Patents by Inventor Hui Lee
Hui Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250183225Abstract: A method of fabricating a semiconductor chip includes the following steps. A bonding material layer is formed on a first wafer substrate and is patterned to form a first bonding layer having a strength adjustment pattern. A semiconductor component layer and a first interconnect structure layer are formed on a second wafer substrate. The first interconnect structure layer is located. A second bonding layer is formed on the first interconnect structure layer. The second wafer substrate is bonded to the first wafer substrate by contacting the second bonding layer with the first bonding layer. A bonding interface of the second bonding layer and the first bonding layer is smaller than an area of the second bonding layer. A second interconnect structure layer is formed on the semiconductor component layer. A conductor terminal is formed on the second interconnect structure layer.Type: ApplicationFiled: February 6, 2025Publication date: June 5, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hong-Wei Chan, Jiing-Feng Yang, Yung-Shih Cheng, Yao-Te Huang, Hui Lee
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Patent number: 12230603Abstract: A method of fabricating a semiconductor chip includes the following steps. A bonding material layer is formed on a first wafer substrate and is patterned to form a first bonding layer having a strength adjustment pattern. A semiconductor component layer and a first interconnect structure layer are formed on a second wafer substrate. The first interconnect structure layer is located. A second bonding layer is formed on the first interconnect structure layer. The second wafer substrate is bonded to the first wafer substrate by contacting the second bonding layer with the first bonding layer. A bonding interface of the second bonding layer and the first bonding layer is smaller than an area of the second bonding layer. A second interconnect structure layer is formed on the semiconductor component layer. A conductor terminal is formed on the second interconnect structure layer.Type: GrantFiled: July 26, 2023Date of Patent: February 18, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hong-Wei Chan, Jiing-Feng Yang, Yung-Shih Cheng, Yao-Te Huang, Hui Lee
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Patent number: 12159830Abstract: Interconnect structures exhibiting reduced accumulation of copper vacancies along interfaces between contact etch stop layers (CESLs) and interconnects, along with methods for fabrication, are disclosed herein. A method includes forming a copper interconnect in a dielectric layer and depositing a metal nitride CESL over the copper interconnect and the dielectric layer. An interface between the metal nitride CESL and the copper interconnect has a first surface nitrogen concentration, a first nitrogen concentration and/or a first number of nitrogen-nitrogen bonds. A nitrogen plasma treatment is performed to modify the interface between the metal nitride CESL and the copper interconnect.Type: GrantFiled: December 20, 2022Date of Patent: December 3, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hui Lee, Po-Hsiang Huang, Wen-Sheh Huang, Jen Hung Wang, Su-Jen Sung, Chih-Chien Chi, Pei-Hsuan Lee
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Publication number: 20240395728Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are described herein. A method includes forming an interconnect structure over a device wafer. The device wafer includes a first integrated circuit, a semiconductor substrate, and a redistribution structure. The method further includes forming a metallization layer and a group of dummy insertion structures having a stepped pattern density in a topmost dielectric layer of the interconnect structure. The group of dummy insertion structures and the metallization layer are planarized with the dielectric layer. The method further includes forming a first bonding layer over the group of dummy insertion structures, the metallization layer, and the dielectric layer. The method further includes bonding a carrier wafer to the first bonding layer, forming an opening through the semiconductor substrate, and forming a conductive via in the opening and electrically coupled to the redistribution structure.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Inventors: Yao-Te Huang, Hong-Wei Chan, Yung-Shih Cheng, Jiing-Feng Yang, Hui Lee
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Publication number: 20240379541Abstract: Interconnect structures exhibiting reduced accumulation of copper vacancies along interfaces between contact etch stop layers (CESLs) and interconnects, along with methods for fabrication, are disclosed herein. A method includes forming a copper interconnect in a dielectric layer and depositing a metal nitride CESL over the copper interconnect and the dielectric layer. An interface between the metal nitride CESL and the copper interconnect has a first surface nitrogen concentration, a first nitrogen concentration and/or a first number of nitrogen-nitrogen bonds. A nitrogen plasma treatment is performed to modify the interface between the metal nitride CESL and the copper interconnect.Type: ApplicationFiled: July 25, 2024Publication date: November 14, 2024Inventors: Hui Lee, Po-Hsiang Huang, Wen-Sheh Huang, Jen Hung Wang, Su-Jen Sung, Chih-Chien Chi, Pei-Hsuan Lee
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Patent number: 12142574Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are described herein. A method includes forming an interconnect structure over a device wafer. The device wafer includes a first integrated circuit, a semiconductor substrate, and a redistribution structure. The method further includes forming a metallization layer and a group of dummy insertion structures having a stepped pattern density in a topmost dielectric layer of the interconnect structure. The group of dummy insertion structures and the metallization layer are planarized with the dielectric layer. The method further includes forming a first bonding layer over the group of dummy insertion structures, the metallization layer, and the dielectric layer. The method further includes bonding a carrier wafer to the first bonding layer, forming an opening through the semiconductor substrate, and forming a conductive via in the opening and electrically coupled to the redistribution structure.Type: GrantFiled: July 30, 2021Date of Patent: November 12, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yao-Te Huang, Hong-Wei Chan, Yung-Shih Cheng, Jiing-Feng Yang, Hui Lee
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Publication number: 20230369285Abstract: A method of fabricating a semiconductor chip includes the following steps. A bonding material layer is formed on a first wafer substrate and is patterned to form a first bonding layer having a strength adjustment pattern. A semiconductor component layer and a first interconnect structure layer are formed on a second wafer substrate. The first interconnect structure layer is located. A second bonding layer is formed on the first interconnect structure layer. The second wafer substrate is bonded to the first wafer substrate by contacting the second bonding layer with the first bonding layer. A bonding interface of the second bonding layer and the first bonding layer is smaller than an area of the second bonding layer. A second interconnect structure layer is formed on the semiconductor component layer. A conductor terminal is formed on the second interconnect structure layer.Type: ApplicationFiled: July 26, 2023Publication date: November 16, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hong-Wei Chan, Jiing-Feng Yang, Yung-Shih Cheng, Yao-Te Huang, Hui Lee
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Patent number: 11756924Abstract: A method of fabricating a semiconductor chip includes the following steps. A bonding material layer is formed on a first wafer substrate and is patterned to form a first bonding layer having a strength adjustment pattern. A semiconductor component layer and a first interconnect structure layer are formed on a second wafer substrate. The first interconnect structure layer is located. A second bonding layer is formed on the first interconnect structure layer. The second wafer substrate is bonded to the first wafer substrate by contacting the second bonding layer with the first bonding layer. A bonding interface of the second bonding layer and the first bonding layer is smaller than an area of the second bonding layer. A second interconnect structure layer is formed on the semiconductor component layer. A conductor terminal is formed on the second interconnect structure layer.Type: GrantFiled: March 25, 2021Date of Patent: September 12, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hong-Wei Chan, Jiing-Feng Yang, Yung-Shih Cheng, Yao-Te Huang, Hui Lee
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Publication number: 20230121958Abstract: Interconnect structures exhibiting reduced accumulation of copper vacancies along interfaces between contact etch stop layers (CESLs) and interconnects, along with methods for fabrication, are disclosed herein. A method includes forming a copper interconnect in a dielectric layer and depositing a metal nitride CESL over the copper interconnect and the dielectric layer. An interface between the metal nitride CESL and the copper interconnect has a first surface nitrogen concentration, a first nitrogen concentration and/or a first number of nitrogen-nitrogen bonds. A nitrogen plasma treatment is performed to modify the interface between the metal nitride CESL and the copper interconnect.Type: ApplicationFiled: December 20, 2022Publication date: April 20, 2023Inventors: Hui Lee, Po-Hsiang Huang, Wen-Sheh Huang, Jen Hung Wang, Su-Jen Sung, Chih-Chien Chi, Pei-Hsuan Lee
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Patent number: 11532548Abstract: Interconnect structures exhibiting reduced accumulation of copper vacancies along interfaces between contact etch stop layers (CESLs) and interconnects, along with methods for fabrication, are disclosed herein. A method includes forming a copper interconnect in a dielectric layer and depositing a metal nitride CESL over the copper interconnect and the dielectric layer. An interface between the metal nitride CESL and the copper interconnect has a first surface nitrogen concentration, a first nitrogen concentration and/or a first number of nitrogen-nitrogen bonds. A nitrogen plasma treatment is performed to modify the interface between the metal nitride CESL and the copper interconnect.Type: GrantFiled: October 14, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hui Lee, Po-Hsiang Huang, Wen-Sheh Huang, Jen Hung Wang, Su-Jen Sung, Chih-Chien Chi, Pei-Hsuan Lee
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Publication number: 20220310527Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are described herein. A method includes forming an interconnect structure over a device wafer. The device wafer includes a first integrated circuit, a semiconductor substrate, and a redistribution structure. The method further includes forming a metallization layer and a group of dummy insertion structures having a stepped pattern density in a topmost dielectric layer of the interconnect structure. The group of dummy insertion structures and the metallization layer are planarized with the dielectric layer. The method further includes forming a first bonding layer over the group of dummy insertion structures, the metallization layer, and the dielectric layer. The method further includes bonding a carrier wafer to the first bonding layer, forming an opening through the semiconductor substrate, and forming a conductive via in the opening and electrically coupled to the redistribution structure.Type: ApplicationFiled: July 30, 2021Publication date: September 29, 2022Inventors: Yao-Te Huang, Hong-Wei Chan, Yung-Shih Cheng, Jiing-Feng Yang, Hui Lee
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Publication number: 20220310559Abstract: A method of fabricating a semiconductor chip includes the following steps. A bonding material layer is formed on a first wafer substrate and is patterned to form a first bonding layer having a strength adjustment pattern. A semiconductor component layer and a first interconnect structure layer are formed on a second wafer substrate. The first interconnect structure layer is located. A second bonding layer is formed on the first interconnect structure layer. The second wafer substrate is bonded to the first wafer substrate by contacting the second bonding layer with the first bonding layer. A bonding interface of the second bonding layer and the first bonding layer is smaller than an area of the second bonding layer. A second interconnect structure layer is formed on the semiconductor component layer. A conductor terminal is formed on the second interconnect structure layer.Type: ApplicationFiled: March 25, 2021Publication date: September 29, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hong-Wei Chan, Jiing-Feng Yang, Yung-Shih Cheng, Yao-Te Huang, Hui Lee
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Publication number: 20210257293Abstract: Interconnect structures exhibiting reduced accumulation of copper vacancies along interfaces between contact etch stop layers (CESLs) and interconnects, along with methods for fabrication, are disclosed herein. A method includes forming a copper interconnect in a dielectric layer and depositing a metal nitride CESL over the copper interconnect and the dielectric layer. An interface between the metal nitride CESL and the copper interconnect has a first surface nitrogen concentration, a first nitrogen concentration and/or a first number of nitrogen-nitrogen bonds. A nitrogen plasma treatment is performed to modify the interface between the metal nitride CESL and the copper interconnect.Type: ApplicationFiled: October 14, 2020Publication date: August 19, 2021Inventors: Hui Lee, Po-Hsiang Huang, Wen-Sheh Huang, Jen Hung Wang, Su-Jen Sung, Chih-Chien Chi, Pei-Hsuan Lee
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Patent number: 10431541Abstract: A semiconductor device for fabricating an IC is provided. The semiconductor device includes an interconnect structure and a first conductive line. The interconnect structure is made of conductive material and includes a first interconnect portion and a second interconnect portion. The second interconnect portion is connected to a first end of the first interconnect portion, and a width of the second interconnect portion is less than a width of the first interconnect portion. The first conductive line is arranged over or below the first interconnect portion and providing an electrical connection between the interconnect structure and an electrical structure. A distance between the first conductive line and the first end is less than a distance between the first conductive line and a second end of the first interconnect portion which is opposite to the first end.Type: GrantFiled: March 20, 2017Date of Patent: October 1, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jian-Hong Lin, Hsin-Chun Chang, Hui Lee, Yung-Sheng Huang, Yung-Huei Lee
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Publication number: 20190282443Abstract: A collapsible nasal ejecting catheter, made of thermoplastic elastomer or other soft and elastic material, can be operated by the patients to insert into their nasal cavity and nasopharynx. The catheter includes a catheter body and a connector. The catheter has a flat closed distal end, a transitional segment starting from the closed end to a circular appearance, a normal segment having a circular appearance, and an open end on the opposite side of the flat closed end. There are multiple side-holes near the closed end. This catheter, when adapted to a connector and further connected to a syringe, can eject multiple strong thin spouts within the nasal cavity and nasopharynx for cleansing mucus and crust. The maximum width of the transitional segment is not less than 1 mm, and the minimum wall thickness of the catheter is not larger than 0.45 mm.Type: ApplicationFiled: December 25, 2017Publication date: September 19, 2019Inventors: Lih-Chiu WU, Hui LEE, Tsang-Mu LEE, Tze-Yu LEE
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Publication number: 20180269148Abstract: A semiconductor device for fabricating an IC is provided. The semiconductor device includes an interconnect structure and a first conductive line. The interconnect structure is made of conductive material and includes a first interconnect portion and a second interconnect portion. The second interconnect portion is connected to a first end of the first interconnect portion, and a width of the second interconnect portion is less than a width of the first interconnect portion. The first conductive line is arranged over or below the first interconnect portion and providing an electrical connection between the interconnect structure and an electrical structure. A distance between the first conductive line and the first end is less than a distance between the first conductive line and a second end of the first interconnect portion which is opposite to the first end.Type: ApplicationFiled: March 20, 2017Publication date: September 20, 2018Inventors: Jian-Hong LIN, Hsin-Chun CHANG, Hui LEE, Yung-Sheng HUANG, Yung-Huei LEE
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Publication number: 20070157976Abstract: A faucet is provided comprising in-service separable parts that can be removed from the faucet without having to remove the entire housing. The faucet includes a main support housing, bolts, brackets and nuts to secure the main support body to a sink surface, two water inlets for connecting hot and cold incoming water lines. A flow control assembly is provided at each inlet to regulate the hot and cold water introduced into a mixing chamber. The valve housing includes an independent adjustable mixing valve for regulating the flow of water, an inline screen filter for removing particulate matter from the water stream, and a check valve for preventing water from returning back to the water source. Upon passing through the check valve and into water mixing housing inlets, the water is mixed in a mixing chamber. From the mixing chamber the water is regulated by a solenoid. When sink users place their hands, or other objects in front of the sensor the solenoid is activated.Type: ApplicationFiled: January 9, 2006Publication date: July 12, 2007Applicant: SPEAKMAN COMPANYInventors: Graham Paterson, Hui Lee, William Walbrandt, Michael Trenham
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Publication number: 20060119867Abstract: The invention relates to a thickness-measuring method for an organic coating film such as an organic solderability preservative film formed on a metal film. In the method, an absorption spectrum of at least one reference organic coating film formed on a first metal surface is measured and absorption intensity in a predetermined wavelength range is calculated from the absorption spectrum. The thickness of the reference organic coating film is measured by destructive measurement. Then, correlation is defined based upon the absorption intensity and measured thickness of the reference organic coating film. An absorption spectrum of an organic coating film to be measured. Absorption intensity in the predetermined wavelength range is calculated from the absorption spectrum of the organic coating film to be measured, and the thickness of the organic coating film is calculated from the absorption intensity thereof based upon the correlation.Type: ApplicationFiled: December 1, 2005Publication date: June 8, 2006Applicant: Samsung Electro-Mechanics Co., Ltd.Inventors: Hee Choi, Hyo Lee, Jin Kim, Hui Lee
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Publication number: 20050097761Abstract: An electromotive can opener comprises a body. The body is formed by a first half and a second half. A motor, a touch switch for actuating the motor, a high twisting gear set, and a cutter handle are assembled to the body. In the high twisting gear set, a plurality of following gears and driving gear are engaged one by one and then is engaged to a driven shaft. The driven shaft is assembled with a driving gear. A knife protrudes out of a cutter handle. In operation, the knife cuts into the can and the touch switch is pressed by the cutter handle to actuate the motor and the shaft is driven. The can is driven to rotate to be cut along the periphery by the knife; and high twisting gear set formed by the plurality of gears provides a high twisting force for securing the can firmly.Type: ApplicationFiled: November 12, 2003Publication date: May 12, 2005Inventor: Hui Lee