Patents by Inventor Hsin-Wen Su

Hsin-Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11367494
    Abstract: The present disclosure provides semiconductor device and methods of forming the same. A semiconductor device according to the present disclosure includes a gate structure, a source/drain feature adjacent the gate structure, a dielectric layer disclosed over the gate structure and the source/drain feature, a gate contact disposed in the dielectric layer and over the gate structure, and a source/drain contact disposed in the dielectric layer and over the source/drain feature. The dielectric layer is doped with a dopant and the dopant includes germanium or tin.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: June 21, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Jui-Lin Chen, Lien Jung Hung, Ping-Wei Wang
  • Publication number: 20220173098
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC) having a device section and a pick-up section. The IC includes a semiconductor substrate. A first fin of the semiconductor substrate is disposed in the device section. A second fin of the semiconductor substrate is disposed in the pick-up section and laterally spaced from the first fin in a first direction. A gate structure is disposed in the device section and laterally spaced from the second fin in the first direction. The gate structure extends laterally over the semiconductor substrate and the first fin in a second direction perpendicular to the first direction. A pick-up region is disposed on the second fin. The pick-up region continuously extends from a first sidewall of the second fin to a second sidewall of the second fin. The first sidewall is laterally spaced from the second sidewall in the first direction.
    Type: Application
    Filed: February 16, 2022
    Publication date: June 2, 2022
    Inventors: Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang, Wen-Chun Keng, Chih-Chuan Yang, Shih-Hao Lin
  • Patent number: 11348929
    Abstract: A memory device includes a substrate, a first gate structure and a second gate structure, first, second, third source/drain structures, gate spacers, a first via and a second via, and a semiconductor layer. The first gate structure and the second gate structure are over the substrate. The first, second, third source/drain structures are over the substrate, in which the first and second source/drain structures are on opposite sides of the first gate structure, the second and third source/drain structures are on opposite sides of the second gate structure. The gate spacers are on opposite sidewalls of the first and second gate structures. The first via and the second via are over the first gate structure and the second gate structure, respectively, in which the first via is in contact with the first gate structure. The semiconductor layer is between the second via and the second gate structure.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Chia-En Huang, Shih-Hao Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20220130971
    Abstract: Methods and devices that provide a first fin structure, a second fin structure, and a third fin structure disposed over a substrate. A dielectric fin is formed between the first fin structure and the second fin structure, and a conductive line is formed between the second fin structure and the third fin structure.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Chih-Chuan Yang, Jing-Yi Lin, Hsin-Wen Su, Shih-Hao Lin
  • Patent number: 11296095
    Abstract: A memory device includes a substrate, first semiconductor layers and second semiconductor layers alternately stacked over the substrate, a first gate structure and a second gate structure crossing the first semiconductor layers and the second semiconductor layers, a first via and a second via over the first gate structure and the second gate structure, and a first word line and a second word line over the first via and the second via. Along a lengthwise direction of the first and second gate structures, a width of the first semiconductor layers is narrower than a width of the second semiconductor layers.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: April 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Shih-Hao Lin, Lien-Jung Hung, Ping-Wei Wang
  • Publication number: 20220102359
    Abstract: A memory device includes a substrate, first semiconductor fin, second semiconductor fin, first gate structure, second gate structure, first gate spacer, and a second gate spacer. The first gate structure crosses the first semiconductor fin. The second gate structure crosses the second semiconductor fin, the first gate structure extending continuously from the second gate structure, in which in a top view of the memory device, a width of the first gate structure is greater than a width of the second gate structure. The first gate spacer is on a sidewall of the first gate structure. The second gate spacer extends continuously from the first gate spacer and on a sidewall of the second gate structure, in which in the top view of the memory device, a width of the first gate spacer is less than a width of the second gate spacer.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Chih-Chuan YANG, Shih-Hao LIN, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Publication number: 20220102366
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Yu-Kuan LIN, Lien-Jung HUNG, Ping-Wei WANG, Chia-En HUANG
  • Publication number: 20220102368
    Abstract: A memory device includes a substrate, a first gate structure and a second gate structure, first, second, third source/drain structures, gate spacers, a first via and a second via, and a semiconductor layer. The first gate structure and the second gate structure are over the substrate. The first, second, third source/drain structures are over the substrate, in which the first and second source/drain structures are on opposite sides of the first gate structure, the second and third source/drain structures are on opposite sides of the second gate structure. The gate spacers are on opposite sidewalls of the first and second gate structures. The first via and the second via are over the first gate structure and the second gate structure, respectively, in which the first via is in contact with the first gate structure. The semiconductor layer is between the second via and the second gate structure.
    Type: Application
    Filed: September 28, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Chia-En HUANG, Shih-Hao LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Publication number: 20220068413
    Abstract: The present disclosure provides semiconductor device and methods of forming the same. A semiconductor device according to the present disclosure includes a gate structure, a source/drain feature adjacent the gate structure, a dielectric layer disclosed over the gate structure and the source/drain feature, a gate contact disposed in the dielectric layer and over the gate structure, and a source/drain contact disposed in the dielectric layer and over the source/drain feature. The dielectric layer is doped with a dopant and the dopant includes germanium or tin.
    Type: Application
    Filed: August 31, 2020
    Publication date: March 3, 2022
    Inventors: Hsin-Wen Su, Shih-Hao Lin, Jui-Lin Chen, Lien Jung Hung, Ping-Wei Wang
  • Patent number: 11257817
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC) having a device section and a pick-up section. The IC includes a semiconductor substrate. A first fin of the semiconductor substrate is disposed in the device section. A second fin of the semiconductor substrate is disposed in the pick-up section and laterally spaced from the first fin in a first direction. A gate structure is disposed in the device section and laterally spaced from the second fin in the first direction. The gate structure extends laterally over the semiconductor substrate and the first fin in a second direction perpendicular to the first direction. A pick-up region is disposed on the second fin. The pick-up region continuously extends from a first sidewall of the second fin to a second sidewall of the second fin. The first sidewall is laterally spaced from the second sidewall in the first direction.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang, Wen-Chun Keng, Chih-Chuan Yang, Shih-Hao Lin
  • Publication number: 20210391341
    Abstract: A memory device includes a substrate, first semiconductor layers and second semiconductor layers alternately stacked over the substrate, a first gate structure and a second gate structure crossing the first semiconductor layers and the second semiconductor layers, a first via and a second via over the first gate structure and the second gate structure, and a first word line and a second word line over the first via and the second via. Along a lengthwise direction of the first and second gate structures, a width of the first semiconductor layers is narrower than a width of the second semiconductor layers.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 16, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen SU, Yu-Kuan LIN, Shih-Hao LIN, Lien-Jung HUNG, Ping-Wei WANG
  • Publication number: 20210343601
    Abstract: A method of forming an integrated circuit, including forming a n-type doped well (N-well) and a p-type doped well (P-well) disposed side by side on a semiconductor substrate, forming a first fin active region extruded from the N-well and a second fin active region extruded from the P-well, forming a first isolation feature inserted between and vertically extending through the N-well and the P-well, and forming a second isolation feature over the N-well and the P-well and laterally contacting the first and the second fin active regions.
    Type: Application
    Filed: July 12, 2021
    Publication date: November 4, 2021
    Inventors: Kuo-Hsiu Hsu, Yu-Kuan Lin, Feng-Ming Chang, Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang
  • Publication number: 20210312997
    Abstract: A semiconductor memory device includes a first word line formed over a first active region. In some embodiments, a first metal line is disposed over and perpendicular to the first word line, where the first metal line is electrically connected to the first word line using a first conductive via, and where the first conductive via is disposed over the first active region. In some examples, the semiconductor memory device further includes a second metal line and a third metal line both parallel to the first metal line and disposed on opposing sides of the first metal line, where the second metal line is electrically connected to a source/drain region of the first active region using a second conductive via, and where the third metal line is electrically connected to the source/drain region of the first active region using a third conductive via.
    Type: Application
    Filed: April 1, 2020
    Publication date: October 7, 2021
    Inventors: Hsin-Wen SU, Kian-Long LIM, Wen-Chun KENG, Chang-Ta YANG, Shih-Hao LIN
  • Publication number: 20210313463
    Abstract: A semiconductor device comprises a memory macro including a well pick-up (WPU) area oriented lengthwise along a first direction, and memory bit areas adjacent to the WPU area. In the WPU area, the memory macro includes n-type and p-type wells arranged alternately along the first direction with well boundaries between adjacent wells; gate structures over the wells and oriented lengthwise along the first direction; a first dielectric layer disposed at each of the well boundaries; first contact features disposed over one of the p-type wells; and second contact features disposed over one of the n-type wells. From a top view, the first dielectric layer extends along a second direction perpendicular to the first direction and separates all the gate structures in the first WPU area, the first contact features are disposed between the gate structures, and the second contact features are disposed between the gate structures.
    Type: Application
    Filed: June 21, 2021
    Publication date: October 7, 2021
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Chih-Chuan Yang, Chang-Ta Yang, Shih-Hao Lin
  • Publication number: 20210280584
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC) having a device section and a pick-up section. The IC includes a semiconductor substrate. A first fin of the semiconductor substrate is disposed in the device section. A second fin of the semiconductor substrate is disposed in the pick-up section and laterally spaced from the first fin in a first direction. A gate structure is disposed in the device section and laterally spaced from the second fin in the first direction. The gate structure extends laterally over the semiconductor substrate and the first fin in a second direction perpendicular to the first direction. A pick-up region is disposed on the second fin. The pick-up region continuously extends from a first sidewall of the second fin to a second sidewall of the second fin. The first sidewall is laterally spaced from the second sidewall in the first direction.
    Type: Application
    Filed: March 4, 2020
    Publication date: September 9, 2021
    Inventors: Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang, Wen-Chun Keng, Chih-Chuan Yang, Shih-Hao Lin
  • Publication number: 20210272966
    Abstract: An N-type metal oxide semiconductor (NMOS) transistor includes a first gate and a first spacer structure disposed on a first sidewall of the first gate in a first direction. The first spacer structure has a first thickness in the first direction and measured from an outermost point of an outer surface of the first spacer structure to the first sidewall. A P-type metal oxide semiconductor (PMOS) transistor includes a second gate and a second spacer structure disposed on a second sidewall of the second gate in the first direction and measured from an outermost point of an outer surface of the second spacer structure to the second sidewall. The second spacer structure has a second thickness that is greater than the first thickness. The NMOS transistor is a pass-gate of a static random access memory (SRAM) cell, and the PMOS transistor is a pull-up of the SRAM cell.
    Type: Application
    Filed: September 29, 2020
    Publication date: September 2, 2021
    Inventors: Shih-Hao Lin, Chih-Chuan Yang, Hsin-Wen Su, Kian-Long Lim, Chien-Chih Lin
  • Patent number: D928040
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: August 17, 2021
    Assignee: Gogoro Inc.
    Inventors: Hok-Sum Horace Luke, Song-Fu Wang, Hsin-Wen Su, Hsi-Wen Chen, Chien-Chih Weng
  • Patent number: D928666
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: August 24, 2021
    Assignee: Gogoro Inc.
    Inventors: Hok-Sum Horace Luke, Song-Fu Wang, Hsin-Wen Su, Hsi-Wen Chen, Chien-Chih Weng
  • Patent number: D934172
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: October 26, 2021
    Assignee: Gogoro Inc.
    Inventors: Shih-Yuan Lin, Hsin-Wen Su, Kuang-I Yen, Chi-Wang Lien, Jye Rong
  • Patent number: D953935
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: June 7, 2022
    Assignee: GOGORO INC.
    Inventors: Sung-Fu Wang, Hsin-Wen Su, Chien-Chih Weng, Hsi-Wen Chen