from the metal of the shielding structure.

Abstract: The invention relates to an electronic component including a housing and a first substrate having at least one integrated circuit, a multiplicity of contact surfaces arranged in an arbitrary distribution on the surface of the first substrate. A second substrate forms a housing and is mechanically joined to the surface of the first substrate in a surface-to-surface contact, via an insulating joining layer. The second substrate has contact connection surfaces that are surface-to-surface connected to the contact surfaces of the first substrate in an electrically conductive manner. The second substrate has symmetrically arranged external contact surfaces that are conductively connected to the contact connection surfaces via through-contacts in the second substrate.

Abstract: A method and apparatus for the reversible contacting of a semiconductor circuit level to assist in performing a function test. The apparatus includes a testing head having test points arranged at a test side lying opposite the contact surfaces of a semiconductor circuit level. The test points are formed of liquid contacts in recesses in the test side of the testing head wherein the liquid contacts form menisci that project beyond the surface of the testing head. The recesses, in turn, are provided for metallizations which are connected to electrically-conductive leads. In addition, the surface may be provided with a roughening or with etched trenches.

Abstract: A substrate wafer having components (13) is bonded onto a mount (3) and is thinned from the rear side. After producing a photoresist mask on the rear side of the substrate wafer, the latter is separated in an etching process into individual components (13). After removal of the photoresist mask, a further component (6), in particular a component stack, is applied onto at least one of the individual components (13) and is firmly connected to the individual component (13a).

Abstract: A terminal metallization (8) is applied onto and structured on a layer structure on the upper side of the component, the terminal metallization is applied on the upper side of an insulating layer (7) with an opening on a metallization (6) provided for electrical connection. By filling a hole produced in a covering dielectric with metal, a contact rod (12) seated on this terminal metallization (8) is formed. This contact rod is resiliently movable in a surrounding opening (14) of the component on the free part of the terminal metallization (8) anchored in the layer structure. This enables the reversible contacting of the component to a further component arranged vertically thereto, whereby the planar upper sides lying opposite one another can be brought into intimate contact because the contact rod (12) pressed against a contact (15) of the other component is pressed back into the opening (14) and an adequately firm connection of the contacts is achieved by the spring power of the terminal metallization (8).

Abstract: In order to produce a three-dimensional circuit arrangement, two substrates (21, 26) which have components in the region of their boundary surfaces (22, 27) which touch one another are stacked one on top of the other. The substrates (21, 26) are firmly connected to one another via these boundary surfaces (22, 27). One of the substrates (21) can subsequently be thinned from the rear side (212) and can be provided with rear-side contacts (213), the other substrate (26) acting as a stabilizing supporting plate.

Abstract: The method produces liquid contacts in contact holes on a top side of a semiconductor component. The top side is not wettable by material provided for the liquid contacts. The walls and edges of the contact holes are wettable by the material. The contact holes are filled as follows. The material provided for the liquid contacts is applied to the top side by a doctor blade. There is situated on a longitudinal edge of the doctor blade an adhesion strip which is made of a material which is wettable by the material provided for the liquid contacts. The longitudinal edge of the doctor blade is guided at a distance over the top side. The material provided for the liquid contacts is moved in the form of a cylinder between the adhesion stip and the surface of the component.

Abstract: Substrates (11, 12) each of which having components with contacts (13, 14) are arranged one above the other in a stack in order to produce a three-dimensional circuit arrangement. Metal surfaces (20) are applied onto that main surface (15) of at least one of the substrates (11) which is adjacent to the other substrate, which metal surfaces (20) are soldered to the adjacent main surface (17) of the other substrate (12) in order to produce the mechanical joint between the two substrates (11, 12). The components can be tested before the application of further substrates, and substrates having faulty components are removed by grinding away into the metal surfaces (20).