Patents by Inventor Hui Wen Chang

Hui Wen Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for target lifetime
    Patent number: 7282122
    Abstract: A method and system for determining a lifetime of a target for a physical vapor deposition tool (302), has, a mapping table (304a) of criteria for a minimum accumulating rate of ? wafers fabricated by ? target life for a target in the tool; and a database (304) recording ? wafers fabricated by ? target life for a target in the tool; and a computer (306) retrieving the criteria from the mapping table and entering the criteria in the database; and the tool (302) reporting ? wafers fabricated by ? target life for a target in the tool (302) for comparison with the criteria.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: October 16, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Hui Wen Chang, Chang Hui Chao, Hong Yi Wu