Patents by Inventor Hsiu-Mei Yu
Hsiu-Mei Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250022766Abstract: A semiconductor device includes: a substrate; a seed layer disposed on the substrate; a compound semiconductor stack layer disposed on the seed layer; and a source metal layer and a drain metal layer disposed on the compound semiconductor stack layer. The semiconductor device further includes a conductive layer at least partially covering the source metal layer and the drain metal layer, and covering opposing side surfaces of the seed layer and opposing side surfaces of the compound semiconductor stack layer. The conductive layer electrically connects the seed layer and the source metal layer.Type: ApplicationFiled: October 1, 2024Publication date: January 16, 2025Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei YU, Guang-Yuan JIANG, Cheng-Yi HSIEH, Wei-Chan CHANG, Chang-Sheng LIN
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Patent number: 12131973Abstract: A semiconductor device includes: a substrate; a seed layer disposed on the substrate; a compound semiconductor stack layer disposed on the seed layer; and a source metal layer and a drain metal layer disposed on the compound semiconductor stack layer. The semiconductor device further includes a conductive layer at least partially covering the source metal layer and the drain metal layer, and covering opposing side surfaces of the seed layer and opposing side surfaces of the compound semiconductor stack layer. The conductive layer electrically connects the seed layer and the source metal layer.Type: GrantFiled: June 23, 2022Date of Patent: October 29, 2024Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Hsiu-Mei Yu, Guang-Yuan Jiang, Cheng-Yi Hsieh, Wei-Chan Chang, Chang-Sheng Lin
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Patent number: 11935878Abstract: A method for manufacturing a package structure includes providing a carrier board; providing at least one die having a top surface, a bottom surface, and a side surface on the carrier board; and forming a protective layer to cover at least a portion of the side surface of the die. The die includes a substrate, a semiconductor layer, a gate structure, a source structure and a drain structure, at least one dielectric layer, and at least one pad. The semiconductor layer is disposed on the substrate. The gate structure is disposed on the semiconductor layer. The source and the drain structures are disposed on opposite sides of the gate structure. The dielectric layer covers the gate, source, and drain structures. The pad is disposed on the dielectric layer and penetrates through the dielectric layer to electrically contact with the gate, source or drain structure.Type: GrantFiled: September 10, 2021Date of Patent: March 19, 2024Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Hsiu-Mei Yu, Guang-Yuan Jiang, Cheng-Yi Hsieh, Wei-Chan Chang, Chang-Sheng Lin
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Publication number: 20230420328Abstract: A semiconductor device includes: a substrate; a seed layer disposed on the substrate; a compound semiconductor stack layer disposed on the seed layer; and a source metal layer and a drain metal layer disposed on the compound semiconductor stack layer. The semiconductor device further includes a conductive layer at least partially covering the source metal layer and the drain metal layer, and covering opposing side surfaces of the seed layer and opposing side surfaces of the compound semiconductor stack layer. The conductive layer electrically connects the seed layer and the source metal layer.Type: ApplicationFiled: June 23, 2022Publication date: December 28, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei YU, Guang-Yuan JIANG, Cheng-Yi HSIEH, Wei-Chan CHANG, Chang-Sheng LIN
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Patent number: 11810804Abstract: A method of forming dice includes the following steps. First, a wafer structure is provides, which includes a substrate and a stack of semiconductor layers disposed in die regions and a scribe line region. Then, the substrate and the stack of the semiconductor layers in the scribe line region are removed to form a groove in the substrate. After the formation of the groove, the substrate is further thinned to obtain the substrate with a reduced thickness. Finally, a separation process is performed on the substrate with the reduced thickness.Type: GrantFiled: March 9, 2022Date of Patent: November 7, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei Yu, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Publication number: 20230238308Abstract: A semiconductor structure is provided. The semiconductor structure includes a lead frame and a sub-substrate disposed on the lead frame, wherein the thickness of the sub-substrate is between 0 and 0.5 ?m. The semiconductor structure also includes an epitaxial layer disposed on the sub-substrate. The epitaxial layer includes a buffer layer, a channel layer and a barrier layer. The buffer layer is disposed between the sub-substrate and the channel layer. The channel layer is disposed between the buffer layer and the barrier layer. The semiconductor structure further includes a device layer disposed on the barrier layer and an interconnector structure electrically connected to the epitaxial layer and/or the device layer by a through hole.Type: ApplicationFiled: January 27, 2022Publication date: July 27, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei YU, Guang-Yuan JIANG, Cheng-Yi HSIEH, Wei-Chan CHANG, Chang-Sheng LIN
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Publication number: 20230083337Abstract: A method for manufacturing a package structure includes providing a carrier board; providing at least one die having a top surface, a bottom surface, and a side surface on the carrier board; and forming a protective layer to cover at least a portion of the side surface of the die. The die includes a substrate, a semiconductor layer, a gate structure, a source structure and a drain structure, at least one dielectric layer, and at least one pad. The semiconductor layer is disposed on the substrate. The gate structure is disposed on the semiconductor layer. The source and the drain structures are disposed on opposite sides of the gate structure. The dielectric layer covers the gate, source, and drain structures. The pad is disposed on the dielectric layer and penetrates through the dielectric layer to electrically contact with the gate, source or drain structure.Type: ApplicationFiled: September 10, 2021Publication date: March 16, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei YU, Guang-Yuan JIANG, Cheng-Yi HSIEH, Wei-Chan CHANG, Chang-Sheng LIN
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Patent number: 11588036Abstract: A chip structure includes a substrate, a bottom conductive layer, a semiconductor layer, an interlayer dielectric layer, at least one electrode, and at least one top electrode. The substrate includes in order a core layer and a composite material. The bottom conductive layer is disposed on the bottom surface of the core layer, the semiconductor layer is disposed on the substrate, and an interlayer dielectric layer is disposed on the semiconductor layer. The at least one electrode is disposed between the semiconductor layer and the interlayer dielectric layer, and the at least one top electrode is disposed on the interlayer dielectric layer and electrically coupled to the at least one electrode.Type: GrantFiled: November 11, 2020Date of Patent: February 21, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei Yu, Cheng-Yi Hsieh, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Publication number: 20220199438Abstract: A method of forming dice includes the following steps. First, a wafer structure is provides, which includes a substrate and a stack of semiconductor layers disposed in die regions and a scribe line region. Then, the substrate and the stack of the semiconductor layers in the scribe line region are removed to form a groove in the substrate. After the formation of the groove, the substrate is further thinned to obtain the substrate with a reduced thickness. Finally, a separation process is performed on the substrate with the reduced thickness.Type: ApplicationFiled: March 9, 2022Publication date: June 23, 2022Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei Yu, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Publication number: 20220149170Abstract: A chip structure includes a substrate, a bottom conductive layer, a semiconductor layer, an interlayer dielectric layer, at least one electrode, and at least one top electrode. The substrate includes in order a core layer and a composite material. The bottom conductive layer is disposed on the bottom surface of the core layer, the semiconductor layer is disposed on the substrate, and an interlayer dielectric layer is disposed on the semiconductor layer. The at least one electrode is disposed between the semiconductor layer and the interlayer dielectric layer, and the at least one top electrode is disposed on the interlayer dielectric layer and electrically coupled to the at least one electrode.Type: ApplicationFiled: November 11, 2020Publication date: May 12, 2022Inventors: Hsiu-Mei Yu, Cheng-Yi Hsieh, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Patent number: 11309201Abstract: A method of forming dice includes the following steps. First, a wafer structure is provides, which includes a substrate and a stack of semiconductor layers disposed in die regions and a scribe line region. Then, the substrate and the stack of the semiconductor layers in the scribe line region are removed to forma groove in the substrate. After the formation of the groove, the substrate is further thinned to obtain the substrate with a reduced thickness. Finally, a separation process is performed on the substrate with the reduced thickness.Type: GrantFiled: May 14, 2020Date of Patent: April 19, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei Yu, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Publication number: 20210358786Abstract: A method of forming dice includes the following steps. First, a wafer structure is provides, which includes a substrate and a stack of semiconductor layers disposed in die regions and a scribe line region. Then, the substrate and the stack of the semiconductor layers in the scribe line region are removed to forma groove in the substrate. After the formation of the groove, the substrate is further thinned to obtain the substrate with a reduced thickness. Finally, a separation process is performed on the substrate with the reduced thickness.Type: ApplicationFiled: May 14, 2020Publication date: November 18, 2021Inventors: Hsiu-Mei Yu, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Patent number: 10797007Abstract: The present disclosure provides a semiconductor structure including a first insulation, a second insulation over the first insulation, a third insulation over the second insulation, a first conductor proximal to a boundary between the first insulation and the second insulation, and an electronic device electrically connected to the first conductor and at least partially surrounded by the second insulation. A coefficient of thermal expansion (CTE) of the second insulation is larger than a CTE of the first insulation and larger than a CTE of the third insulation.Type: GrantFiled: November 27, 2018Date of Patent: October 6, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Hsiao-Wen Lee, Hsiu-Mei Yu
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Publication number: 20190164912Abstract: The present disclosure provides a semiconductor structure including a first insulation, a second insulation over the first insulation, a third insulation over the second insulation, a first conductor proximal to a boundary between the first insulation and the second insulation, and an electronic device electrically connected to the first conductor and at least partially surrounded by the second insulation. A coefficient of thermal expansion (CTE) of the second insulation is larger than a CTE of the first insulation and larger than a CTE of the third insulation.Type: ApplicationFiled: November 27, 2018Publication date: May 30, 2019Inventors: HSIAO-WEN LEE, HSIU-MEI YU
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Patent number: 10157839Abstract: An interconnect structure includes a first substrate including a first surface, a second surface opposite to the first surface, a cavity extended through the first substrate, and a first recess extended from the second surface towards the first surface; a second substrate disposed opposite to the second surface of the first substrate; an electronic device disposed within the cavity; a first polymeric layer disposed over the first surface and within the cavity of the first substrate; and a second polymeric layer disposed between the first substrate and the second substrate and within the first recess.Type: GrantFiled: December 14, 2017Date of Patent: December 18, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chia-Jen Cheng, Hsiu-Mei Yu
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Publication number: 20180342456Abstract: An interconnect structure includes a first substrate including a first surface, a second surface opposite to the first surface, a cavity extended through the first substrate, and a first recess extended from the second surface towards the first surface; a second substrate disposed opposite to the second surface of the first substrate; an electronic device disposed within the cavity; a first polymeric layer disposed over the first surface and within the cavity of the first substrate; and a second polymeric layer disposed between the first substrate and the second substrate and within the first recess.Type: ApplicationFiled: December 14, 2017Publication date: November 29, 2018Inventors: CHIA-JEN CHENG, HSIU-MEI YU
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Publication number: 20180019183Abstract: Structures and formation methods of a chip package are provided. The chip package includes a first package structure including a first semiconductor die that has a first side and a second side opposite thereto. The chip package also includes a package layer partially or completely encapsulating the first semiconductor die, and a conductive feature in the package layer. The chip package further includes a first heat-spreading layer over the first side of the first semiconductor die and a first cap layer on the first heat-spreading layer.Type: ApplicationFiled: July 14, 2016Publication date: January 18, 2018Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chin-Hua WANG, Po-Yao LIN, Shu-Shen YEH, Kuang-Chun LEE, Shin-Puu JENG, Shyue-Ter LEU, Cheng-Lin HUANG, Hsiu-Mei YU
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Patent number: 9870975Abstract: Structures and formation methods of a chip package are provided. The chip package includes a first package structure including a first semiconductor die that has a first side and a second side opposite thereto. The chip package also includes a package layer partially or completely encapsulating the first semiconductor die, and a conductive feature in the package layer. The chip package further includes a first heat-spreading layer over the first side of the first semiconductor die and a first cap layer on the first heat-spreading layer.Type: GrantFiled: July 14, 2016Date of Patent: January 16, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chin-Hua Wang, Po-Yao Lin, Shu-Shen Yeh, Kuang-Chun Lee, Shin-Puu Jeng, Shyue-Ter Leu, Cheng-Lin Huang, Hsiu-Mei Yu
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Patent number: 9515038Abstract: A system and method for providing a post-passivation and underbump metallization is provided. An embodiment comprises a post-passivation layer that is larger than an overlying underbump metallization. The post-passivation layer extending beyond the underbump metallization shields the underlying layers from stresses generated from mismatches of the materials' coefficient of thermal expansion.Type: GrantFiled: May 5, 2015Date of Patent: December 6, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Chih Yew, Fu-Jen Li, Po-Yao Lin, Chia-Jen Cheng, Hsiu-Mei Yu
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Publication number: 20150235976Abstract: A system and method for providing a post-passivation and underbump metallization is provided. An embodiment comprises a post-passivation layer that is larger than an overlying underbump metallization. The post-passivation layer extending beyond the underbump metallization shields the underlying layers from stresses generated from mismatches of the materials' coefficient of thermal expansion.Type: ApplicationFiled: May 5, 2015Publication date: August 20, 2015Inventors: Ming-Chih Yew, Fu-Jen Li, Po-Yao Lin, Chia-Jen Cheng, Hsiu-Mei Yu