Patents by Inventor Hsi Wang
Hsi Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240429036Abstract: A physical vapor deposition (PVD) system includes: a chamber body; a substrate support disposed within the chamber body and capable of supporting a substrate; a PVD target; and a target profile monitoring subsystem. The PVD target includes: a target plate comprising a target material; and a backing plate attached to the target plate and comprising: a central section; and a peripheral section circumferentially surrounding the central section in a horizontal plane. The peripheral section has a first thickness in a vertical direction, the central section has a second thickness in the vertical direction, and the first thickness is larger than the second thickness. The target profile monitoring subsystem is configured to monitor usage of the target plate.Type: ApplicationFiled: June 20, 2023Publication date: December 26, 2024Inventors: Chia-Hsi Wang, Yen-Yu Chen
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Patent number: 12174444Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, a first driving assembly, and a positioning element. The movable portion is movably disposed on the fixed portion and comprising an optical element. The optical element moves in a first direction. The first driving assembly is at least partially disposed on the fixed portion. The positioning element is rotatably disposed on the fixed portion or the movable portion. When the first driving assembly is not activated, the positioning element is used to limit the position of the movable portion relative to the fixed portion to a limit position, and the positioning element comprises a main body and a limiting portion extending from the main body in a second direction that is perpendicular to the first direction. The limiting portion passes through the optical element.Type: GrantFiled: September 7, 2022Date of Patent: December 24, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Chao-Chang Hu, Chih-Wei Weng, He-Ling Chang
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Patent number: 12165898Abstract: Various embodiments of the present application are directed toward an adjustable wafer chuck. The adjustable wafer chuck is configured to hold a wafer. The adjustable wafer chuck comprises a base portion and a pad portion. The base portion comprises a plurality of adjustable base structures. The pad portion is disposed on a first side of the base portion. The pad portion comprises a plurality of contact pads disposed on the plurality of adjustable base structures. Each of the adjustable base structures are configured to move along a plane in a first direction and configured to move along the plane in a second direction that is opposite the first direction.Type: GrantFiled: August 15, 2022Date of Patent: December 10, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Hsi Wang, Yen-Yu Chen
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Patent number: 12165502Abstract: A driving mechanism is provided, including a base, a movable unit, a magnetic element, and a driving assembly. The movable unit is movably disposed on the base. The magnetic element is disposed on the movable unit and has plastic material. The driving assembly is configured to drive the movable unit to move relative to the base, wherein the driving assembly has a coil, and the magnetic element and the movable unit move relative to the base when an electrical current is applied to the coil.Type: GrantFiled: September 13, 2022Date of Patent: December 10, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Lien-Yu Huang, Yu-Chi Kuo, Xuan-Huan Su
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Patent number: 12165503Abstract: An optical element driving mechanism is provided and includes a first movable part, a fixed assembly and a first driving assembly. The first movable part includes an optical element, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The fixed assembly includes a first base and a second base arranged along a first axis, and the first movable part moves along the first axis.Type: GrantFiled: September 14, 2022Date of Patent: December 10, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Xuan-Huan Su, Yu-Chi Kuo, Yueh-Lin Lee
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Patent number: 12164172Abstract: The present disclosure provides an optical element driving mechanism, which includes a first movable part, a fixed assembly, a first driving assembly, a second movable part, a second driving assembly and a locking assembly. The first movable part is configured to connect an optical element. The first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly, and the second driving assembly is configured to drive the second movable part to move relative to the first movable part and the fixed assembly. The locking assembly is configured to fix the first movable part at a first position relative to the fixed assembly.Type: GrantFiled: October 15, 2021Date of Patent: December 10, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Chih-Wei Weng, Che-Wei Chang, Ko-Lun Chao
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Patent number: 12153336Abstract: An optical element driving mechanism for corresponding to an optical module, the optical element driving mechanism including a fixed portion, a movable portion, and a first driving assembly. The fixed portion has an aperture. The movable portion is for connecting to an optical element and is movable relative to the fixed portion. The first driving assembly is for driving the movable portion to move relative to the fixed portion. The fixed portion has an elongated structure, and the fixed portion further comprises a first end. The fixed portion further comprising a second end, wherein the first end and the second end are arranged along a first direction. A shortest distance between the optical sensing element and the first end is shorter than a shortest distance between the optical sensing element and the second end.Type: GrantFiled: June 12, 2023Date of Patent: November 26, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Chao-Chang Hu, Chih-Wei Weng, He-Ling Chang
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Publication number: 20240344976Abstract: A system for monitoring a precursor tank during a deposition process includes a sensor and a signal processor. The sensor includes a sensor chamber connected in line with the precursor tank and a deposition chamber, a radiation emitter to emit a radiation passing through a precursor-containing gas in the sensor chamber, and a radiation receiver to receive the radiation passed through the precursor-containing gas. The signal processor obtains an absorption spectrum of the precursor-containing gas from the received radiation and determines a remaining precursor amount in the precursor tank based on the absorption spectrum. The system facilitates inline monitoring the remaining precursor amount in the precursor tank during a deposition operation, thereby advantageously reducing risks of undergoing a deposition operation while the remaining precursor amount is unacceptably low and avoiding replacing the precursor tank while the remaining precursor amount is acceptable.Type: ApplicationFiled: April 14, 2023Publication date: October 17, 2024Inventors: Chia-Hsi WANG, Yen-Yu CHEN, Jui-Mu CHO, Chung Hsien LIAO
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Patent number: 12112617Abstract: A driving mechanism for moving a flat optical element is provided. The driving mechanism includes a fixed part, a movable member, and a driving assembly. The movable member is movably disposed on the fixed part and connected to the optical element. The driving assembly is configured to impel the movable member and the optical element to move relative to the fixed part. The driving assembly has a coil disposed on the fixed part.Type: GrantFiled: August 8, 2022Date of Patent: October 8, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Xuan-Huan Su, Kuen-Wang Tsai, Chao-Chang Hu
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Publication number: 20240331436Abstract: A method of automatically detecting whether a procedure in a scheduled process has been performed is disclosed. The method includes: capturing images of a person engaged in a plurality of predetermined steps in the scheduled process; estimating a human pose of the person in the captured images that includes a plurality of body parts of the human pose; tracking movement of the plurality of body parts of the human pose; generating a movement signal based on the tracked movement of the plurality of body parts; determining based on the movement signal whether a predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person; and recording a time at which the predetermined step of the plurality of predetermined steps in the scheduled process has been performed by the person when it has been determined that the predetermined step has been performed.Type: ApplicationFiled: March 27, 2023Publication date: October 3, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Hsi Wang, Yen-Yu Chen
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Patent number: 12094698Abstract: A method includes loading a wafer into a sputtering chamber, followed by depositing a film over the wafer by performing a sputtering process in the sputtering chamber. In the sputtering process, a target is bombarded by ions that are applied with a magnetic field using a magnetron. The magnetron includes a magnetic element over the target, an arm assembly connected to the magnetic element, a hinge mechanism connecting the arm assembly and a rotational shaft. The arm assembly includes a first prong and a second prong at opposite sides of the hinge mechanism. The magnetron further includes a controller that controls motion of the first arm assembly, enabling the first prong to revolve in an orbital motion path about the first hinge mechanism while the second prong remains stationary.Type: GrantFiled: May 12, 2023Date of Patent: September 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chia-Hsi Wang, Kun-Che Ho, Yen-Yu Chen
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Publication number: 20240288657Abstract: An optical element driving mechanism has an optical axis, and includes a fixed portion, a movable element, a plurality of blades, and a driving assembly. The fixed portion has an opening. The movable element is movable relative to the fixed portion. The blades are connected to the movable element. The driving assembly drives the movable element to move relative to the fixed portion. The driving assembly drives the movable element to change an overlap area of the blade and the opening.Type: ApplicationFiled: May 3, 2024Publication date: August 29, 2024Inventors: Chao-Chang HU, Chih-Wei WENG, Chao-Hsi WANG, Kuen-Wang TSAI
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Publication number: 20240271271Abstract: A method for fabricating semiconductor devices is disclosed. The method includes introducing a target in a chamber of a physical vapor deposition (PVD) system. The method includes depositing, on a substrate, a first portion of a film based on a first compensation function, a first value of the first compensation function being determined according to a lifetime of the target. The method includes depositing, on the first portion of the film, a second portion of the film based on a second compensation function, a second value of the second compensation function being determined according to the lifetime of the target. The first value is different from the second value.Type: ApplicationFiled: May 31, 2023Publication date: August 15, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Hsi Wang, Yen-Yu Chen
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Publication number: 20240258755Abstract: The present invention is related to a stacking structure having a docking station and using one of a USB Type-C and a direct current (DC) power supply, including a first stack layer, a first connection member and a second stack layer. The first stack layer has a first connection port including at least two electric power conductors. The first connection member is configured on the first stack layer and has a first engagement portion. The second stack layer has a second connection port and a second engagement portion, wherein the second connection port includes at least two electric power conductors, the second connection port of the second stack layer is used to electrically connect thereto the first connection port of the first stack, and the second engagement portion is used to connect thereto the first engagement portion.Type: ApplicationFiled: November 20, 2023Publication date: August 1, 2024Inventor: An-Hsi Wang
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Patent number: 12001074Abstract: An optical element driving mechanism has an optical axis, and includes a fixed portion, a movable element, a plurality of blades, and a driving assembly. The fixed portion has an opening. The movable element is movable relative to the fixed portion. The blades are connected to the movable element. The driving assembly drives the movable element to move relative to the fixed portion. The driving assembly drives the movable element to change an overlap area of the blade and the opening.Type: GrantFiled: October 9, 2020Date of Patent: June 4, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Chang Hu, Chih-Wei Weng, Chao-Hsi Wang, Kuen-Wang Tsai
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Publication number: 20240176093Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.Type: ApplicationFiled: February 5, 2024Publication date: May 30, 2024Inventors: Chao-Chang HU, Chih-Wei WENG, Chia-Che WU, Chien-Yu KAO, Hsiao-Hsin HU, He-Ling CHANG, Chao-Hsi WANG, Chen-Hsien FAN, Che-Wei CHANG, Mao-Gen JIAN, Sung-Mao TSAI, Wei-Jhe SHEN, Yung-Ping YANG, Sin-Hong LIN, Tzu-Yu CHANG, Sin-Jhong SONG, Shang-Yu HSU, Meng-Ting LIN, Shih-Wei HUNG, Yu-Huai LIAO, Mao-Kuo HSU, Hsueh-Ju LU, Ching-Chieh HUANG, Chih-Wen CHIANG, Yu-Chiao LO, Ying-Jen WANG, Shu-Shan CHEN, Che-Hsiang CHIU
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Patent number: 11994795Abstract: An optical element driving mechanism includes a first movable part, a fixed assembly and a first driving assembly. The first movable part includes an optical element, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The optical element driving mechanism further includes a strengthening assembly configured to strengthen the fixed assembly to bear a force along a first axis.Type: GrantFiled: August 3, 2022Date of Patent: May 28, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Sin-Jhong Song
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Patent number: 11997372Abstract: An optical component driving mechanism is provided. The optical component driving mechanism includes a first movable portion, a fixed portion, and a first driving assembly. The fixed portion includes a first opening. The first movable portion is movable relative to the fixed portion. The first driving assembly is configured to drive the first movable portion to move relative to the fixed portion.Type: GrantFiled: May 3, 2022Date of Patent: May 28, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Yueh-Lin Lee, Ko-Lun Chao, Chao-Chang Hu
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Publication number: 20240168256Abstract: An optical element driving mechanism is provided, including a fixed portion and a movable portion. The movable portion moves relative to the fixed portion. The movable portion includes a first movable assembly and a second movable assembly. The first movable assembly is connected to a first optical element. The second movable assembly is connected to a second optical element. The first movable assembly and the second movable assembly are movable relative to each other. The fixed portion further includes a first guiding element and a second guiding element. The first guiding element guides the first movable assembly and the second movable assembly to move in a first dimension. The second guiding element guides the first movable assembly and the second movable assembly to move in the first dimension. The first guiding element and the second guiding element are located at opposite corners of the fixed portion.Type: ApplicationFiled: February 1, 2024Publication date: May 23, 2024Inventors: Chao-Hsi WANG, Chao-Chang HU, Chih-Wei WENG
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Patent number: 11991436Abstract: A driving mechanism is provided, including a base, a movable unit, and a movable part. The movable unit is movably disposed on the base and connected to an optical element. The movable part is movably disposed on the base and forms a passage. When the movable part moves from the first position to the second position relative to the base, the movable unit can slide relative to the base from its initial position through the passage to a closed position.Type: GrantFiled: August 25, 2022Date of Patent: May 21, 2024Assignee: TDK TAIWAN CORP.Inventors: Chao-Hsi Wang, Yu-Chi Kuo, Xuan-Huan Su, Yueh-Lin Lee