Patents by Inventor Hsu Yu
Hsu Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10854607Abstract: An impurity source film is formed along a portion of a non-planar semiconductor fin structure. The impurity source film may serve as source of an impurity that becomes electrically active subsequent to diffusing from the source film into the semiconductor fin. In one embodiment, an impurity source film is disposed adjacent to a sidewall surface of a portion of a sub-fin region disposed between an active region of the fin and the substrate and is more proximate to the substrate than to the active area.Type: GrantFiled: April 20, 2020Date of Patent: December 1, 2020Assignee: Intel CorporationInventors: Chia-Hong Jan, Walid M Hafez, Jeng-Ya David Yeh, Hsu-Yu Chang, Neville L Dias, Chanaka D Munasinghe
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Patent number: 10854757Abstract: A transistor including a channel disposed between a source and a drain, a gate electrode disposed on the channel and surrounding the channel, wherein the source and the drain are formed in a body on a substrate and the channel is separated from the body. A method of forming an integrated circuit device including forming a trench in a dielectric layer on a substrate, the trench including dimensions for a transistor body including a width; forming a channel material in the trench; recessing the dielectric layer to expose a first portion of the channel material; increasing a width dimension of the exposed channel material; recessing the dielectric layer to expose a second portion of the channel material; removing the second portion of the channel material; and forming a gate stack on the first portion of the channel material, the gate stack including a gate dielectric and a gate electrode.Type: GrantFiled: December 13, 2016Date of Patent: December 1, 2020Assignee: Intel CorporationInventors: Rahul Ramaswamy, Hsu-Yu Chang, Chia-Hong Jan, Walid M. Hafez, Neville L. Dias, Roman W. Olac-Vaw, Chen-Guan Lee
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Patent number: 10811751Abstract: Embodiments of the invention include an electromagnetic waveguide and methods of forming the electromagnetic waveguide. In an embodiment the electromagnetic waveguide includes a first spacer and a second spacer. In an embodiment, the first and second spacer each have a reentrant profile. The electromagnetic waveguide may also include a conductive body formed between in the first and second spacer, and a void formed within the conductive body. In an additional embodiment, the electromagnetic waveguide may include a first spacer and a second spacer. Additionally, the electromagnetic waveguide may include a first portion of a conductive body formed along sidewalls of the first and second spacer and a second portion of the conductive body formed between an upper portion of the first portion of the conductive body. In an embodiment, the first portion of the conductive body and the second portion of the conductive body define a void through the electromagnetic waveguide.Type: GrantFiled: December 30, 2016Date of Patent: October 20, 2020Assignee: Intel CorporationInventors: Rahul Ramaswamy, Chia-Hong Jan, Walid Hafez, Neville Dias, Hsu-Yu Chang, Roman Olac-Vaw, Chen-Guan Lee
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Publication number: 20200303255Abstract: A method for forming semiconductor device structure is provided. The method includes forming a gate stack over a semiconductor substrate and forming a spacer element over a sidewall of the gate stack. The method also includes forming a dielectric layer over the semiconductor substrate to surround the gate stack and the spacer element and replacing the gate stack with a metal gate stack. The method further includes forming a protection element over the metal gate stack and forming a conductive contact partially surrounded by the dielectric layer. A portion of the conductive contact is formed directly above a portion of the protection element.Type: ApplicationFiled: June 3, 2020Publication date: September 24, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hua-Li HUNG, Chih-Lun LU, Hsu-Yu HUANG, Tsung-Fan YIN, Ying-Ting HSIA, Yi-Wei CHIU, Li-Te HSU
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Patent number: 10761264Abstract: Embodiments of the invention include an electromagnetic waveguide and methods of forming electromagnetic waveguides. In an embodiment, the electromagnetic waveguide may include a first semiconductor fin extending up from a substrate and a second semiconductor fin extending up from the substrate. The fins may be bent towards each other so that a centerline of the first semiconductor fin and a centerline of the second semiconductor fin extend from the substrate at a non-orthogonal angle. Accordingly, a cavity may be defined by the first semiconductor fin, the second semiconductor fin, and a top surface of the substrate. Embodiments of the invention may include a metallic layer and a cladding layer lining the surfaces of the cavity. Additional embodiments may include a core formed in the cavity.Type: GrantFiled: December 30, 2016Date of Patent: September 1, 2020Assignee: Intel CorporationInventors: Rahul Ramaswamy, Chia-Hong Jan, Walid Hafez, Neville Dias, Hsu-Yu Chang, Roman W. Olac-Vaw, Chen-Guan Lee
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Patent number: 10763209Abstract: A MOS antifuse with an accelerated dielectric breakdown induced by a void or seam formed in the electrode. In some embodiments, the programming voltage at which a MOS antifuse undergoes dielectric breakdown is reduced through intentional damage to at least part of the MOS antifuse dielectric. In some embodiments, damage may be introduced during an etchback of an electrode material which has a seam formed during backfilling of the electrode material into an opening having a threshold aspect ratio. In further embodiments, a MOS antifuse bit-cell includes a MOS transistor and a MOS antifuse. The MOS transistor has a gate electrode that maintains a predetermined voltage threshold swing, while the MOS antifuse has a gate electrode with a void accelerated dielectric breakdown.Type: GrantFiled: August 19, 2014Date of Patent: September 1, 2020Assignee: Intel CorporationInventors: Roman Olac-Vaw, Walid Hafez, Chia-Hong Jan, Hsu-Yu Chang, Ting Chang, Rahul Ramaswamy, Pei-Chi Liu, Neville Dias
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Patent number: 10756210Abstract: A transistor device including a transistor including a body disposed on a substrate, a gate stack contacting at least two adjacent sides of the body and a source and a drain on opposing sides of the gate stack and a channel defined in the body between the source and the drain, wherein a conductivity of the channel is similar to a conductivity of the source and the drain. An input/output (IO) circuit including a driver circuit coupled to the logic circuit, the driver circuit including at least one transistor device is described. A method including forming a channel of a transistor device on a substrate including an electrical conductivity; forming a source and a drain on opposite sides of the channel, wherein the source and the drain include the same electrical conductivity as the channel; and forming a gate stack on the channel.Type: GrantFiled: September 30, 2016Date of Patent: August 25, 2020Assignee: Intel CorporationInventors: Chia-Hong Jan, Walid M. Hafez, Hsu-Yu Chang, Neville L. Dias, Rahul Ramaswamy, Roman W. Olac-Vaw, Chen-Guan Lee
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Publication number: 20200251471Abstract: An impurity source film is formed along a portion of a non-planar semiconductor fin structure. The impurity source film may serve as source of an impurity that becomes electrically active subsequent to diffusing from the source film into the semiconductor fin. In one embodiment, an impurity source film is disposed adjacent to a sidewall surface of a portion of a sub-fin region disposed between an active region of the fin and the substrate and is more proximate to the substrate than to the active area.Type: ApplicationFiled: April 20, 2020Publication date: August 6, 2020Applicant: Intel CorporationInventors: Chia-Hong Jan, Walid M. Hafez, Jeng-Ya David Yeh, Hsu-Yu Chang, Neville L. Dias, Chanaka D. Munasinghe
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Patent number: 10692762Abstract: A semiconductor device is provided. The semiconductor device includes a gate stack over a semiconductor substrate and a spacer element over a sidewall of the gate stack. The spacer element has a lower portion and an upper portion, the lower portion has a substantially uniform width. The upper portion becomes wider along a direction from a top of the spacer element towards the lower portion, and a bottom of the upper portion is higher than a top of the gate stack. The semiconductor device also includes a dielectric layer surrounding the gate stack and the spacer element. The semiconductor device further includes a conductive contact penetrating through the dielectric layer and electrically connected to a conductive feature over the semiconductor substrate.Type: GrantFiled: September 10, 2018Date of Patent: June 23, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hua-Li Hung, Chih-Lun Lu, Hsu-Yu Huang, Tsung-Fan Yin, Ying-Ting Hsia, Yi-Wei Chiu, Li-Te Hsu
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Patent number: 10643999Abstract: An impurity source film is formed along a portion of a non-planar semiconductor fin structure. The impurity source film may serve as source of an impurity that becomes electrically active subsequent to diffusing from the source film into the semiconductor fin. In one embodiment, an impurity source film is disposed adjacent to a sidewall surface of a portion of a sub-fin region disposed between an active region of the fin and the substrate and is more proximate to the substrate than to the active area.Type: GrantFiled: June 3, 2019Date of Patent: May 5, 2020Assignee: Intel CorporationInventors: Chia-Hong Jan, Walid M Hafez, Jeng-Ya David Yeh, Hsu-Yu Chang, Neville L Dias, Chanaka D Munasinghe
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Patent number: 10601160Abstract: A card edge connector structure includes: an insulation main body, having one side disposed with an insertion surface and having another side disposed with an installation surface; the insertion surface has an insertion port; two electrical conductive terminal sets, disposed in the insulation main body with a parallel arrangement means; each electric conductive terminal set has a positioning seat, grounding terminals and electrical conductive terminals protruded from the positioning seat, each grounding terminal has an inner side, a first end exposed in the insertion port and a second end exposed on the installation surface; and a grounding plate, disposed between the two electrical conductive terminal sets; two sides of the grounding plate are extended with grounding elastic arms towards a direction of each first end, and each grounding elastic arm is elastically abutted against the inner side of each grounding terminal.Type: GrantFiled: January 3, 2019Date of Patent: March 24, 2020Assignee: JESS-LINK PRODUCTS CO., LTD.Inventors: Ya-Fen Kao, Ching-Hung Liu, Hsu-Yu Li, Yun-Chang Yang
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Publication number: 20200066907Abstract: A transistor device including a transistor including a body disposed on a substrate, a gate stack contacting at least two adjacent sides of the body and a source and a drain on opposing sides of the gate stack and a channel defined in the body between the source and the drain, wherein a conductivity of the channel is similar to a conductivity of the source and the drain. An input/output (IO) circuit including a driver circuit coupled to the logic circuit, the driver circuit including at least one transistor device is described. A method including forming a channel of a transistor device on a substrate including an electrical conductivity; forming a source and a drain on opposite sides of the channel, wherein the source and the drain include the same electrical conductivity as the channel; and forming a gate stack on the channel.Type: ApplicationFiled: September 30, 2016Publication date: February 27, 2020Inventors: Chia-Hong JAN, Walid M. HAFEZ, Hsu-Yu CHANG, Neville L. DIAS, Rahul RAMASWAMY, Roman W. OLAC-VAW, Chen-Guan LEE
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Patent number: 10559688Abstract: Techniques are disclosed for forming a transistor with enhanced thermal performance. The enhanced thermal performance can be derived from the inclusion of thermal boost material adjacent to the transistor, where the material can be selected based on the transistor type being formed. In the case of PMOS devices, the adjacent thermal boost material may have a high positive linear coefficient of thermal expansion (CTE) (e.g., greater than 5 ppm/° C. at around 20° C.) and thus expand as operating temperatures increase, thereby inducing compressive strain on the channel region of an adjacent transistor and increasing carrier (e.g., hole) mobility. In the case of NMOS devices, the adjacent thermal boost material may have a negative linear CTE (e.g., less than 0 ppm/° C. at around 20° C.) and thus contract as operating temperatures increase, thereby inducing tensile strain on the channel region of an adjacent transistor and increasing carrier (e.g., electron) mobility.Type: GrantFiled: April 1, 2016Date of Patent: February 11, 2020Assignee: Intel CorporationInventors: Chen-Guan Lee, Walid M. Hafez, Joodong Park, Chia-Hong Jan, Hsu-Yu Chang
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Publication number: 20200043914Abstract: Techniques are disclosed for forming semiconductor structures including resistors between gates on self-aligned gate edge architecture. A semiconductor structure includes a first semiconductor fin extending in a first direction, and a second semiconductor fin adjacent to the first semiconductor fin, extending in the first direction. A first gate structure is disposed proximal to a first end of the first semiconductor fin and over the first semiconductor fin in a second direction, orthogonal to the first direction, and a second gate structure is disposed proximal to a second end of the first semiconductor fin and over the first semiconductor fin in the second direction. A first structure comprising isolation material is centered between the first and second semiconductor fins. A second structure comprising resistive material is disposed in the first structure, the second structure extending at least between the first gate structure and the second gate structure.Type: ApplicationFiled: March 31, 2017Publication date: February 6, 2020Applicant: INTEL CORPORATIONInventors: ROMAN W. OLAC-VAW, WALID M. HAFEZ, CHIA-HONG JAN, HSU-YU CHANG, NEVILLE L. DIAS, RAHUL RAMASWAMY, NIDHI NIDHI, CHEN-GUAN LEE
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Publication number: 20190393634Abstract: A card edge connector structure includes: an insulation main body, having one side disposed with an insertion surface and having another side disposed with an installation surface; the insertion surface has an insertion port; two electrical conductive terminal sets, disposed in the insulation main body with a parallel arrangement means; each electric conductive terminal set has a positioning seat, grounding terminals and electrical conductive terminals protruded from the positioning seat, each grounding terminal has an inner side, a first end exposed in the insertion port and a second end exposed on the installation surface; and a grounding plate, disposed between the two electrical conductive terminal sets; two sides of the grounding plate are extended with grounding elastic arms towards a direction of each first end, and each grounding elastic arm is elastically abutted against the inner side of each grounding terminal.Type: ApplicationFiled: January 3, 2019Publication date: December 26, 2019Inventors: Ya-Fen KAO, Ching-Hung LIU, Hsu-Yu LI, Yun-Chang YANG
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Publication number: 20190356032Abstract: Embodiments of the invention include an electromagnetic waveguide and methods of forming the electromagnetic waveguide. In an embodiment the electromagnetic waveguide includes a first spacer and a second spacer. In an embodiment, the first and second spacer each have a reentrant profile. The electromagnetic waveguide may also include a conductive body formed between in the first and second spacer, and a void formed within the conductive body. In an additional embodiment, the electromagnetic waveguide may include a first spacer and a second spacer. Additionally, the electromagnetic waveguide may include a first portion of a conductive body formed along sidewalls of the first and second spacer and a second portion of the conductive body formed between an upper portion of the first portion of the conductive body. In an embodiment, the first portion of the conductive body and the second portion of the conductive body define a void through the electromagnetic waveguide.Type: ApplicationFiled: December 30, 2016Publication date: November 21, 2019Inventors: Rahul RAMASWAMY, Chia-Hong JAN, Walid HAFEZ, Neville DIAS, Hsu-Yu CHANG, Roman OLAC-VAW, Chen-Guan LEE
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Publication number: 20190304840Abstract: An apparatus comprising at least one transistor in a first area of a substrate and at least one transistor in a second area, a work function material on a channel region of each of the at least one transistor, wherein an amount of work function material in the first area is different than an amount of work function material in the second area. A method comprising depositing a work function material and a masking material on at least one transistor body in a first area and at least one in a second area; removing less than an entire portion of the masking material so that the portion of the work function material that is exposed in the first area is different than that exposed in the second area; removing the exposed work function material; and forming a gate electrode on each of the at least one transistor bodies.Type: ApplicationFiled: September 30, 2016Publication date: October 3, 2019Inventors: Chen-Guan LEE, Everett S. CASSIDY-COMFORT, Joodong PARK, Walid M. HAFEZ, Chia-Hong JAN, Rahul RAMASWAMY, Neville L. DIAS, Hsu-Yu CHANG
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Publication number: 20190287973Abstract: An impurity source film is formed along a portion of a non-planar semiconductor fin structure. The impurity source film may serve as source of an impurity that becomes electrically active subsequent to diffusing from the source film into the semiconductor fin. In one embodiment, an impurity source film is disposed adjacent to a sidewall surface of a portion of a sub-fin region disposed between an active region of the fin and the substrate and is more proximate to the substrate than to the active area.Type: ApplicationFiled: June 3, 2019Publication date: September 19, 2019Applicant: Intel CorporationInventors: Chia-Hong Jan, Walid M. Hafez, Jeng-Ya David Yeh, Hsu-Yu Chang, Neville L. Dias, Chanaka D. Munasinghe
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Publication number: 20190278022Abstract: Embodiments of the invention include an electromagnetic waveguide and methods of forming electromagnetic waveguides. In an embodiment, the electromagnetic waveguide may include a first semiconductor fin extending up from a substrate and a second semiconductor fin extending up from the substrate. The fins may be bent towards each other so that a centerline of the first semiconductor fin and a centerline of the second semiconductor fin extend from the substrate at a non-orthogonal angle. Accordingly, a cavity may be defined by the first semiconductor fin, the second semiconductor fin, and a top surface of the substrate. Embodiments of the invention may include a metallic layer and a cladding layer lining the surfaces of the cavity. Additional embodiments may include a core formed in the cavity.Type: ApplicationFiled: December 30, 2016Publication date: September 12, 2019Inventors: Rahul RAMASWAMY, Chia-Hong JAN, Walid HAFEZ, Neville DIAS, Hsu-Yu CHANG, Roman W. OLAC-VAW, Chen-Guan LEE
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Publication number: 20190245098Abstract: A transistor including a channel disposed between a source and a drain, a gate electrode disposed on the channel and surrounding the channel, wherein the source and the drain are formed in a body on a substrate and the channel is separated from the body. A method of forming an integrated circuit device including forming a trench in a dielectric layer on a substrate, the trench including dimensions for a transistor body including a width; forming a channel material in the trench; recessing the dielectric layer to expose a first portion of the channel material; increasing a width dimension of the exposed channel material; recessing the dielectric layer to expose a second portion of the channel material; removing the second portion of the channel material; and forming a gate stack on the first portion of the channel material, the gate stack including a gate dielectric and a gate electrode.Type: ApplicationFiled: December 13, 2016Publication date: August 8, 2019Inventors: Rahul RAMASWAMY, Hsu-Yu CHANG, Chia-Hong JAN, Walid M. HAFEZ, Neville L. DIAS, Roman W. OLAC-VAW, Chen-Guan LEE