Patents by Inventor Hsi Wang

Hsi Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240429036
    Abstract: A physical vapor deposition (PVD) system includes: a chamber body; a substrate support disposed within the chamber body and capable of supporting a substrate; a PVD target; and a target profile monitoring subsystem. The PVD target includes: a target plate comprising a target material; and a backing plate attached to the target plate and comprising: a central section; and a peripheral section circumferentially surrounding the central section in a horizontal plane. The peripheral section has a first thickness in a vertical direction, the central section has a second thickness in the vertical direction, and the first thickness is larger than the second thickness. The target profile monitoring subsystem is configured to monitor usage of the target plate.
    Type: Application
    Filed: June 20, 2023
    Publication date: December 26, 2024
    Inventors: Chia-Hsi Wang, Yen-Yu Chen
  • Patent number: 12174444
    Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, a first driving assembly, and a positioning element. The movable portion is movably disposed on the fixed portion and comprising an optical element. The optical element moves in a first direction. The first driving assembly is at least partially disposed on the fixed portion. The positioning element is rotatably disposed on the fixed portion or the movable portion. When the first driving assembly is not activated, the positioning element is used to limit the position of the movable portion relative to the fixed portion to a limit position, and the positioning element comprises a main body and a limiting portion extending from the main body in a second direction that is perpendicular to the first direction. The limiting portion passes through the optical element.
    Type: Grant
    Filed: September 7, 2022
    Date of Patent: December 24, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Chao-Chang Hu, Chih-Wei Weng, He-Ling Chang
  • Patent number: 12165898
    Abstract: Various embodiments of the present application are directed toward an adjustable wafer chuck. The adjustable wafer chuck is configured to hold a wafer. The adjustable wafer chuck comprises a base portion and a pad portion. The base portion comprises a plurality of adjustable base structures. The pad portion is disposed on a first side of the base portion. The pad portion comprises a plurality of contact pads disposed on the plurality of adjustable base structures. Each of the adjustable base structures are configured to move along a plane in a first direction and configured to move along the plane in a second direction that is opposite the first direction.
    Type: Grant
    Filed: August 15, 2022
    Date of Patent: December 10, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsi Wang, Yen-Yu Chen
  • Patent number: 12165502
    Abstract: A driving mechanism is provided, including a base, a movable unit, a magnetic element, and a driving assembly. The movable unit is movably disposed on the base. The magnetic element is disposed on the movable unit and has plastic material. The driving assembly is configured to drive the movable unit to move relative to the base, wherein the driving assembly has a coil, and the magnetic element and the movable unit move relative to the base when an electrical current is applied to the coil.
    Type: Grant
    Filed: September 13, 2022
    Date of Patent: December 10, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Lien-Yu Huang, Yu-Chi Kuo, Xuan-Huan Su
  • Patent number: 12165503
    Abstract: An optical element driving mechanism is provided and includes a first movable part, a fixed assembly and a first driving assembly. The first movable part includes an optical element, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The fixed assembly includes a first base and a second base arranged along a first axis, and the first movable part moves along the first axis.
    Type: Grant
    Filed: September 14, 2022
    Date of Patent: December 10, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Xuan-Huan Su, Yu-Chi Kuo, Yueh-Lin Lee
  • Patent number: 12164172
    Abstract: The present disclosure provides an optical element driving mechanism, which includes a first movable part, a fixed assembly, a first driving assembly, a second movable part, a second driving assembly and a locking assembly. The first movable part is configured to connect an optical element. The first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly, and the second driving assembly is configured to drive the second movable part to move relative to the first movable part and the fixed assembly. The locking assembly is configured to fix the first movable part at a first position relative to the fixed assembly.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: December 10, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Chih-Wei Weng, Che-Wei Chang, Ko-Lun Chao
  • Patent number: 12153336
    Abstract: An optical element driving mechanism for corresponding to an optical module, the optical element driving mechanism including a fixed portion, a movable portion, and a first driving assembly. The fixed portion has an aperture. The movable portion is for connecting to an optical element and is movable relative to the fixed portion. The first driving assembly is for driving the movable portion to move relative to the fixed portion. The fixed portion has an elongated structure, and the fixed portion further comprises a first end. The fixed portion further comprising a second end, wherein the first end and the second end are arranged along a first direction. A shortest distance between the optical sensing element and the first end is shorter than a shortest distance between the optical sensing element and the second end.
    Type: Grant
    Filed: June 12, 2023
    Date of Patent: November 26, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Chao-Chang Hu, Chih-Wei Weng, He-Ling Chang
  • Publication number: 20240344976
    Abstract: A system for monitoring a precursor tank during a deposition process includes a sensor and a signal processor. The sensor includes a sensor chamber connected in line with the precursor tank and a deposition chamber, a radiation emitter to emit a radiation passing through a precursor-containing gas in the sensor chamber, and a radiation receiver to receive the radiation passed through the precursor-containing gas. The signal processor obtains an absorption spectrum of the precursor-containing gas from the received radiation and determines a remaining precursor amount in the precursor tank based on the absorption spectrum. The system facilitates inline monitoring the remaining precursor amount in the precursor tank during a deposition operation, thereby advantageously reducing risks of undergoing a deposition operation while the remaining precursor amount is unacceptably low and avoiding replacing the precursor tank while the remaining precursor amount is acceptable.
    Type: Application
    Filed: April 14, 2023
    Publication date: October 17, 2024
    Inventors: Chia-Hsi WANG, Yen-Yu CHEN, Jui-Mu CHO, Chung Hsien LIAO
  • Patent number: 12112617
    Abstract: A driving mechanism for moving a flat optical element is provided. The driving mechanism includes a fixed part, a movable member, and a driving assembly. The movable member is movably disposed on the fixed part and connected to the optical element. The driving assembly is configured to impel the movable member and the optical element to move relative to the fixed part. The driving assembly has a coil disposed on the fixed part.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: October 8, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Xuan-Huan Su, Kuen-Wang Tsai, Chao-Chang Hu
  • Publication number: 20240331436
    Abstract: A method of automatically detecting whether a procedure in a scheduled process has been performed is disclosed. The method includes: capturing images of a person engaged in a plurality of predetermined steps in the scheduled process; estimating a human pose of the person in the captured images that includes a plurality of body parts of the human pose; tracking movement of the plurality of body parts of the human pose; generating a movement signal based on the tracked movement of the plurality of body parts; determining based on the movement signal whether a predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person; and recording a time at which the predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person when it has been determined that the predetermined step has been performed.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 3, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsi Wang, Yen-Yu Chen
  • Patent number: 12094698
    Abstract: A method includes loading a wafer into a sputtering chamber, followed by depositing a film over the wafer by performing a sputtering process in the sputtering chamber. In the sputtering process, a target is bombarded by ions that are applied with a magnetic field using a magnetron. The magnetron includes a magnetic element over the target, an arm assembly connected to the magnetic element, a hinge mechanism connecting the arm assembly and a rotational shaft. The arm assembly includes a first prong and a second prong at opposite sides of the hinge mechanism. The magnetron further includes a controller that controls motion of the first arm assembly, enabling the first prong to revolve in an orbital motion path about the first hinge mechanism while the second prong remains stationary.
    Type: Grant
    Filed: May 12, 2023
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Hsi Wang, Kun-Che Ho, Yen-Yu Chen
  • Publication number: 20240288657
    Abstract: An optical element driving mechanism has an optical axis, and includes a fixed portion, a movable element, a plurality of blades, and a driving assembly. The fixed portion has an opening. The movable element is movable relative to the fixed portion. The blades are connected to the movable element. The driving assembly drives the movable element to move relative to the fixed portion. The driving assembly drives the movable element to change an overlap area of the blade and the opening.
    Type: Application
    Filed: May 3, 2024
    Publication date: August 29, 2024
    Inventors: Chao-Chang HU, Chih-Wei WENG, Chao-Hsi WANG, Kuen-Wang TSAI
  • Publication number: 20240271271
    Abstract: A method for fabricating semiconductor devices is disclosed. The method includes introducing a target in a chamber of a physical vapor deposition (PVD) system. The method includes depositing, on a substrate, a first portion of a film based on a first compensation function, a first value of the first compensation function being determined according to a lifetime of the target. The method includes depositing, on the first portion of the film, a second portion of the film based on a second compensation function, a second value of the second compensation function being determined according to the lifetime of the target. The first value is different from the second value.
    Type: Application
    Filed: May 31, 2023
    Publication date: August 15, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsi Wang, Yen-Yu Chen
  • Publication number: 20240258755
    Abstract: The present invention is related to a stacking structure having a docking station and using one of a USB Type-C and a direct current (DC) power supply, including a first stack layer, a first connection member and a second stack layer. The first stack layer has a first connection port including at least two electric power conductors. The first connection member is configured on the first stack layer and has a first engagement portion. The second stack layer has a second connection port and a second engagement portion, wherein the second connection port includes at least two electric power conductors, the second connection port of the second stack layer is used to electrically connect thereto the first connection port of the first stack, and the second engagement portion is used to connect thereto the first engagement portion.
    Type: Application
    Filed: November 20, 2023
    Publication date: August 1, 2024
    Inventor: An-Hsi Wang
  • Patent number: 12001074
    Abstract: An optical element driving mechanism has an optical axis, and includes a fixed portion, a movable element, a plurality of blades, and a driving assembly. The fixed portion has an opening. The movable element is movable relative to the fixed portion. The blades are connected to the movable element. The driving assembly drives the movable element to move relative to the fixed portion. The driving assembly drives the movable element to change an overlap area of the blade and the opening.
    Type: Grant
    Filed: October 9, 2020
    Date of Patent: June 4, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Chang Hu, Chih-Wei Weng, Chao-Hsi Wang, Kuen-Wang Tsai
  • Publication number: 20240176093
    Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Inventors: Chao-Chang HU, Chih-Wei WENG, Chia-Che WU, Chien-Yu KAO, Hsiao-Hsin HU, He-Ling CHANG, Chao-Hsi WANG, Chen-Hsien FAN, Che-Wei CHANG, Mao-Gen JIAN, Sung-Mao TSAI, Wei-Jhe SHEN, Yung-Ping YANG, Sin-Hong LIN, Tzu-Yu CHANG, Sin-Jhong SONG, Shang-Yu HSU, Meng-Ting LIN, Shih-Wei HUNG, Yu-Huai LIAO, Mao-Kuo HSU, Hsueh-Ju LU, Ching-Chieh HUANG, Chih-Wen CHIANG, Yu-Chiao LO, Ying-Jen WANG, Shu-Shan CHEN, Che-Hsiang CHIU
  • Patent number: 11994795
    Abstract: An optical element driving mechanism includes a first movable part, a fixed assembly and a first driving assembly. The first movable part includes an optical element, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The optical element driving mechanism further includes a strengthening assembly configured to strengthen the fixed assembly to bear a force along a first axis.
    Type: Grant
    Filed: August 3, 2022
    Date of Patent: May 28, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Sin-Jhong Song
  • Patent number: 11997372
    Abstract: An optical component driving mechanism is provided. The optical component driving mechanism includes a first movable portion, a fixed portion, and a first driving assembly. The fixed portion includes a first opening. The first movable portion is movable relative to the fixed portion. The first driving assembly is configured to drive the first movable portion to move relative to the fixed portion.
    Type: Grant
    Filed: May 3, 2022
    Date of Patent: May 28, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Yueh-Lin Lee, Ko-Lun Chao, Chao-Chang Hu
  • Publication number: 20240168256
    Abstract: An optical element driving mechanism is provided, including a fixed portion and a movable portion. The movable portion moves relative to the fixed portion. The movable portion includes a first movable assembly and a second movable assembly. The first movable assembly is connected to a first optical element. The second movable assembly is connected to a second optical element. The first movable assembly and the second movable assembly are movable relative to each other. The fixed portion further includes a first guiding element and a second guiding element. The first guiding element guides the first movable assembly and the second movable assembly to move in a first dimension. The second guiding element guides the first movable assembly and the second movable assembly to move in the first dimension. The first guiding element and the second guiding element are located at opposite corners of the fixed portion.
    Type: Application
    Filed: February 1, 2024
    Publication date: May 23, 2024
    Inventors: Chao-Hsi WANG, Chao-Chang HU, Chih-Wei WENG
  • Patent number: 11991436
    Abstract: A driving mechanism is provided, including a base, a movable unit, and a movable part. The movable unit is movably disposed on the base and connected to an optical element. The movable part is movably disposed on the base and forms a passage. When the movable part moves from the first position to the second position relative to the base, the movable unit can slide relative to the base from its initial position through the passage to a closed position.
    Type: Grant
    Filed: August 25, 2022
    Date of Patent: May 21, 2024
    Assignee: TDK TAIWAN CORP.
    Inventors: Chao-Hsi Wang, Yu-Chi Kuo, Xuan-Huan Su, Yueh-Lin Lee